Developing solution concentration detection device

Abstract

The utility model discloses a developing solution concentration detection device which comprises a solution storage tank, a first detection assembly, a second detection assembly and a control module, a developing solution is stored in the solution storage tank, and a water inlet pipe for inputting clear water and a solution inlet pipe for inputting the developing solution are arranged on the solution storage tank; the first detection assembly comprises a developing solution concentration meter, and the detection end of the developing solution concentration meter is arranged in the solution storage tank; the second detection assembly comprises a neutralization titration tank, a titration cavity is formed in the neutralization titration tank, a liquid extraction pipe and a neutralizer input pipe which are respectively communicated with the titration cavity are arranged on the neutralization titration tank, one end of the liquid extraction pipe is arranged in the liquid storage tank, and a pH sensor is arranged in the titration cavity; the control module is connected with the first detection assembly, the second detection assembly and the pH sensor so as to receive data detected by the first detection assembly, the second detection assembly and the pH sensor. The device can improve the detection accuracy of the concentration of the developing solution and ensure that the concentration of the developing solution is kept within a standard operation range.

Description

Technical Field

[0001] This utility model relates to the technical field of developer concentration detection equipment, and in particular to a developer concentration detection device. Background Technology

[0002] In the manufacturing process of electronic displays, photolithography is one of the three major processes. As an important step in photolithography, development requires strict control of the concentration and composition of the developing solution in order to obtain products with high resolution, high definition, high stability and high yield.

[0003] In existing technologies, such as Figure 1 As shown, traditional developer concentration detection typically uses a conductivity meter 2′ to directly measure the concentration of developer 3′ placed in the storage tank 1′. The developer 3′ is drawn from the storage tank 1′ into the detection chamber 22′ via a sampling tube 21′. An alternating current is input from the generator 26′, generating an alternating electromagnetic field at the positive electrode 24′, inducing a current in the developer 3′. This induced current generates another electromagnetic field at the negative electrode 25′. The receiver 27′ measures the induced current at the negative electrode 25′, thereby determining the conductivity of the developer 3′. The concentration of the developer 3′ is directly proportional to its conductivity. By measuring the conductivity of the developer 3′, its concentration is obtained. Finally, the developer 3′ in the detection chamber 22′ is returned to the storage tank 1′ via a return tube 23′. However, in traditional developer concentration detection operations, the conductivity meter 2′ is prone to a decrease in detection accuracy after long-term use, leading to inaccurate detection of the developer 3′ concentration data. Utility Model Content

[0004] The purpose of this invention is to provide a developer concentration detection device that can improve the accuracy of developer concentration detection and ensure that the developer concentration is kept within the standard operating range.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] A developer concentration detection device is provided, comprising a storage tank, a first detection component, a second detection component, and a control module. The storage tank contains developer and is equipped with a water inlet pipe for inputting clean water and a developer inlet pipe for inputting developer. The first detection component includes a developer concentration meter, the detection end of which is located within the storage tank. The second detection component includes a neutralization titration tank, which contains a titration chamber. The neutralization titration tank is equipped with a suction pipe and a neutralizing agent input pipe, both of which are connected to the titration chamber. One end of the suction pipe is located within the storage tank. A pH sensor is located within the titration chamber. The control module is connected to the first detection component, the second detection component, and the pH sensor.

[0007] In one embodiment, the neutralization titration vessel is further provided with a cleaning pipe for supplying clean water. The water inlet of the cleaning pipe is disposed inside the titration chamber, and a high-pressure nozzle is provided on the water inlet.

[0008] In one embodiment, the high-pressure nozzle is rotatably connected to the water inlet end of the cleaning pipe via a universal joint.

[0009] In one embodiment, a plurality of cleaning tubes are provided, and the plurality of cleaning tubes are evenly distributed around the outside of the neutralization titration vessel.

[0010] In one embodiment, the storage tank is provided with a first limiter for detecting the liquid level of the developer, and the first limiter is connected to the control module.

[0011] In one embodiment, the neutralization titration tank is provided with a second limiter for detecting the level of the developer and a third limiter for detecting the level of the total solution, and the second limiter and the third limiter are connected to the control module.

[0012] In one embodiment, a flow meter is provided on the liquid extraction tube, and the flow meter is connected to the control module.

[0013] In one embodiment, the developer concentration meter includes a first concentration meter and a second concentration meter.

[0014] In one embodiment, a colorimetric container for storing an acid-base colorimetric reagent is also included, the colorimetric container being provided with a colorimetric reagent inlet pipe that communicates with the neutralization titration container.

[0015] In one embodiment, the neutralization titration vessel is equipped with a photographic component, which is connected to the control module.

[0016] The beneficial effects of this utility model are:

[0017] This invention discloses a developer concentration detection device. The device places the detection end of a developer concentration meter inside a storage tank, bringing it into contact with the developer. This allows for initial extraction and concentration detection of the developer. Next, a certain amount of developer is drawn from the storage tank through a suction tube and introduced into a titration chamber. Then, a neutralizing agent is added dropwise through a neutralizing agent inlet tube. During this process, a pH sensor in the titration chamber continuously monitors the pH value of the mixture formed by the developer and neutralizing agent. Adding neutralizing agent is stopped when the pH value of the mixture reaches 7. At this point, the control module calculates the accurate concentration of the developer based on the extracted developer volume, the amount of neutralizing agent used, and the neutralizing agent concentration. This method offers high measurement accuracy. Furthermore, the calculated developer concentration data is compared with the measurement data from the developer concentration meter to correct and supplement the meter's readings. This allows the developer concentration meter to continue normal developer concentration detection operations, ensuring that the developer concentration remains within the specified range. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of a developer concentration detection device in the prior art;

[0019] Figure 2 This is a schematic diagram of the developer concentration detection device in one embodiment.

[0020] Figure 3 This is a schematic diagram of the structure of the neutralization titration vessel in one embodiment;

[0021] Figure 4 This is a schematic diagram of the high-pressure nozzle in one embodiment;

[0022] Figure 5 This is a schematic diagram of the developer concentration detection device in another embodiment;

[0023] Figure 6 This is a schematic diagram of the structure of the neutralization titration vessel in another embodiment.

[0024] Figure 1 middle:

[0025] 1′, Storage tank; 2′, Conductivity meter; 21′, Sampling tube; 22′, Detection chamber; 23′, Reflux tube; 24′, Positive electrode; 25′, Negative electrode; 26′, Generator; 27′, Receiver; 3′, Developer.

[0026] Figures 2 to 6 middle:

[0027] 1. Storage tank; 11. Water inlet pipe; 12. Liquid inlet pipe; 2. Developer concentration meter; 2a. First concentration meter; 2b. Second concentration meter; 21. Detection end; 3. Neutralization titration tank; 31. Titration chamber; 32. Liquid extraction pipe; 33. Neutralizing agent input pipe; 34. pH sensor; 35. Cleaning pipe; 36. High-pressure nozzle; 37. Universal drive component; 4. Developer solution; 51. First limiter; 52. Second limiter; 53. Third limiter; 6. Flow meter; 7. Neutralizing agent container; 8. Color developing tank; 81. Color developing agent input pipe; 9. Imaging component. Detailed Implementation

[0028] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, the accompanying drawings show only the parts relevant to the present invention, not the entire structure.

[0029] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0031] In the description of this embodiment, the terms "upper," "lower," "right," etc., refer to the orientation or positional relationship shown in the accompanying drawings. They are used only for ease of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are only used for distinction in description and have no special meaning.

[0032] like Figures 2 to 6 As shown, a developer concentration detection device according to this embodiment includes a storage tank 1, a first detection component, a second detection component, and a control module (not shown). The storage tank 1 contains developer 4, and the storage tank 1 is provided with a water inlet pipe 11 for inputting clean water and a liquid inlet pipe 12 for inputting developer 4. The first detection component includes a developer concentration meter 2, and the detection end 21 of the developer concentration meter 2 is located in the storage tank 1. The second detection component includes a neutralization titration tank 3, and the neutralization titration tank 3 is provided with a titration chamber 31. The neutralization titration tank 3 is provided with a suction pipe 32 and a neutralizing agent input pipe 33, which are respectively connected to the titration chamber 31. One end of the suction pipe 32 is located in the storage tank 1, and the titration chamber 31 is provided with a pH sensor 34. The control module is connected to the first detection component, the second detection component, and the pH sensor 34 to receive data detected by the first detection component, the second detection component, and the pH sensor 34. The neutralizing agent inlet pipe 33 is connected to the external neutralizing agent container 7 so that the neutralizing agent can be introduced into the neutralization titration vessel 3 through the neutralizing agent inlet pipe 33 via the external neutralizing agent container 7, thereby completing the neutralization titration operation.

[0033] In this embodiment, the detection end 21 of the developer concentration meter 2 is placed inside the storage tank 1 and comes into contact with the developer 4 inside the storage tank 1 to initially extract the developer 4 and perform concentration detection. Next, a certain amount of developer 4 (usually alkaline) is extracted from the storage tank 1 through the extraction tube 32 and input into the titration chamber 31. Then, a neutralizing agent (acidic) is added dropwise through the neutralizing agent input tube 33. During this process, the pH sensor 34 in the titration chamber 31 detects the pH value of the mixture formed by the developer 4 and the neutralizing agent in real time. When the pH value of the mixture is detected to be 7, the addition of the neutralizing agent is stopped. At this time, the control module calculates the accurate concentration of the developer 4 based on the extraction amount of developer 4, the amount of neutralizing agent used, and the concentration of the neutralizing agent, resulting in high measurement accuracy. Furthermore, by comparing the concentration data of developer 4 obtained from the measurement calculation with the measurement data of developer concentration meter 2, the measurement value of developer concentration meter 2 is corrected and adjusted, so that developer concentration meter 2 can continue to perform normal concentration detection of developer 4 and ensure that the concentration of developer 4 is kept within the standard value.

[0034] In actual operation, a power component such as a water pump (not shown) is also provided. The detection end 21 of the developer concentration meter 2 and the extraction pipe 32 are respectively connected to the water pump to provide the power for extracting the developer 4 in the storage tank 1.

[0035] Specifically, during the concentration detection of developer 4, if the measured concentration of developer 4 is lower than the specified value, a higher concentration of developer 4 is introduced into the storage tank 1 through the inlet pipe 12 to increase the concentration of developer 4, ensuring that the concentration of developer 4 in the storage tank 1 remains within the specified value. This ensures the normal progress of the developing operation and guarantees the production of high-resolution, high-definition, high-stability, and high-yield products. If the measured concentration of developer 4 is higher than the specified value, clean water is introduced into the storage tank 1 through the water inlet pipe 11 to decrease the concentration of developer 4, ensuring that the concentration of developer 4 in the storage tank 1 remains within the specified value.

[0036] In one embodiment, Figure 3 As shown, the neutralization titration tank 3 is also equipped with a cleaning pipe 35 for supplying clean water. The water inlet of the cleaning pipe 35 is installed inside the titration chamber 31. A high-pressure nozzle 36 is provided on the water inlet. The high-pressure nozzle 36 cleans the titration chamber 31 to ensure its cleanliness. This ensures the accuracy of the amount of neutralizing agent used during the neutralization titration of the developer 4 through the neutralization titration tank 3, that is, ensures the accuracy of the concentration of the developer 4 obtained by the final measurement and calculation.

[0037] In one embodiment, Figure 4 As shown, the high-pressure nozzle 36 is rotatably connected to the water inlet end of the cleaning pipe 35 through the universal transmission component 37, so that the high-pressure nozzle 36 can rotate 360° relative to the cleaning pipe 35, so that the high-pressure nozzle 36 can spray water for cleaning in all directions inside the neutralization titration tank 3.

[0038] Furthermore, multiple cleaning tubes 35 are provided, and the multiple cleaning tubes 35 are evenly distributed around the outside of the titration vessel 3. Through the multiple evenly distributed cleaning tubes 35 and the high-pressure nozzle 36, the titration chamber 31 is evenly and clearly cleaned, further ensuring that the titration chamber 31 is thoroughly cleaned.

[0039] In one embodiment, the storage tank 1 is provided with a first limiter 51 for detecting the liquid level of the developer 4. The first limiter 51 is connected to the control module. The first limiter 51 is used to detect the liquid level of the developer 4 in the storage tank 1 to prevent the liquid level of the developer 4 from being too high and causing overflow.

[0040] In one embodiment, the neutralization titration tank 3 is equipped with a second limiter 52 for detecting the liquid level of the developer 4 and a third limiter 53 for detecting the liquid level of the total solution. The second limiter 52 and the third limiter 53 are connected to the control module. The second limiter 52 is used to detect the liquid level of the developer 4 drawn from the storage tank 1. In actual operation, the amount of developer 4 drawn each time is 50 ml. At this time, the second limiter 52 is set in the neutralization titration tank 3 at the liquid level corresponding to 50 ml of developer 4. That is, when the second limiter 52 detects the liquid level information of the developer 4, it means that the amount of developer 4 drawn at this time is exactly 50 ml, ensuring the accuracy of the developer 4 volume drawn, so as to ensure the accuracy of the subsequent developer concentration calculation 2.

[0041] Of course, in other embodiments, different volumes of developer 4 can be used for the detection operation, such as 20ml, 25ml, 30ml, 80ml and 100ml, or other values ​​of developer 4. The operator can draw the corresponding volume of developer 4 for neutralization titration detection according to the actual operation. Such designs are all within the protection scope of this utility model.

[0042] Furthermore, the third limiter 53 is used to detect the liquid level of the total solution, so as to prevent the total solution from overflowing the neutralization titration tank 3 due to the continuous input of developer 4 or the continuous dripping of neutralizing agent during the neutralization titration of developer 4, thus ensuring the safety of the operation.

[0043] In one embodiment, a flow meter 6 is installed on the extraction tube 32. The flow meter 6 is connected to the control module to detect the amount of developer 4 extracted by the extraction tube 32, thereby achieving quantitative extraction of developer 4. Specifically, in actual operation, 50 ml of developer 4 needs to be extracted each time. During the extraction process, after the flow meter 6 detects that 50 ml of developer 4 has been extracted, it feeds the information back to the control module. The control module then stops the extraction of developer 4, ensuring that the volume of developer 4 extracted from the neutralization titration tank 3 is an accurate 50 ml.

[0044] Furthermore, by using the flow meter 6 and the second limiter 52 to detect and judge the volume of the developer 4, the accuracy of the developer 4 volume extraction can be further guaranteed, avoiding errors that would occur when the extracted developer 4 volume is inaccurate and the developer concentration meter 2 is calculated using the standard developer 4 volume.

[0045] In one embodiment, Figure 5As shown, the developer concentration meter 2 includes a first concentration meter 2a and a second concentration meter 2b. Specifically, the concentration value A of the developer 4 is measured by the first concentration meter 2a, and the concentration value B of the developer 4 is measured by the second concentration meter 2b. By comparing concentration values ​​A and B, when the difference between concentration values ​​A and B reaches a certain value, the first concentration meter 2a and / or the second concentration meter 2b exhibits a detection accuracy deviation. At this time, the concentration of the developer 4 is accurately detected by the neutralization titration tank 3, and the accurate data obtained is compared with the concentration values ​​A and B to correct and supplement the data of the first concentration meter 2a and the second concentration meter 2b. Alternatively, when the measurement data of the first concentration meter 2a and the second concentration meter 2b show a deviation, maintenance, cleaning, or replacement operations are performed on the first concentration meter 2a and / or the second concentration meter 2b to ensure the accuracy of the measurement.

[0046] In one embodiment, Figure 6 As shown, the developer concentration detection device also includes a colorimetric tank 8 for storing acid-base colorimetric reagents. The colorimetric tank 8 is equipped with a colorimetric reagent inlet pipe 81 connected to the neutralization titration tank 3, allowing the acid-base colorimetric reagent to be dripped into the neutralization titration tank 3. Therefore, during the neutralization titration process, the color of the mixture in the neutralization titration tank can be directly observed to determine the acidity or alkalinity of the mixture, thus confirming whether the titration is complete and the mixture has reached neutrality. Directly judging by the color of the mixture is simple, intuitive, and convenient for operators to observe visually. If errors or omissions are found, a quick and timely response can be made.

[0047] In one embodiment, Figure 6 As shown, the neutralization titration tank 3 is equipped with a photographic component 9, which is connected to the control module to photograph and observe the color of the mixture, determining whether the titration has been completed and neutralized. When the photographic component 9 captures a neutralized color in the mixture, it sends the corresponding information to the control module. The control module then stops the addition of the neutralizing agent and calculates the concentration of the developing solution 4 based on the volume and concentration of the added neutralizing agent. In actual operation, the photographic component 9 uses an industrial camera, allowing it to be seamlessly integrated into the overall equipment and perform operations such as photographing the mixture and identifying its color.

[0048] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A developer concentration detection device, characterized in that, include A storage tank for storing developer solution, wherein the storage tank is equipped with a water inlet pipe for supplying clean water and a liquid inlet pipe for supplying developer solution; A first detection component, comprising a developer concentration meter, wherein the detection end of the developer concentration meter is disposed in the storage tank; The second detection component includes a neutralization titration vessel, which has a titration chamber. The neutralization titration vessel is provided with a liquid extraction tube and a neutralizing agent input tube that are respectively connected to the titration chamber. One end of the liquid extraction tube is located in the liquid storage tank. A pH sensor is provided in the titration chamber. A control module is connected to the first detection component, the second detection component, and the pH sensor.

2. The developer concentration detection device according to claim 1, characterized in that, The neutralization titration vessel is also equipped with a cleaning pipe for supplying clean water. The water inlet of the cleaning pipe is installed inside the titration chamber, and a high-pressure nozzle is provided on the water inlet.

3. The developer concentration detection device according to claim 2, characterized in that, The high-pressure nozzle is rotatably connected to the water inlet end of the cleaning pipe via a universal transmission component.

4. The developer concentration detection device according to claim 3, characterized in that, The cleaning tubes are provided in multiple quantities and are evenly distributed around the outside of the neutralization titration vessel.

5. The developer concentration detection device according to any one of claims 1 to 4, characterized in that, The storage tank is equipped with a first limiter for detecting the liquid level of the developer, and the first limiter is connected to the control module.

6. The developer concentration detection device according to any one of claims 1 to 4, characterized in that, The neutralization titration tank is equipped with a second limiter for detecting the level of the developer and a third limiter for detecting the level of the total solution. The second limiter and the third limiter are connected to the control module.

7. The developer concentration detection device according to any one of claims 1 to 4, characterized in that, The liquid extraction tube is equipped with a flow meter, which is connected to the control module.

8. The developer concentration detection device according to any one of claims 1 to 4, characterized in that, The developer concentration meter includes a first concentration meter and a second concentration meter.

9. The developer concentration detection device according to any one of claims 1 to 4, characterized in that, It also includes a colorimetric container for storing acid-base colorimetric reagents, wherein the colorimetric container is provided with a colorimetric reagent inlet pipe that is connected to the neutralization titration container.

10. The developer concentration detection device according to claim 9, characterized in that, The neutralization titration vessel is equipped with a photographic component, which is connected to the control module.

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