Multi-layer thickness measurement framework for storage chip

Abstract

The utility model relates to the technical field of measuring tools, and discloses a storage chip multilayer thickness measuring frame, which comprises a bottom plate, a plurality of suckers and a connecting plate, the top of the bottom plate is fixedly connected with a vacuum box, the right side of the vacuum box is communicated with a negative pressure fan, the top of the vacuum box is fixedly connected with a support plate, and the support plate is fixedly connected with a base plate. The bottoms of the multiple suction cups penetrate through the interior of the supporting plate, fixing lugs are fixedly connected to the left sides and the right sides of the multiple suction cups, fixing sleeves are fixedly connected to the inner walls of the fixing lugs, and pressing plates are slidably connected to the interiors of the fixing sleeves. According to the sucker dismounting device, the pressing plate is pressed, the connecting rod pushes the limiting block to move downwards, and when the blocking ball is exposed out of the fixing sleeve and clamped in the limiting groove, fixing of the sucker is completed, the pressing plate is pressed again, and the blocking ball retracts into the fixing sleeve, the fixing sleeve is pulled out of the limiting groove, and dismounting of the sucker is completed.

Description

TECHNICAL FIELD

[0001] The utility model relates to measuring tool technical field especially relates to the storage chip multilayer thickness measurement frame. BACKGROUND

[0002] The storage chip is the semiconductor device for storing and retrieving data, and the birth of storage chip greatly improves data processing capacity, and lays the foundation for the miniaturization and high performance of electronic equipment, and the multilayer thickness measurement frame is the important measuring tool for detecting the production quality of storage chip.

[0003] Each layer of storage chip has specific function, and the thickness of these layers must be accurately controlled to ensure the performance consistency of chip, and thickness deviation will cause the electrical characteristics of storage chip to change, and then affect data storage and reading speed, and through the accurate measurement of multilayer structure of storage chip, it can ensure that the product meets the design standard and reduces the generation of defective products.

[0004] During the multilayer thickness measurement of storage chip, the chip will cause a small displacement in measurement, which will cause the measurement probe to not accurately aim at the target layer, resulting in the measurement data being wrong, so the storage chip needs to be fixed before measurement, and the existing chip fixing method uses movable clamp, adjusts the position of clamp according to the size of chip, so that it can tightly clamp the edge of chip, prevents the chip from moving during measurement, but a large pressure is applied to the chip, which causes the chip to deform, especially for thin chip, which easily affects the measurement accuracy. UTILITY MODEL CONTENTS

[0005] In order to make up for the above shortcomings, the utility model provides storage chip multilayer thickness measurement frame, which aims at improving the problem that the existing technology fixed clamp applies a large pressure to the chip, which causes the chip to deform, especially for thin chip, which easily affects the measurement accuracy.

[0006] In order to achieve the above object, the utility model discloses the following technical scheme: the storage chip multilayer thickness measurement frame, including the bottom plate, a plurality of suction disc and connecting plate, the top of bottom plate is fixedly connected with vacuum tank, the right side of vacuum tank is connected with negative pressure fan, the top of vacuum tank is fixedly connected with supporting plate, the bottom of a plurality of suction disc all runs through the inside of supporting plate, the left and right sides of a plurality of suction disc are all fixedly connected with fixed lug, the inner wall of a plurality of fixed lug is all fixedly connected with fixed sleeve, the inside of a plurality of fixed sleeve is all slidingly connected with pressing plate, the bottom of a plurality of pressing plate is all fixedly connected with connecting rod, the outer wall of a plurality of connecting rod is all provided with spring, the outer wall of a plurality of connecting rod is all slidingly connected with baffle, the bottom of a plurality of connecting rod is all fixedly connected with limiting block, the left and right sides in the inside of a plurality of fixed sleeve are all provided with blocking ball, a plurality of limiting grooves are seted up in the inside of supporting plate, and the top of supporting plate is provided with dust collection mechanism.

[0007] As further description of the above technical scheme:

[0008] The dust collection mechanism includes a dust cover, the top of the dust cover is fixedly connected to the bottom of the connecting plate, the left side of the dust cover is communicated with an air inlet pipe, the right side of the dust cover is communicated with a gas blowing pipe, the left end of the gas blowing pipe is communicated with a spray head, the other end of the gas blowing pipe is communicated with a circulating fan, the air inlet end of the circulating fan is communicated with a connecting pipe, the left end of the connecting pipe is communicated with a collection box, and the inside of the collection box is fixedly connected with a filter plate.

[0009] As further description of the above technical scheme:

[0010] The inside of the dust cover is slidingly connected with a measuring instrument, the front right side of the collection box is rotatably connected with a hinge, and the right side of the hinge is rotatably connected with airtight door.

[0011] As further description of the above technical scheme:

[0012] The front side of the airtight door is fixedly connected with a handle, and the outer wall of the handle is fixedly connected with an anti-skid sleeve.

[0013] As further description of the above technical scheme:

[0014] The top of the bottom plate is fixedly connected with a guide rail on the left and right sides, and the inside of the two guide rails is rotatably connected with a threaded rod, and the top of the two threaded rods is fixedly connected with a handle.

[0015] As further description of the above technical scheme:

[0016] The front side of the dust cover is fixedly connected with a fixed plate, and the top of the fixed plate is fixedly connected with a controller, and the controller is electrically connected with the negative pressure fan, the circulating fan and the measuring instrument.

[0017] As a further description of the above technical solutions:

[0018] The bottom plate is fixedly connected with a supporting column at each of the four corners, and the bottom of each of the supporting columns is fixedly connected with an anti-skid pad.

[0019] As a further description of the above technical solutions:

[0020] The top of each of the plurality of springs is fixedly connected to the bottom of the pressing plate, the bottom of each of the plurality of springs is fixedly connected to the top of the blocking plate, the limiting grooves are symmetrical about the center line of the suction cup, and the number of the limiting grooves corresponds to the number of the fixed ears one by one.

[0021] The utility model has the advantages of the following beneficial effects:

[0022] 1. In the utility model, when the pressing plate is pressed, the connecting rod pushes the limiting block to move downward, the blocking ball is exposed from the fixed sleeve, and is clamped at the step of the limiting groove, thereby completing the fixing of the suction cup. When the pressing plate is pressed again, the blocking ball is retracted into the inside of the fixed sleeve, the diameter of the step of the limiting groove is the same as the diameter of the lower part of the fixed sleeve, so that the fixed sleeve can be pulled out from the inside of the limiting groove, and the suction cup is disassembled.

[0023] 2. In the utility model, the rotating handle drives the threaded rod to rotate, and drives the dust cover to move. When the dust cover is attached to the supporting plate, the circulating fan is started, the generated gas is sprayed into the inside of the dust cover, the dust on the surface of the storage chip is blown out from the air inlet pipe by the gas, and is introduced into the inside of the collecting box. Through the filtering effect of the filter plate, the dust is intercepted in the inside of the collecting box. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 The utility model provides a three-dimensional schematic view of the storage chip multilayer thickness measurement frame;

[0025] Figure 2 The utility model provides an adsorption mechanism structure schematic view of the storage chip multilayer thickness measurement frame;

[0026] Figure 3 The utility model provides a supporting plate sectional view of the storage chip multilayer thickness measurement frame;

[0027] Figure 4 The utility model provides a fixed sleeve sectional view of the storage chip multilayer thickness measurement frame;

[0028] Figure 5 The utility model provides a dust collection mechanism structure schematic view of the storage chip multilayer thickness measurement frame.

[0029] LEGEND:

[0030] 1, bottom plate; 2, vacuum box; 3, negative pressure fan; 4, support plate; 5, suction cup; 6, fixing lug; 7, fixing sleeve; 8, pressing plate; 9, connecting rod; 10, spring; 11, blocking plate; 12, limiting block; 13, blocking ball; 14, limiting groove; 15, connecting plate; 16, dust collection mechanism; 1601, dust collection cover; 1602, air inlet pipe; 1603, nozzle; 1604, air blowing pipe; 1605, circulating fan; 1606, connecting pipe; 1607, collection box; 1608, filter plate; 17, measuring instrument; 18, hinge; 19, airtight door; 20, handle; 21, anti-skid sleeve; 22, guide rail; 23, threaded rod; 24, handle; 25, fixed plate; 26, controller; 27, support column; 28, anti-skid pad. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0032] Reference Figure 1 , Figure 3 and Figure 4The utility model provides an embodiment: storage chip multilayer thickness measurement frame, including bottom plate 1, a plurality of sucking disc 5 and connecting plate 15, the top fixed connection of bottom plate 1 has vacuum tank 2, the right side intercommunication of vacuum tank 2 has negative pressure fan 3, the top fixed connection of vacuum tank 2 has support plate 4, and the air in vacuum tank 2 can be extracted to form negative pressure by starting negative pressure fan 3, and the function of realizing fixed chip is realized to the adsorption of storage chip by sucking disc 5, and then the multilayer thickness of storage chip is conveniently measured, the bottom of a plurality of sucking disc 5 all penetrates the inside of support plate 4, realizes the bottom of sucking disc 5 and the inside communication of vacuum tank 2, the left and right sides of a plurality of sucking disc 5 all are fixedly connected with fixed lug 6, the inner wall of a plurality of fixed sleeve 7 all is fixedly connected with fixed sleeve 7, the inside of a plurality of fixed sleeve 7 all is slidably connected with pressing plate 8, wherein, fixed sleeve 7 is divided into two parts, and the outer diameter of the upper part is greater than the outer diameter of the lower part, so that the upper part of fixed sleeve 7 can be clamped in the top end of fixed lug 6, in addition, the top end of fixed sleeve 7 is set as horn shape, and it is convenient for staff to press pressing plate 8, the bottom of pressing plate 8 all is fixedly connected with connecting rod 9, the outer wall of a plurality of connecting rod 9 all is provided with spring 10, the outer wall of a plurality of connecting rod 9 all is slidably connected with baffle 11, wherein, when pressing plate 8 is pressed, spring 10 will be extruded, and the bottom end of spring 10 is fixed on the top of baffle 11, so that pressing plate 8 and baffle 11 cooperate to make spring 10 deform, and generate elastic force, when pressing plate 8 is no longer pressed, spring 10 restores deformation, and resets, pushes pressing plate 8 back to the original position, the bottom of a plurality of connecting rod 9 all is fixedly connected with limiting block 12, wherein, limiting block 12 is composed of two parts, the upper part is cylindrical, and the lower part is circular table, the inside left and right sides of a plurality of fixed sleeve 7 all are provided with blocking ball 13, a plurality of limiting grooves 14 are seted up in the inside of support plate 4, wherein, the top of limiting groove 14 is set as step shape, when blocking ball 13 exposes fixed sleeve 7, it can be clamped at the step of limiting groove 14, and fixed sleeve 7 is fixed, indirectly completes the fixing of sucking disc 5, in addition, when blocking ball 13 is retracted to the inside of fixed sleeve 7, the diameter of limiting groove 14 step place is same with the diameter of fixed sleeve 7 lower part, so it can pull out fixed sleeve 7 from the inside of limiting groove 14, and the sucking disc 5 is disassembled, the top of support plate 4 is provided with dust collection mechanism 16.

[0033] Refer to Figure 1 And Figure 5The dust collection mechanism 16 comprises a dust collection cover 1601, the top of the dust collection cover 1601 is fixedly connected to the bottom of the connecting plate 15, the top of the bottom plate 1 is fixedly connected with guide rails 22 on the left and right sides, the interiors of the two guide rails 22 are both rotationally connected with threaded rods 23, the outer walls of the two threaded rods 23 are both threadedly connected with threaded blocks, the two threaded blocks are fixedly connected to the left and right sides of the connecting plate 15 respectively, the top of each of the two threaded rods 23 is fixedly connected with a handle 24, rotating the handle 24 drives the threaded rod 23 to rotate, when the threaded rod 23 rotates, the connecting plate 15 is driven to move up and down through the threaded block, in addition, the connecting plate 15 is fixed to the top of the dust collection cover 1601, so that when the connecting plate 15 moves, the dust collection cover 1601 is driven to move, and when the dust collection cover 1601 covers the top of the supporting plate 4 and the two are in close contact, the dust on the surface of the storage chip can be cleaned, the front side of the dust collection cover 1601 is fixedly connected with a fixed plate 25, the fixed plate 25 serves as a carrier of a controller 26 and plays a role in fixedly supporting the controller 26, the top of the fixed plate 25 is fixedly connected with the controller 26, the controller 26 is electrically connected with the negative pressure fan 3, the circulating fan 1605 and the measuring instrument 17, the left side of the dust collection cover 1601 is communicated with an air inlet pipe 1602, the right side of the dust collection cover 1601 is communicated with a gas blowing pipe 1604, the left end of the gas blowing pipe 1604 is communicated with a spray head 1603, when the dust collection cover 1601 is in close contact with the supporting plate 4, the gas blowing pipe 1604 can blow out gas, and through the action of the spray head 1603, the speed of the gas blowing out is accelerated, the cleaning effect of the dust on the surface of the storage chip is better, in addition, the gas will be blown out from the air inlet pipe 1602 on the other side of the dust collection cover 1601 and will carry the dust out, the other end of the gas blowing pipe 1604 is communicated with the circulating fan 1605, the air inlet end of the circulating fan 1605 is communicated with a connecting pipe 1606, the left end of the connecting pipe 1606 is communicated with a collection box 1607, the inside of the collection box 1607 is fixedly connected with a filter plate 1608, when the circulating fan 1605 is started, the gas generated by the circulating fan 1605 will be blown into the inside of the dust collection cover 1601 through the gas blowing pipe 1604 and the spray head 1603, so as to clean the storage chip, finally, the gas will carry the dust out of the air inlet pipe 1602 and then into the inside of the collection box 1607, the dust is intercepted in the inside of the collection box 1607 through the filtering action of the filter plate 1608, and the right side of the collection box 1607 is communicated with the air inlet end of the circulating fan 1605 through the connecting pipe 1606, so as to realize the recycling of the gas.

[0034] Referring to Figure 1 , Figure 2 and Figure 3The inside of the dust cover 1601 is slidably connected with a measuring instrument 17, when the dust cover 1601 is lowered to be attached to the supporting plate 4, the controller 26 is started to control the supporting column 27 to measure the multi-layer thickness of the storage chip, the front right side of the collecting box 1607 is rotatably connected with a hinge 18, the right side of the hinge 18 is rotatably connected with a sealed door 19, the front side of the sealed door 19 is fixedly connected with a handle 20, the outer wall of the handle 20 is fixedly connected with an anti-skid sleeve 21, the staff can conveniently open the sealed door 19 through the handle 20, and then the dust and the filter plate 1608 in the collecting box 1607 are cleaned, in addition, the setting of the anti-skid sleeve 21 increases the friction force, prevents the staff from dropping the handle, the four corners of the bottom plate 1 are fixedly connected with the supporting column 27, the bottoms of the plurality of supporting columns 27 are fixedly connected with the anti-skid pads 28, the setting of the anti-skid pads 28 prevents the equipment from moving in the use process, thereby avoiding the deviation of the measurement data, the tops of the plurality of springs 10 are fixedly connected to the bottom of the pressing plate 8, the bottoms of the plurality of springs 10 are fixedly connected to the top of the blocking plate 11, the limiting grooves 14 are symmetrical about the center line of the suction cup 5, and the number of the limiting grooves 14 corresponds to the number of the fixed lugs 6.

[0035] Working principle: when the pressing plate 8 is pressed, the connecting rod 9 pushes the limiting block 12 to move downwards, and the cylindrical structure of the limiting block 12 is located inside the blocking ball 13, so that the blocking ball 13 has a certain moving space, and the top of the limiting groove 14 is stepped, when the blocking ball 13 exposes the fixed sleeve 7, it is clamped at the step of the limiting groove 14, and the fixed sleeve 7 is fixed, and the suction cup 5 is indirectly fixed, in addition, when the pressing plate 8 is pressed again, the blocking ball 13 is retracted into the inside of the fixed sleeve 7, and the diameter of the step of the limiting groove 14 is the same as that of the lower part of the fixed sleeve 7, so that the fixed sleeve 7 can be pulled out from the inside of the limiting groove 14, and the suction cup 5 is disassembled;

[0036] The rotating handle 24 drives the threaded rod 23 to rotate, and then drives the dust cover 1601 to move, and when the dust cover 1601 is attached to the supporting plate 4, the gas generated by starting the circulating fan 1605 passes through the blowing pipe 1604 and is sprayed to the inside of the dust cover 1601 by the nozzle 1603, the dust on the surface of the storage chip is carried by the gas and escapes from the air inlet pipe 1602, enters the inside of the collecting box 1607, and is intercepted in the inside of the collecting box 1607 by the filtering effect of the filter plate 1608, and the right side of the collecting box 1607 is connected in communication with the air inlet end of the circulating fan 1605 through the connecting pipe 1606, realizing the recycling of the gas.

[0037] Finally, it should be noted that: the above only for the preferred embodiments of the present application, and is not intended to limit the present application, although the foregoing embodiments of the present application has been described in detail, for the skilled in the art, it still can be modified, or for part of the technical features of the equivalent replacement, the spirit and principles of the present application, the made any modification, equivalent replacement, improvement, etc., should be included within the scope of the present application.

Claims

1. A framework for measuring the thickness of a plurality of memory chips, comprising a base plate (1), a plurality of suction cups (5) and a connecting plate (15), characterized in that: The top of the bottom plate (1) is fixedly connected with a vacuum box (2), the right side of the vacuum box (2) is communicated with a negative pressure fan (3), the top of the vacuum box (2) is fixedly connected with a supporting plate (4), the bottoms of multiple suction cups (5) all penetrate the inside of the supporting plate (4), the left and right sides of multiple suction cups (5) are all fixedly connected with fixed ears (6), the inner walls of multiple fixed ears (6) are all fixedly connected with fixed sleeves (7), the insides of multiple fixed sleeves (7) are all slidingly connected with pressing plates (8), the bottoms of multiple pressing plates (8) are all fixedly connected with connecting rods (9), the outer walls of multiple connecting rods (9) are all provided with springs (10), the outer walls of multiple connecting rods (9) are all slidingly connected with blocking plates (11), the bottoms of multiple connecting rods (9) are all fixedly connected with limiting blocks (12), the left and right sides of multiple fixed sleeves (7) are all provided with blocking balls (13), multiple limiting grooves (14) are arranged in the inside of the supporting plate (4), and a dust collection mechanism (16) is arranged on the top of the supporting plate (4).

2. The storage chip multi-faceted thickness measurement framework of claim 1, wherein: The dust collection mechanism (16) comprises a dust collection cover (1601), the top of the dust collection cover (1601) is fixedly connected to the bottom of the connecting plate (15), the left side of the dust collection cover (1601) is communicated with an air inlet pipe (1602), the right side of the dust collection cover (1601) is communicated with a gas blowing pipe (1604), the left end of the gas blowing pipe (1604) is communicated with a spray head (1603), the other end of the gas blowing pipe (1604) is communicated with a circulating fan (1605), the air inlet end of the circulating fan (1605) is communicated with a connecting pipe (1606), the left end of the connecting pipe (1606) is communicated with a collection box (1607), and the inside of the collection box (1607) is fixedly connected with a filter plate (1608).

3. The storage chip multi-faceted thickness measurement framework of claim 2, wherein: The inside of the dust collection cover (1601) is slidingly connected with a measuring instrument (17), the front right side of the collection box (1607) is rotatably connected with a hinge (18), and the right side of the hinge (18) is rotatably connected with airtight door (19).

4. The storage chip multi-faceted thickness measurement framework of claim 3, wherein: The front side of the airtight door (19) is fixedly connected with a handle (20), and the outer wall of the handle (20) is fixedly connected with an anti-skid sleeve (21).

5. The storage chip multi-faceted thickness measurement framework of claim 1, wherein: The left and right sides of the top of the bottom plate (1) are both fixedly connected with guide rails (22), the insides of the two guide rails (22) are both rotatably connected with threaded rods (23), and the tops of the two threaded rods (23) are both fixedly connected with handles (24).

6. The storage chip multi-faceted thickness measurement frame of claim 2, wherein: The front side of the dust collection cover (1601) is fixedly connected with a fixed plate (25), the top of the fixed plate (25) is fixedly connected with a controller (26), and the controller (26) is electrically connected with the negative pressure fan (3), the circulating fan (1605) and the measuring instrument (17).

7. The storage chip multi-faceted thickness measurement framework of claim 1, wherein: The four corners of the bottom plate (1) are all fixedly connected with supporting columns (27), and the bottoms of multiple supporting columns (27) are all fixedly connected with anti-skid pads (28).

8. The storage chip multi-faceted thickness measurement framework of claim 1, wherein: The top of the plurality of springs (10) is fixedly connected to the bottom of the pressing plate (8), the bottom of the plurality of springs (10) is fixedly connected to the top of the blocking plate (11), the limiting groove (14) is symmetrical about the center line of the suction cup (5), and the number of the limiting grooves (14) corresponds to the number of the fixed ears (6) one by one.

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