CVD (Chemical Vapor Deposition) diamond coating equipment with multiple hot wire devices

Abstract

The utility model relates to the technical field of coating devices, in particular to CVD (Chemical Vapor Deposition) diamond coating equipment with a plurality of hot wire devices, which comprises a cavity device, a plurality of hot wire devices arranged on the cavity device, and objective tables which are arranged in the cavity device and are respectively in one-to-one correspondence with the plurality of hot wire devices, a mounting plate is arranged in the cavity device, the mounting plate is in sliding fit with a plurality of objective tables through a plurality of sliding parts, and the objective tables are made to be close to or away from the corresponding hot wire devices by sliding the objective tables, so that the coating temperature of products on the objective tables is changed. The utility model aims to solve the technical problem that when different products are subjected to film coating treatment, the overall film coating quality of various products is reduced by keeping consistent film coating temperature.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, specifically to a CVD diamond coating equipment with multiple hot wire devices. Background Technology

[0002] Chemical vapor deposition (CVD) is the most widely used technique in the semiconductor industry for depositing a wide range of materials, including a broad spectrum of insulating materials, most metals, and metal alloys. Theoretically, it is quite simple: two or more gaseous raw materials are introduced into a reaction chamber, where they react chemically to form a new material, which is then deposited onto the wafer surface.

[0003] Existing coating equipment suffers from insufficient safety and a lack of flexibility in the variety of coated products within the same batch. To address this issue, Chinese invention patent discloses a CVD diamond coating device with multiple hot filament devices (Publication No.:

[0004] CN108396308B) includes a cavity device, multiple hot wire devices, a main frame device, a cooling device, and a driving device. The main frame device is disposed inside the cavity device. The main frame device includes a frame and multiple platforms evenly distributed on the frame. The frame is connected to the output end of the driving device. The multiple platforms correspond to the multiple hot wire devices, and the multiple platforms are all connected to the cooling device.

[0005] The aforementioned invention, by corresponding multiple stages to multiple hot wire devices and enabling the main frame to not only rise and fall vertically but also rotate on the same plane, can automatically switch between corresponding hot wire devices, effectively solving the problems of insufficient safety factor in the coating process and lack of flexibility in the variety of coated products within the same batch. In the technical solution provided by the aforementioned invention, the stages and their corresponding hot wire devices are designed to maintain the same distance to achieve temperature consistency during coating of the same product. However, this design has some problems. Specifically, when coating different products, since these products often have different optimal coating temperature requirements, maintaining a consistent coating temperature will reduce the overall coating quality of various products. Utility Model Content

[0006] In view of this, the purpose of this utility model is to provide a CVD diamond coating equipment with multiple hot wire devices to solve the technical problem that maintaining a consistent coating temperature will reduce the overall coating quality of various products when coating different products.

[0007] The utility model is achieved through the following technical solutions:

[0008] A CVD diamond coating apparatus with multiple hot wire devices includes a cavity device, multiple hot wire devices disposed on the cavity device, and a stage disposed inside the cavity device and corresponding to each of the multiple hot wire devices. The cavity device is provided with a mounting plate, which is slidably engaged with the multiple stages through multiple sliding components. By sliding the stage, the stage can be moved closer to or away from the corresponding hot wire device, thereby changing the coating temperature of the product on the stage.

[0009] Furthermore, the sliding component includes a strip slide rail fixed to the mounting plate. One end of the strip slide rail is located in the middle of the mounting plate, and the other end extends from the middle of the mounting plate toward the hot wire device. The stage is mounted on the strip slide rail and can slide along the length of the strip slide rail.

[0010] The strip slide rail is provided with locking posts extending along the width direction of the strip slide rail. There are multiple locking posts, which are arranged in an array along the length direction of the strip slide rail. A locking groove is formed between each pair of adjacent locking posts. The platform is movably provided with locking blocks that cooperate with the locking grooves. By moving the locking blocks, the lower end of the locking blocks extends into the locking grooves, thereby limiting the position of the platform.

[0011] Furthermore, an elastic element is provided between the locking block and the platform. When the elastic element is in its natural state, the lower end of the locking block extends into the locking groove.

[0012] Furthermore, a support portion is provided on the platform, and a lever is hinged to the support portion. One end of the lever is connected to the lock block as a connecting end, and the other end extends in the opposite direction to the lock block as a prying end. By pressing the prying end, the lock block is moved upward.

[0013] Furthermore, the support portion is provided with a blocking portion for limiting the rotation angle of the paddle.

[0014] Furthermore, the sidewall of the strip slide rail is provided with scale lines extending along the length of the strip slide rail.

[0015] Furthermore, a positioning slider for defining the position of the stage is slidably disposed on the strip slide rail, and the positioning slider is provided with a locking member for fixing the positioning slider to the strip slide rail.

[0016] Furthermore, a limit block is provided at the end of the strip rail away from the hot wire device.

[0017] Furthermore, the cross-section of the strip rail is T-shaped.

[0018] This CVD diamond coating equipment with multiple hot wire devices overcomes the defect in the prior art where the distance between the stage and the hot wire device cannot be changed by the sliding cooperation between the stage and the mounting plate. When coating various types of workpieces, the temperature distribution of the coating area can be directly affected by adjusting the distance between the stage and the hot wire device. For various types of workpieces that require different temperature conditions to optimize coating quality, this design can provide more precise temperature control, thereby improving the overall coating quality of the workpiece.

[0019] Other advantages, objectives, and features of this invention will be set forth in part in the description which follows, and in part will be apparent to those skilled in the art from the following examination and study, or may be learned from practice of this invention. The objectives and other advantages of this invention can be realized and obtained through the following description. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of an embodiment of the present utility model;

[0021] Figure 2 for Figure 1 Schematic diagram of cross-section Figure 1 ;

[0022] Figure 3 for Figure 1 Schematic diagram of the enlarged structure at A in the middle;

[0023] Figure 4 for Figure 2 A magnified structural diagram at point B in the middle.

[0024] In the diagram: 1. Platform; 2. Mounting plate; 3. Strip slide rail; 4. Locking post; 5. Locking groove; 6. Elastic element; 7. Support part; 8. Paddle; 9. Strip through hole; 10. Connecting shaft; 11. Blocking part; 12. Scale line; 13. Positioning slider; 14. Locking element; 15. Pushing part; 16. Limiting block; 17. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0026] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0027] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0028] In the above description of this utility model, it should be noted that the terms "one side," "the other side," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0029] Furthermore, terms such as "identical" do not imply that components must be absolutely identical; minor differences are permissible. The term "perpendicular" simply means that the positional relationship between components is more perpendicular than "parallel," not that the structure must be perfectly perpendicular; a slight tilt is acceptable.

[0030] Please see Figure 1-4This utility model provides a technical solution: a CVD diamond coating device with multiple hot wire devices, including a cavity device, multiple hot wire devices disposed on the cavity device, and a stage 1 disposed inside the cavity device and corresponding to each of the multiple hot wire devices. According to the prior art, the cavity device mainly provides the mounting base for each component, provides the reaction space for the gas during the coating process, and provides the vacuum environment required for the coating process. Specifically, the cavity device includes a cavity, a vent pipe, and a vacuum pipe. One end of both the vent pipe and the vacuum pipe is connected to the cavity, and the other end of the vent pipe is connected to a reaction gas device. The other end of the vacuum pipe is connected to a vacuum pumping device. Both the vent pipe and the vacuum pipe are connected to valves. The vacuum pumping device evacuates the gas from the cavity, and the reaction gas device fills the cavity with reaction gas. The hot wire device is mainly used to provide the coating temperature during the coating process. The stage 1 serves as the base for placing the workpiece. An mounting plate 2 is installed inside the cavity device. The mounting plate 2 is slidably engaged with multiple stages 1 via multiple sliding components. By sliding the stage 1, it can move closer to or further away from the corresponding hot wire device, thereby changing the coating temperature of the product on the stage 1. The sliding engagement between the stage 1 and the mounting plate 2 overcomes the defect in the prior art where the distance between the stage 1 and the hot wire device cannot be changed. When coating various types of workpieces, adjusting the distance between the stage 1 and the hot wire device can directly affect the temperature distribution in the coating area. For various workpieces requiring different temperature conditions to optimize coating quality, this design can provide more precise temperature control, thereby improving the overall coating quality of the workpiece.

[0031] In this embodiment: the sliding component includes a strip slide rail 3 fixed to the mounting plate 2. The strip slide rail 3 can be fixed by welding, bolt fixing, riveting, or other fixing methods known to those skilled in the art. One end of the strip slide rail 3 is located in the middle of the mounting plate 2, and the other end extends from the middle of the mounting plate 2 towards the hot wire device. The platform 1 is mounted on the strip slide rail 3 and can slide along the length of the strip slide rail 3. More specifically, the platform 1 is an L-shaped plate structure formed by integrally connecting a horizontal plate and a vertical plate. The vertical plate is used to install the workpiece, and the bottom of the horizontal plate has a groove that runs through the horizontal plate along the width direction. The slide rail 3 is located within the slide groove. The strip slide rail 3 and the slide groove form a sliding fit structure for the stage 1. This configuration of the strip slide rail 3 and the stage 1 can be understood as follows: as the stage 1 moves from one end of the strip slide rail 3 located in the middle of the mounting plate 2 to the end near the hot wire device, the temperature received by the stage 1 from the corresponding hot wire device gradually increases. Conversely, as the stage 1 moves from the end of the strip slide rail 3 near the hot wire device to the end located in the middle of the mounting plate 2, the temperature received by the stage 1 from the corresponding hot wire device gradually decreases. These two methods result in the stage 1 receiving a gradually increasing or decreasing temperature from the corresponding hot wire device. Furthermore, when it is necessary to increase or decrease the temperature, the stage 1 can have a definite sliding direction. For example, when it is necessary to increase the temperature, the stage 1 can be slid towards the hot wire device.

[0032] The strip slide rail 3 is provided with locking posts 4 extending along the width direction of the strip slide rail 3. The locking posts 4 can be integrally connected to the top of the strip slide rail 3 or welded to the top of the strip slide rail 3. There are multiple locking posts 4, which are arranged in an array along the length direction of the strip slide rail 3. A locking groove 5 is formed between each two adjacent locking posts 4. The platform 1 is movably provided with locking blocks 6 that cooperate with the locking groove 5. Specifically, the locking blocks 6 are set on the top of the horizontal plate of the platform 1. The top of the horizontal plate has a mounting hole that communicates with the inside of the slide groove. The lower end of the locking block 6 passes through the mounting hole and contacts the locking post 4. By moving the locking block 6, the lower end of the locking block 6 is inserted into the locking groove 5, thereby limiting the position of the platform 1.

[0033] When adjusting the distance between the stage 1 and the hot wire device as needed, the operator can manually or mechanically push the stage 1 to slide along the length of the strip slide rail 3. After the stage 1 moves to the desired position, the operator moves the locking block 6 so that its lower end is inserted into the locking groove 5 between two adjacent locking posts 4. In this way, the stage 1 is firmly locked in the current position, reducing the possibility of position displacement due to vibration or other factors during the coating process.

[0034] In this embodiment, an elastic element 7 is provided between the locking block 6 and the platform 1. The elastic element 7 can be a spring, an elastic rubber column, an elastic rope, or other elastic structures that have elastic functions and can cause the locking block 6 to automatically engage with the locking groove 5 under the action of elastic force. When the elastic element 7 is in its natural state, the lower end of the locking block 6 extends into the locking groove 5. It should be noted that the natural state of the elastic element 7 does not mean that the elastic element 7 is in a state of no force, but rather that the elastic element 7 is in a state of elastic force, that is, under the action of the elastic force of the elastic element 7, the locking block 6 can be tightly pressed against the locking groove 5 and kept in a static state. When locking, moving the platform 1 to a position close to the locking groove 5 will cause the locking block 6 to lock automatically under the action of elastic force, without the need for additional manual operation. When it is necessary to unlock and move the platform 1, the operator only needs to apply an external force opposite to the elastic force to the locking block 6 to disengage the locking block 6 from the locking groove 5. It should be noted that during the process of pulling the locking block 6 out of the locking groove 5, the force on the elastic element 7 will be further increased, so that after the locking block 6 is released, the elastic force of the elastic element 7 can re-lock the locking block 6 into the locking groove 5.

[0035] In this embodiment: To facilitate the upward movement of the locking block 6, a support part 8 is provided on the platform 1. A lever 9 is hinged to the support part 8. The support part 8 is not limited by its specific shape or structure; it mainly provides a mounting base for the lever 9, used for hinged connection. Of course, the installation of the support part 8 should not affect the use of other components. The middle part of the lever 9 is hinged to the support part 8, and one end of the lever 9 serves as a connecting end, movably connected to the locking block 6. Figure 3 or Figure 4 As shown, the specific movable connection method is as follows: the connecting end has a strip-shaped through hole 10 that penetrates the lever 9. Specifically, the lever 9 is a long strip-shaped plate structure. The strip-shaped through hole 10 is opened on one side wall along the length direction of the lever 9 and penetrates the lever 9 along the thickness direction. A connecting shaft 11 is provided inside the strip-shaped through hole 10. Both ends of the connecting shaft 11 extend along the two ends of the strip-shaped through hole 10 and extend out of the two ends of the strip-shaped through hole 10. The two ends of the connecting shaft 11 are fixedly connected to the support part 8. The other end of the lever 9 extends in the opposite direction to the lock block 6 as a prying end. Using the lever principle, pressing the prying end causes the connecting end to move upward, thereby driving the connecting shaft 11 to move upward, and then simultaneously driving the lock block 6 to move upward. The lock block 6 moves upward and disengages from the locking groove 5 to achieve unlocking. During the upward movement, the connecting shaft 11 also slides in the strip-shaped through hole 10. In this way, the movable connection between the connecting end and the lock block 6 is achieved.

[0036] In this embodiment: To limit the movement distance of the locking block 6 and prevent it from dislodging from the mounting hole, a blocking part 12 is provided on the support part 8 to limit the rotation angle of the lever 9. By providing the blocking part 12, the rotation angle of the lever 9 is limited, thereby limiting the movement distance of the locking block 6. Pressing the lever 9 and making it contact the blocking part 12 causes the locking block 6 to move upward a certain distance. At this point, the upward movement distance of the locking block 6 is the maximum upward movement distance. When the locking block 6 moves to its maximum extent, it does not dislodge from the mounting hole. This design can reduce the subsequent installation process of the locking block 6.

[0037] In this embodiment: To facilitate more accurate control of the coating temperature of the workpiece on the stage 1, a scale line 13 extending along the length of the strip slide rail 3 is provided on the side wall of the strip slide rail 3. Through this scale line 13, the operator can clearly know the relative distance between the stage 1 and the hot wire device, and based on the relationship between distance and temperature, can clearly understand the temperature of the stage 1 at a certain position. The operator can then adjust the stage 1 to the corresponding scale position according to the required coating temperature of the workpiece, thereby enabling more accurate control of the coating temperature of the workpiece on the stage 1. Furthermore, by setting a unified scale standard, the operation process can be standardized and regulated, reducing human error and improving production efficiency and product quality.

[0038] In this embodiment, a positioning slider 14 for defining the position of the stage 1 is slidably disposed on the strip slide rail 3. The positioning slider 14, by sliding on the strip slide rail 3, can fix the stage 1 in a specific position when it abuts against the stage 1, thus defining the position of the stage 1. The positioning slider 14 is provided with a locking member 15, which is a fastening bolt, to fix the positioning slider 14 to the strip slide rail 3. A bolt hole is provided on the side wall of the positioning slider 14, and the fastening bolt is located in the bolt hole and connected to the bolt hole by a threaded engagement. Rotating the fastening bolt causes one end of the fastening bolt to abut against the strip slide rail 3, thereby locking the positioning slider 14. In practical use, the position of the stage 1 can be predetermined according to the optimal coating temperature of the workpiece, thereby sliding the positioning slider 14 to the corresponding position and fixing it with the locking member 15. Subsequently, it is only necessary to move the stage 1 until it abuts against the positioning slider 14 to achieve the positioning of the stage 1.

[0039] Preferably, to further enhance the convenience of moving the platform 1, the locking post 4 is configured as a triangular prism, with its top edge inclined towards the center of the mounting plate 2, thus forming a toothed structure. The engaging groove 5 between two adjacent locking posts 4 is triangular, and the upper surface of the locking post 4 forms a guide surface for pressing the locking block 6 upward during the movement of the platform 1. Under the pressing action of the guide surface, the locking block 6 can automatically spring up. The inclined setting of the top edge of the locking post 4 is mainly used to control the inclination direction of the guide surface, thereby determining the positive direction of the movement of the locking block 6. It should be noted that during the positive movement of the locking block 6, due to the automatic springing action of the guide surface, the locking block 6 does not effectively engage with the engaging groove 5, allowing the locking block 6 to move smoothly. When pushing the locking block 6 in the reverse movement, the lower end of the locking block 6 abuts against the engaging groove 5, forming an effective engagement. In this embodiment, since the top edge of the locking post 4 is inclined towards the center of the mounting plate 2, the direction of movement from the side near the hot wire device towards the center of the mounting plate 2 is determined to be positive. Through this design, during the sliding of the platform 1 towards the center of the mounting plate 2, the locking block 6 automatically pops up under the action of the guide surface, eliminating the need to manually lift the locking block 6 and increasing the convenience of moving the platform 1. Furthermore, it can cooperate with the positioning slider 14 to fix the position of the platform 1. In addition to positioning the platform 1, the positioning slider 14 also prevents the platform 1 from continuing to slide towards the center of the mounting plate 2, thus restricting the sliding of the platform 1 in both directions and fixing its position. To reverse the movement of the platform 1, simply press the lever 9 to disengage the locking block 6 from the locking groove 5, releasing the locking of the platform 1, allowing it to move freely.

[0040] Preferably, in order to make it more convenient to push the platform 1 to move in the reverse direction, the prying end of the lever 9 extends upward to form a pushing part 16. By manually pressing the lever 9 and keeping it pressed so that the lock block 6 remains unlocked, and then pushing the pushing part 16, the platform 1 can be moved in the reverse direction. In this process, only the lever 9 needs to be operated to move the platform 1 in the reverse direction, which is more convenient than both pressing the lever 9 and pushing the platform 1.

[0041] In this embodiment: In order to reduce the possibility of the positioning slider 14 slipping off the end of the strip slide rail 3 away from the hot wire device, a limiting block 17 is provided at the end of the strip slide rail 3 away from the hot wire device. The limiting block 17 is fixedly connected to the end of the strip slide rail 3 away from the hot wire device by screws. By setting the limiting block 17, the position of the positioning slider 14 can be limited, so that the positioning slider 14 can only slide to the end of the strip slide rail 3 away from the hot wire device at most, thereby reducing the possibility of the positioning slider 14 slipping off the end of the strip slide rail 3 away from the hot wire device.

[0042] In this embodiment: In order to reduce the possibility of the positioning slider 14 and the stage 1 slipping off the top of the strip slide rail 3, the cross section of the strip slide rail 3 is designed to be T-shaped.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A CVD diamond coating apparatus having multiple hot filament devices, comprising a cavity device, multiple hot filament devices disposed on the cavity device, and a stage disposed inside the cavity device and corresponding one-to-one with each of the multiple hot filament devices, characterized in that: The cavity device is equipped with a mounting plate, which is slidably engaged with multiple stages through multiple sliding components. By sliding the stages, the stages can be moved closer to or further away from the corresponding hot wire devices, thereby changing the coating temperature of the products on the stages.

2. The CVD diamond coating equipment with multiple hot filament devices according to claim 1, characterized in that: The sliding component includes a strip slide rail fixed to the mounting plate. One end of the strip slide rail is located in the middle of the mounting plate, and the other end extends from the middle of the mounting plate toward the hot wire device. The stage is mounted on the strip slide rail and can slide along the length of the strip slide rail. The strip slide rail is provided with locking posts extending along the width direction of the strip slide rail. There are multiple locking posts, which are arranged in an array along the length direction of the strip slide rail. A locking groove is formed between each pair of adjacent locking posts. The platform is movably provided with locking blocks that cooperate with the locking grooves. By moving the locking blocks, the lower end of the locking blocks extends into the locking grooves, thereby limiting the position of the platform.

3. A CVD diamond coating apparatus with multiple hot filament devices according to claim 2, characterized in that: An elastic element is provided between the locking block and the platform. When the elastic element is in its natural state, the lower end of the locking block is inserted into the locking groove.

4. A CVD diamond coating apparatus with multiple hot filament devices according to claim 3, characterized in that: The platform is provided with a support part, and a lever is hinged to the support part. One end of the lever is connected to the lock block as a connecting end, and the other end extends in the opposite direction of the lock block as a prying end. By pressing the prying end, the lock block is moved upward.

5. A CVD diamond coating apparatus with multiple hot filament devices according to claim 4, characterized in that: The support is provided with a blocking part for limiting the rotation angle of the paddle.

6. A CVD diamond coating apparatus having multiple hot filament devices according to any one of claims 2-5, characterized in that: The sidewall of the strip slide rail is provided with scale lines extending along the length of the strip slide rail.

7. A CVD diamond coating apparatus having multiple hot filament devices according to claim 6, characterized in that: A positioning slider for defining the position of the stage is slidably disposed on the strip slide rail, and the positioning slider is provided with a locking component to fix the positioning slider on the strip slide rail.

8. A CVD diamond coating apparatus having multiple hot filament devices according to claim 7, characterized in that: A limit block is provided at the end of the strip rail away from the hot wire device.

9. A CVD diamond coating apparatus having multiple hot filament devices according to claim 8, characterized in that: The cross-section of the strip rail is T-shaped.

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