Transportation mechanism and deposition device

Abstract

The utility model discloses a transportation mechanism and a deposition device, and relates to the technical field of transportation. The conveying mechanism comprises a base, a translation assembly, a lifting assembly, a supporting plate, a bearing plate and a centering assembly. The translation assembly is installed on the base and connected with the lifting assembly, the lifting assembly is connected with the supporting plate, the centering assembly is installed on the supporting plate and connected with the bearing plate, the bearing plate is used for bearing a material carrier, and the centering assembly is used for adjusting the centering degree of the bearing plate. Compared with the prior art, due to the fact that the centering assembly which is installed on the supporting plate and connected with the bearing plate is adopted in the conveying mechanism, the centering precision of the material carrier and the deposition cavity can be effectively improved, the sealing performance of the deposition cavity in the deposition process is guaranteed, the deposition effect is improved, and the product quality is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of transportation technology, and more specifically, to a transportation mechanism and a sedimentation device. Background Technology

[0002] Currently, in the material deposition process, a forklift is typically used to move the material carrier horizontally to align it with the deposition chamber. The carrier is then inserted into the chamber to facilitate material deposition. However, current forklifts have relatively low movement precision, resulting in lower alignment accuracy between the carrier and the chamber. This creates gaps between the carrier and the chamber when material is fed in, directly affecting the chamber's sealing and thus the deposition effect, leading to poor product quality.

[0003] In view of this, designing and manufacturing a transport mechanism and deposition device with high centering accuracy is particularly important, especially in semiconductor production. Utility Model Content

[0004] The purpose of this invention is to provide a transport mechanism that can effectively improve the alignment accuracy between the material carrier and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and guarantee product quality.

[0005] Another objective of this invention is to provide a deposition device that can effectively improve the alignment accuracy between the material carrier and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and guarantee product quality.

[0006] This utility model is achieved by the following technical solution.

[0007] A transport mechanism includes a base, a translation component, a lifting component, a pallet, a support plate, and a centering component. The translation component is mounted on the base and connected to the lifting component. The lifting component is connected to the pallet. The centering component is mounted on the pallet and connected to the support plate. The support plate is used to carry material carriers, and the centering component is used to adjust the centering of the support plate.

[0008] Optionally, the centering component includes a first centering unit and a second centering unit. Both the first centering unit and the second centering unit are connected to the carrier plate. The first centering unit is used to adjust the position of the carrier plate in a first direction, and the second centering unit is used to adjust the position of the carrier plate in a second direction. The first direction and the second direction are set at a preset angle.

[0009] Optionally, the first centering unit includes a first fixing block, a second fixing block, a first adjusting member, and a second adjusting member. The first fixing block and the second fixing block are disposed opposite to each other on both sides of the support plate in a first direction and are both connected to the support plate. The first adjusting member is movably connected to the first fixing block, and the second adjusting member is movably connected to the second fixing block. The support plate is clamped between the first adjusting member and the second adjusting member.

[0010] Optionally, the transport mechanism also includes a leveling assembly mounted on the pallet and connected to the support plate, the leveling assembly being used to adjust the levelness of the support plate.

[0011] Optionally, the leveling assembly includes a third adjusting member, which is movably connected to the support plate and abuts against the tray.

[0012] Optionally, the transport mechanism also includes a fastening assembly comprising fasteners that are detachably connected to both the carrier plate and the pallet to secure the relative positions of the carrier plate and the pallet after alignment.

[0013] Optionally, the transport mechanism also includes a buffer assembly, which includes a positioning seat, an elastic element, and a support block. The support block includes a support portion and a connecting portion connected to each other. The cross-sectional area of ​​the support portion is larger than that of the connecting portion. The positioning seat is connected to the bearing plate. The elastic element is sleeved outside the connecting portion. One end of the elastic element abuts against the support portion, and the other end abuts against the positioning seat. The support portion is used to support the material carrier.

[0014] Optionally, the positioning seat includes a seat body, a guide sleeve, and a stop block. The seat body is connected to the bearing plate, the guide sleeve is installed in the seat body and slides with the connecting part, and the stop block is installed in the seat body and is used to stop the connecting part.

[0015] Optionally, the translation assembly includes a first drive unit and a translation frame, the first drive unit being mounted on a base and connected to the translation frame, and the lifting assembly being mounted on the translation frame.

[0016] Optionally, the lifting assembly includes a second drive unit and a lifting frame, the second drive unit being connected to the lifting frame, and the pallet being connected to the lifting frame.

[0017] A sedimentation apparatus includes the aforementioned transport mechanism, which includes a base, a translation component, a lifting component, a pallet, a support plate, and a centering component. The translation component is mounted on the base and connected to the lifting component, the lifting component is connected to the pallet, and the centering component is mounted on the pallet and connected to the support plate. The support plate is used to carry material carriers, and the centering component is used to adjust the centering of the support plate.

[0018] The transport mechanism and sedimentation device provided by this utility model have the following beneficial effects:

[0019] The transport mechanism provided by this utility model includes a translation component mounted on a base and connected to a lifting component, which in turn is connected to a pallet. A centering component is mounted on the pallet and connected to a support plate. The support plate carries the material carrier, and the centering component adjusts the centering of the support plate. Compared with existing technologies, the transport mechanism provided by this utility model, due to the use of a centering component mounted on the pallet and connected to the support plate, effectively improves the centering accuracy between the material carrier and the deposition chamber, ensures the sealing of the deposition chamber during deposition, improves the deposition effect, and guarantees product quality.

[0020] The deposition apparatus provided by this utility model includes a transport mechanism, which can effectively improve the alignment accuracy between the material carrier and the deposition chamber, ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 A schematic diagram of the structure of the material-carrying vehicle of the transportation mechanism provided in this embodiment of the utility model;

[0023] Figure 2 A structural schematic diagram of the transportation mechanism provided in an embodiment of this utility model;

[0024] Figure 3 A structural schematic diagram of the transportation mechanism provided in another perspective of this utility model embodiment;

[0025] Figure 4 A schematic diagram of the connection between the pallet and the bearing plate in the transportation mechanism provided in this embodiment of the utility model;

[0026] Figure 5 An exploded view of the connection between the pallet and the support plate in the transportation mechanism provided in this embodiment of the utility model;

[0027] Figure 6 A cross-sectional view of the buffer assembly in the transportation mechanism provided in an embodiment of this utility model.

[0028] Icons: 100-Transportation mechanism; 110-Base; 120-Translation assembly; 121-First drive component; 122-Translation frame; 123-Drive motor; 124-Lead screw; 125-Nut seat; 130-Lifting assembly; 131-Second drive component; 132-Lifting frame; 140-Panel; 141-Second through hole; 150-Bearing plate; 151-Third threaded hole; 152-First through hole; 160-Centering assembly; 161-First centering unit; 162-Second centering unit; 163-First fixed... 164-Second fixing block; 165-First adjusting component; 166-Second adjusting component; 167-First threaded hole; 168-Second threaded hole; 170-Leveling component; 171-Third adjusting component; 180-Fastening component; 181-Fastening screw; 182-Fastening nut; 190-Buffer component; 191-Positioning seat; 192-Elastic component; 193-Supporting block; 194-Supporting part; 195-Connecting part; 196-Seat body; 197-Guide sleeve; 198-Stop block; 200-Material carrier. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0030] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0031] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0032] In the description of this utility model, it should be noted that the terms "inner," "outer," "upper," "lower," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0033] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "connected," "installed," and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0034] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the features in the following embodiments can be combined with each other.

[0035] Please refer to Figure 1 This utility model provides a deposition apparatus (not shown) for depositing materials. It effectively improves the alignment accuracy between the material carrier 200 and the deposition chamber, ensures the sealing of the deposition chamber during the deposition process, improves the deposition effect, and guarantees product quality.

[0036] The deposition apparatus includes a transport mechanism 100, a material carrier 200, and a deposition chamber (not shown). The material carrier 200 is used to hold materials and has a multi-layered partition structure (not shown), each partition structure carrying at least one material. The transport mechanism 100 transports the materials via the material carrier 200 to deliver them into the deposition chamber, where the materials are deposited. The transport mechanism 100 also removes the deposited materials from the deposition chamber via the material carrier 200.

[0037] It should be noted that the transport mechanism 100 is located below the sedimentation chamber, and the bottom of the sedimentation chamber is provided with a feed port (not shown in the figure), which is located in the middle of the sedimentation chamber. During the process of the transport mechanism 100 sending material into the sedimentation chamber, the material is first loaded onto the material carrier 200; then the material carrier 200 is placed on the transport mechanism 100; then the transport mechanism 100 drives the material carrier 200 to extend into the feed port until the bottom plate of the material carrier 200 abuts against the bottom of the sedimentation chamber.

[0038] Please refer to Figures 2 to 6 The transport mechanism 100 includes a base 110, a translation component 120, a lifting component 130, a pallet 140, a support plate 150, and a centering component 160. The translation component 120 is mounted on the base 110 and connected to the lifting component 130, and is used to move the lifting component 130 horizontally. The lifting component 130 is connected to the pallet 140 and is used to move the pallet 140 vertically upwards or downwards. The centering component 160 is mounted on the pallet 140 and connected to the support plate 150. The support plate 150 carries the material carrier 200, and the centering component 160 adjusts the centering of the support plate 150 to ensure that the material carrier 200 is aligned with the deposition chamber, improving the alignment accuracy between the material carrier 200 and the deposition chamber, thereby ensuring the sealing of the deposition chamber during deposition, improving the deposition effect, and guaranteeing product quality.

[0039] The centering assembly 160 includes a first centering unit 161 and a second centering unit 162. Both the first centering unit 161 and the second centering unit 162 are mounted on the support plate 140 and connected to the carrier plate 150. The first centering unit 161 is used to adjust the position of the carrier plate 150 in a first direction, and the second centering unit 162 is used to adjust the position of the carrier plate 150 in a second direction. The first and second directions are set at a preset angle. The first centering unit 161 and the second centering unit 162 work together to adjust the position of the material carrier 200 via the carrier plate 150, improving the centering accuracy between the material carrier 200 and the deposition chamber. This ensures that the material carrier 200 can completely cover the material inlet, thereby ensuring the sealing of the deposition chamber during the deposition process, improving the deposition effect, and guaranteeing product quality.

[0040] Furthermore, the preset angle is 90 degrees, meaning the first direction is perpendicular to the second direction, and the first direction, the second direction, and the translation direction of the translation component 120 are all on the same plane, which is a horizontal plane. Specifically, because the translation component 120 drives the lifting component 130 with low precision, the lifting component 130 is prone to not moving into position, resulting in low alignment accuracy between the material carrier 200 and the sedimentation chamber. Therefore, this invention adjusts the bearing plate 150 through the first alignment unit 161 and the second alignment unit 162, thereby adjusting the position of the material carrier 200 on the horizontal plane, improving the alignment accuracy between the material carrier 200 and the sedimentation chamber, and ensuring the sedimentation effect.

[0041] In this embodiment, the translation direction of the translation component 120 is the first direction. The first centering unit 161 is used to adjust the position of the support plate 150 in the translation direction of the translation component 120, and the second centering unit 162 is used to adjust the position of the support plate 150 in the direction perpendicular to the translation direction of the translation component 120, so as to ensure that the material carrier 200 placed on the support plate 150 can be aligned with the feed port.

[0042] The first centering unit 161 includes a first fixing block 163, a second fixing block 164, a first adjusting member 165, and a second adjusting member 166. The first fixing block 163 and the second fixing block 164 are disposed opposite each other on both sides of the support plate 150 in a first direction, and both are connected to the support plate 140, which is used to fix the positions of the first fixing block 163 and the second fixing block 164. The first adjusting member 165 is movably connected to the first fixing block 163, and the second adjusting member 166 is movably connected to the second fixing block 164. The support plate 150 is clamped between the first adjusting member 165 and the second adjusting member 166. By adjusting the position of the first adjusting member 165 relative to the first fixing block 163 in the first direction, and by adjusting the position of the second adjusting member 166 relative to the second fixing block 164 in the first direction, the position of the support plate 150 in the first direction can be reliably adjusted, thereby ensuring the centering accuracy of the material carrier 200.

[0043] In this embodiment, both the first adjusting member 165 and the second adjusting member 166 are screws. The first fixing block 163 has a first threaded hole 167, and the second fixing block 164 has a second threaded hole 168. The first adjusting member 165 mates with the first threaded hole 167, and the second adjusting member 166 mates with the second threaded hole 168. Specifically, the axial directions of both the first adjusting member 165 and the second adjusting member 166 are in the first direction. By manually or mechanically turning the first adjusting member 165 and the second adjusting member 166, the bearing plate 150 is pushed to move in the first direction to ensure that the material carrier 200 placed on the bearing plate 150 is aligned with the feed port in the first direction.

[0044] Understandably, when the first adjusting member 165 is tightened relative to the first threaded hole 167, the first adjusting member 165 moves axially relative to the first fixed block 163 and gradually approaches the support plate 150 to push the support plate 150 to move in the first direction. During this process, the second adjusting member 166 needs to be loosened appropriately to ensure that the support plate 150 is always clamped between the first adjusting member 165 and the second adjusting member 166. Similarly, when the second adjusting member 166 is tightened relative to the second threaded hole 168, the second adjusting member 166 moves axially relative to the second fixed block 164 and gradually approaches the support plate 150 to push the support plate 150 to move in the first direction. During this process, the first adjusting member 165 needs to be loosened appropriately to ensure that the support plate 150 is always clamped between the first adjusting member 165 and the second adjusting member 166.

[0045] In this embodiment, there are two of each of the following: the first fixing block 163, the second fixing block 164, the first adjusting member 165, and the second adjusting member 166. The two first fixing blocks 163 are spaced apart, and the two second fixing blocks 164 are spaced apart. Each first adjusting member 165 cooperates with one first fixing block 163, and each second adjusting member 166 cooperates with one second fixing block 164. However, this is not the only embodiment. In other embodiments, the number of each of the following can be one or three. There is no specific limitation on the number of each of the following: the first fixing block 163, the second fixing block 164, the first adjusting member 165, and the second adjusting member 166.

[0046] In this embodiment, the specific structure of the second centering unit 162 is the same as that of the first centering unit 161, except that the second centering unit 162 is used to push the carrier plate 150 to move in the second direction, which will not be described in detail here.

[0047] Preferably, the transport mechanism 100 further includes a leveling component 170. The leveling component 170 is mounted on the pallet 140 and connected to the support plate 150. The leveling component 170 is used to adjust the level of the support plate 150, thereby adjusting the level of the material carrier 200 placed on the support plate 150. This ensures that the bottom plate of the material carrier 200 can fit tightly with the deposition chamber, avoiding gaps, further ensuring the sealing of the deposition chamber during the deposition process, improving the deposition effect, and ensuring product quality.

[0048] The leveling assembly 170 includes a third adjusting member 171. The third adjusting member 171 is movably connected to the support plate 150 and abuts against the pallet 140. By adjusting the position of the third adjusting member 171 relative to the support plate 150 in the vertical direction, the position of the support plate 150 in the vertical direction can be reliably adjusted, thereby ensuring the levelness of the material carrier 200.

[0049] In this embodiment, the third adjusting member 171 is a screw, and there are multiple third adjusting members 171. The support plate 150 has multiple third threaded holes 151, which are spaced apart. Each third adjusting member 171 mates with one third threaded hole 151 and abuts against the support plate 140. Specifically, the axis of the third adjusting member 171 is vertical. By manually or mechanically turning the third adjusting member 171, the corresponding position of the support plate 150 is moved in the vertical direction to ensure the levelness of the support plate 150.

[0050] Understandably, when the third adjusting member 171 is tightened relative to the third threaded hole 151, the third adjusting member 171 moves axially relative to the support plate 150. During this process, since the end of the third adjusting member 171 always abuts against the support plate 140, the position of the support plate 150 corresponding to the third adjusting member 171 will be raised upward and away from the support plate 140. When the third adjusting member 171 is loosened relative to the third threaded hole 151, the third adjusting member 171 moves axially relative to the support plate 150. During this process, since the end of the third adjusting member 171 always abuts against the support plate 140, the position of the support plate 150 corresponding to the third adjusting member 171 will sink downward and move closer to the support plate 140.

[0051] In this embodiment, the support plate 150 is a hollow rectangular plate. There are eight third adjusting members 171 and eight third threaded holes 151. The eight third threaded holes 151 are divided into four groups, with two third threaded holes 151 in each group spaced apart and located on one side of the support plate 150. Each third adjusting member 171 mates with one third threaded hole 151. However, this is not the only embodiment. In other embodiments, the number of third adjusting members 171 and third threaded holes 151 can be four or twelve; the number of third adjusting members 171 and third threaded holes 151 is not specifically limited.

[0052] Preferably, the transport mechanism 100 further includes a fastening assembly 180. The fastening assembly 180 includes fasteners that are detachably connected to both the carrier plate 150 and the pallet 140 to fix their relative positions after alignment. Further, the fasteners include fastening screws 181 and fastening nuts 182. The carrier plate 150 has a first through hole 152, and the pallet 140 has a second through hole 141. The fastening screw 181 passes through both the first and second through holes 152 and cooperates with the fastening nut 182 to fix the relative positions of the carrier plate 150 and the pallet 140. Specifically, after the alignment accuracy and levelness of the carrier plate 150 are adjusted, it is necessary to fix its position to prevent misalignment during subsequent transport. Therefore, the carrier plate 150 is stably fixed to the pallet 140 by the cooperation of the fastening screws 181 and the fastening nuts 182 to ensure positioning effectiveness.

[0053] In this embodiment, there are eight fastening screws 181 and eight fastening nuts 182. The eight fastening nuts 182 are divided into four groups, with two fastening nuts 182 in each group spaced apart and all located on one side of the support plate 150. Each fastening screw 181 mates with one fastening nut 182. However, this is not the only embodiment. In other embodiments, the number of fastening screws 181 and four fastening nuts 182 can be used, or the number of fastening nuts 182 can be used, and there is no specific limitation on the number of fastening screws 181 and twelve fastening nuts 182.

[0054] Preferably, the transport mechanism 100 further includes a buffer assembly 190. The buffer assembly 190 is mounted on the support plate 150 and abuts against the material carrier 200. The buffer assembly 190 is used to buffer the material carrier 200 to ensure that the bottom plate of the material carrier 200 can fit tightly with the deposition chamber, avoid gaps, further ensure the sealing of the deposition chamber during the deposition process, improve the deposition effect, and ensure product quality.

[0055] The buffer assembly 190 includes a positioning seat 191, an elastic element 192, and a supporting block 193. The supporting block 193 includes a supporting portion 194 and a connecting portion 195 connected to each other, with the cross-sectional area of ​​the supporting portion 194 being larger than that of the connecting portion 195. The positioning seat 191 is connected to the support plate 150, and the elastic element 192 is sleeved on the connecting portion 195. One end of the elastic element 192 abuts against the supporting portion 194, and the other end abuts against the positioning seat 191. The supporting portion 194 is used to support the material carrier 200. Specifically, the elastic element 192 is always in a compressed state to apply an upward elastic force to the supporting part 194, which can overcome the weight of the material carrier 200; when the material carrier 200 moves upward to abut against the sedimentation chamber, the sedimentation chamber applies pressure to the supporting part 194 through the material carrier 200, so that the elastic element 192 is deformed by pressure, thereby ensuring that the bottom plate of the material carrier 200 is in close contact with the sedimentation chamber.

[0056] The positioning seat 191 includes a seat body 196, a guide sleeve 197, and a stop block 198. The seat body 196 is connected to the support plate 150. The guide sleeve 197 is installed inside the seat body 196 and slides with the connecting part 195. The connecting part 195 can slide relative to the guide sleeve 197. The guide sleeve 197 can guide and limit the connecting part 195 to ensure the stability of the up-and-down sliding of the abutment block 193, prevent the abutment block 193 from tilting or deflecting, and ensure a buffering effect. Specifically, the stop block 198 is installed inside the seat body 196. The stop block 198 is used to stop the connecting part 195 to limit the downward sliding limit of the abutment block 193 and prevent the abutment block 193 from dislodging from the seat body 196.

[0057] In this embodiment, the elastic element 192 is a spring, and the number of buffer components 190 is four, with the four buffer components 190 respectively disposed at the four corners of the support plate 150. However, this is not the only embodiment; in other embodiments, the elastic element 192 can also be an elastic rubber sleeve, and the number of buffer components 190 can be six or eight. There are no specific limitations on the material of the elastic element 192 or the number of buffer components 190. Each elastic element 192 is configured with the same amount of compression to ensure that the height of each buffer component 190 is the same in the initial state.

[0058] The translation assembly 120 includes a first drive member 121 and a translation frame 122. The first drive member 121 is mounted on the base 110 and connected to the translation frame 122. The lifting assembly 130 is mounted on the translation frame 122. The first drive member 121 is used to drive the lifting assembly 130 to move along a first direction through the translation frame 122.

[0059] The lifting assembly 130 includes a second drive member 131 and a lifting frame 132. The second drive member 131 is connected to the lifting frame 132, and the support plate 140 is connected to the lifting frame 132. The second drive member 131 is used to drive the support plate 140 to rise or fall via the lifting frame 132. Specifically, the lifting direction of the lifting frame 132 is perpendicular to the plane containing the first and second directions, that is, the lifting direction of the lifting frame 132 is perpendicular to the horizontal plane, and the lifting direction of the lifting frame 132 is vertical.

[0060] Furthermore, the first driving member 121 is used to drive the bearing plate 150 to move horizontally via the translation frame 122, the second driving member 131, the lifting frame 132 and the pallet 140 in sequence. The second driving member 131 is used to drive the bearing plate 150 to move vertically via the lifting frame 132 and the pallet 140 in sequence. The first driving member 121 and the second driving member 131 work together to drive the material carrier 200 to move horizontally or vertically via the bearing plate 150, thereby realizing the material transportation function.

[0061] The first driving component 121 includes a drive motor 123, a lead screw 124, and a nut seat 125. The drive motor 123 is mounted on the base 110 and connected to the lead screw 124. The lead screw 124 engages with the nut seat 125, which is connected to the translation frame 122. The drive motor 123 drives the lead screw 124 to rotate around its axial direction, thereby causing the nut seat 125 to move along the axial direction of the lead screw 124, which in turn drives the translation frame 122 to move along the axial direction of the lead screw 124.

[0062] In this embodiment, the specific structure of the second driving member 131 is the same as that of the first driving member 121, and will not be described again here.

[0063] Furthermore, the method of using the transportation agency includes the following steps:

[0064] Step S110: Place the material carrier 200 containing the material onto the support plate 150.

[0065] Step S120: Use the translation component 120 to move the material carrier 200 to the bottom of the deposition chamber.

[0066] Step S130: Adjust the centering of the support plate 150 using the centering component 160 to ensure that the position of the material carrier 200 corresponds to the position of the material outlet of the deposition chamber.

[0067] Step S140: Adjust the level of the support plate 150 using the leveling component 170 installed on the pallet 140 to ensure that the material carrier 200 is in a horizontal state.

[0068] Step S150: Use the lifting assembly 130 to drive the material carrier 200 to rise, so that the material carrier 200 extends into the sedimentation chamber through the material inlet.

[0069] It should be noted that the order of steps S130 and S140 is not specifically limited. After the material carrier 200 is moved to the bottom of the sedimentation chamber by the translation component 120, the centering component 160 can be used to adjust the centering of the support plate 150 first, and then the leveling component 170 installed on the support plate 140 can be used to adjust the level of the support plate 150; alternatively, the leveling component 170 installed on the support plate 140 can be used to adjust the level of the support plate 150 first, and then the centering component 160 can be used to adjust the centering of the support plate 150.

[0070] In one optional embodiment, the vertical distance between the support plate 150 and the deposition chamber is small, which allows for convenient and accurate centering when the material carrier 200 is moved to the bottom of the deposition chamber. Therefore, the material carrier 200 is first moved to the bottom of the deposition chamber by the translation component 120, and then the material carrier 200 is centered and leveled. Then, the material carrier 200 is raised by the lifting component 130 so that the material carrier 200 extends into the deposition chamber through the feed port.

[0071] In another optional embodiment, the vertical distance between the support plate 150 and the deposition chamber is relatively large. In this case, step S111 is included between steps S110 and S120: the lifting assembly 130 is used to lift the material carrier 200 to a preset height. In this case, in order to ensure the centering accuracy, the lifting assembly 130 is first used to lift the material carrier 200 to the preset height (reducing the vertical distance between the support plate 150 and the deposition chamber), then the translation assembly 120 is used to translate the material carrier 200 to below the deposition chamber, then the material carrier 200 is centered and leveled, and then the lifting assembly 130 is used to lift the material carrier 200 so that the material carrier 200 extends into the deposition chamber through the feed port.

[0072] The transport mechanism 100 provided in this embodiment of the present invention includes a translation component 120 mounted on a base 110 and connected to a lifting component 130, which is connected to a pallet 140. A centering component 160 is mounted on the pallet 140 and connected to a support plate 150, which carries the material carrier 200. The centering component 160 is used to adjust the centering of the support plate 150. Compared with the prior art, the transport mechanism 100 provided by this invention, due to the use of the centering component 160 mounted on the pallet 140 and connected to the support plate 150, can effectively improve the centering accuracy between the material carrier 200 and the deposition chamber, ensuring the sealing of the deposition chamber during deposition, improving the deposition effect, and guaranteeing product quality. This results in high deposition efficiency, good deposition effect, and high yield of the deposition device.

[0073] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A transportation mechanism, characterized in that, The device includes a base, a translation component, a lifting component, a pallet, a support plate, and a centering component. The translation component is mounted on the base and connected to the lifting component. The lifting component is connected to the pallet. The centering component is mounted on the pallet and connected to the support plate. The support plate is used to support the material carrier, and the centering component is used to adjust the centering of the support plate.

2. The transportation mechanism according to claim 1, characterized in that, The centering component includes a first centering unit and a second centering unit, both of which are connected to the support plate. The first centering unit is used to adjust the position of the support plate in a first direction, and the second centering unit is used to adjust the position of the support plate in a second direction. The first direction and the second direction are set at a preset angle.

3. The transportation mechanism according to claim 2, characterized in that, The first centering unit includes a first fixing block, a second fixing block, a first adjusting member, and a second adjusting member. The first fixing block and the second fixing block are disposed opposite to each other on both sides of the support plate in the first direction and are both connected to the support plate. The first adjusting member is movably connected to the first fixing block, and the second adjusting member is movably connected to the second fixing block. The support plate is clamped between the first adjusting member and the second adjusting member.

4. The transportation mechanism according to claim 1, characterized in that, The transport mechanism also includes a leveling component, which is mounted on the pallet and connected to the support plate. The leveling component is used to adjust the levelness of the support plate.

5. The transportation mechanism according to claim 4, characterized in that, The leveling assembly includes a plurality of third adjusting members spaced apart. The third adjusting members are movably connected to the support plate and abut against the tray.

6. The transportation mechanism according to claim 1, characterized in that, The transport mechanism further includes a fastening assembly comprising fasteners that are detachably connected to both the carrier plate and the pallet to secure the relative positions of the carrier plate and the pallet after alignment.

7. The transportation mechanism according to claim 1, characterized in that, The transport mechanism further includes a buffer assembly, which includes a positioning seat, an elastic element, and a supporting block. The supporting block includes a supporting portion and a connecting portion connected to each other. The cross-sectional area of ​​the supporting portion is larger than that of the connecting portion. The positioning seat is connected to the bearing plate. The elastic element is sleeved outside the connecting portion. One end of the elastic element abuts against the supporting portion, and the other end abuts against the positioning seat. The supporting portion is used to support the material carrier.

8. The transportation mechanism according to claim 7, characterized in that, The positioning seat includes a seat body, a guide sleeve, and a stop block. The seat body is connected to the bearing plate. The guide sleeve is installed in the seat body and slides in cooperation with the connecting part. The stop block is installed in the seat body and is used to stop the connecting part.

9. The transportation mechanism according to claim 1, characterized in that, The translation component includes a first drive unit and a translation frame. The first drive unit is mounted on the base and connected to the translation frame. The lifting component is mounted on the translation frame.

10. The transportation mechanism according to claim 1, characterized in that, The lifting assembly includes a second drive component and a lifting frame, the second drive component being connected to the lifting frame, and the pallet being connected to the lifting frame.

11. A deposition apparatus, characterized in that, This includes the transportation agencies described in any one of claims 1-10.

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