Novel cleaning device for PVD (Physical Vapor Deposition) coating equipment

Abstract

The utility model discloses a novel cleaning device for PVD (Physical Vapor Deposition) coating equipment, and relates to the technical field of cleaning devices, the novel cleaning device comprises a bottom groove body, the right side of the bottom end in the bottom groove body is fixedly connected with a receiving groove, and the right side of the top of the bottom groove body is provided with a spraying assembly convenient for adjusting cleaning strength. According to the novel cleaning device for the PVD coating equipment, through the arrangement of the first concave frame, the sliding rail, the liquid distribution pipe, the sliding block, the nozzle, the electric cylinder and the liquid inlet hose, when the novel cleaning device is used, a pump machine pumps out a cleaning agent in the liquid storage tank and feeds the cleaning agent into the liquid distribution pipe along the liquid inlet hose, and the nozzle at the bottom of the liquid distribution pipe sprays fine water mist to clean the surface of a workpiece; according to different properties of workpieces, the height of the nozzle and the extension or retraction of the electric cylinder can be adjusted, namely the liquid distribution pipe and the sliding blocks on the two sides of the liquid distribution pipe can be pulled to slide along the sliding rails, so that the vertical adjustment is smoother, the function of conveniently adjusting the spraying height is realized, and the problem that the device does not have the function of conveniently adjusting the spraying height is solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to cleaning device technical field, concretely is a novel cleaning device for PVD coating equipment. BACKGROUND

[0002] PVD coating technology, namely physical vapor deposition technology, refers to the technology that under vacuum conditions, a material source solid or liquid surface is gasified into gaseous atoms or molecules or partially ionized into ions, and through low-pressure gas or plasma process, a thin film with certain special function is deposited on the substrate surface, and is one of main surface treatment technologies.

[0003] Before the material enters the PVD coating equipment, it is first subjected to surface cleaning in the cleaning assembly to remove the white film, wax ash and dirt on the workpiece surface. Usually, spray cleaning is adopted, that is, the workpiece is placed under the nozzle, and the surface is cleaned by the sprayed cleaning agent. However, in the actual use process, there are some functional deficiencies, and there is room for improvement. For example, according to the different materials, the requirements of the spray are different. The difference in spray intensity of the thin film and the metal is more obvious. However, the height of the nozzle of the current spray cleaning equipment is fixed, and cannot be adjusted according to the actual properties of the material, and does not have the function of conveniently adjusting the spray height.

[0004] Now, a novel cleaning device for PVD coating equipment is proposed to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a novel cleaning device for PVD coating equipment to solve the problem of not having the function of conveniently adjusting the spray height in the background technology.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a novel cleaning device for PVD coating equipment, comprising a bottom groove body, a receiving groove is fixedly connected to the right side of the bottom end inside the bottom groove body, a liquid discharge pipe is arranged on the right side of the receiving groove, a liquid storage tank is fixedly connected to the left side of the bottom end inside the bottom groove body, a pump is installed at the rear end of the bottom groove body, a liquid outlet pipe is fixedly connected between the left side of the pump and the front end of the liquid storage tank, a first fixed plate is welded to the top end of the right side of the bottom groove body, a second fixed plate is welded to the top end of the left side of the bottom groove body, two groups of optical axes are welded between the first fixed plate and the second fixed plate, two groups of ball screws are movably connected between the first fixed plate and the second fixed plate, two groups of servo motors are installed on the right side of the first fixed plate, a supporting plate is horizontally placed at the top end of the optical axis and the ball screw, and a spray assembly for conveniently adjusting the cleaning intensity is arranged on the right side of the top of the bottom groove body.

[0007] The spray assembly comprises a first concave frame fixedly connected to the right side of the top of the bottom groove body, sliding rails fixedly connected to the front and back ends of the inside of the first concave frame respectively, a liquid distribution pipe arranged in the inside of the first concave frame, sliding blocks fixedly connected to the front and back ends of the liquid distribution pipe respectively, a plurality of nozzles arranged at the bottom end of the liquid distribution pipe, two groups of electric cylinders mounted at the bottom of the first concave frame, and a liquid inlet hose movably connected to the rear end of the top of the liquid distribution pipe.

[0008] As a further technical scheme of the utility model, the front and back ends of the first concave frame and the front and back ends of the bottom groove body are flush, and the bottom end of the liquid distribution pipe is higher than the top end of the supporting plate.

[0009] As a further technical scheme of the utility model, the shape and size of the outside of the sliding rail are adapted to the shape and size of the inside of the sliding block, and the sliding block can slide up and down along the outside of the sliding rail.

[0010] As a further technical scheme of the utility model, the bottom end of the liquid inlet hose is connected to the top end of the pump, and the inside of the pump, the liquid distribution pipe and the liquid inlet hose are communicated.

[0011] As a further technical scheme of the utility model, the bottom of the supporting plate is provided with a bottom supporting plate, a plurality of magnetic protrusions are fixedly connected to the top end of the supporting plate, a plurality of groups of stainless steel material placing discs are horizontally placed at the top end of the supporting plate, and a plurality of groups of grooves are arranged at the bottom end of the stainless steel material placing discs.

[0012] As a further technical scheme of the utility model, the supporting plate and the bottom supporting plate are fixedly connected through bolts, the threads in the inside of the supporting plate and the bottom supporting plate are matched with the threads of the outside of the ball screws, and the supporting plate and the bottom supporting plate can slide left and right along the outside of the optical axis.

[0013] As a further technical scheme of the utility model, a second concave frame is fixedly connected to the middle position of the top end of the bottom groove body, a visual detection camera module is fixedly connected to the middle position of the top end of the inside of the second concave frame, a third concave frame is fixedly connected to the left side of the top of the bottom groove body, a blower is mounted at the front end of the third concave frame, a distribution cavity is fixedly connected to the top end of the inside of the third concave frame, a plurality of electric heating wires are arranged in the inside of the distribution cavity, and a plurality of groups of inclined air knives are fixedly connected to the bottom end of the distribution cavity.

[0014] As a further technical scheme of the utility model, the inside of the blower, the distribution cavity and the inclined air knives are communicated, and the electric heating wires are arranged at equal intervals.

[0015] Compared with the prior art, the novel cleaning device for the PVD coating equipment has the advantages that: the novel cleaning device for the PVD coating equipment not only has the function of conveniently adjusting the spraying height, but also has the functions of conveniently replacing the placing disc and conveniently drying after washing.

[0016] (1) By setting first recessed frame, slide rail, distribution pipe, sliding block, nozzle, electric cylinder and liquid inlet hose, when using, the workpiece is first clamped into the stainless steel material placing disc before entering the PVD coating equipment, the servo motor drives the ball screw to rotate, the supporting plate is displaced to below the first recessed frame, the pump extracts the cleaning agent in the liquid storage tank, and sends the cleaning agent into the distribution pipe along the liquid inlet hose, the nozzle at the bottom of the distribution pipe sprays fine mist, the workpiece surface is cleaned, according to the different properties of the workpiece, the height of the nozzle can be adjusted, the electric cylinder is extended or retracted, the distribution pipe can be pulled, the sliding blocks on both sides of the distribution pipe slide along the slide rail, so that the up-down adjustment is more smooth and smooth, and the function of conveniently adjusting the spraying height is realized.

[0017] (2) By setting supporting plate, bottom supporting plate, magnetic protrusion, groove and stainless steel material placing disc, when using, the workpiece is placed in the stainless steel material placing disc, and the stainless steel material placing disc can be customized according to the different shapes of the workpiece, the groove at the bottom of the stainless steel material placing disc is nested with the magnetic protrusion, the supporting plate and the bottom supporting plate are fixed through bolts, the stainless steel material placing disc is convenient to disassemble and replace, and the function of conveniently replacing the placing disc is realized.

[0018] (3) By setting second recessed frame, visual detection camera module, third recessed frame, air blower, distribution cavity, electric heating wire and oblique air knife, when using, the workpiece cleaned is detected by the visual detection camera module when reaching below the second recessed frame, and is returned to washing if not cleaned, and enters below the third recessed frame if cleaned, the air blower continuously blows air into the distribution cavity, the air blows out along the bottom opening of the oblique air knife after being heated by the electric heating wire, the cleaning agent on the surface of the workpiece is blown off and dried, and the function of conveniently drying after washing is realized. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 It is a front view structural schematic diagram of the utility model;

[0020] Figure 2 It is a bottom groove body top view structural schematic diagram of the utility model;

[0021] Figure 3 It is a first recessed frame side view enlarged structural schematic diagram of the utility model;

[0022] Figure 4 It is a supporting plate, bottom supporting plate separation state side view enlarged structural schematic diagram of the utility model;

[0023] Figure 5 It is the second concave frame side view enlarged structure schematic diagram of the utility model;

[0024] Figure 6 It is the third concave frame side view enlarged structure schematic diagram of the utility model.

[0025] In the figure: 1, bottom groove body; 2, receiving groove; 3, drain pipe; 4, liquid storage tank; 5, liquid outlet pipe; 6, pump; 7, first fixed plate; 8, second fixed plate; 9, optical axis; 10, ball screw; 11, servo motor; 12, supporting plate; 13, first concave frame; 14, sliding rail; 15, liquid distribution pipe; 16, sliding block; 17, nozzle; 18, electric cylinder; 19, liquid inlet hose; 20, bottom supporting plate; 21, magnetic bump; 22, groove; 23, stainless steel material placing disc; 24, second concave frame; 25, visual inspection camera module; 26, third concave frame; 27, air blower; 28, distribution cavity; 29, electric heating wire; 30, oblique air knife. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the utility model.

[0027] Embodiment 1: please refer to Figures 1-6 A novel cleaning device for PVD coating equipment, including bottom groove body 1, the right side of the bottom end in bottom groove body 1 is fixedly connected with receiving groove 2, receiving groove 2 is provided with drain pipe 3 on the right side, the left side of the bottom end in bottom groove body 1 is fixedly connected with liquid storage tank 4, the rear end of bottom groove body 1 is installed with pump 6, and the left side of pump 6 and the front end of liquid storage tank 4 are fixedly connected with liquid outlet pipe 5, the top end of the right side of bottom groove body 1 is welded with first fixed plate 7, the top end of the left side of bottom groove body 1 is welded with second fixed plate 8, two groups of optical axes 9 are welded between first fixed plate 7 and second fixed plate 8, two groups of ball screws 10 are movably connected between first fixed plate 7 and second fixed plate 8, two groups of servo motors 11 are installed on the right side of first fixed plate 7, supporting plate 12 is horizontally placed on the top end of optical axis 9 and ball screw 10, and the right side of the top of bottom groove body 1 is provided with a spraying assembly for adjusting cleaning intensity;

[0028] Please refer to Figures 1-6The novel cleaning device for the PVD coating equipment further comprises a spraying assembly, the spraying assembly comprises a first concave frame 13 fixedly connected to the right side of the top of the bottom groove body 1, sliding rails 14 fixedly connected to the front and back ends in the first concave frame 13 respectively, a distribution pipe 15 arranged in the first concave frame 13, sliding blocks 16 fixedly connected to the front and back ends of the distribution pipe 15 respectively, and a plurality of nozzles 17 arranged at the bottom end of the distribution pipe 15, and two groups of electric cylinders 18 are mounted at the bottom of the first concave frame 13, and a liquid inlet hose 19 is movably connected to the rear end of the top of the distribution pipe 15;

[0029] The front and back ends of the first concave frame 13 are flush with the front and back ends of the bottom groove body 1, the bottom end of the distribution pipe 15 is higher than the top end of the supporting plate 12, the shape and size of the outside of the sliding rail 14 are matched with the shape and size of the inside of the sliding block 16, the sliding block 16 can slide up and down along the outside of the sliding rail 14, the bottom end of the liquid inlet hose 19 is connected to the top end of the pump 6, the inside of the pump 6, the distribution pipe 15 and the liquid inlet hose 19 are communicated, and the spraying height is conveniently adjusted;

[0030] Specifically, as shown in Figure 1 , Figure 2 and Figure 3 , the pump 6 draws the cleaning agent in the liquid storage tank 4 out, sends it into the distribution pipe 15 along the liquid inlet hose 19, and sprays fine water mist from the nozzles 17 at the bottom of the distribution pipe 15 to clean the surface of the workpiece, the height of the nozzles 17 can be adjusted according to the different properties of the workpiece, the extension or retraction of the electric cylinder 18 can pull the distribution pipe 15, and the sliding blocks 16 on the two sides of the distribution pipe 15 slide along the sliding rails 14, so that the up and down adjustment is smoother.

[0031] In embodiment 2, a bottom supporting plate 20 is arranged below the supporting plate 12, a plurality of magnetic protrusions 21 are fixedly connected to the top end of the supporting plate 12, a plurality of groups of stainless steel material placing discs 23 are horizontally placed at the top end of the supporting plate 12, a plurality of groups of grooves 22 are arranged at the bottom end of the stainless steel material placing disc 23, the supporting plate 12 and the bottom supporting plate 20 are fixedly connected by bolts, the threads in the supporting plate 12 and the bottom supporting plate 20 are matched with the threads on the outside of the ball screw 10, and the supporting plate 12 and the bottom supporting plate 20 can slide left and right along the outside of the optical axis 9, so that the material position is conveniently fixed and adjusted;

[0032] Specifically, as shown in Figure 1 , Figure 2 and Figure 4 , the stainless steel material placing disc 23 can be customized according to the different shapes of the workpiece, the grooves 22 at the bottom of the stainless steel material placing disc 23 are nested with the magnetic protrusions 21, and the stainless steel material placing disc 23 is fixed by magnetic attraction, and the supporting plate 12 and the bottom supporting plate 20 are fixed by bolts, so that the supporting plate 12 and the bottom supporting plate 20 are conveniently disassembled and replaced.

[0033] The embodiment 3 is characterized in that the second concave frame 24 is fixedly connected to the middle position of the top end of the bottom groove 1, the visual detection camera module 25 is fixedly connected to the middle position of the top end of the inside of the second concave frame 24, the third concave frame 26 is fixedly connected to the left top of the bottom groove 1, the air blower 27 is installed at the front end of the third concave frame 26, the distribution cavity 28 is fixedly connected to the top end of the inside of the third concave frame 26, a plurality of electric heating wires 29 are arranged in the inside of the distribution cavity 28, a plurality of groups of oblique air knives 30 are fixedly connected to the bottom end of the distribution cavity 28, the inside of the air blower 27, the distribution cavity 28 and the oblique air knives 30 are communicated, and the electric heating wires 29 are arranged at equal intervals, so that washing and drying are facilitated.

[0034] Specifically, as shown in Figure 1 、 Figure 2 、 Figure 5 and Figure 6 indicated, the visual detection camera module 25 takes a photo for detection, returns to washing if not cleaned, enters the third concave frame 26 below if cleaned, the air blower 27 continuously blows air into the distribution cavity 28, the air is blown out along the bottom opening of the oblique air knife 30 after being heated by the electric heating wire 29, and the cleaning agent on the surface of the workpiece is blown off and dried.

[0035] Working principle: when the utility model is used, firstly, the workpiece is clamped into the stainless steel material placing disc 23 before entering the PVD coating equipment, the servo motor 11 drives the ball screw 10 to rotate, the supporting plate 12 is displaced to below the first concave frame 13, the pump 6 pumps the cleaning agent in the liquid storage tank 4 out, sends it into the distribution pipe 15 along the liquid inlet hose 19, and the nozzle 17 at the bottom of the distribution pipe 15 sprays fine water mist to clean the surface of the workpiece; according to the different properties of the workpiece, the height of the nozzle 17 can be adjusted, the electric cylinder 18 is extended or retracted, the distribution pipe 15 can be pulled, the sliding blocks 16 on the two sides of the distribution pipe 15 slide along the slide rails 14, and the up-down adjustment is more smooth. The workpiece is placed in the stainless steel material placing disc 23, the stainless steel material placing disc 23 can be customized according to the different shapes of the workpiece, the recess 22 and the magnetic convex block 21 at the bottom of the stainless steel material placing disc 23 are nested, fixed by magnetic attraction, and the supporting plate 12 and the bottom supporting plate 20 are fixed by bolts, so that the stainless steel material placing disc 23 is convenient to disassemble and replace. When the cleaned workpiece reaches below the second concave frame 24, the visual detection camera module 25 takes a photo for detection, returns to washing if not cleaned, enters the third concave frame 26 below if cleaned, the air blower 27 continuously blows air into the distribution cavity 28, the air is blown out along the bottom opening of the oblique air knife 30 after being heated by the electric heating wire 29, and the cleaning agent on the surface of the workpiece is blown off and dried.

[0036] It is apparent for a person skilled in the art that the present application is not restricted to the details of the above exemplary embodiments, but that it can be implemented in other concrete forms without departing from the spirit or the essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary only, and not limiting, the scope of the present application being defined by the appended claims rather than the above description, and all changes coming within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims concerned.

Claims

1. A new type of cleaning device for PVD coating equipment, comprising a bottom tank (1), characterized in that: The right side of the bottom of the inner end of the groove body (1) is fixedly connected with the receiving groove (2), the right side of the receiving groove (2) is provided with the liquid discharge pipe (3), the left side of the bottom of the inner end of the groove body (1) is fixedly connected with the liquid storage tank (4), the rear end of the groove body (1) is provided with the pump (6), the left side of the pump (6) and the front end of the liquid storage tank (4) are fixedly connected with the liquid outlet pipe (5), the top end of the right side of the groove body (1) is welded with the first fixed plate (7), the top end of the left side of the groove body (1) is welded with the second fixed plate (8), the first fixed plate (7), the second fixed plate (8) are welded with two groups of optical axes (9), the first fixed plate (7), the second fixed plate (8) are movably connected with two groups of ball screws (10), the right side of the first fixed plate (7) is provided with two groups of servo motors (11), the top end of the optical axis (9), the ball screw (10) is horizontally placed with the supporting plate (12), the right side of the top of the groove body (1) is provided with the spray assembly for facilitating the adjustment of the cleaning strength. The spray assembly comprises a first recessed frame (13), the first recessed frame (13) is fixedly connected to the right side of the top of the groove body (1), the front and rear ends of the inside of the first recessed frame (13) are respectively fixedly connected with the sliding rail (14), the inside of the first recessed frame (13) is provided with the liquid distribution pipe (15), the front and rear ends of the liquid distribution pipe (15) are respectively fixedly connected with the sliding block (16), the bottom end of the liquid distribution pipe (15) is provided with a plurality of nozzles (17), the bottom of the first recessed frame (13) is provided with two groups of electric cylinders (18), the rear end of the top of the liquid distribution pipe (15) is movably connected with the liquid inlet hose (19).

2. A new cleaning device for PVD coating equipment according to claim 1, characterized in that: The front and rear ends of the first recessed frame (13) and the front and rear ends of the groove body (1) are flush, the bottom end of the liquid distribution pipe (15) is higher than the top end of the supporting plate (12).

3. The new cleaning device for PVD coating equipment according to claim 1, characterized in that: The shape and size of the outside of the sliding rail (14) and the shape and size of the inside of the sliding block (16) are matched, the sliding block (16) can slide up and down along the outside of the sliding rail (14).

4. The new cleaning device for PVD coating equipment according to claim 1, characterized in that: The bottom end of the liquid inlet hose (19) is connected with the top end of the pump (6), the inside of the pump (6), the liquid distribution pipe (15) and the liquid inlet hose (19) are communicated.

5. The new cleaning device for PVD coating equipment according to claim 1, characterized in that: The bottom of the supporting plate (12) is provided with a bottom supporting plate (20), the top end of the supporting plate (12) is fixedly connected with a plurality of magnetic protrusions (21), the top end of the supporting plate (12) is horizontally placed with a plurality of groups of stainless steel material placing plates (23), the bottom end of the stainless steel material placing plate (23) is provided with a plurality of grooves (22).

6. The new cleaning device for PVD coating equipment according to claim 5, characterized in that: The supporting plate (12) and the bottom supporting plate (20) are fixedly connected by bolts, the threads in the inside of the supporting plate (12) and the bottom supporting plate (20) and the threads on the outside of the ball screw (10) are matched, the supporting plate (12) and the bottom supporting plate (20) can slide left and right along the outside of the optical axis (9).

7. The new cleaning device for PVD coating equipment according to claim 1, characterized in that: The middle position at the top end of the bottom groove (1) is fixedly connected with a second concave frame (24), the middle position at the top end of the inside of the second concave frame (24) is fixedly connected with a visual detection camera module (25), the left side of the top of the bottom groove (1) is fixedly connected with a third concave frame (26), the front end of the third concave frame (26) is provided with a blower (27), the top end of the inside of the third concave frame (26) is fixedly connected with a distribution cavity (28), the inside of the distribution cavity (28) is provided with various electric heating wires (29), and the bottom end of the distribution cavity (28) is fixedly connected with multiple groups of inclined air knives (30).

8. The new cleaning device for PVD coating equipment according to claim 7, characterized in that: The inside of the blower (27), the distribution cavity (28) and the inclined air knives (30) are connected, and the electric heating wires (29) are arranged at equal intervals.

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