Water cooling screen and single crystal furnace

Abstract

The utility model belongs to the technical field of monocrystalline silicon production, and particularly relates to a water cooling screen and a single crystal furnace, the water cooling screen comprises a cooling cylinder and an annular partition plate, the cooling cylinder comprises a cylinder inner layer and a cylinder outer layer, and the cylinder inner layer and the cylinder outer layer are enclosed to form an interlayer space; the annular partition plates are wave-shaped partition plates, the annular partition plates are wound in the interlayer space up and down at intervals, so that a cooling water path is formed in the interlayer space, the cooling water path comprises a plurality of annular water channels which are arranged up and down and communicated, and the annular water channels are gradually expanded and gradually shrunk water channels; one end of the cooling water channel communicates with a liquid inlet channel, and the other end communicates with a liquid outlet channel. After water flow passes through the gradually-expanding and gradually-shrinking water path, the flow speed is gradually increased and decreased, so that the disturbance mixing turbulence effect is enhanced, the water speed and the Reynolds number are increased, the water convective heat transfer effect is improved, the heat dissipation rate of a crystal bar is increased, and the purposes of increasing the pulling speed and reducing the production cost are achieved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to single crystal silicon production technical field, concretely is a water cooling screen and single crystal silicon. BACKGROUND

[0002] In the production of single crystal silicon, the heat of the crystal bar in the single crystal furnace is absorbed by the heat exchange device (hereinafter referred to as water-cooled heat screen) of the cooling circulating water type to increase the longitudinal temperature gradient of the crystal bar and enhance the driving force of crystallization growth, thereby increasing the growth rate of the single crystal bar. The existing single crystal silicon production process often affects the yield due to low pulling speed, thereby increasing the production cost. The main reason for the low pulling speed is that the internal circulating waterway of the water-cooled screen is flat, the water flow rate and Reynolds number are small, which is not conducive to the convective heat transfer of water and thus affects the heat dissipation rate of the crystal bar. SUMMARY

[0003] To solve the problems in the above background art, the utility model provides a water-cooled screen and a single crystal furnace. The annular partition plate is designed as a wave-shaped partition plate, the cooling waterway is gradually expanded and contracted, the disturbance and turbulence effects of the water flow are enhanced, the water flow rate and Reynolds number are both increased, the convective heat transfer effect of water is improved, and the heat dissipation rate of the crystal bar is increased.

[0004] The first aspect of the utility model is to provide a water-cooled screen, which comprises:

[0005] A cooling cylinder body, which comprises an inner cylinder layer and an outer cylinder layer, and the inner cylinder layer and the outer cylinder layer enclose a sandwich space;

[0006] An annular partition plate, which is a wave-shaped partition plate, a plurality of annular partition plates are arranged in the sandwich space in an up-down interval, so as to form a cooling waterway in the sandwich space, the cooling waterway comprises a plurality of annular water channels arranged in an up-down direction and connected with each other, and the annular water channels are gradually expanded and contracted; one end of the cooling waterway is connected with an inlet channel, and the other end is connected with an outlet channel.

[0007] Further, the inner cylinder layer comprises a wall surface located at the lower part of the cooling cylinder body, the wall surface is uniformly provided with a pit structure, and the pit structures in two adjacent rows on the wall surface are arranged in a staggered manner.

[0008] Further, the pit structure is a circular pit, the diameter of the circular pit is 8-12 mm, and / or the distance between the two adjacent rows of circular pits is 16-24 mm.

[0009] Further, a black film-forming layer is coated on the inner wall surface of the wall surface of the inner cylinder layer, the film-forming layer comprises inorganic silicate and filler, and the filler is one or more of transition element oxide, zirconium oxide and rare earth oxide.

[0010] Further, the film forming layer has a thickness of 130-170 um.

[0011] Further, the annular partition plate comprises staggered recesses and protrusions, and two adjacent annular partition plates are an upper partition plate and a lower partition plate.

[0012] Further, the liquid inlet channel is arranged above the top annular partition plate, and the liquid inlet channel is an annular channel; the liquid outlet channel is formed by two vertical plates arranged at intervals and fixed to the inner layer and the outer layer of the cylinder, the liquid outlet channel extends to the bottom of the water cooling screen, and the liquid outlet channel is communicated with the liquid outlet of the bottom annular partition plate.

[0013] Further, two adjacent annular partition plates are an upper partition plate and a lower partition plate, and the two vertical plates are a first vertical plate and a second vertical plate; one end of the upper partition plate is suspended between the first vertical plate to form a liquid outlet, and the other end is fixedly connected with the second vertical plate; one end of the lower partition plate is suspended between the second vertical plate to form a liquid outlet, and the other end is fixedly connected with the first vertical plate.

[0014] Further, the cooling cylinder body further comprises a cylinder inner layer between the inner layer and the outer layer, the outer layer and the inner layer form a first interlayer space, and the inner layer and the outer layer form a second interlayer space; the plurality of annular partition plates are arranged in the first interlayer space to form a first cooling water path, and the plurality of annular partition plates are arranged in the second interlayer space to form a second cooling water path; the first cooling water path and the second cooling water path are communicated with the liquid inlet channel and the liquid outlet channel.

[0015] The second aspect of the utility model provides a single crystal furnace, including water cooling screen of any preceding.

[0016] The utility model discloses beneficial effects are:

[0017] (1) the inner layer and the outer layer of the utility model form an interlayer space, and the plurality of annular partition plates are arranged in the interlayer space, so that the cooling water path is formed in the interlayer space, and the cooling water path is a gradually expanding and gradually shrinking water path, the water flow speed is large and small after passing through the gradually expanding and gradually shrinking water path, the disturbance mixing turbulent effect is enhanced, the water speed and the Reynolds number are all large, the water convection heat transfer effect is improved, and then the heat dissipation rate of the crystal bar is improved, and the heat of the crystal bar is taken away by the water after heat exchange and flows out through the liquid outlet pipe.

[0018] (2) the inner layer of the utility model comprises a wall surface at the lower part of the cooling cylinder body, and the wall surface is uniformly provided with a pit structure, the pit structure can increase the heat radiation absorption of the water cooling screen in the bottom area, and can more uniformly improve the proportion of heat radiation diffuse reflection, thereby increasing the heat radiation absorption of the water cooling screen and improving the crystal pulling speed.

[0019] (3) The inner wall surface of the upper part of the wall surface of the utility model is coated with a black film-forming layer, which has an ultra-high emissivity. At the same time, the film-forming layer has the advantages of excellent adhesion, high temperature resistance and not easy to peel off. The emissivity of the inner wall surface of the water-cooled screen can be increased from 0.90 to 0.93, further increasing the absorption rate of thermal radiation.

[0020] (4) The utility model adds an inner layer between the inner layer and the outer layer of the cylinder. The outer layer and the inner layer form a first cooling water path, and the inner layer and the inner layer form a second cooling water path. The first cooling water path and the second cooling water path are independent of each other, forming a double-layer circulating water path. This design reduces the water flow cross-sectional area while increasing the heat transfer area. Under the same water flow rate, more heat per unit area of ​​the crystal rod can be taken away, thereby increasing the crystal rod pulling speed and reducing production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 This is a structural diagram of the appearance of a water-cooled screen provided in one embodiment of the present application;

[0023] Figure 2 A longitudinal cross-sectional view of a water-cooling screen according to an embodiment of the present application (I);

[0024] Figure 3 A longitudinal cross-sectional view of a water-cooling screen according to an embodiment of the present application (II);

[0025] Figure 4 A transverse cross-sectional view of a water-cooling screen provided in one embodiment of the present application;

[0026] Figure 5 A cross-sectional view of the liquid outlet channel of a water-cooled screen provided in one embodiment of the present application;

[0027] Figure 6 A cross-sectional view of an annular water channel of a water-cooled screen provided in one embodiment of the present application;

[0028] Figure 7 for Figure 6 A magnified view of part A in FIG;

[0029] Figure 8 A structural diagram of a double-layer circulating water channel of a water-cooled screen provided in one embodiment of the present application;

[0030] 1-cooling cylinder, 11-cylinder inner layer, 111-wall surface, 112-pit structure, 113-film forming layer, 12-cylinder outer layer, 13-interlayer space, 121-first interlayer space, 122-second interlayer space, 14-cavity, 15-cylinder inner layer, 2-annular partition, 21-annular water channel, 211-liquid outlet, 22-protrusion, 23-recess, 3-liquid inlet channel, 4-liquid outlet channel, 41-first vertical plate, 42-second vertical plate, 5-liquid outlet pipe, 6-liquid inlet pipe. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the protection scope of the present application.

[0032] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work are within the protection scope of the present application. Figure 1 to the drawings Figure 8 The present application will be described in detail below with reference to the specific embodiments.

[0033] As Figures 1 to 8The utility model provides a water -cooled screen, water -cooled screen is used for providing uniform heat field for the drawing of monocrystalline silicon can know that the czochralski crystal growth is used for the main growth method of solar cell monocrystalline silicon, and improving the pulling speed is the effective method of reducing cost, and the present water -cooled screen is improved, can improve the pulling speed, improve production efficiency. The water -cooled screen of the application includes cooling cylinder 1 and the annular baffle 2 of setting in cooling cylinder 1, cooling cylinder 1 includes cylinder inner layer 11 and cylinder outer layer 12, and cylinder inner layer 11 and cylinder outer layer 12 enclose and form the sandwich space 13;The annular baffle 2 has a plurality of, and the annular baffle 2 is arranged at intervals up and down, and the annular baffle 2 is wave-shaped baffle, and the annular baffle 2 is arranged at intervals up and down in the sandwich space 13, so that the cooling water path is formed in the sandwich space 13, and the cooling water path includes a plurality of annular water channels 21 arranged in sequence and communicated up and down, and the annular water channel 21 of each layer is gradually expanded gradually tapered water path, and each layer annular water channel 21 has a liquid outlet 211, and water flow can be introduced into the annular water channel 21 of lower layer;One end of the cooling water path is communicated with the liquid inlet channel 3, and the other end is communicated with the liquid outlet channel 4, the liquid inlet channel 3 is connected with the liquid inlet pipe 6, and the liquid outlet channel 4 is connected with the liquid outlet pipe 5, in the application, the inner edge of the annular baffle 2 is fixed on the side wall of the cylinder inner layer 11, the outer edge of the annular baffle 2 is fixed on the side wall of the cylinder outer layer 12, and the width of the annular baffle 2 changes with the spacing between the cylinder inner layer 11 and the cylinder outer layer 12, the annular water channel 21 is formed between the two annular baffles 2 arranged adjacent up and down, and the water flow flows from one side of the annular water channel 21 to the other side, and enters the annular water channel 21 of lower layer through the liquid outlet 211 of the other side, and continues to circulate in the annular water channel 21 of lower layer, to realize the full flow of cooling liquid.

[0034] The cavity 14 in the cooling cylinder 1 of the application has a hollow, and the two ends are provided with openings. When drawing the crystal bar, the cooling liquid is introduced into the liquid inlet channel 3 of the cooling water path through the liquid inlet pipe 6, and flows in the cooling water path, so that a low-temperature environment is formed in the cavity inside the cooling cylinder 1, and the crystal bar is cooled comprehensively. Since the cooling water path of the application is gradually expanded gradually tapered water path, the water flow speed is large and small after passing through the gradually expanded gradually tapered water path, so that the disturbance mixing turbulent effect is enhanced, the water speed and the Reynolds number are increased, the water convection heat transfer effect is improved, and the heat dissipation rate of the crystal bar is improved, and finally the water flows out from the liquid outlet pipe and carries away the heat of the crystal bar.

[0035] In some embodiments, referring to Figure 2 , Figure 3The inner layer 11 of the cylinder includes a wall surface 111 at the lower part, which is the inner wall surface of the cavity 14 in the hollow interior of the cooling cylinder body 1, and the wall surface 111 is uniformly provided with the pit structure 112, and the adjacent two rows of pit structures 112 on the wall surface 111 are staggered. The pit structure 112 of the present application can increase the absorption of thermal radiation by the water-cooled screen in the bottom area while more uniformly increasing the proportion of thermal radiation diffuse reflection, thereby increasing the absorption of thermal radiation by the water-cooled screen, increasing the crystal bar pulling speed, and reducing the production cost.

[0036] In at least one embodiment, the pit structure 112 of the present application is a circular pit with a diameter of 8-12 mm, and the adjacent two rows of circular pits are staggered at a circumferential interval of 4-6°.

[0037] In some embodiments, referring to Figure 2 The inner layer 11 of the cylinder is coated with a black film layer 113 on the inner wall surface at the upper part of the wall surface 111. The black film layer 113 is arranged to be black to better absorb thermal radiation and improve yield; the film layer 113 includes inorganic silicate and filler, and the filler is one or more of transition element oxide, zirconium oxide, and rare earth oxide. The transition metal oxide refers to the oxide formed by transition metal elements. The film layer 113 is a coating layer with super-high emissivity composed of inorganic silicate and filler, which has excellent adhesion, high temperature resistance, and is not easy to peel off, etc. The coating layer can be stably used in an environment with a high temperature of less than 1600°, and at the same time, the black coating layer can increase the emissivity of the inner wall surface of the water-cooled screen from 0.90 to 0.93, further increasing the absorption rate of thermal radiation, thereby increasing the crystal bar pulling speed.

[0038] The thickness of the film layer 113 is 130-170 um, and in at least one embodiment, the thickness of the film layer 113 is 150 um.

[0039] The present application improves the pulling speed during the isodiametric growth of the crystal bar by improving the structure of the water-cooled screen, so that the crystal bar can complete the growth process more quickly, shorten the production time, and achieve the purpose of reducing cost and increasing efficiency.

[0040] In some embodiments, referring to Figures 4 to 7, the annular partition plate 2 comprises staggered recesses 23 and protrusions 22, two annular partition plates 2 adjacent to each other are respectively an upper partition plate and a lower partition plate, the protrusion 22 of the upper partition plate is arranged opposite to the recess 23 of the lower partition plate, and the recess 23 of the upper partition plate is arranged opposite to the protrusion 22 of the lower partition plate, so that a gradually expanding and gradually tapering water channel is formed. When the water flow passes through the gradually expanding and gradually tapering water channel, the flow velocity is large and small alternately, the disturbance mixing and turbulent effect is enhanced, the water velocity and the Reynolds number are both large, the water convection heat transfer effect is improved, and then the heat dissipation rate of the crystal bar is improved. Finally, the water flows out of the liquid outlet pipe and carries away the heat of the crystal bar. Of course, in other embodiments, the annular partition plate 2 can also be an irregular wave-shaped partition plate, such as the heights of the protrusion 22 and the recess 23 of each layer of annular partition plate being different, but as long as the gradually expanding and gradually tapering annular water channel can be realized, it belongs to the protection scope of the application.

[0041] In some embodiments, referring to Figure 5 , the liquid inlet channel 3 is located above the top annular partition plate 2, and the liquid inlet channel 3 is an annular channel; the liquid outlet channel 4 is surrounded by two vertically arranged plates fixed to the inner layer 11 and the outer layer 12 of the cylinder, the liquid outlet channel 4 extends to the bottom of the cooling cylinder 1, and the liquid outlet channel 4 is in communication with the liquid outlet 211 of the bottom annular partition plate 2. Of course, in other embodiments, the liquid inlet channel 3 and the liquid outlet channel 4 can be exchanged, as long as the cooling liquid can circulate in the cooling channel.

[0042] Specifically, two annular partition plates 2 adjacent to each other are respectively an upper partition plate and a lower partition plate, and two vertically arranged plates are respectively a first vertically arranged plate 41 and a second vertically arranged plate 42; one end of the upper partition plate is suspended and forms a liquid outlet between the first vertically arranged plate 41, and the other end is fixedly connected with the second vertically arranged plate 42; one end of the lower partition plate is suspended and forms a liquid outlet between the second vertically arranged plate 42, and the other end is fixedly connected with the first vertically arranged plate 41, so that the water flow forms a serpentine flow route. In other words, the flow direction of the water flow in the upper annular water channel 21 is opposite to the flow direction of the water flow in the lower annular water channel 21, and so on, the water flow circulates from top to bottom or from bottom to top, and the heat exchange effect is increased. The design of the structure can not only increase the number of water channels and make the water channel more dense, but also achieve the purpose of reducing the flow area to increase the flow velocity and the turbulent intensity.

[0043] In some embodiments, referring to Figure 8The cooling cylinder 1 further comprises a cylinder inner layer 15 between the cylinder inner layer 11 and the cylinder outer layer 12, the cylinder outer layer 12 and the cylinder inner layer 15 form a first interlayer space 121, and the cylinder inner layer 11 and the cylinder inner layer 15 form a second interlayer space 122; a plurality of annular partitions 2 are arranged in the first interlayer space 121 to form a first cooling water path; a plurality of annular partitions 2 are arranged in the second interlayer space 122 to form a second cooling water path; the first cooling water path and the second cooling water path are in communication with the liquid inlet channel 3 and the liquid outlet channel 4. The first cooling water path and the second cooling water path are independent of each other, forming a double-layer circulating water path, which reduces the water flow cross-sectional area while increasing the heat transfer area, and can carry away more heat per unit area of the crystal bar under the same water flow, thereby increasing the crystal bar pulling speed. It can be understood that the liquid inlet pipe 6 is a liquid inlet main pipe, the liquid outlet pipe 5 is a liquid outlet main pipe, the cooling water enters the first cooling water path and the second cooling water path from the liquid inlet main pipe 6 and circulates independently, and finally flows into the liquid outlet main pipe.

[0044] One or more embodiments of the present application also provide a single crystal furnace comprising the water-cooled screen described above. The single crystal furnace provided by the present application adopts all the technical solutions of all the embodiments of the water-cooled screen described above, and therefore at least has all the beneficial effects brought by the technical solutions of the embodiments of the water-cooled screen, which will not be described here.

[0045] The above has further described the present application with the help of specific embodiments, but it should be understood that the specific description here should not be understood as limiting the essence and scope of the present application, and various modifications made by those skilled in the art after reading the present specification belong to the scope of the present application.

Claims

1. A water cooled panel, characterized by, The water cooling screen comprises: a cooling cylinder body comprising an inner cylinder layer and an outer cylinder layer, which enclose a sandwich space; a plurality of annular baffles, which are arranged in the sandwich space in a wave shape and are spaced apart from each other in the vertical direction, so that a cooling water channel is formed in the sandwich space, the cooling water channel comprising a plurality of annular water channels arranged in the vertical direction and connected to each other, the annular water channels being gradually expanded and contracted water channels; one end of the cooling water channel is connected to a liquid inlet channel, and the other end is connected to a liquid outlet channel.

2. The water screen of claim 1, wherein The inner cylinder layer comprises a wall surface at the lower part of the cooling cylinder body, the wall surface is uniformly provided with a pit structure, and the pit structures in two adjacent rows on the wall surface are arranged in a staggered manner.

3. The water cooled panel of claim 2 wherein, The pit structure is a circular pit, the diameter of the circular pit is 8-12 mm, and / or the distance between two adjacent rows of the circular pits is 16-24 mm.

4. The water screen of claim 2, wherein, The inner wall surface at the upper part of the inner cylinder layer is coated with a black film-forming layer, the film-forming layer comprises inorganic silicate and a filler, and the filler is one or more of transition element oxides, zirconium oxide and rare earth oxides.

5. The water screen of claim 4, wherein, The thickness of the film-forming layer is 130-170 um.

6. The water screen of claim 1, wherein The annular baffles comprise recessed parts and protruding parts arranged in a staggered manner, two adjacent annular baffles in the vertical direction are respectively an upper baffle and a lower baffle, the upper baffle and the lower baffle enclose the annular water channel, the protruding part of the upper baffle is arranged opposite to the recessed part of the lower baffle, and the recessed part of the upper baffle is arranged opposite to the protruding part of the lower baffle.

7. The water screen of claim 1, wherein The liquid inlet channel is located above the top annular baffle, and the liquid inlet channel is an annular channel; the liquid outlet channel is enclosed by two spaced-apart vertical plates fixed to the inner cylinder layer and the outer cylinder layer, the liquid outlet channel extends to the bottom of the water cooling screen, and the liquid outlet channel is connected to the liquid outlet of the bottom annular baffle.

8. The water screen of claim 7, wherein, Two adjacent annular baffles in the vertical direction are respectively an upper baffle and a lower baffle, and two vertical plates are respectively a first vertical plate and a second vertical plate; one end of the upper baffle is suspended and forms a liquid outlet between the first vertical plate, and the other end is fixedly connected to the second vertical plate; one end of the lower baffle is suspended and forms a liquid outlet between the second vertical plate, and the other end is fixedly connected to the first vertical plate.

9. The water screen of claim 1, wherein The cooling cylinder body further comprises an inner cylinder layer between the inner cylinder layer and the outer cylinder layer, the outer cylinder layer and the inner cylinder layer enclose a first sandwich space, and the inner cylinder layer and the outer cylinder layer enclose a second sandwich space; A plurality of annular baffles are arranged in the first sandwich space to form a first cooling water channel, and a plurality of annular baffles are arranged in the second sandwich space to form a second cooling water channel; the first cooling water channel and the second cooling water channel are connected to the liquid inlet channel and the liquid outlet channel.

10. A single crystal furnace characterized by comprising: The water cooling screen comprises the water cooling screen according to any one of claims 1-9.

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