Probe card protective cover detection device and probe station

Abstract

The utility model discloses a probe card protective cover detection device and a probe station, the probe card protective cover detection device is applied to the probe station, and the probe card protective cover detection device comprises a probe card loading mechanism, the probe card loading mechanism comprises a driving member and a first tray, and the driving member is configured to drive the first tray to move relative to the probe station; the first tray is used for loading a probe card; the card reader is arranged on the probe station; the radio frequency card is pasted on the probe card protection cover, the radio frequency card is used for being in near field communication connection with the card reader, and the probe card protection cover is detachably connected to the probe card; and the controller is electrically connected with the card reader and the driving piece. Therefore, the condition that the probe card protective cover enters the probe station without being detached can be effectively avoided, so that the situation that the maintenance cost and the test cost are increased due to the fact that the wafer bearing table collides with the probe card protective cover is avoided.

Description

Technical Field

[0001] This utility model relates to the field of probe station technology, and in particular to a needle clip protective cover detection device and probe station. Background Technology

[0002] Probe cards are used in wafer testing, and they are an important interface between the chip under test and the testing machine. Therefore, probe cards need to be protected with probe card protective covers during transportation and storage to prevent them from being deformed or damaged by external objects.

[0003] However, if the probe card protective cover is not removed in time during probe card installation, the wafer stage may directly impact the cover during operation, potentially damaging the probe card. This risk necessitates that operators carefully inspect and remove the protective cover before installation. However, in practice, human error can lead to the protective cover remaining on during installation, causing direct contact between the wafer stage and the cover upon insertion into the probe station, resulting in probe card damage, high repair costs, and increased testing expenses. Utility Model Content

[0004] The utility model aims to solve one of the technical problems in the related art at least to a certain extent.

[0005] Therefore, one objective of this utility model is to provide a probe card protective cover detection device, which can effectively prevent the probe card protective cover from entering the probe station without being removed, thereby avoiding the collision between the wafer carrier stage and the probe card protective cover, which would lead to increased maintenance and testing costs.

[0006] This utility model also proposes a probe station with the above-mentioned needle card protective cover detection device.

[0007] To achieve the above objectives, a first aspect of this utility model provides a pin card protective cover detection device, applied in a probe station, comprising: a pin card loading mechanism, the pin card loading mechanism including a driving component and a first tray, the driving component being configured to drive the first tray to move relative to the probe station, the first tray being used to load a probe card; a card reader, disposed on the probe station; an RFID card, attached to the pin card protective cover, the RFID card being used for near-field communication connection with the card reader, the pin card protective cover being detachably connected to the probe card; and a controller, electrically connected to the card reader and the driving component, the controller being configured to, upon receiving a contact signal between the RFID card and the card reader, and determining that the information read by the card reader is consistent with pre-stored information, determine that the probe card is correctly loaded and control the driving component to drive the first tray to move towards the probe station; if no contact signal between the RFID card and the card reader is received, or if it is determined that the information read by the card reader is inconsistent with the pre-stored information, determine that the probe card is incorrectly loaded.

[0008] In this invention's probe card protective cover detection device, if the operator negligently fails to remove the protective cover from the probe card in a timely manner when the probe card is replaced, and instead directly places the probe card with the protective cover on the first tray for loading, this will directly prevent the RFID card and the card reader from establishing contact. The lack of contact between the RFID card and the card reader prevents the card reader from effectively reading the pre-stored control information in the RFID card. This missing information, in turn, prevents the controller from being correctly activated. The controller then defaults to judging that the probe card is incorrectly loaded, and therefore cannot send commands to the drive unit to move the first tray smoothly towards the probe station.

[0009] Furthermore, if an operator mistakenly removes the protective cover from another probe card and accidentally touches the card reader, the reader will subsequently read the RFID card information on the probe card and send this information to the controller. Upon receiving this information, the controller will immediately compare it with pre-stored information about the probe card. If the controller determines that the information read by the card reader is inconsistent with the pre-stored information, it will immediately determine that the probe card is incorrectly loaded and refuse to perform subsequent operations. This prevents the controller from being properly activated, thus preventing it from sending commands to the drive unit to move the first tray smoothly towards the probe station, thereby preventing misuse.

[0010] The above situation prevents probe cards with protective caps from being properly inserted into the working area of ​​the probe station, serving as a warning and reminder. This effectively prevents situations where the protective caps are not removed in time due to operator negligence and the probe cards are accidentally inserted into the probe station. This avoids collisions between the wafer carrier stage and the protective caps, thus preventing increased repair and testing costs.

[0011] In addition, the needle card protective cover detection device proposed in the above application may also have the following additional technical features:

[0012] Specifically, the radio frequency card is an RFID (Radio Frequency Identification) card or an NFC (Near Field Communication) card, and the card reader is configured as an RFID card reader or an NFC card reader that matches the radio frequency card.

[0013] Specifically, a second tray is detachably connected to the first tray, and the second tray has a limiting cavity that is adapted to the shape of the probe card.

[0014] Specifically, it also includes a positioning pin, which is disposed in the limiting cavity, and when the probe card is arranged in the limiting cavity, the positioning pin passes through the optical hole provided on the probe card.

[0015] Specifically, the needle card loading mechanism further includes a detection sensor, which is disposed on the first tray and arranged adjacent to the second tray. The detection sensor is also electrically connected to the controller in the probe station and is used to detect the levelness of the second tray.

[0016] Specifically, the needle card loading mechanism further includes a cylinder, which is mounted on the driving member, and the telescopic end of the cylinder is connected to the first tray to drive the first tray to move along the height direction of the first tray.

[0017] Specifically, the driving component includes a driving component body, which is installed in a mounting cavity opened in the probe station, and the driving component body has a driving end that moves toward or away from the opening of the mounting cavity, and the cylinder is disposed on the driving end.

[0018] The second aspect of this utility model provides a probe station, including the needle card protective cover detection device described in the first aspect. Attached Figure Description

[0019] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with the present invention and, together with the description, serve to explain the principles of the present invention.

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the probe station portion according to an embodiment of the present invention;

[0022] Figure 2 This is a schematic diagram of the structure of the first tray entering the probe station according to an embodiment of the present invention;

[0023] Figure 3 This is a schematic diagram of the probe station according to an embodiment of the present invention;

[0024] Figure 4 This is a bottom view of the needle card loading mechanism according to an embodiment of the present invention.

[0025] As shown in the figure:

[0026] 1. Needle card loading mechanism; 10. Drive unit; 11. First tray; 12. Cylinder; 13. Second tray; 14. Detection sensor; 100. Drive end;

[0027] 2. Radio frequency card;

[0028] 3. Card reader;

[0029] 4. Pin clip protective cover;

[0030] 5. Probe card;

[0031] 6. Probe stage; 60. Mounting cavity;

[0032] 7. Positioning pin. Detailed Implementation

[0033] To better understand the above-mentioned objectives, features, and advantages of this utility model, the solution of this utility model will be further described below. It should be noted that, unless otherwise specified, the embodiments of this utility model and the features thereof can be combined with each other.

[0034] Many specific details are set forth in the following description in order to provide a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein; obviously, the embodiments in the specification are only some embodiments of the present invention, and not all embodiments.

[0035] The following description, in conjunction with the accompanying drawings, describes the needle card protective cover detection device and probe station of this utility model embodiment.

[0036] like Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the needle card protective cover detection device of the first aspect of this utility model is applied in the probe station 6 and may include a needle card loading mechanism 1, an RFID card 2, a card reader 3 and a controller (not shown in the figure).

[0037] The needle card loading mechanism 1 includes a drive unit 10 and a first tray 11. The drive unit 10 is disposed in the mounting cavity 60 in the probe station 6, and the drive unit 10 is configured to drive the first tray 11 to move relative to the probe station 6. The first tray 11 is used to load the probe card 5.

[0038] The card reader 3 is mounted on the probe station 6. The card reader 3 can be configured as an RFID card reader or an NFC card reader that matches the radio frequency card 2. Optionally, if the radio frequency card 2 is an RFID card, then the card reader 3 is an RFID card reader; if the radio frequency card 2 is an NFC card, then the card reader 3 is an NFC card reader, so as to achieve accurate communication with the radio frequency card 2.

[0039] The RFID card 2 is attached to the pin card protective cover 4, and the RFID card 2 is used for near-field communication connection with the card reader 3. The RFID card 2 can be an RFID card or an NFC card, which can be selected according to the actual situation.

[0040] It should be noted that near-field communication connection refers to the radio frequency card 2 being brought close to the card reader 3 at a certain distance in order to form a resonant circuit and inductive coupling, thus establishing a communication connection between the two.

[0041] The controller is electrically connected to the card reader 3 driver 10. The controller is configured to receive a contact signal between the RFID card 2 and the card reader 3, and determine that the information read by the card reader 3 is consistent with the pre-stored information. If so, the controller determines that the probe card 5 is correctly loaded and controls the driver 10 to drive the first tray 11 to move towards the probe station 6. If no contact signal between the RFID card 2 and the card reader 3 is received, or if the controller determines that the information read by the card reader 3 is inconsistent with the pre-stored information, the controller determines that the probe card 5 is incorrectly loaded.

[0042] It should be noted that the controller described in this embodiment can be an independent controller set on the probe station 6, or it can be a controller built into the probe station 6, which can be selected according to the actual situation. The card reader 3 and the driver 10 can be connected to the controller in the probe station 6 through signal lines (such as RS485, RS232 and other communication lines).

[0043] In addition, the pre-stored information refers to the detailed information about each probe card 5 and its matching RF card 2 that is pre-stored in the controller. This information includes key data such as the model, serial number, and version number of the probe card 5, as well as the model, serial number, and version number of the matching RF card 2. During the wafer testing process, the replacement of the probe card 5 must strictly follow the order of the information pre-entered in the controller.

[0044] Specifically, when probe card 5 is replaced, if the operator negligently fails to remove the protective cover 4 from probe card 5 in a timely manner and instead places probe card 5 with the protective cover 4 on the first tray 11 for loading, this will directly prevent the RFID card 2 from establishing contact with the reader 3. The lack of contact between RFID card 2 and reader 3 prevents the reader 3 from establishing a connection with RFID card 2, causing the reader 3 to be unable to effectively read the pre-stored control information in RFID card 2. Furthermore, if the operator mistakenly removes the protective cover 4 from another probe card 5 and accidentally touches the reader 3—for example, assuming the current wafer testing process requires replacement with probe card 5A, whose pre-stored information includes a specific model, serial number, and version number—but due to operator negligence, they mistakenly remove the protective cover 4 from probe card 5B and place it near the reader 3, the reader 3 will then read the information from RFID card 2 on probe card 5B and send this information to the controller. Upon receiving this information, the controller immediately compares it with pre-stored information about probe card 5A. Since this information pertains to probe card 5B, not the currently replaceable probe card 5A, the comparison result will show an inconsistency. This means the information read by reader 3 is inconsistent with the pre-stored information; specifically, the information read by reader 3 for RFID card 2 does not match the pre-stored information for probe card 5, which should be replaced in sequence. The controller immediately determines that probe card 5 is incorrectly loaded and refuses to perform subsequent operations, thus preventing the controller from being correctly activated. Consequently, it cannot send commands to drive component 10 to move the first tray 11 smoothly towards probe station 6, preventing misuse. Simultaneously, the controller will issue an error message, reminding the operator of the loading error and requiring immediate inspection and correction. This controller may be equipped with a display screen, which will then display the error message.

[0045] Therefore, the first tray 11 cannot be pushed into the probe station 6, which also means that the probe card 5 with the needle card protective cover 4 cannot be normally sent into the working area of ​​the probe station 6, which serves as an early warning and reminder. It informs the operator that the status of the needle card protective cover 4 must be checked immediately to ensure that it has been properly removed.

[0046] By using the above methods, it is possible to effectively avoid the situation where the probe card protective cover 4 is not removed in time due to operator negligence and accidentally enters the probe station 6, thereby avoiding the increase in maintenance costs and testing costs caused by the collision between the wafer carrier stage and the probe card protective cover 4.

[0047] In another scenario, when probe card 5 is changed, the operator needs to first remove the probe card protective cover 4 from probe card 5, then load probe card 5 onto the first tray 11, and bring the removed probe card protective cover 4 close to the card reader 3, so that the RFID card 2 on the probe card protective cover 4 and the card reader 3 have a near-field communication connection. The card reader 3 can read the information stored in the RFID card 2 and convert the read information into an electrical signal and send it to the controller. If the controller receives the contact signal between the RFID card 2 and the card reader 3, it determines that the information read by the card reader 3 is consistent with the pre-stored information. That is, the information of the RFID card 2 currently read by the card reader 3 matches the pre-stored information of the probe card 5 that should be replaced in sequence. Then the controller determines that probe card 5 is loaded correctly and issues a clear instruction to the drive unit 10. After receiving the instruction from the controller, the drive unit 10 will push the first tray 11 to move smoothly along the predetermined trajectory toward the probe station 6, that is, to transport the probe card 5 with the probe card protective cover 4 removed into the probe station 6.

[0048] In one embodiment of the present invention, Figure 1 As shown, a second tray 13 is detachably connected to the first tray 11, and the second tray 13 has a limiting cavity that matches the shape of the probe card 5. The second tray 13 can be fixed to the first tray 11 by snapping or using fasteners to achieve the disassembly and fixing of the first tray 11 and the second tray 13. The detachable connection between the second tray 13 and the first tray 11 allows the operator to quickly replace or adjust the second tray 13 to match the specifications of the probe card 5 according to different specifications or types of probe cards 5, so as to meet the limiting requirements of probe cards 5 of different specifications, thereby improving the applicability of the probe card protective cover detection device.

[0049] In addition, by designing a limiting cavity in the second tray 13 that is adapted to the shape of the probe card 5, the probe card 5 is limited, thereby ensuring the stability of the probe card 5 when it moves with the first tray 11.

[0050] like Figure 2 As shown, the needle card protective cover detection device of this utility model embodiment may further include a positioning pin 7. The positioning pin 7 is disposed in the limiting cavity, and when the probe card 5 is arranged in the limiting cavity, the positioning pin 7 passes through the light hole provided on the probe card 5. The positioning pin 7 can pass through the light hole on the probe card 5 to achieve precise positioning, thereby ensuring the positional accuracy of the probe card 5 during the installation process and preventing test errors caused by positional deviation.

[0051] Secondly, the positioning pin 7 not only serves as a limit, but also fixes the installation direction of the probe card 5 by passing through the optical hole on the probe card 5. This design effectively avoids incorrect orientation of the probe card 5 during installation, improving the accuracy and efficiency of installation.

[0052] In one embodiment of the present invention, Figure 2 As shown, the needle card loading mechanism 1 also includes a detection sensor 14, which is disposed on the first tray 11 and arranged adjacent to the second tray 13. The detection sensor 14 is also electrically connected to the controller in the probe station 6. The detection sensor 14 is used to detect the levelness of the second tray 13, thereby ensuring the levelness of the second tray 13 during installation, which in turn ensures the levelness of the subsequent probe card 5 installation, thereby ensuring the accuracy of the subsequent probe card 5 testing and helping to reduce test errors caused by improper installation.

[0053] In one embodiment of the present invention, Figure 4 As shown, the needle card loading mechanism 1 also includes a cylinder 12, which is mounted on the drive member 10, and the telescopic end of the cylinder 12 is connected to the first tray 11 to drive the first tray 11 to move along the height direction of the first tray 11.

[0054] Specifically, the cylinder 12 can be manually controlled to drive the first tray 11 upward, adjusting the position of the probe card 5 relative to the probe in the probe station 6. This ensures precise alignment between the probe card 5 and the probe, improving the accuracy and reliability of the test.

[0055] Optionally, to further improve the accuracy of the contact between the probe card 5 and the probe, the cylinder 12 can also be electrically connected to the controller and used in conjunction with a sensor. The controller can precisely control the extension and retraction stroke of the cylinder 12, so that the probe card 5 can accurately move to the position of contact with the probe, thereby ensuring the accuracy of the contact between the probe card 5 and the probe. The sensor is directly installed on or near the cylinder 12 to accurately monitor the stroke and position of the cylinder 12. The sensor is connected to the controller, and the sensor can be a magnetic sensor, a capacitive sensor, etc.

[0056] As a possible scenario, in order to further improve the stability of the cylinder 12 when it pushes the first tray 11 up and down, multiple cylinders 12 can be provided.

[0057] Furthermore, if Figure 4As shown, the drive unit 10 includes a drive unit body, which is installed in the mounting cavity 60 opened in the probe station 6. The drive unit body has a drive end 100 that moves toward the opening of the mounting cavity 60 or away from the opening of the mounting cavity 60, and the cylinder 12 is disposed on the drive end 100.

[0058] Optionally, the drive component 10 may be a linear motor, electric actuator, or other drive component with a movable drive end 100.

[0059] For example, the drive unit 10 is a linear motor. The drive unit 10 can drive the first tray 11 to move closer to or further away from the probe station 6. With the self-locking characteristic of the drive unit 10, the first tray 11 can automatically lock its position after moving to the predetermined position. Even if it is subjected to external interference or vibration, it can maintain the stability of its position. This prevents the RFID card 2 from being in the first position. It also prevents relevant personnel from placing the probe card 5 with the pin card protective cover 4 on the first tray 11 and pushing the first tray 11 into the probe station 6.

[0060] like Figure 1 As shown, a probe station according to a second aspect embodiment of the present invention includes a needle clip protective cover detection device according to the above-described second aspect embodiment of the present invention.

[0061] It should be noted that the explanation of the aforementioned embodiment of the needle card protective cover detection device also applies to the probe station of this embodiment, and will not be repeated here.

[0062] In summary, the pin card protective cover detection device and probe station of this utility model embodiment can effectively prevent the pin card protective cover from entering the probe station without being removed, thereby avoiding the impact between the wafer carrier stage and the pin card protective cover, which would lead to increased maintenance and testing costs.

[0063] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0064] The above description is merely a specific embodiment of the present invention, enabling those skilled in the art to understand or implement the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments described herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A needle-type protective cover detection device, used in a probe station, characterized in that, include: A probe card loading mechanism includes a drive unit and a first tray, the drive unit being configured to drive the first tray to move relative to the probe station, the first tray being used to load a probe card; The card reader is mounted on the probe station; An RFID card is attached to a pin card protective cover, and the RFID card is used for near-field communication with the card reader. The pin card protective cover is detachably connected to the probe card. The controller is electrically connected to the card reader and the driver. The controller is configured to, when receiving a contact signal between the RFID card and the card reader, determine that the information read by the card reader is consistent with the pre-stored information, then determine that the probe card is correctly loaded and control the driver to drive the first tray to move towards the probe station; if no contact signal between the RFID card and the card reader is received or if the information read by the card reader is inconsistent with the pre-stored information, then determine that the probe card is incorrectly loaded.

2. The needle-card protective cover detection device according to claim 1, characterized in that, The radio frequency card is an RFID card or an NFC card, and the card reader is configured as an RFID card reader or an NFC card reader that matches the radio frequency card.

3. The needle-card protective cover detection device according to claim 1, characterized in that, A second tray is detachably connected to the first tray, and the second tray has a limiting cavity that is adapted to the shape of the probe card.

4. The needle clip protective cover detection device according to claim 3, characterized in that, It also includes a positioning pin, which is disposed in a limiting cavity, and when the probe card is arranged in the limiting cavity, the positioning pin passes through the light hole provided on the probe card.

5. The needle-card protective cover detection device according to claim 3, characterized in that, The needle card loading mechanism also includes a detection sensor, which is disposed on the first tray and arranged adjacent to the second tray. The detection sensor is also electrically connected to the controller and is used to detect the levelness of the second tray.

6. The needle-card protective cover detection device according to claim 1, characterized in that, The needle card loading mechanism also includes a cylinder, which is mounted on the drive member and the telescopic end of the cylinder is connected to the first tray to drive the first tray to move along the height direction of the first tray.

7. The needle-card protective cover detection device according to claim 6, characterized in that, The driving component includes a driving component body, which is installed in a mounting cavity opened in the probe station. The driving component body has a driving end that moves toward or away from the opening of the mounting cavity, and the cylinder is disposed on the driving end.

8. A probe station, characterized in that, The device includes the needle card protective cover detection device according to any one of claims 1-7.

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