Wafer calibration centering device
By combining the centering drive and stop wheel of the wafer calibration and centering device, the problem of wafer misalignment during transportation is solved, achieving high-precision centering and stability, preventing wafer damage, and extending equipment life.
Patent Information
- Application Number
- CN202423021016.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-06
- Publication Date
- 2025-10-24
- Estimated Expiration
- 2034-12-06
AI Technical Summary
During wafer transfer, the uncertainty of the robotic arm's handling can cause wafer misalignment and make precise positioning impossible. This can lead to processing position deviations and wafer damage, increasing manufacturing costs.
A wafer calibration and centering device is adopted. The centering moving seat is driven by the centering drive component to slide. The centering wheel and the stop wheel are used to calibrate and center the wafer to ensure high-precision alignment. Combined with the centering cylinder, a stable thrust is provided and the hydraulic buffer is used to reduce impact and prevent damage.
It improves the accuracy and stability of wafer centering, reduces centering errors, ensures high-precision alignment, extends equipment lifespan, and prevents wafer rotation and damage.
Smart Images
Figure CN223471584U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application relates to the technical field of wafer processing equipment, in particular to a wafer calibration centering device. BACKGROUND
[0002] In semiconductor production, a wafer must be positioned in a processing chamber with extremely precise accuracy and in a specific direction, so that accurate and reliable wafer centering is crucial to each process step. During the transfer of the wafer, the wafer is carried by a robot arm. Since the robot arm may not be in the center during wafer carrying or wafer deviation may occur during the carrying process, if no centering adjustment is performed, the suction position of the robot may change when the wafer is suctioned, thereby increasing the deviation of the preset placement position, causing the wafer to be damaged during processing, and increasing the manufacturing cost. CONTENT OF THE UTILITY MODEL
[0003] In order to facilitate the calibration and centering of the wafer, the application provides a wafer calibration centering device.
[0004] The wafer calibration centering device provided by the application adopts the following technical scheme:
[0005] A wafer calibration centering device comprises a base, a plurality of wafer support columns arranged on the upper end surface of the base, and a wafer body placed on the wafer support columns. The upper end surface of the base is slidably connected with a centering movable seat. The centering movable seat is provided with two centering wheels arranged symmetrically along the axis of the base. Each centering movable seat is provided with two centering wheels abutting against the outer circumferential wall of the wafer body. The base is provided with a centering driving member for driving the centering movable seat to slide.
[0006] By placing the wafer body on the wafer support columns by the robot, the two centering movable seats are driven by the centering driving member to slide towards each other. The centering wheels on the centering movable seats abut against the outer circumferential wall of the wafer body. The four centering wheels realize the calibration and centering of the wafer body and fix the wafer body, so as to ensure that the wafer body reaches a high alignment accuracy.
[0007] Preferably, the upper end surface of the base is fixedly connected with a linear guide rail, and the centering movable seat is fixedly connected with a sliding seat slidably connected with the linear guide rail.
[0008] By adopting the above technical scheme, the cooperation of the linear guide rail and the sliding seat makes the sliding of the centering movable seat on the upper end surface of the base more stable and reliable, improves the accuracy and stability of the centering process, reduces the centering error caused by unsmooth sliding, and ensures the high-precision alignment of the wafer body.
[0009] Preferably, the centering driving member is a centering cylinder, a cylinder body of the centering cylinder is fixedly connected to an upper end surface of the base, a piston rod of the centering cylinder is axially parallel to a sliding direction of the centering movable seat, and the piston rod of the centering cylinder is fixedly connected to the centering movable seat.
[0010] By adopting the above technical solution, the centering cylinder as the centering driving member can provide stable thrust to make the centering movable seat smoothly slide along a predetermined path, thereby improving centering accuracy and reliability. Meanwhile, the centering cylinder has simple structure and is convenient to maintain, can maintain good performance stability in high-frequency operation, and prolongs service life of the equipment.
[0011] Preferably, the base is provided with an oil pressure buffer for abutting against the centering movable seat.
[0012] By adopting the above technical solution, when the centering movable seat moves to the wafer body under the action of the centering driving member and finally abuts, the oil pressure buffer can effectively absorb and slow down the impact force of the centering movable seat, prevent the centering movable seat from generating excessive impact due to sudden stop, protect the centering movable seat and the wafer body from damage, and improve stability and service life of the equipment.
[0013] Preferably, the outer wall of the wafer body has a stop straight surface, two stop straight surfaces are provided and symmetrically arranged along an axis of the wafer body, and the centering movable seat is provided with a stop wheel abutting against the stop straight surface.
[0014] By adopting the above technical solution, the stop straight surface and the stop wheel are additionally provided, when the centering wheel abuts against the circumferential wall of the wafer body, the stop wheel abuts against the stop straight surface, the stop straight surface can cooperate with the stop wheel on the centering movable seat, and the possibility of rotation of the wafer body around its axis is effectively prevented.
[0015] Preferably, an adjusting groove is formed in an upper end surface of the centering movable seat, a length direction of the adjusting groove is parallel to a sliding direction of the centering movable seat, the centering movable seat is provided with a stop seat slidably connected to the adjusting groove, the stop wheel is arranged on the stop seat, and the centering movable seat is provided with an adjusting assembly for adjusting a sliding position of the stop seat.
[0016] By adopting the above technical solution, the adjusting groove is formed in the upper end surface of the centering movable seat, the stop seat can slide in the adjusting groove, so that the position of the stop wheel can be flexibly adjusted according to wafer bodies of different sizes, the centering wheel can abut against the circumferential wall of the wafer body while the stop wheel can accurately abut against the stop straight surface of the wafer body, and flexibility and accuracy of the centering process are improved.
[0017] Preferably, a threaded hole is formed in the inner wall of the bottom of the adjusting groove, a locking groove corresponding to the threaded hole is formed in the upper end surface of the stop seat, the locking groove is a strip-shaped groove, the length direction of the locking groove is parallel to the sliding direction of the stop seat, the adjusting assembly comprises a locking bolt penetrating the locking groove, the locking bolt is threadedly connected to the threaded hole, and the nut end surface of the locking bolt abuts against the stop seat.
[0018] By adopting the above technical scheme, after the sliding position of the stop seat is adjusted, the nut end surface of the locking bolt abuts against the stop seat by tightening the locking bolt, so that the stop seat is fixed in the form of damping.
[0019] Preferably, the adjusting assembly comprises an adjusting screw rotatably connected to the adjusting groove, the adjusting screw is threadedly penetrating the stop seat, and the axial direction of the adjusting screw is parallel to the sliding direction of the stop seat.
[0020] By adopting the above technical scheme, by rotating the adjusting screw, the stop seat slides along the axial direction under the threaded limiting action of the adjusting screw, so that the position of the stop seat is adjusted.
[0021] Preferably, the adjusting assembly further comprises a knob fixedly connected to the adjusting screw.
[0022] By adopting the above technical scheme, the operator can manually rotate the knob to adjust the position of the stop seat, so that the relative position between the stop wheel and the stop straight surface is conveniently and quickly adjusted.
[0023] In summary, the utility model has the following beneficial effects:
[0024] 1. The wafer body is placed on the wafer supporting column by the mechanical hand, the two centering movable seats are driven to slide towards each other by the centering driving element, the centering wheels on the centering movable seats abut against the outer circumferential wall of the wafer body, the four centering wheels are used for centering and fixing the wafer body, and the wafer body can reach high alignment accuracy.
[0025] 2. The centering cylinder is used as the centering driving element, can provide stable thrust, and makes the centering movable seat slide stably along the predetermined path, thereby improving centering accuracy and reliability.
[0026] 3. The stop straight surface and the stop wheel are additionally arranged, when the centering wheel abuts against the circumferential wall of the wafer body, the stop wheel abuts against the stop straight surface, the stop straight surface can cooperate with the stop wheel on the centering movable seat, and the possibility that the wafer body rotates around the axis thereof is effectively prevented. BRIEF DESCRIPTION OF DRAWINGS
[0027] Figure 1is a schematic diagram of the overall structure of a wafer calibration centering device in embodiment 1;
[0028] Figure 2 is a schematic diagram of the structure of a base in embodiment 1;
[0029] Figure 3 is a schematic diagram of the connection structure of a centering movable seat and a stop seat in embodiment 1;
[0030] Figure 4 is a schematic diagram of the structure of an adjusting assembly in embodiment 2.
[0031] In the figure, 1, base; 11, linear guide rail; 12, fixed plate; 13, limiting plate; 14, oil buffer; 2, wafer support column; 3, wafer body; 31, stop straight surface; 4, centering movable seat; 41, sliding seat; 42, centering arm; 43, centering wheel; 44, adjusting groove; 45, threaded hole; 46, sliding groove; 5, centering driving part; 6, stop seat; 61, stop arm; 62, stop wheel; 63, locking groove; 64, sliding block; 7, adjusting assembly; 71, adjusting screw; 72, knob. DETAILED DESCRIPTION
[0032] The following will be described in detail in combination with the accompanying Figures 1-4 The present application is further described in detail.
[0033] Embodiment 1:
[0034] The present application discloses a wafer calibration centering device, referring to Figure 1 , comprising a base 1, a plurality of wafer support columns 2 arranged on the upper end surface of the base 1, and a wafer body 3 placed on the wafer support columns 2, the wafer support columns 2 are arranged vertically, in this embodiment, four wafer support columns 2 are arranged around the axis of the base 1, the outer peripheral wall of the wafer body 3 is cut to form a stop straight surface 31, the stop straight surface 31 is arranged with an even number, in this embodiment, two stop straight surfaces 31 are arranged symmetrically along the axis of the wafer body 3.
[0035] Referring to Figure 2 , the upper end surface of the base 1 is slidably connected with a centering movable seat 4, the upper surface of the centering movable seat 4 is lower than the lower surface of the wafer body 3, the centering movable seat 4 is arranged with two and arranged symmetrically along the axis of the base 1. Specifically, the upper end surface of the base 1 is fixedly connected with a linear guide rail 11, the linear guide rail 11 is arranged with two, the two linear guide rails 11 are arranged in parallel, the lower end surface of the centering movable seat 4 is fixedly connected with a sliding seat 41 slidably connected with the linear guide rail 11.
[0036] The base 1 is provided with a centering driving element 5 for driving the centering movable seat 4 to slide. In the embodiment, the upper end surface of the base 1 is fixedly connected with a fixed plate 12 between the two linear guides 11, the fixed plate 12 is below the wafer body 3, the centering driving element 5 is a centering cylinder, two centering cylinders are correspondingly arranged, the two centering cylinders are symmetrically distributed along the center line of the fixed plate 12, the cylinder body of the centering cylinder is fixedly connected to the fixed plate 12, the piston rod of the centering cylinder is axially parallel to the length direction of the linear guide 11, and the piston rod of the centering cylinder is fixedly connected to the side wall of the centering movable seat 4. In other embodiments, the centering driving element 5 can drive the centering movable seat 4 to slide in a screw rod transmission mode. The linear guide 11 is fixedly connected with a limiting plate 13, the limiting plate 13 is provided with an oil pressure buffer 14 for abutting against the side wall of the centering movable seat 4, the main body of the oil pressure buffer 14 is fixedly connected to the limiting plate 13, and the impact head of the oil pressure buffer 14 is used for abutting against the centering movable seat 4.
[0037] Referring to Figure 1 , Figure 2 , the side wall of the centering movable seat 4 is fixedly connected with a centering arm 42, the centering arm 42 is provided with two, and the length direction of the centering arm 42 is perpendicular to the length direction of the linear guide 11. The centering arm 42 is provided with a centering wheel 43 abutting against the outer circumferential wall of the wafer body 3, the centering wheel 43 is rotationally connected to the centering arm 42 through a rotating shaft, and the axis of the centering wheel 43 is vertically arranged. The upper end surface of the centering movable seat 4 is provided with an adjusting groove 44, the length direction of the adjusting groove 44 is parallel to the sliding direction of the centering movable seat 4, the centering movable seat 4 is provided with a stop seat 6 slidingly connected to the adjusting groove 44, and the upper surface of the stop seat 6 is flush with the upper surface of the centering movable seat 4. The side wall of the stop seat 6 is fixedly connected with a stop arm 61 parallel to the centering arm 42, two stop arms 61 are arranged on one stop seat 6, the stop arm 61 is provided with a stop wheel 62 abutting against the stop straight surface 31, the stop wheel 62 is rotationally connected to the stop arm 61 through a rotating shaft, and the axis of the stop wheel 62 is vertically arranged.
[0038] Referring to Figure 2 , Figure 3 , the centering movable seat 4 is provided with an adjusting assembly 7 for adjusting the sliding position of the stop seat 6. In the embodiment, the inner wall of the bottom of the adjusting groove 44 is provided with a threaded hole 45, the upper end surface of the stop seat 6 is provided with a locking groove 63 corresponding to the threaded hole 45, the locking groove 63 is a strip-shaped groove and a countersunk groove, the length direction of the locking groove 63 is parallel to the sliding direction of the stop seat 6, and the adjusting assembly 7 comprises a locking bolt penetrating the locking groove 63, the locking bolt is a countersunk bolt, the locking bolt is threadedly connected to the threaded hole 45, and the end surface of the nut of the locking bolt abuts against the bottom wall of the countersunk groove of the locking groove 63.
[0039] The implementation principle of the wafer calibration centering device is as follows: in normal state, the piston rods of the two centering cylinders are extended to drive the two centering movable seats 4 to slide away from each other, the wafer body 3 is placed on the wafer support column 2 by the mechanical hand, the piston rods of the centering cylinders are retracted to drive the two centering movable seats 4 to slide towards each other, the centering wheels 43 on the centering movable seats 4 abut against the outer circumferential wall of the wafer body 3, and the stop wheels 62 abut against the stop straight surface 31 of the wafer body 3, after the two groups of centering wheels 43 and stop wheels 62 clamp and fix the wafer body 3, the calibration centering of the wafer body 3 is realized, the high alignment accuracy of the wafer body 3 is ensured, and the high alignment accuracy of the wafer body 3 is ensured, after the machining equipment completes the machining of the wafer body 3, the piston rods of the centering cylinders are extended to reset, and the wafer body 3 is grabbed and unloaded by the mechanical hand.
[0040] Embodiment 2:
[0041] The difference from embodiment 1 is that, referring to Figure 4 , the bottom inner wall of the adjusting groove 44 is provided with a sliding groove 46, the stop seat 6 is fixedly connected with a sliding block 64 which is connected to the sliding groove 46 in a sliding manner, the adjusting assembly 7 comprises an adjusting screw 71 which is rotationally connected to the inner wall of the sliding groove 46 and a knob 72 which is coaxially and fixedly connected to the end of the adjusting screw 71, the knob 72 is located outside the centering movable seat 4, the adjusting screw 71 is threadedly arranged in the sliding block 64, and the axial direction of the adjusting screw 71 is parallel to the sliding direction of the stop seat 6. The sliding block 64 slides along the axial direction under the thread limiting action of the adjusting screw 71 by rotating the knob 72 to drive the adjusting screw 71 to rotate, and the position adjustment of the stop seat 6 is realized.
[0042] The above are preferred embodiments of the present application, and do not limit the protection scope of the present application, therefore: all equivalent changes made on the structure, shape, principle of the present application should be covered in the protection scope of the present application.
Claims
1. A wafer alignment centering device, characterized by: The application relates to a wafer centering device, which comprises a base (1), a plurality of wafer supporting columns (2) arranged on the upper end surface of the base (1) and a wafer body (3) placed on the wafer supporting columns (2), the upper end surface of the base (1) is slidably connected with a centering movable seat (4), the centering movable seat (4) is provided with two centering wheels (43) which abut against the outer circumferential wall of the wafer body (3) and is symmetrically arranged along the axis of the base (1), each centering movable seat (4) is provided with two centering wheels (43) which abut against the outer circumferential wall of the wafer body (3), and the base (1) is provided with a centering driving element (5) for driving the sliding movement of the centering movable seat (4).
2. The wafer alignment and centering device of claim 1, wherein: The upper end surface of the base (1) is fixedly connected with a linear guide rail (11), and the centering movable seat (4) is fixedly connected with a sliding seat (41) which is slidably connected with the linear guide rail (11).
3. The wafer alignment and centering device of claim 1, wherein: The centering driving element (5) is a centering cylinder, the cylinder body of the centering cylinder is fixedly connected with the upper end surface of the base (1), the piston rod of the centering cylinder is axially parallel to the sliding direction of the centering movable seat (4), and the piston rod of the centering cylinder is fixedly connected with the centering movable seat (4).
4. The wafer alignment and centering device of claim 1, wherein: The base (1) is provided with an oil pressure buffer (14) for abutting against the centering movable seat (4).
5. The wafer alignment and centering device of claim 1, wherein: The outer wall of the wafer body (3) is provided with a stop straight surface (31), the stop straight surface (31) is provided with two stop wheels (62) which are symmetrically arranged along the axis of the wafer body (3), and the centering movable seat (4) is provided with the stop wheels (62) which abut against the stop straight surface (31).
6. The wafer alignment and centering device of claim 5, wherein: The upper end surface of the centering movable seat (4) is provided with an adjusting groove (44), the length direction of the adjusting groove (44) is parallel to the sliding direction of the centering movable seat (4), the centering movable seat (4) is provided with a stop seat (6) which is slidably connected with the adjusting groove (44), the stop wheel (62) is arranged on the stop seat (6), and the centering movable seat (4) is provided with an adjusting assembly (7) for adjusting the sliding position of the stop seat (6).
7. The wafer alignment and centering device of claim 6, wherein: The bottom inner wall of the adjusting groove (44) is provided with a threaded hole (45), the upper end surface of the stop seat (6) is provided with a locking groove (63) which is correspondingly arranged in the threaded hole (45), the locking groove (63) is a strip-shaped groove, the length direction of the locking groove (63) is parallel to the sliding direction of the stop seat (6), and the adjusting assembly (7) comprises a locking bolt which is arranged in the locking groove (63) and is threadedly connected with the threaded hole (45), and the nut end surface of the locking bolt abuts against the stop seat (6).
8. The wafer alignment and centering device of claim 6, wherein: The adjusting assembly (7) comprises an adjusting screw (71) which is rotatably connected with the adjusting groove (44) and is threadedly arranged in the stop seat (6), and the axial direction of the adjusting screw (71) is parallel to the sliding direction of the stop seat (6).
9. The wafer alignment and centering device of claim 8, wherein: The adjusting assembly (7) further comprises a knob (72) which is fixedly connected with the adjusting screw (71).