Heating assembly, reaction furnace and processing equipment

Abstract

The utility model provides a heating assembly, a reacting furnace and processing equipment, relates to the field of semiconductor or photovoltaic material processing, and solves the technical problems of complex process and high manufacturing cost of a traditional furnace wire fixing process. The heating assembly comprises a heating wire wound on the outer side wall of the furnace tube, and the heating wire is configured to heat the furnace tube; the at least two fixing wires are wound on the outer side wall of the furnace tube and located on the two sides of the heating wire in the first direction respectively, the two ends of each fixing wire are wound to form a locking structure, and each locking structure and one end of the heating wire are wound to form a leading-out structure; the two ends of the heating wire and the two ends of the at least two fixing wires form two leading-out structures respectively, and the two leading-out structures are used for being electrically connected with two electrodes of an external power supply device respectively. By adopting the structure, the heating wire and the fixing wire are fixed on the furnace tube only through a simple winding mode, the process is simple, and the manufacturing cost is lower.

Description

Technical Field

[0001] This application relates to the field of semiconductor or photovoltaic material processing, specifically to a heating component, a reactor, and processing equipment. Background Technology

[0002] When processing products such as semiconductors or photovoltaic materials, such as when coating silicon wafers, high-temperature reactors are usually required to process the products. An exemplary reactor is a chemical vapor deposition (CVD) device, in which furnace tubes are heated by furnace wires.

[0003] In related technologies, heating wires are fixed to insulation materials using adsorption molding technology, and each heating wire requires a wire-winding bridging process to form multiple interconnected heating structures (specifically, adjacent heating structures are connected, and the connection points between adjacent heating structures are called bridging points). However, both the wire-winding bridging process and the adsorption molding process are complex and costly to manufacture. For example, in the wire-winding bridging process, it is necessary to ensure that the length of the heating wire at the bridging point between any two adjacent heating structures is equal, meaning that the length accuracy requirement for the heating wire at the bridging point is high, resulting in significant manufacturing difficulty and cost. Therefore, there is an urgent need for a new method of fixing heating wires that allows for fixing with a simpler process and lower production costs. Utility Model Content

[0004] To address the aforementioned technical problems, this application is proposed. Embodiments of this application provide a heating assembly, a reaction furnace, and processing equipment.

[0005] In a first aspect, one embodiment of this application provides a heating assembly applied to a reactor. The reactor includes a furnace tube extending along a first direction. The heating assembly includes: a heating wire wound around the outer wall of the furnace tube, the heating wire being configured to heat the furnace tube; and at least two fixing wires for fixing the heating wire. The two fixing wires are wound around the outer wall of the furnace tube and are respectively located on both sides of the heating wire in the first direction. The two ends of each fixing wire are intertwined to form a locking structure. Each locking structure is intertwined with one end of the heating wire to form a lead-out structure, so that the two ends of the heating wire and the two ends of the at least two fixing wires respectively form two lead-out structures. The two lead-out structures are used to electrically connect to two electrodes of an external power supply device, respectively.

[0006] In some embodiments, the material of the fixing wire is a conductive material, and the cross-sectional area of ​​the lead-out structure is greater than the cross-sectional area of ​​the heating wire.

[0007] In some embodiments, the heating wire is made of the same material as the fixing wire.

[0008] In some embodiments, the diameter of the fixing wire ranges from 0.5 mm to 2 mm.

[0009] In some embodiments, each fixing wire is wound around the outer wall of the furnace tube at least three times.

[0010] Secondly, one embodiment of this application provides a reactor configured to process a product, comprising: a furnace tube extending along a first direction, the furnace tube having a reaction chamber configured to contain the product; and a heating assembly of any of the first aspects described above configured to heat the furnace tube.

[0011] In some embodiments, the furnace tube includes: a connecting portion extending in a first direction, wherein a heating wire and a fixing wire of the heating assembly are wound around the outer side wall of the connecting portion; and two fixing portions respectively connected to the two ends of the connecting portion, wherein the fixing portions protrude from the outer side wall of the connecting portion and are configured to limit the position of the heating assembly in the first direction.

[0012] In some embodiments, the first cross section of the connecting part perpendicular to the first direction is annular, the second cross section of the fixing part perpendicular to the first direction is annular, the first cross section and the second cross section are concentric, and the outer diameter of the second cross section is larger than the outer diameter of the first cross section.

[0013] In some embodiments, the reactor further includes: a shell having a receiving cavity, and a furnace tube disposed within the receiving cavity; and an insulation layer disposed between the heating assembly and the shell, configured to prevent heat from escaping from the heating assembly and the furnace tube.

[0014] Thirdly, one embodiment of this application provides a processing apparatus, comprising: a reactor according to any of the second aspects above, configured to process a product; and a power supply device, wherein two electrodes of the power supply device are electrically connected to two lead-out structures of the heating assembly of the reactor, and configured to supply power to the heating assembly.

[0015] The heating assembly, reactor, and processing equipment proposed in this application feature a locking structure formed by the intertwining of the two ends of each fixing wire. This allows the fixing wire to be taut and securely wound onto the furnace tube. Then, the two ends of the heating wire are each wound together with one of the two locking structures to form a lead-out structure. This further tightens the two ends of the heating wire, securing it securely to the furnace tube and preventing it from sliding along the first direction. Using this structure, the heating wire and fixing wire only need to be fixed to the furnace tube through a simple winding method, resulting in a simple process and low manufacturing cost. Attached Figure Description

[0016] The above and other objects, features, and advantages of this application will become more apparent from the more detailed description of the embodiments of this application in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of this application and form part of the specification. They are used together with the embodiments of this application to explain this application and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same components or steps.

[0017] Figure 1 The diagram shown is a schematic diagram of the structure of a heating assembly provided in an exemplary embodiment of this application.

[0018] Figure 2 The diagram shown is a structural schematic of a heating assembly and furnace tube provided in an exemplary embodiment of this application.

[0019] Figure 3 The image shown is an exemplary embodiment of this application. Figure 2 The heating components and furnace tubes shown are partially enlarged in region A.

[0020] Figure 4 The diagram shown is a schematic diagram of the structure of the fixing wire provided in an exemplary embodiment of this application.

[0021] Figure 5 The image shown is a side view of a reactor provided in an exemplary embodiment of this application.

[0022] Figure 6 The image shown is an exemplary embodiment of this application. Figure 5 The reactor shown is a partial cross-sectional view along the BB direction.

[0023] Figure 7 The diagram shown is a schematic diagram of the structure of a furnace tube provided in an exemplary embodiment of this application.

[0024] Figure 8 The diagram shown is a schematic diagram of the structure of the insulation layer provided in an exemplary embodiment of this application.

[0025] Figure 9 The diagram shown is a structural schematic of a housing provided in an exemplary embodiment of this application.

[0026] Figure 10 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.

[0027] Figure label:

[0028] 100. Heating component; 110. Heating wire; 120. Fixing wire; 121. Locking structure; 130. Lead-out structure; 200. Reactor; 210. Furnace tube; 211. Connecting part; 212. Fixing part; 220. Shell; 230. Insulation layer; 300. Processing equipment; 310. Power supply device. Detailed Implementation

[0029] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0030] Figure 1 The diagram shown is a structural schematic of a heating assembly provided in an exemplary embodiment of this application. Figure 2 The diagram shown is a structural schematic of a heating assembly and furnace tube provided in an exemplary embodiment of this application. Figure 3 The image shown is an exemplary embodiment of this application. Figure 2 The diagram shows a partial enlarged view of the heating components and furnace tubes in region A. Figure 4 The diagram shown is a schematic diagram of the structure of the fixing wire provided in an exemplary embodiment of this application.

[0031] like Figures 1-4 As shown, this application embodiment provides a heating assembly 100 applied to a reactor 200. The reactor 200 includes a furnace tube 210, which runs along a first direction (e.g., Figure 1 and Figure 2 Extending in the X direction, the heating assembly 100 includes a heating wire 110 and at least two fixing wires 120. The heating wire 110 is wound around the outer wall of the furnace tube 210 and is configured to heat the furnace tube 210. At least two fixing wires 120 are used to fix the heating wire 110, wherein the two fixing wires 120 are wound around the outer wall of the furnace tube 210 and are respectively located on both sides of the heating wire 110 in the first direction. The two ends of each fixing wire 120 are intertwined to form a locking structure 121. Each locking structure 121 is intertwined with one end of the heating wire 110 to form a lead-out structure 130, so that the two ends of the heating wire 110 and the two ends of the at least two fixing wires 120 respectively form two lead-out structures 130. The two lead-out structures 130 are used to electrically connect to two electrodes (such as positive and negative electrodes) of an external power supply device 310, respectively.

[0032] The material of the fixing wire 120 is a high-temperature resistant material, and this application embodiment does not limit this.

[0033] For example, there are two fixing wires 120. One fixing wire 120 is wound around the first end of the furnace tube 210, and the other fixing wire 120 is wound around the second end of the furnace tube 210. The heating wire 110 is wound between the first end and the second end of the furnace tube 210. The heating wire 110 has a third end near the first end of the furnace tube 210 and a fourth end near the second end of the furnace tube 210. The two ends of the fixing wire 120 at the first end of the furnace tube 210 are intertwined with the third end of the heating wire 110 to form an outgoing structure 130. The two ends of the fixing wire 120 at the second end of the furnace tube 210 are intertwined with the fourth end of the heating wire 110 to form an outgoing structure 130.

[0034] If the heating wire 110 is not fixed, it can easily expand towards both ends of the furnace tube 210 due to its own elasticity, meaning the two ends of the heating wire 110 will slide along the first direction. In the above embodiment, since the two ends of each fixing wire 120 are intertwined to form a locking structure 121, the fixing wire 120 can be tightened and thus securely wound around the furnace tube 210. Then, the two ends of the heating wire 110 are respectively wound together with the two locking structures 121 to form a lead-out structure 130, thereby tightening the two ends of the heating wire 110 and securing it around the furnace tube 210, preventing the heating wire 110 from sliding along the first direction. With this structure, the heating wire 110 and the fixing wire 120 only need to be fixed to the furnace tube 210 by a simple winding method, which is simple in process and has a low manufacturing cost.

[0035] In some embodiments, the material of the fixing wire 120 is a conductive material, and the cross-sectional area of ​​the lead-out structure 130 is greater than the cross-sectional area of ​​the heating wire 110.

[0036] For example, the material of the fixing wire 120 is iron-chromium-aluminum.

[0037] In the above embodiments, since the cross-sectional area of ​​the lead-out structure 130 is larger than that of the heating wire 110, the resistance of the lead-out structure 130 is smaller than that of the power supply device when only a single heating wire 110 is used to connect the power supply device, thus greatly reducing heat loss. Furthermore, since both ends of each fixing wire 120 are electrically connected to the same electrode of the power supply device, there is no potential difference inside each fixing wire 120, and the remaining parts of the fixing wire 120, except for the locking structure 121, will not generate heat, which greatly improves the reliability of the fixing wire 120.

[0038] In some embodiments, the heating wire 110 is made of the same material as the fixing wire 120.

[0039] For example, the heating wire 110 and the fixing wire 120 are both made of iron-chromium-aluminum.

[0040] In the above embodiments, by using a fixing wire 120 made of the same material as the heating wire 110, it is more convenient to manufacture the heating assembly 100 by purchasing only one material. Furthermore, the commonly used material of the heating wire 110 is low in cost and resistant to high temperatures, and using a fixing wire 120 made of the same material as the heating wire 110 also saves costs.

[0041] In some embodiments, the diameter of the fixing wire 120 ranges from 0.5 mm to 3 mm.

[0042] For example, the diameter of the fixing wire 120 is 0.5 mm, 1 mm, 2 mm, or 3 mm.

[0043] In some embodiments, the diameter of the heating wire 110 ranges from 0.5 mm to 3 mm.

[0044] For example, the diameter of the heating wire 110 is 0.5 mm, 1 mm, 2 mm, or 3 mm.

[0045] In some embodiments, the diameter of the fixing wire 120 ranges from 0.5 mm to 2 mm.

[0046] For example, the diameter of the fixing wire 120 is 0.5 mm, 1 mm, or 2 mm.

[0047] In the above embodiments, a fixing wire 120 with a diameter ranging from 0.5 mm to 2 mm is used. The fixing wire 120 has a small diameter and is lightweight.

[0048] In some embodiments, the diameter of the heating wire 110 ranges from 0.5 mm to 2 mm.

[0049] For example, the diameter of the heating wire 110 is 0.5 mm, 1 mm, or 2 mm.

[0050] In the above embodiments, a heating wire 110 with a diameter ranging from 0.5 mm to 2 mm is used, which results in a smaller diameter and lighter weight. Furthermore, using a smaller diameter heating wire 110 allows for more turns of the heating wire 110 wound along the first direction on the furnace tube 210. If the number of turns of the heating wire 110 is small, the potential difference between two adjacent turns will be large. When two adjacent turns are in close contact, the current will not flow along the extension direction of the heating wire 110, but will flow directly through the contact point between the two adjacent turns, reducing the stability of the heating wire 110. However, with the structure in the above embodiments, because the number of turns of the heating wire 110 is large, the potential difference between two adjacent turns is smaller, preventing current from flowing through the contact point between two adjacent turns when they are in close contact.

[0051] In some embodiments, each fixing wire 120 surrounds the outer wall of the furnace tube 210 at least three times.

[0052] For example, such as Figure 3 As shown, each fixing wire 120 can wrap around the outer wall of the furnace tube 210 five times.

[0053] In the above embodiments, by having the fixing wire 120 surround the outer wall of the furnace tube 210 at least three times, the fixing wire 120 can be more securely connected to the furnace tube 210.

[0054] Figure 5 The image shown is a side view of a reactor provided in an exemplary embodiment of this application. Figure 6 The image shown is an exemplary embodiment of this application. Figure 5 The diagram shows a partial sectional view of the reactor along the BB direction. This is to clearly illustrate the reactor's structure. Figure 6 Only the outer shell and insulation layer of the reactor were cut open.

[0055] Based on the same concept, such as Figure 5 and Figure 6 As shown, this application embodiment also provides a reaction furnace 200, which is configured to process a product. The reaction furnace 200 includes a furnace tube 210 and a heating assembly 100 as described in any of the above embodiments. The furnace tube 210 extends along a first direction and has a reaction chamber configured to contain the product. The heating assembly 100 is configured to heat the furnace tube 210.

[0056] For example, the furnace tube 210 is made of quartz.

[0057] For example, the product is a silicon wafer, a glass substrate, a crystal wafer, etc.

[0058] Figure 7 The diagram shown is a schematic diagram of the structure of a furnace tube provided in an exemplary embodiment of this application.

[0059] In some embodiments, as Figure 7 As shown, the furnace tube 210 includes a connecting portion 211 and two fixing portions 212. The connecting portion 211 extends along a first direction, and the heating wire 110 and fixing wire 120 of the heating assembly 100 are wound around the outer side wall of the connecting portion 211. The two fixing portions 212 are respectively connected to both ends of the connecting portion 211, and the fixing portions 212 protrude from the outer side wall of the connecting portion 211 and are configured to limit the position of the heating assembly 100 in the first direction.

[0060] In the above embodiment, the position of the heating assembly 100 in the first direction can be restricted by the two fixing parts 212, which further restricts the sliding of the heating wire 110 in the first direction.

[0061] In some embodiments, as Figure 7 As shown, the first cross section of the connecting part 211, which is perpendicular to the first direction, is annular in shape, and the second cross section of the fixing part 212, which is perpendicular to the first direction, is annular in shape. The first cross section and the second cross section are concentric, and the outer diameter of the second cross section is larger than the outer diameter of the first cross section.

[0062] For example, the ring described above can be a circular ring or a square ring.

[0063] In the above embodiment, the fixing part 212 of this shape can be used to apply a uniform thrust to the side of the fixing wire 120, which can better restrict the movement of the heating assembly 100 and prevent the heating wire 110 from sliding along the first direction.

[0064] Figure 8 The diagram shown is a schematic representation of the structure of the insulation layer provided in an exemplary embodiment of this application. Figure 9 The diagram shown is a structural schematic of a housing provided in an exemplary embodiment of this application.

[0065] In some embodiments, as Figure 6 , Figure 8 and Figure 9 As shown, the reactor 200 also includes a shell 220 and an insulation layer 230. The shell 220 has a receiving cavity, and the furnace tube 210 is disposed within the receiving cavity. The insulation layer 230 is disposed between the heating assembly 100 and the shell 220 and is configured to prevent heat from escaping from the heating assembly 100 and the furnace tube 210.

[0066] For example, the third cross section of the insulation layer 230, which is perpendicular to the first direction, is annular. The insulation layer can wrap the heating component 100 and the furnace tube 210 to better reduce the heat loss from the heating component 100 and the furnace tube 210.

[0067] For example, the sidewall of the housing 220 has two through holes, and two lead-out structures 130 can extend from the inside of the reaction chamber through the two through holes to the outside of the housing 220, and are electrically connected to the two electrodes of the power supply device 310 respectively.

[0068] For example, the material of the housing 220 is metal.

[0069] In the above embodiments, by setting the insulation layer 230, heat loss can be reduced and the heating effect of the heating component 100 on the furnace tube 210 can be improved.

[0070] Figure 10 The diagram shown is a schematic diagram of the processing equipment provided in an exemplary embodiment of this application.

[0071] Based on the same concept, such as Figure 10As shown in the embodiments of this application, a processing apparatus 300 is also provided. The processing apparatus 300 includes a reaction furnace 200 according to any of the above embodiments and a power supply device 310. The reaction furnace 200 is configured to process a product. The two electrodes of the power supply device 310 are electrically connected to the two lead-out structures 130 of the heating assembly 100 of the reaction furnace 200, respectively, and are configured to supply power to the heating assembly 100.

[0072] For example, the processing equipment 300 may be a chemical vapor deposition (CVD) equipment, such as a plasma enhanced chemical vapor deposition (PECVD) equipment or a low pressure chemical vapor deposition (LPCVD) equipment.

[0073] In some embodiments, the processing equipment 300 may further include a boat-pushing device. The boat-pushing device can carry the product and transport the product into the reaction chamber of the reactor 200.

[0074] In some embodiments, the processing apparatus 300 may further include a gas supply cabinet. The gas supply cabinet is configured to supply process gas to the reaction chamber.

[0075] The basic principles of this application have been described above with reference to specific embodiments. However, it should be noted that the advantages, benefits, and effects mentioned in this application are merely examples and not limitations, and should not be considered as essential features of each embodiment of this application. Furthermore, the specific details disclosed above are for illustrative and facilitative purposes only, and are not limitations. These details do not limit the application to the necessity of employing the aforementioned specific details for implementation.

[0076] The block diagrams of devices, apparatuses, devices, and systems involved in this application are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As those skilled in the art will recognize, these devices, apparatuses, devices, and systems can be connected, arranged, and configured in any manner. Words such as “comprising,” “including,” “having,” etc., are open-ended terms meaning “including but not limited to,” and are used interchangeably with them. The terms “or” and “and” as used herein refer to the terms “and / or,” and are used interchangeably with them unless the context clearly indicates otherwise. The term “such as” as used herein refers to the phrase “such as but not limited to,” and is used interchangeably with it.

[0077] It should also be noted that in the apparatus, equipment, and methods of this application, the components or steps can be disassembled and / or recombined. These disassemblies and / or recombinations should be considered as equivalent solutions of this application.

[0078] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use this application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein can be applied to other aspects without departing from the scope of this application. Therefore, this application is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0079] The above description has been given for purposes of illustration and description. Furthermore, this description is not intended to limit the embodiments of this application to the forms disclosed herein. Although numerous exemplary aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A heating assembly, characterized in that, Applied to a reactor, the reactor including furnace tubes extending along a first direction, the heating assembly including: A heating wire is wound around the outer wall of the furnace tube, and the heating wire is configured to heat the furnace tube; At least two fixing wires are used to fix the heating wire. The two fixing wires are wound around the outer wall of the furnace tube and are respectively located on both sides of the heating wire in the first direction. The two ends of each fixing wire are intertwined to form a locking structure. Each locking structure is intertwined with one end of the heating wire to form a lead-out structure, so that the two ends of the heating wire and the two ends of the at least two fixing wires respectively form two lead-out structures. The two lead-out structures are used to electrically connect to the two electrodes of an external power supply device respectively.

2. The heating assembly according to claim 1, characterized in that, The fixing wire is made of a conductive material, and the cross-sectional area of ​​the lead-out structure is larger than the cross-sectional area of ​​the heating wire.

3. The heating assembly according to claim 1 or 2, characterized in that, The heating wire is made of the same material as the fixing wire.

4. The heating assembly according to claim 1 or 2, characterized in that, The diameter of the fixing wire ranges from 0.5 mm to 2 mm.

5. The heating assembly according to claim 1 or 2, characterized in that, Each of the fixing wires wraps around the outer wall of the furnace tube at least three times.

6. A reactor, characterized in that, Configured to process products, including: A furnace tube extending in a first direction, the furnace tube having a reaction chamber configured to contain the product; The heating assembly according to any one of claims 1 to 5 is configured to heat the furnace tube.

7. The reactor according to claim 6, characterized in that, The furnace tube includes: A connecting portion extends along the first direction, and the heating wire and the fixing wire of the heating assembly are wound around the outer wall of the connecting portion; Two fixing parts are respectively connected to the two ends of the connecting part. The fixing parts protrude from the outer side wall of the connecting part and are configured to limit the position of the heating assembly in the first direction.

8. The reactor according to claim 7, characterized in that, The first cross section of the connecting part perpendicular to the first direction is annular, and the second cross section of the fixing part perpendicular to the first direction is annular. The first cross section and the second cross section are concentric, and the outer diameter of the second cross section is larger than the outer diameter of the first cross section.

9. The reactor according to any one of claims 6 to 8, characterized in that, Also includes: A housing having a receiving cavity, wherein the furnace tube is disposed within the receiving cavity; An insulation layer, disposed between the heating component and the housing, is configured to prevent heat from escaping from the heating component and the furnace tube.

10. A processing device, characterized in that, include: The reactor according to any one of claims 6 to 9 is configured to process the product; A power supply device, wherein the two electrodes of the power supply device are electrically connected to the two lead-out structures of the heating assembly of the reactor, and is configured to supply power to the heating assembly.

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