Telescopic mechanism and trimmer

Abstract

The utility model provides a telescopic mechanism, and relates to the technical field of wafer processing equipment, the telescopic mechanism at least comprises a top layer component, a bottom layer component located below the top layer component and a transmission device arranged between the adjacent layer components, the top layer component is used for installing a trimming head, and the bottom layer component is used for installing a trimming head. The transmission device is used for enabling the adjacent layers of components to do relative telescopic motion in the horizontal direction. The defect that the trimmer cannot be used and operated when located in a narrow space is overcome.

Description

Technical Field

[0001] This application relates to the field of wafer processing equipment technology, and more specifically, to a telescopic mechanism and a trimmer. Background Technology

[0002] In the wafer fabrication process, wafer polishing needs to be performed in multiple steps. Polishing requires the use of polishing pads and polishing fluid to grind and polish the wafer. The debris from the polished wafer and the polishing fluid slurry on the surface of the polishing pad will slowly fill the polishing pad. Over time, the surface of the polishing pad will harden and become shiny, forming a glaze and becoming smooth, which will significantly reduce the polishing efficiency.

[0003] Therefore, the use of the dressing head in the dressing device to dress and maintain the surface of the polishing pad is an essential step in the polishing process; otherwise, it will affect the quality of wafer polishing.

[0004] In existing technologies, the dressing head is mounted on a swing arm in the dressing device. When dressing is needed, the dressing head is swung above the polishing pad by the swing arm. However, in some multi-head polishing equipment, the space that allows the dressing device to operate is extremely small, which makes it impossible to install and use the existing dressing device. Utility Model Content

[0005] The purpose of this application is to provide a telescopic mechanism and a trimmer, which aims to solve the shortcomings of trimmers being unusable and unoperable when located in confined spaces.

[0006] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description or may be learned by practice of this application.

[0007] According to a first aspect of this application, a telescopic mechanism is provided, comprising at least a top layer member, a bottom layer member located below the top layer member, and a transmission device disposed between adjacent layer members, wherein the top layer member is used to mount a trimming head, and the transmission device is configured to enable adjacent layer members to telescopically move relative to each other in a horizontal direction.

[0008] In one exemplary embodiment of this application, at least one intermediate layer component is also included, located between the top layer component and the bottom layer component.

[0009] In one exemplary embodiment of this application, the transmission device is any one of a gear and rack structure, a worm gear structure, a lead screw structure, or a cylinder / hydraulic cylinder piston rod structure.

[0010] In one exemplary embodiment of this application, a drive device for driving the transmission device is also included.

[0011] In one exemplary embodiment of this application, the transmission device between the top layer member and the adjacent intermediate layer member is a cylinder / hydraulic cylinder piston rod structure, and the driving device includes a pressure supply device for providing air / hydraulic pressure to the cylinder / hydraulic cylinder piston rod structure.

[0012] In one exemplary embodiment of this application, two intermediate layer components are provided, and the two intermediate layer components are respectively configured as a primary base plate and a secondary base plate located below the primary base plate; the transmission device between the primary base plate and the secondary base plate is configured as a first transmission assembly, and the transmission device between the secondary base plate and the bottom layer component is configured as a second transmission assembly; a synchronization assembly for synchronizing the movement of the primary base plate and the secondary base plate is provided between the first transmission assembly and the second transmission assembly.

[0013] In an exemplary embodiment of this application, both the first transmission component and the second transmission component are configured as a gear and rack structure. The first transmission component includes a first rack and a first gear. The first rack is arranged along the moving direction of the first-stage base plate and is fixedly connected to the first-stage base plate. The first gear is rotatably connected to the second-stage base plate. The first rack is located above the first gear and meshes with the first gear. The second transmission component includes a second rack and a second gear. The second rack is arranged along the moving direction of the second-stage base plate and is fixedly connected to the bottom component. The second gear is rotatably connected to the second-stage base plate. The second rack is located below the second gear and meshes with the second gear. The synchronization component is disposed between the first gear and the second gear and is used to drive the first gear and the second gear to rotate synchronously.

[0014] In one exemplary embodiment of this application, the driving device between the intermediate layer component and the bottom layer component includes a motor, which is used to drive either the first gear or the second gear to rotate.

[0015] In one exemplary embodiment of this application, the synchronization component includes:

[0016] The first synchronous pulley is fixedly connected to the first gear, and the rotation axis of the first synchronous pulley coincides with the rotation axis of the first gear.

[0017] The second synchronous pulley is fixedly connected to the second gear, and the rotation axis of the second synchronous pulley coincides with the rotation axis of the second gear;

[0018] A timing belt, wrapped between the first timing pulley and the second timing pulley, is used to drive the first timing pulley and the second timing pulley to rotate synchronously.

[0019] In one exemplary embodiment of this application, a lifting device for adjusting the height of the top layer component is provided between the intermediate layer component and the top layer component.

[0020] According to a second aspect of this application, a trimmer is provided, comprising any of the telescopic mechanisms described above.

[0021] The exemplary embodiments of this application may have some or all of the following beneficial effects:

[0022] The telescopic mechanism provided in the exemplary embodiment of this application controls the relative telescopic movement of adjacent layer components in the horizontal direction through a transmission device, enabling the dresser to adapt to different working environments and needs. When the dresser is in use, the transmission device allows relative sliding between adjacent layer components, causing the top layer component to slide out from above the bottom layer component, moving the dressing head to the position of the polishing pad, and then maintaining the polishing pad through the dressing head. When the dresser is not in use, the transmission device can retract the adjacent layer components to reduce the space occupied. Therefore, this structure allows the dresser to still be used in some relatively small polishing equipment and to successfully complete the maintenance of the polishing pad.

[0023] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and do not limit this application. Attached Figure Description

[0024] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0025] Figure 1 This invention provides a schematic diagram of the structure of a telescopic mechanism in its extended state according to an embodiment of this application.

[0026] Figure 2 A schematic diagram of the retracted state of a telescopic mechanism in an embodiment of this application is shown;

[0027] Figure 3 A side view of a telescopic mechanism in the retracted state according to an embodiment of this application is shown.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1. Top layer component; 11. Trimming head; 2. Bottom layer component; 21. Base; 3. Intermediate layer component; 31. Primary base plate; 32. Secondary base plate; 4. First transmission assembly; 41. First rack; 42. First gear; 5. Second transmission assembly; 51. Second rack; 52. Second gear; 6. Synchronization assembly; 61. First synchronous pulley; 62. Second synchronous pulley; 63. Synchronous belt; 7. Lifting device; 8. Motor; 9. Reducer. Detailed Implementation

[0030] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this application will be thorough and complete, and will fully convey the concept of the exemplary embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and therefore their detailed descriptions will be omitted. Furthermore, the drawings are merely illustrative of this application and are not necessarily drawn to scale.

[0031] Although relative terms such as "upper" and "lower" are used in this specification to describe the relative relationship of one component of an icon to another, these terms are used only for convenience, such as according to the orientation of the examples in the accompanying drawings. It is understood that if the device of the icon is flipped so that it is upside down, the component described as "upper" will become the component described as "lower." When a structure is "upper" of another structure, it may mean that the structure is integrally formed on the other structure, or that the structure is "directly" mounted on the other structure, or that the structure is "indirectly" mounted on the other structure through another structure.

[0032] The terms “a,” “one,” “the,” and “at least one” are used to indicate the existence of one or more elements / components / etc.; the terms “including” and “having” are used to indicate an open-ended inclusion and to mean that there may be other elements / components / etc. in addition to the listed elements / components / etc.; the terms “first” and “second” are used only as markers and are not a limitation on the number of objects.

[0033] like Figure 1 and Figure 2 As shown in the embodiment of this application, a telescopic mechanism is provided, which includes at least a top layer component 1, a bottom layer component 2 located below the top layer component 1, and a transmission device disposed between adjacent layer components. The top layer component 1 is used to install a trimming head 11, and the transmission device is configured to enable adjacent layer components to telescopically move relative to each other in the horizontal direction.

[0034] In this embodiment, a transmission device enables relative sliding between the top layer component 1 and the bottom layer component 2 in the horizontal direction. This structure allows the dresser to adapt to different working environments and needs. Specifically, when the dresser is in operation, the transmission device controls the relative sliding between adjacent layer components, causing the top layer component 1 to slide smoothly out from above the bottom layer component 2, precisely moving the dressing head 11 to the position of the polishing pad for maintenance. When the dresser is not in use, the transmission device retracts between adjacent layer components, causing the top layer component 1 to return to its original position above the bottom layer component 2, effectively reducing the space occupied by the dresser in the polishing equipment. This ensures that the dresser can operate freely even in confined spaces and successfully complete the maintenance of the polishing pad.

[0035] In summary, by combining the top component 1, the bottom component 2, and the transmission device, the trimmer in this embodiment can not only adapt to various working scenarios, but also effectively save space when not in use, demonstrating the flexibility and practicality of the trimmer.

[0036] In this embodiment, at least one intermediate layer component 3 is provided between the top layer component 1 and the bottom layer component 2. There is no special limitation on the specific number of intermediate layer components 3. Therefore, the intermediate layer component 3 can have only one component or multiple components.

[0037] When only one intermediate layer component 3 is used, its upper surface forms a sliding connection with the top layer component 1. A transmission mechanism between them ensures that the top layer component 1 can extend or retract horizontally from the upper surface of the intermediate layer component 3. Similarly, the lower surface of the intermediate layer component 3 forms a sliding connection with the bottom layer component 2. The transmission mechanism between them also ensures that the intermediate layer component 3 can extend or retract horizontally from the upper surface of the bottom layer component 2. This design not only demonstrates the flexibility and adaptability of the equipment but also provides customized solutions for different working scenarios.

[0038] When multiple intermediate layer components 3 are configured, they are arranged in a stepped, multi-level distribution from top to bottom. At the top of the structure, the top layer component 1 and the uppermost intermediate layer component 3 are connected by a transmission mechanism to extend or retract the top layer component 1; at the bottom of the structure, the bottom layer component 2 and the lowermost intermediate layer component 3 are connected by a transmission mechanism to extend or retract the lowermost intermediate layer component 3. Furthermore, each intermediate layer component 3 is horizontally slidably connected, and the transmission mechanism between adjacent intermediate layer components 3 ensures that each intermediate layer component 3 can extend or retract with its adjacent components.

[0039] It is understandable that by increasing the number of intermediate layer components 3, the total distance the trimming head 11 extends from above the bottom layer component 2 can be effectively extended. Therefore, users can flexibly adjust the number of intermediate layer components 3 according to actual needs to achieve the ideal extension length of the trimming head 11, thereby meeting the usage needs in different scenarios.

[0040] In the embodiments of this application, no special restrictions are placed on the specific structure of the transmission device. It can be understood that any structure that enables relative sliding between adjacent layer components in the horizontal direction is acceptable. The following are some exemplary descriptions of the transmission components:

[0041] Example 1:

[0042] The transmission component is configured as a rack and pinion structure, specifically comprising a gear and a rack. The gear is rotatably connected to one of the adjacent layer components, and its axis of rotation is perpendicular to the extension / retraction direction of the adjacent layer component in the same horizontal plane. The rack is fixedly connected to another component along the extension / retraction direction of the adjacent layer component, and the gear and rack mesh. When the extension / retraction movement of the adjacent layer components is required, simply rotating the gear drives the rack to move, causing the adjacent layer components to move relative to each other in the horizontal direction, thereby extending or retracting the components.

[0043] Example 2:

[0044] The transmission component is configured as a worm gear structure, specifically comprising a worm wheel and a worm. The worm wheel is rotatably connected to one of the adjacent layer components, its axis of rotation perpendicular to the extension / retraction direction of the adjacent layer component in the same horizontal plane. The worm is fixedly connected to another component along the extension / retraction direction of the adjacent layer component, and the worm wheel meshes with the worm. When the extension / retraction movement of the adjacent layer components is required, simply rotating the worm wheel causes it to roll along the length of the worm, causing the adjacent layer components to move relative to each other in the horizontal direction, thereby extending or retracting the components.

[0045] Example 3:

[0046] The transmission component is configured as a lead screw structure. The lead screw is rotatably connected to one of the adjacent layer components along the extension and retraction direction, and threadedly connected to the other component in the adjacent layer. When the extension and retraction of the adjacent layer components is required, simply rotating the lead screw will cause the adjacent layer components to move relative to each other in the horizontal direction, thereby extending or retracting the components.

[0047] Example 4:

[0048] The transmission component is configured as a cylinder / hydraulic cylinder piston rod structure. The piston rod can extend and retract in the horizontal direction, and one of the components in an adjacent layer is fixedly connected to the piston rod. When it is necessary to achieve the extension and retraction of the adjacent layer components, simply supplying air / hydraulic pressure to the cylinder / hydraulic cylinder piston rod will cause the piston rod to extend and retract, causing the adjacent layer components to move relative to each other in the horizontal direction, thereby achieving the extension or retraction of the components.

[0049] In this embodiment, the telescopic mechanism further includes a drive device for driving the transmission device. No special restrictions are placed on the specific structure and number of the drive device in this application.

[0050] In the specific embodiment of this application, the top layer component 1 and its adjacent intermediate layer component 3 adopt the scheme of Example 4 described above, while the driving device adopts a pressure transmission device for providing air / hydraulic pressure to the cylinder / hydraulic cylinder piston rod structure.

[0051] Specifically, in this embodiment, the top layer component 1 is a top plate, and there are two intermediate layer components 3, which are arranged from top to bottom as a primary base plate 31 and a secondary base plate 32. Therefore, it can be understood that the intermediate layer component 3 adjacent to the top plate is the primary base plate 31. The piston rod of the pneumatic / hydraulic cylinder is fixedly connected to the top plate, and the pressure transmission device is configured as a cylinder for outputting pneumatic / hydraulic pressure and is fixedly connected to the primary base plate 31. When the pressure transmission device adjusts the pneumatic / hydraulic pressure inside its cylinder, it can drive the piston rod to extend or retract from the inside of the cylinder, thereby realizing the telescopic movement of the top plate above the primary base plate 31.

[0052] Furthermore, the intermediate layer component 3 adjacent to the bottom component 2 is a secondary base plate 32. In this embodiment, the bottom component 2 is set as a tertiary base plate. A base 21 is provided below the tertiary base plate, and the upper surface of the tertiary base plate and the base 21 are fixedly connected to ensure the stability and reliability of the structure.

[0053] The transmission device between the primary base plate 31 and the secondary base plate 32 is configured as a first transmission assembly 4, and the transmission device between the secondary base plate 32 and the tertiary base plate is configured as a second transmission assembly 5. A synchronization assembly 6 is provided between the first transmission assembly 4 and the second transmission assembly 5 to enable the primary base plate 31 and the secondary base plate 32 to move synchronously. The synchronization assembly 6 ensures that the extension or retraction of the primary base plate 31 and the secondary base plate 32 does not require individual operation, which not only simplifies the operation process but also greatly improves the efficiency and convenience of operation.

[0054] In this embodiment, the first transmission component 4 includes a first rack 41 and a first gear 42. Through their cooperation, the first-stage base plate 31 can move horizontally. Specifically, the first rack 41 is firmly connected to the first-stage base plate 31 along its travel trajectory, and the first rack 41 is located above the first gear 42. The first gear 42 is rotatably connected to the second-stage base plate 32, and its position is relatively fixed relative to the second-stage base plate 32. Since the position of the first gear 42 is relatively fixed relative to the second-stage base plate 32, when the first gear 42 rotates, it can drive the first rack 41 to slide horizontally, thereby causing the first-stage base plate 31 to move smoothly along the horizontal axis.

[0055] Similarly, the second transmission assembly 5 includes a second rack 51 and a second gear 52. The second rack 51 is fixedly connected to the third-stage base plate along the travel trajectory of the second-stage base plate 32. The second rack 51 is located below the second gear 52, and the second gear 52 is rotatably connected to the second-stage base plate 32. The third-stage base plate is stably supported by the base 21, ensuring its fixed position. Therefore, when the second gear 52 rotates and meshes with the second rack 51, the position of the second rack 51 remains stable. In this way, when the second gear 52 rotates, it can roll on the first rack 41, driving the second-stage base plate 32 to move synchronously.

[0056] like Figure 1 , Figure 2 and Figure 3 As shown in this embodiment, the driving device between the intermediate layer component 3 and the bottom layer component 2 includes a motor 8, which drives either the first gear 42 or the second gear 52 to rotate. For specific illustration, taking the rotation of the second gear 52 as an example, the driving device, in addition to the motor 8, also includes a reducer 9, which is positioned between the motor 8 and the second gear 52. Both the motor 8 and the reducer 9 are fixedly connected to the secondary base plate 32, ensuring the stability and reliability of the entire driving system. The output shaft of the motor 8 serves as the direct source of power, transmitting rotational power to the reducer 9. The reducer 9 effectively reduces the high-speed rotational power output by the motor 8, ensuring smooth power delivery, and then transmits the power to the second gear 52, thereby driving the second gear 52 to rotate.

[0057] In this embodiment of the application, the synchronization component 6 includes:

[0058] The first synchronous pulley 61 is fixedly connected to one side of the first gear 42, and the rotation axis of the first synchronous pulley 61 coincides with the rotation axis of the first gear 42.

[0059] The second synchronous pulley 62 is fixedly connected to one side of the second gear 52, and the rotation axis of the second synchronous pulley 62 coincides with the rotation axis of the second gear 52;

[0060] A timing belt 63 is wrapped between the first timing belt 63 and the second timing belt 63 to drive the first timing pulley 61 and the second timing pulley 62 to rotate synchronously.

[0061] In this embodiment, either the first gear 42 or the second gear 52 can serve as a drive wheel. Taking the second gear 52 as an example, when the second gear 52 rotates, it drives the second synchronous pulley 62 to rotate accordingly. When the second synchronous pulley 62 rotates, it drives the synchronous belt 63 to rotate around the first synchronous pulley 61 and the second synchronous pulley 62. The synchronous belt 63 then drives the first synchronous pulley 61 and the second synchronous pulley 62 to rotate synchronously, thus achieving power transmission. The first synchronous pulley 61 then drives the first gear 42 to rotate, thereby causing the first gear 42 and the second gear 52 to rotate synchronously. Through this structure, while the secondary base plate 32 extends from above the tertiary base plate, the primary base plate 31 can also extend synchronously from above the secondary base plate 32 without requiring individual adjustments, thus providing convenience for the user's adjustment work.

[0062] In this embodiment of the application, a lifting device 7 is also provided between the top component 1 and the trimming head 11. Its function is to adjust the height of the trimming head 11 so that the trimming head 11 can be used to perform maintenance work at different heights.

[0063] In this embodiment, the lifting device 7 is configured as a cylinder, with the cylinder body fixedly mounted on the lower surface of the top layer component 1 and the piston rod fixedly mounted on the top of the trimming head 11. The height of the trimming head 11 is adjusted by adjusting the air pressure within the cylinder to extend or retract the piston rod. Of course, the structure of the lifting device 7 is not limited to this; for example, it could also be a hydraulic cylinder. It is understood that any structure capable of adjusting the height of the trimming head is acceptable.

[0064] In this application embodiment, a trimmer is also provided, including any of the telescopic mechanisms described above.

[0065] Other embodiments of this application will readily conceive of by those skilled in the art upon consideration of the specification and practice of the embodiments thereof. This application is intended to cover any variations, uses, or adaptations of this application that follow the general principles of this application and include common knowledge or customary techniques in the art not claimed in this application. The specification and embodiments are to be considered exemplary only, and the true scope and spirit of this application are indicated by the appended claims.

Claims

1. A telescopic mechanism, characterized in that, It includes at least a top layer component (1), a bottom layer component (2) located below the top layer component (1), and a transmission device disposed between adjacent layer components. The top layer component (1) is used to install a trimming head (11), and the transmission device is configured to enable adjacent layer components to move relative to each other in the horizontal direction.

2. The telescopic mechanism according to claim 1, characterized in that, It also includes at least one intermediate layer member (3) located between the top layer member (1) and the bottom layer member (2).

3. The telescopic mechanism according to claim 1, characterized in that, The transmission device can be any one of the following: a gear and rack structure, a worm gear structure, a lead screw structure, or a cylinder / hydraulic cylinder piston rod structure.

4. The telescopic mechanism according to claim 2, characterized in that, It also includes a drive unit for driving the transmission device.

5. The telescopic mechanism according to claim 4, characterized in that, The transmission device between the top layer component (1) and the adjacent intermediate layer component (3) is a cylinder / hydraulic cylinder piston rod structure, and the driving device includes a pressure supply device for providing air / hydraulic pressure to the cylinder / hydraulic cylinder piston rod structure.

6. The telescopic mechanism according to claim 4, characterized in that, The intermediate layer component (3) is configured as two, and the two intermediate layer components (3) are respectively configured as a primary base plate (31) and a secondary base plate (32) located below the primary base plate (31); the transmission device between the primary base plate (31) and the secondary base plate (32) is configured as a first transmission component (4), and the transmission device between the secondary base plate (32) and the bottom component (2) is configured as a second transmission component (5). A synchronization component (6) for synchronizing the movement of the primary base plate (31) and the secondary base plate (32) is provided between the first transmission component (4) and the second transmission component (5).

7. The telescopic mechanism according to claim 6, characterized in that, Both the first transmission assembly (4) and the second transmission assembly (5) are configured as a gear and rack structure. The first transmission assembly (4) includes a first rack (41) and a first gear (42). The first rack (41) is arranged along the moving direction of the first-stage base plate (31) and is fixedly connected to the first-stage base plate (31). The first gear (42) is rotatably connected to the second-stage base plate (32). The first rack (41) is located above the first gear (42) and meshes with the first gear (42). The second transmission assembly (5) includes a second... A rack (51) and a second gear (52) are provided. The second rack (51) is arranged along the moving direction of the secondary base plate (32) and fixedly connected to the bottom component (2). The second gear (52) is rotatably connected to the secondary base plate (32). The second rack (51) is located below the second gear (52) and meshes with the second gear (52). The synchronization component (6) is arranged between the first gear (42) and the second gear (52) to drive the first gear (42) and the second gear (52) to rotate synchronously.

8. The telescopic mechanism according to claim 7, characterized in that, The driving device between the intermediate layer component (3) and the bottom layer component (2) includes a motor (8), which is used to drive either the first gear (42) or the second gear (52) to rotate.

9. The telescopic mechanism according to claim 7 or 8, characterized in that, The synchronization component (6) includes: The first synchronous pulley (61) is fixedly connected to the first gear (42), and the rotation axis of the first synchronous pulley (61) coincides with the rotation axis of the first gear (42); The second synchronous pulley (62) is fixedly connected to the second gear (52), and the rotation axis of the second synchronous pulley (62) coincides with the rotation axis of the second gear (52); A timing belt (63) is wrapped around the first timing pulley (61) and the second timing pulley (62) to drive the first timing pulley (61) and the second timing pulley (62) to rotate synchronously.

10. The telescopic mechanism according to claim 2, characterized in that, A lifting device (7) for adjusting the height of the trimming head (11) is provided between the top component (1) and the trimming head (11).

11. A trimmer, characterized in that: Includes the telescopic mechanism described in any one of claims 1-10.

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