Double-layer flower basket self-circulation material supplying and receiving equipment

Abstract

The utility model provides double-layer flower basket self-circulation material supplying and receiving equipment, and relates to the technical field of semiconductor processing equipment. The double-layer flower basket self-circulation material supplying and receiving equipment comprises a first lifting assembly and a second lifting assembly which are arranged in a first direction in a spaced mode and are both configured to fix a flower basket and drive the flower basket to ascend and descend in the height direction. The first transverse moving module is arranged on the side, located in the second direction, of the first lifting assembly and the second lifting assembly and can drive the flower basket to move in the first direction and move the first conveying line and the second conveying line in the second direction, and the second conveying line is arranged above the first conveying line at intervals; one of the first conveying line and the second conveying line is located at the same height as the first transverse moving module, and the other one corresponds to the first lifting assembly so as to convey flower baskets to the first lifting assembly. The double-layer flower basket self-circulation feeding and receiving equipment can achieve efficient and automatic feeding and discharging, and meanwhile the space utilization rate is increased.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and more specifically, to a double-layer flower basket self-circulating feeding and receiving device. Background Technology

[0002] In the processing of solar cells, baskets are frequently used for storing the cells. A basket-based circulating feeding system, working in conjunction with the processing equipment, is typically required during the cell manufacturing process, and AGV (Automated Guided Vehicle) carts are then used to achieve automated production.

[0003] The existing sequential feeding devices for flower baskets typically have a transverse module located between two sets of lifting components. However, the transverse module occupies a significant amount of horizontal space, resulting in low space utilization in the overall layout of the flower basket circulation equipment. Utility Model Content

[0004] The purpose of this utility model is to provide a double-layer flower basket self-circulating feeding and receiving device, which can achieve efficient automatic feeding and unloading while improving space utilization.

[0005] The embodiments of this utility model can be implemented as follows:

[0006] This utility model provides a double-layer flower basket self-circulating feeding and receiving device, comprising:

[0007] The first lifting component is configured to fix the basket and drive the basket to move up and down in the height direction to cooperate with the processing equipment to transfer the unprocessed silicon wafers on the basket to the processing equipment;

[0008] The second lifting component is spaced apart from the first lifting component in the first direction and is configured to fix the basket and drive the basket to lift in the height direction in order to cooperate with the processing equipment to place the processed silicon wafers into the empty basket in sequence.

[0009] The first lateral movement module is located on one side of the first lifting component and the second lifting component in the second direction, and can drive the flower basket to move along the first direction and the second direction; wherein, the first direction and the second direction are perpendicular.

[0010] A first conveyor line and a second conveyor line are arranged at intervals above the first conveyor line. One of the first and second conveyor lines is at the same height as the first transverse module, and the other corresponds to the first lifting assembly to convey the flower basket to the first lifting assembly.

[0011] After the basket containing the silicon wafers to be processed is conveyed to the first lifting assembly, the silicon wafers are transferred to the processing equipment in cooperation with the first lifting assembly and the processing equipment. The empty basket after taking the silicon wafers will be conveyed to the first traverse module in cooperation with the first lifting assembly and the first traverse module. Then, driven by the first traverse module, it moves along the first direction to the position corresponding to the second lifting assembly. The basket containing the processed silicon wafers on the second lifting assembly will be transferred to the first traverse module in cooperation with the second lifting assembly and the first traverse module. Then, the empty basket on the first traverse module will be installed on the second lifting assembly in cooperation with the first traverse module and the second lifting assembly to load the processed silicon wafers.

[0012] In an optional implementation, the first lifting assembly and the second lifting assembly are arranged opposite to each other.

[0013] In an optional embodiment, the first lifting assembly includes a first guide post, a first flower basket fixing member, and a first driving member. The first flower basket fixing member is movably mounted on the first guide post and is located on the side of the first guide post away from the second guide post. The first driving member is located on the first guide post and is configured to drive the first flower basket fixing member to lift and lower. The first flower basket fixing member is configured to fix the flower basket.

[0014] The second lifting assembly includes a second guide post, a second flower basket fixing member, and a second driving member. The second flower basket fixing member is movably installed on the second guide post and is located on the side of the second guide post opposite to the first guide post. The second driving member is located on the second guide post and is configured to drive the second flower basket fixing member to lift and lower. The second flower basket fixing member is configured to fix the flower basket.

[0015] In an optional embodiment, the first flower basket fixing component includes a first mounting plate, a first bottom plate, a first top plate, a first conveyor belt, and a first clamping member. The first mounting plate is movably mounted on the side of the first guide post away from the second guide post. The first bottom plate is disposed at the bottom of the first mounting plate, the first top plate is disposed at the top of the first mounting plate, the first conveyor belt is disposed at the top of the first bottom plate, and the first clamping member is disposed at the first top plate. The first conveyor belt can transport the flower basket in a second direction, and the first clamping member can apply pressure to the flower basket from the top of the flower basket to fix the flower basket.

[0016] The second flower basket fixing component includes a second mounting plate, a second base plate, a second top plate, a second conveyor belt, and a second clamping member. The second mounting plate is movably mounted on the side of the second guide post away from the first guide post. The second base plate is located at the bottom of the second mounting plate, the second top plate is located at the top of the second mounting plate, the second conveyor belt is located at the top of the second base plate, and the second clamping member is located on the second top plate. The second conveyor belt can transport the flower basket in a second direction, and the second clamping member can apply pressure to the flower basket from the top of the flower basket to fix the flower basket.

[0017] In an optional embodiment, the first traverse module is located at the same height as the first conveyor line. The first traverse module can also transfer the basket loaded with the processed silicon wafers to the first conveyor line, and the second conveyor line is used to transfer the basket carrying the unprocessed silicon wafers to the first lifting assembly.

[0018] In an optional implementation, the first lateral movement module includes a first fixing plate, a first transmission component, and a first drive component;

[0019] The first fixing plate is disposed in the second direction of the first lifting assembly and the second lifting assembly, and the first fixing plate is disposed at the bottom end of the first lifting assembly and the second lifting assembly, and the first fixing plate extends from the first lifting assembly to the second lifting assembly;

[0020] The first transmission component is disposed on the first fixed plate, and the first drive component is disposed on the first fixed plate and is connected to the first transmission component in a transmission manner. The first drive component can drive the first transmission component to reciprocate in a first direction.

[0021] The bearing surface of the first transmission component is on the same plane as the bearing surface of the first conveyor line, and the first transmission component can drive the flower basket to move in the second direction.

[0022] In an optional embodiment, the first transmission component includes a first belt module and a second belt module arranged side by side in a first direction. The first drive component is connected to both the first belt module and the second belt module in a transmission manner. The first drive component is configured to drive either or both of the first belt module and the second belt module to reciprocate synchronously along the first fixed plate in the first direction.

[0023] In an optional embodiment, the first conveyor line includes a first conveyor belt and a second conveyor belt arranged side by side along a first direction, and the first conveyor assembly can convey baskets loaded with processed silicon wafers to the first conveyor belt or the second conveyor belt.

[0024] In an optional embodiment, the second conveyor line includes a third and a fourth conveyor belt arranged side by side along the first direction;

[0025] The double-layer flower basket self-circulating feeding and receiving equipment also includes a second transverse transfer module. The second transverse transfer module is located between the second conveyor line and the first lifting component, and is at the same height as the second conveyor line. The second transverse transfer module can transfer the flower baskets on the third and fourth conveyor belts to the first lifting component.

[0026] In an optional implementation, the second traverse module includes a second fixed plate, a second transmission component, and a second drive component;

[0027] The second fixing plate is disposed on one side of the first lifting assembly and the second lifting assembly in the second direction, and is located above the first transverse module. The second fixing plate extends from the first lifting assembly to the second lifting assembly.

[0028] The second transmission component is disposed on the second fixed plate, the second drive component is disposed on the second fixed plate, and the second drive component is connected to the second transmission component in a transmission manner. The second drive component can drive the second transmission component to reciprocate in the first direction.

[0029] The bearing surface of the second transmission component is on the same plane as the bearing surface of the second conveyor line, and the second transmission component can drive the flower basket to move in the second direction.

[0030] The beneficial effects of the double-layer flower basket self-circulating feeding and receiving device provided in this embodiment of the utility model include:

[0031] This application arranges the second lifting component and the first lifting component at a distance in the first direction, while placing the first lateral moving module on one side of the first and second lifting components in the second direction. The first lateral moving module moves the flower basket along either the first or second direction according to transport requirements, and the first and second directions are perpendicular. This prevents the first lateral moving module from occupying the lateral space between the first and second lifting components, allowing the first and second lifting components to be positioned as needed, thus improving space utilization. Most importantly, it prevents the flower basket from getting stuck during transport, thus ensuring its circulation. Secondly, this application arranges the first and second conveyor lines at a distance in the height direction, avoiding interference in the plane. This allows the first and second conveyor lines to be wider, accommodating and transporting more flower baskets. Attached Figure Description

[0032] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0033] Figure 1 This is a structural schematic diagram of the double-layer flower basket self-circulating feeding and receiving device provided in this embodiment from a first-view perspective.

[0034] Figure 2 This is a schematic diagram of the structure of the double-layer flower basket self-circulating feeding and receiving device provided in this embodiment after removing the second transverse module and the second transmission line;

[0035] Figure 3This is a schematic diagram of the structure of the first lifting component of the double-layer flower basket self-circulating feeding and receiving device provided in this embodiment;

[0036] Figure 4 This is a schematic diagram of the first transverse module of the double-layer flower basket self-circulating feeding and receiving device provided in this embodiment.

[0037] Figure 5 This is a schematic diagram of the double-layer flower basket self-circulating feeding and receiving device provided in this embodiment from a second perspective.

[0038] Icons: 100 - Double-layer flower basket self-circulating feeding and receiving device; 110 - First lifting assembly; 111 - First guide column; 112 - First flower basket fixing component; 113 - First driving component; 114 - First mounting plate; 115 - First base plate; 116 - First top plate; 117 - First conveyor belt; 118 - First clamping component; 130 - Second lifting assembly; 131 - Second guide column; 132 - Second flower basket fixing component; 133 - Second driving component; 134 - Second mounting plate; 135 - Second base plate; 136 - Second top plate; 137 - Second conveyor belt Belt; 138 - Second clamping component; 150 - First transverse module; 151 - First fixing plate; 152 - First transmission assembly; 153 - First drive assembly; 154 - First belt module; 155 - Second belt module; 170 - First conveyor line; 171 - First transmission belt; 172 - Second transmission belt; 180 - Second conveyor line; 181 - Third transmission belt; 182 - Fourth transmission belt; 190 - Second transverse module; 191 - Second fixing plate; 192 - Second transmission assembly; 193 - Second drive assembly; 200 - Flower basket. Detailed Implementation

[0039] The existing sequential feeding devices for flower baskets typically have a transverse module located between two sets of lifting components. However, the transverse module occupies a significant amount of horizontal space, resulting in low space utilization in the overall layout of the flower basket circulation equipment.

[0040] To address the aforementioned problems, this utility model provides a double-layer flower basket self-circulating feeding and receiving device and its control method, which can achieve efficient automatic feeding and receiving while improving space utilization.

[0041] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0042] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0043] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0044] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0045] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0046] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0047] Please refer to Figures 1 to 5In this embodiment, the double-layer basket self-circulating material feeding and receiving device 100 includes a first lifting assembly 110, a second lifting assembly 130, a first lateral movement module 150, a first conveyor line 170, and a second conveyor line 180. The first lifting assembly 110 is configured to fix the basket 200 and move the basket 200 up and down in the height direction to cooperate with the processing equipment in conveying unprocessed silicon wafers from the basket 200 to the processing equipment. The second lifting assembly 130 is spaced apart from the first lifting assembly 110 in a first direction. The second lifting assembly 130 is configured to fix the basket 200 and move the basket 200 up and down in the height direction to cooperate with the processing equipment in placing processed silicon wafers sequentially into empty baskets 200. The first lateral movement module 150 is located on one side of the first lifting assembly 110 and the second lifting assembly 130 in a second direction, and can move the basket 200 along the first and second directions. The first and second directions are perpendicular. The second conveyor line 180 is spaced above the first conveyor line 170. One of the first conveyor line 170 and the second conveyor line 180 is at the same height as the first lateral movement module 150 to convey the flower basket 200 outward. The other of the first conveyor line 170 and the second conveyor line 180 corresponds to the first lifting assembly 110 to convey the flower basket 200 to the first lifting assembly 110.

[0048] After the basket 200 containing the silicon wafers to be processed is conveyed to the first lifting assembly 110, the silicon wafers are transferred to the processing equipment in cooperation with the first lifting assembly 110. The empty basket 200 after taking the silicon wafers will be conveyed to the first transverse module 150 in cooperation with the first lifting assembly 110. Then, driven by the first transverse module 150, it moves along the first direction to the position corresponding to the second lifting assembly 130. The basket 200 containing the processed silicon wafers on the second lifting assembly 130 will be transferred to the first transverse module 150 in cooperation with the second lifting assembly 130 and the first transverse module 150. Then, the empty basket 200 on the first transverse module 150 will be installed on the second lifting assembly 130 to load the processed silicon wafers in cooperation with the first transverse module 150 and the second lifting assembly 130.

[0049] In this embodiment, the second lifting component 130 and the first lifting component 110 are spaced apart in the first direction, while the first lateral movement module 150 is positioned on one side of the first lifting component 110 and the second lifting component 130 in the second direction. This allows the first lateral movement module 150 to move the flower basket 200 along either the first or second direction according to transport requirements, with the first and second directions perpendicular. This ensures that the first lateral movement module 150 does not occupy the lateral space between the first lifting component 110 and the second lifting component 130, allowing the positions of the first and second lifting components 110 and 130 to be set as needed, thereby improving space utilization. Most importantly, it prevents the flower basket 200 from getting stuck during transport, thus ensuring its circulation. Furthermore, this application spaces the first conveyor line 170 and the second conveyor line 180 apart in the height direction, avoiding interference in the plane. This allows the first and second conveyor lines 170 and 180 to be wider to carry and transport more flower baskets 200.

[0050] It should be noted that the processing equipment can be laser cleaning equipment, coating equipment, etc. Generally, these processing equipment are arranged side-by-side with infeed conveyor lines, outfeed conveyor lines, and processing modules. The silicon wafers to be processed are conveyed to the processing module by the infeed conveyor line, and the silicon wafers processed by the processing module are conveyed out by the outfeed conveyor line. A double-layer basket self-circulating feeding and receiving device 100 is located at the ends of the infeed and outfeed conveyor lines, with the infeed conveyor line corresponding to the first lifting assembly 110 and the outfeed conveyor line corresponding to the second lifting assembly 130. Generally, both the infeed and outfeed conveyor lines are equipped with telescopic belts at their ends. The telescopic belt of the infeed conveyor line can extend into the basket 200 fixed to the first lifting assembly 110, transferring the silicon wafers to be processed from the basket 200 to the infeed conveyor line until the basket 200 is emptied by the infeed conveyor line, at which point the basket 200 becomes empty. The empty basket 200 needs to be transferred to the second lifting assembly 130 by the double-layer basket self-circulating material receiving device 100. The telescopic belt at the end of the discharge conveyor line works with the second lifting assembly 130 to stack the processed silicon wafers in the empty basket 200, thereby realizing the automatic sequential circulation of the basket 200, automatic removal of silicon wafers from the basket 200 and automatic stacking of processed silicon wafers back into the basket 200. With the help of the double-layer AGV trolley, fully automatic processing can be achieved.

[0051] In this embodiment, the first lifting component 110 and the second lifting component 130 are arranged opposite to each other.

[0052] In this embodiment, the first lifting component 110 and the second lifting component 130 are arranged opposite each other, which can better save space in the first direction.

[0053] The first lifting assembly 110 includes a first guide post 111, a first flower basket fixing member 112, and a first driving member 113. The first flower basket fixing member 112 is movably mounted on the first guide post 111 and is located on the side of the first guide post 111 away from the second guide post 131. The first driving member 113 is located on the first guide post 111 and is configured to drive the first flower basket fixing member 112 to lift. The first flower basket fixing member 112 is configured to fix the flower basket 200. The second lifting assembly 130 includes a second guide post 131, a second flower basket fixing member 132, and a second driving member 133. The second flower basket fixing member 132 is movably mounted on the second guide post 131 and is located on the side of the second guide post 131 opposite to the first guide post 111. The second driving member 133 is located on the second guide post 131 and is configured to drive the second flower basket fixing member 132 to lift. The second flower basket fixing component 132 is configured to fix the flower basket 200.

[0054] This embodiment, by setting the first lifting assembly 110 and the second lifting assembly 130 back to back (i.e., setting the first flower basket fixing member 112 on the side of the first guide post 111 away from the second guide post 131, and setting the second flower basket fixing member 132 on the side of the second guide post 131 away from the first guide post 111), can further reduce the overall space occupied by the equipment in the first direction compared to the existing relative arrangement. This is more conducive to reducing the volume occupied by the double-layer flower basket self-circulating feeding and receiving equipment 100 in the first direction, and also facilitates the miniaturization of the processing equipment.

[0055] Normally, the first basket fixing member 112 is correspondingly arranged with the feeding conveyor line in the first direction, so that the telescopic belt at the end of the feeding conveyor line extends into the basket 200 fixed by the first basket fixing member 112 to transfer the silicon wafers outward. The second basket fixing member 132 is correspondingly arranged with the discharging conveyor line in the first direction, so that the telescopic belt at the end of the discharging conveyor line extends into the basket 200 fixed by the second basket fixing member 132 to stack the processed silicon wafers sequentially on the basket 200. If the first lifting assembly 110 and the second lifting assembly 130 are arranged opposite each other, due to the first guide post 111 and the second guide post 131, the overall size of the double-layer basket self-circulating feeding and receiving device 100 in the first direction will be larger than the size of the double-layer basket self-circulating feeding and receiving device 100 in the first direction when the first lifting assembly 110 and the second lifting assembly 130 are arranged opposite each other.

[0056] Specifically, the first flower basket fixing component 112 includes a first mounting plate 114, a first base plate 115, a first top plate 116, a first conveyor belt 117, and a first clamping member 118. The first mounting plate 114 is movably mounted on the side of the first guide post 111 away from the second guide post 131. The first base plate 115 is disposed at the bottom of the first mounting plate 114. The first top plate 116 is disposed at the top of the first mounting plate 114. The first conveyor belt 117 is disposed at the top of the first base plate 115. The first clamping member 118 is disposed on the first top plate 116. The first conveyor belt 117 can transport the flower basket 200 in a second direction. The first clamping member 118 can apply pressure from the top of the flower basket 200 to secure it.

[0057] The second flower basket fixing component 132 includes a second mounting plate 134, a second base plate 135, a second top plate 136, a second conveyor belt 137, and a second clamping member 138. The second mounting plate 134 is movably mounted on the side of the second guide post 131 away from the first guide post 111. The second base plate 135 is disposed at the bottom of the second mounting plate 134. The second top plate 136 is disposed at the top of the second mounting plate 134. The second conveyor belt 137 is disposed at the top of the second base plate 135. The second clamping member 138 is disposed on the second top plate 136. The second conveyor belt 137 can transport the flower basket 200 in a second direction. The second clamping member 138 can apply pressure to the flower basket 200 from the top of the flower basket 200 to fix the flower basket 200.

[0058] In this embodiment, the first flower basket fixing member 112 and the second flower basket fixing member 132 are configured as described above. In this way, the flower basket 200 can move in the second direction under the drive of the first conveyor belt 117 and the second conveyor belt 137 during the fixing and disassembly process and during the circulation process of the flower basket 200. The simple structure and movement will not cause the flower basket 200 to get stuck during the movement.

[0059] In this embodiment, both the first clamping member 118 and the second clamping member 138 are clamping cylinders. For example, after the flower basket 200 is transported to a preset position by the first conveyor belt 117, the clamping cylinder extends and abuts against the top of the flower basket 200, thereby preventing the flower basket 200 from shaking or tipping over during lifting. The first driving member 113 and the second driving member 133 can be screw motors, which are threadedly connected to the first mounting plate 114 and the second mounting plate 134, respectively.

[0060] In this embodiment, the first traverse module 150 and the first conveyor line 170 are located at the same height. The first traverse module 150 can also transfer the basket 200 containing the processed silicon wafers to the first conveyor line 170. The second conveyor line 180 is used to transfer the basket 200 containing the unprocessed silicon wafers to the first lifting assembly 110.

[0061] In this embodiment, the first transverse module 150 and the first conveyor line 170 are set at the same height. This way, when the first lifting assembly 110 moves the basket 200 downwards to pick up silicon wafers, the basket 200 continues to move downwards. The basket 200, after picking up the wafers, is located at the bottom of the first lifting assembly 110 and on the same plane as the first transverse module 150. This allows for the rapid transfer of empty baskets 200 to the first transverse module 150, thereby improving the efficiency of basket 200 circulation. Overall, the upper second conveyor line 180 feeds baskets 200 (containing unprocessed silicon wafers), while the lower first conveyor line 170 discharges baskets 200 (containing processed silicon wafers). This allows loading and unloading to occur at different heights, enabling simultaneous operation. Most importantly, the first transverse module 150 can transport the flower basket 200 in both the first and second directions, thereby realizing the transfer of empty and full flower baskets 200.

[0062] Of course, in some other embodiments of this application, the first transverse module 150 may also be configured to be at the same height as the second conveyor line 180, but after the silicon wafer on the basket 200 of the first lifting assembly 110 is moved downward and picked up, the basket 200 needs to be transferred upward before it can reach the first transverse module 150.

[0063] Furthermore, the first lateral movement module 150 includes a first fixed plate 151, a first transmission component 152, and a first drive component 153. The first fixed plate 151 is disposed in a second direction of the first lifting component 110 and the second lifting component 130, and the first lateral movement module 150 is disposed at the bottom end corresponding to the first lifting component 110 and the second lifting component 130. The first fixed plate 151 extends from the first lifting component 110 to the second lifting component 130. The first transmission component 152 is disposed on the first fixed plate 151. The first drive component 153 is disposed on the first fixed plate 151 and is drively connected to the first transmission component 152. The first drive component 153 can drive the first transmission component 152 to reciprocate in a first direction. The bearing surface of the first transmission component 152 is on the same plane as the bearing surface of the first conveyor line 170, and the first transmission component 152 can drive the flower basket 200 to move in a second direction.

[0064] In this embodiment, by setting the first transverse module 150 to the above structure, the structure of the first transverse module 150 can be made simpler, and the movements in different directions are separated from each other, thereby avoiding jamming of the flower basket 200.

[0065] Furthermore, the first transmission component 152 includes a first belt module 154 and a second belt module 155 arranged side by side in a first direction, and a first drive component 153 is drivenly connected to both the first belt module 154 and the second belt module 155. The first drive component 153 is configured to drive the first belt module 154 and the second belt module 155 to reciprocate synchronously along the first fixed plate 151 in a second direction.

[0066] In this embodiment, the first transmission component 152 is configured as a first belt module 154 and a second belt module 155 arranged side by side in the first direction. This ensures that the upper and lower flower baskets 200 do not interfere with each other during the circulation process, thereby improving transfer efficiency. The first belt module 154 and the second belt module 155 move synchronously in the first direction, thus simplifying the structure of the first drive component 153.

[0067] In this embodiment, the first belt module 154 and the second belt module 155 are an integral unit. The first belt module 154 and the second belt module 155 are movably mounted on the first fixed plate 151. The first drive assembly 153 is mounted on the first belt module 154 and the second belt module 155 and can drive the first belt module 154 and the second belt module 155 to move as a whole in a first direction, so that the first belt module 154 or the second belt module 155 can be aligned with the first transmission belt 117 or the second transmission belt 137, respectively.

[0068] The recycling process of Flower Basket 200 is as follows:

[0069] When the double-layer basket self-circulating feeding and receiving device 100 is running, the basket 200 containing unprocessed silicon wafers is first transferred from the second conveyor line 180 to the first lifting assembly 110. Then, the first drive assembly 153 drives the first belt module 154 and the second belt module 155 to move in the first direction toward the first lifting assembly 110, aligning the first conveyor belt 117 and the first belt module 154 in the first direction. After the silicon wafers in the basket 200 fixed on the first lifting assembly 110 have been transferred, the empty basket 200 moves in the second direction and is carried on the first belt module 154 with the cooperation of the first conveyor belt 117 and the first belt module 154. Afterward, the first belt module 154 and the second belt module 155 move in the first direction toward the second lifting assembly 130 under the action of the first drive assembly 153, aligning the second belt module 155 with the second conveyor belt 172 of the second lifting assembly 130 in the first direction. After the basket 200 fixed to the second lifting assembly 130 is filled with processed silicon wafers, the second lifting assembly 130 descends so that the second conveyor belt 137 and the second belt module 155 are on the same plane. Then, with the cooperation of the second conveyor belt 137 and the second lateral movement module 190, the basket 200 filled with processed silicon wafers moves in a second direction to the second belt module 155. Next, the first drive assembly 153 drives the first belt module 154 and the second belt module 155 to move in a first direction toward the second lifting assembly 130, aligning the first belt module 154 with the second conveyor belt 137 in the first direction. Then, with the cooperation of the first belt module 154 and the second conveyor belt 172, the empty basket 200 carrying the first belt module 154 descends and is transferred to the second conveyor belt 172 to load the processed silicon wafers. Finally, the first drive assembly 153 drives the first belt module 154 and the second belt module 155 to move along the first direction so that the second belt module 155 is aligned with the first conveyor line 170 in the first direction, and transfers the basket 200 loaded with processed silicon wafers on the second belt module 155 to the first conveyor line 170.

[0070] Of course, in some other embodiments of this application, the first belt module 154 and the second belt module 155 are also arranged side by side and separately on the first fixing plate 151, that is, either the first belt module 154 or the second belt module 155 can move independently in the first direction.

[0071] Furthermore, the first conveyor line 170 includes a first conveyor belt 171 and a second conveyor belt 172 arranged side by side along a first direction. The first conveyor assembly 152 can convey the basket 200 loaded with processed silicon wafers to the first conveyor belt 171 or the second conveyor belt 172.

[0072] In this embodiment, the first conveyor line 170 is configured as a first conveyor belt 171 and a second conveyor belt 172 arranged side by side. This allows the first conveyor line 170 to hold more baskets 200, thereby making better use of space. Furthermore, this configuration of the first transverse module 150 allows the baskets 200 filled with processed silicon wafers to be transferred to the first conveyor belt 171 and the second conveyor belt 172 without the need for other cooperating components.

[0073] In this embodiment, the second conveyor line 180 includes a third conveyor belt 181 and a fourth conveyor belt 182 arranged side by side along a first direction. The double-layer flower basket self-circulating feeding and receiving device 100 also includes a second lateral movement module 190, which is disposed between the second conveyor line 180 and the first lifting assembly 110, and at the same height as the second conveyor line 180. The second lateral movement module 190 can transport the flower baskets 200 on the third conveyor belt 181 and the fourth conveyor belt 182 to the first lifting assembly 110.

[0074] In this embodiment, the second conveyor line 180 is configured with a third conveyor belt 181 and a fourth conveyor belt 182 arranged side by side along the first direction, which can carry more flower baskets 200. By setting up a second lateral movement module 190, the flower baskets 200 transported by the third conveyor belt 181 or the fourth conveyor belt 182 can be transferred to the first lifting assembly 110. When loading the flower baskets 200 into the first lifting assembly 110, the first lifting assembly 110 is first raised until the first conveyor belt 117 is at the same height as the second lateral movement module 190. Then, the second lateral movement module 190 and the first conveyor belt 117 cooperate to transfer the flower baskets 200 onto the first conveyor belt 117 of the first lifting assembly 110 and fix them in place.

[0075] Specifically, the second lateral movement module 190 includes a second fixed plate 191, a second transmission component 192, and a second drive component 193. The second fixed plate 191 is disposed on one side of the first lifting component 110 and the second lifting component 130 in the second direction, and is located above the first lateral movement module 150. The second fixed plate 191 extends from the first lifting component 110 to the second lifting component 130. The second transmission component 192 is disposed on the second fixed plate 191, and the second drive component 193 is disposed on the second mounting plate 134 and is drively connected to the second transmission component 192. The second drive component 193 can drive the second transmission component 192 to reciprocate in the first direction. The bearing surface of the second transmission component 192 is on the same plane as the bearing surface of the second conveyor line 180, and the second transmission component 192 can drive the flower basket 200 to move in the second direction.

[0076] In this embodiment, the second transmission component 192 is disposed on the second fixed plate 191, and the second transmission component 192 can be driven by the second drive component 193 to move in the first direction so that the second transmission component 192 is aligned with one of the third transmission belt 181, the fourth transmission belt 182 and the first lifting component 110 in the first direction to transfer the flower basket 200.

[0077] Furthermore, the second transmission component 192 includes a third belt module, which is movably mounted on the second fixed plate 191. The second drive component 193 can drive the third belt module to reciprocate in the first direction, and the third belt module can transport the flower basket 200 in the second direction.

[0078] In this embodiment, only one third belt module is set in the second transmission component 192, which can meet the usage requirements and has a lower cost.

[0079] Of course, in some other embodiments of this application, the structure of the second transverse module 190 may be set to be the same as that of the first transverse module 150, that is, a fourth belt module may be set on the second mounting plate 134.

[0080] Secondly, the configuration can also be adjusted so that the second lifting assembly 130 loads materials while the first lifting assembly 110 unloads them, or so that the second conveyor line 180 inwardly conveys the basket 200 loaded with unprocessed silicon wafers while the first conveyor line 170 outwardly conveys the basket 200 loaded with processed silicon wafers. It can be seen that there are four possible combinations of operation under the same principle. This embodiment only describes in detail the cases where the first lifting assembly 110 loads materials, the second lifting assembly 130 unloads materials, the first conveyor line 170 inwardly conveys the basket 200 loaded with unprocessed silicon wafers, and the second conveyor line 180 outwardly conveys the basket 200 loaded with processed silicon wafers. Other variations are based on the same principle as this embodiment and will not be elaborated upon here, but are within the scope of protection of this application. For example, the positions of the first transverse module 150 and the second transverse module 190 can be replaced.

[0081] The double-layer flower basket self-circulating feeding and receiving device 100 provided in the above embodiments can achieve continuous and efficient operation through the following control methods.

[0082] The method includes the following steps:

[0083] S1. Determine whether the flower basket 200 fixed to the first lifting component 110 is an empty flower basket and determine whether the first transverse module 150 is transferring the empty flower basket 200.

[0084] It should be noted that determining whether the basket 200 of the first lifting assembly 110 is empty is generally done by setting sensors in the first lifting assembly 110, such as vision sensors, position sensors, and weight sensors. If the basket 200 of the first lifting assembly 110 is empty, it means that all the silicon wafers to be processed carried in the basket 200 have been transferred, and the number of silicon wafers in the basket 200 is 0. If the basket 200 of the first lifting assembly 110 is not empty, it means that the silicon wafers to be processed on the basket 200 have not yet been transferred. In this embodiment, determining whether the first transverse module 150 is transferring an empty basket 200 is done by sensors detecting whether the first belt module 154 carries a basket 200. If the first belt module 154 carries a basket 200, it is considered that the first belt module 154 is transferring an empty basket 200. If the first belt module 154 does not carry a basket 200, it is considered that the first belt module 154 is not transferring an empty basket 200.

[0085] S2. If the flower basket 200 fixed to the first lifting component 110 is an empty flower basket 200, and the first transverse module 150 is not transferring the empty flower basket 200, then control the first lifting component 110 to lift up to the same plane as the first transverse module 150, and control the first lifting component 110 and the first transverse module 150 to cooperate in transferring the empty flower basket 200 to the first transverse module 150.

[0086] Specifically, step S2 includes the following sub-steps:

[0087] S21. Control the first lifting assembly 110 to lift so that the bearing surface of the first conveyor belt 117 is on the same plane as the bearing surface of the first belt module 154 of the first transverse module 150.

[0088] S22, Control the first drive assembly 153 to drive the first belt module 154 to move in the first direction toward the first lifting assembly 110 so that the first belt module 154 and the first transmission belt 117 are aligned in the first direction;

[0089] S23. Control the first clamping element 118 to release the fixation of the flower basket 200;

[0090] S24. Then control the first conveyor belt 117 and the first belt module 154 to transport the empty flower basket 200 along the second direction from the first conveyor belt 117 to the first belt module 154, and place it on top of the first belt module 154.

[0091] S3. Determine whether the basket 200 fixed to the second lifting assembly 130 is full of processed silicon wafers;

[0092] Specifically, determining whether the flower basket 200 fixed to the second lifting assembly 130 is full of processed silicon wafers is based on the information obtained by the sensor set in the second lifting assembly 130 from the flower basket 200.

[0093] S4. If the basket 200 fixed to the second lifting assembly 130 is full of processed silicon wafers, then control the second lifting assembly 130 to cooperate with the first transverse module 150 to transfer the basket 200 full of processed silicon wafers to the first transverse module 150, and transfer the empty basket 200 carried on the first transverse module 150 to the second lifting assembly 130.

[0094] Specifically, step S4 includes the following sub-steps:

[0095] S41. Control the first drive assembly 153 to drive the second belt module 155 to move in the first direction, so that the second belt module 155 is aligned with the second transmission belt 137 in the first direction.

[0096] S42. Control the second lifting assembly 130 to lift so that the second transmission belt 137 and the second belt module 155 are on the same plane;

[0097] S43, Control the second clamping element 138 to release the fixation of the flower basket 200;

[0098] S44. Control the operation of the second conveyor belt 137 and the second belt module 155 to move the flower basket 200 carried on the second conveyor belt 137 along the second direction to the preset position of the second belt module 155.

[0099] S45. Control the first drive assembly 153 to drive the first belt module 154 and the second belt module 155 to move, so that the second belt module 155 avoids the first belt module 154, and the first belt module 154 is aligned with the second transmission belt 137 in the first direction.

[0100] S46. Then control the second conveyor belt 137 and the first belt module 154 to operate, and transfer the empty flower basket 200 carried on the first belt module 154 along the second direction to the preset position of the second conveyor belt 137.

[0101] S47, then control the second clamping element 138 to fix the flower basket 200.

[0102] This embodiment can better achieve the self-circulation of the flower basket 200 through the above method.

[0103] In this embodiment, the control method further includes the following steps before step S1:

[0104] S01. Determine whether there is a flower basket 200 on the first conveyor line 170;

[0105] It should be noted that the determination of whether there is a flower basket 200 on the first conveyor line 170 is based on the sensor installed on the first conveyor line 170.

[0106] S02. If there is no flower basket 200 on the first conveyor line 170, an alarm will be set to remind the first conveyor line 170 that there is a shortage of material, and the AGV will be activated to deliver the material.

[0107] S03. If there is a flower basket 200 on the first conveyor line 170, then determine whether there is a flower basket 200 on the second transverse module 190 (that is, determine whether there is a flower basket 200 on the third belt module).

[0108] S04. If there is no flower basket 200 on the second transverse module 190 (third belt module), control the first conveyor line 170 and the second transverse module 190 to cooperate in transferring the flower basket 200 to the second transverse module 190.

[0109] Specifically, S04 includes the following sub-steps:

[0110] S041. Control the second drive assembly 193 to drive the third belt module to move along the first direction, so that the third belt module is aligned with the third transmission belt 181 or the fourth transmission belt 182 in the first direction; (specifically, whether it is aligned with the third transmission belt 181 or the fourth transmission belt 182 is determined according to the number of flower baskets 200 carried by the third transmission belt 181 and the fourth transmission belt 182).

[0111] S042. Control the third transmission belt 181 or the fourth transmission belt 182 to cooperate with the third belt module to transfer the flower basket 200 to the third belt module.

[0112] S043. Determine whether the third belt module is aligned with the first transmission belt 117 in the first direction;

[0113] S044. If the third belt module is not aligned with the first transmission belt 117 in the first direction, then control the second drive component 193 to move the third belt module in the first direction so that the third belt module is aligned with the first transmission belt 117 in the first direction.

[0114] It should be noted that the third transmission belt 181 is aligned with the first transmission belt 117 in the first direction. If the flower basket 200 is picked up by the third belt module from the third transmission belt 181, then step S044 is not required; however, if the flower basket 200 is picked up by the third belt module from the fourth transmission belt 182, then step S044 is required.

[0115] S05. If there is a flower basket 200 on the second transverse module 190, then determine whether there is a flower basket 200 on the first lifting component 110.

[0116] S06. If there is no flower basket 200 on the first lifting component 110, control the first lifting component 110 and the second transverse module 190 to cooperate in transferring the flower basket 200 to the first lifting component 110.

[0117] Specifically, step S06 includes the following sub-steps:

[0118] S061. Control the first lifting component 110 to raise it so that the first conveyor belt 117 and the third belt module (i.e. the second transverse module 190) are at the same height;

[0119] S062. Control the operation of the third belt module and the first conveyor belt 117 to transfer the basket 200 carrying the unprocessed silicon wafers on the third belt module along the second direction to the preset position of the first conveyor belt 117.

[0120] S063, then control the first clamping member 118 to clamp the flower basket 200 from the top.

[0121] Secondly, the following steps are included after step S4:

[0122] S5. Control the first transverse module 150 and the first conveyor line 170 to transfer the basket 200 containing the processed silicon wafers to the first conveyor line 170.

[0123] Specifically, step S5 includes the following sub-steps:

[0124] S51. Determine whether there are empty spaces on the first transmission belt 171 and the second transmission belt 172;

[0125] S52. If there are no empty positions on the first conveyor belt 171 and the second conveyor belt 172, an alarm will be triggered to remind the second conveyor line 180 to fill the basket 200, and the AGV trolley will be activated to transfer the goods.

[0126] S53. If at least one of the first transmission belt 171 and the second transmission belt 172 has an empty position, the first drive assembly 153 is controlled to drive the second belt module 155 to move so that the second belt module 155 is aligned with the empty position of the first transmission belt 171 and the second transmission belt 172 in a first direction.

[0127] S54. Control the second belt module 155 to operate one of the first transmission belt 171 and the second transmission belt 172, and transfer the flower basket 200 carried on the second belt module 155 to the transmission belt.

[0128] It should be noted that during the operation of the double-layer flower basket self-circulating material feeding and receiving equipment, the detection sensor is running. When the state of a certain node changes, that is, the position of the flower basket 200 changes, the control steps or sub-steps linked to it will be activated to replenish the flower basket 200 at that position, thereby making the operation more continuous.

[0129] In summary, the double-layer flower basket self-circulating feeding and receiving device 100 provided in this embodiment, by arranging the second lifting component 130 and the first lifting component 110 at intervals in the first direction, and setting the first lateral movement module 150 on one side of the first lifting component 110 and the second lifting component 130 in the second direction, allows the first lateral movement module 150 to drive the flower basket 200 to move along the first direction or the second direction according to the transmission requirements. Since the first and second directions are perpendicular, the first lateral movement module 150 does not occupy the lateral space between the first lifting component and the second lifting component 130, thus allowing the first lifting component 110 and the second lifting component 130 to be positioned as needed, thereby improving space utilization. Most importantly, it can prevent the flower basket 200 from getting stuck during the transfer process, thus affecting the circulation of the flower basket 200. Secondly, this application arranges the first conveyor line 170 and the second conveyor line 180 at intervals in the height direction, which can avoid mutual interference in the plane, allowing the first conveyor line 170 and the second conveyor line 180 to be set wider, thus carrying and transferring more flower baskets 200.

[0130] The above are merely specific embodiments of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A double-layer flower basket self-circulating feeding and receiving device, characterized in that, include: The first lifting assembly (110) is configured to fix the basket (200) and drive the basket (200) to lift in the height direction to cooperate with the processing equipment to transfer the unprocessed silicon wafers on the basket (200) to the processing equipment; The second lifting assembly (130) is spaced apart from the first lifting assembly (110) in the first direction and is configured to fix the basket (200) and drive the basket (200) to lift in the height direction so as to cooperate with the processing equipment to place the processed silicon wafers into the empty basket (200) in sequence. The first lateral movement module (150) is disposed on one side of the first lifting component (110) and the second lifting component (130) located in the second direction, and can drive the flower basket (200) to move along the first direction and the second direction; wherein, the first direction and the second direction are perpendicular; A first conveyor line (170) and a second conveyor line (180) are arranged at intervals above the first conveyor line (170). One of the first conveyor line (170) and the second conveyor line (180) is at the same height as the first transverse module (150), and the other corresponds to the first lifting assembly (110) to convey the flower basket (200) to the first lifting assembly (110). After the basket (200) containing the silicon wafers to be processed is conveyed to the first lifting assembly (110), the silicon wafers are transferred to the processing equipment in cooperation with the first lifting assembly (110) and the processing equipment. The empty basket (200) after taking the silicon wafers will be conveyed to the first transverse module (150) in cooperation with the first lifting assembly (110) and the first transverse module (150). Then, driven by the first transverse module (150), it moves along the first direction to the second lifting assembly (110) and the processing equipment. At the corresponding position (30), the basket (200) on the second lifting assembly (130) containing the processed silicon wafers will be transferred to the first transverse module (150) with the cooperation of the second lifting assembly (130) and the first transverse module (150). Then, the basket (200) above the first transverse module (150) will be installed on the second lifting assembly (130) with the cooperation of the first transverse module (150) and the second lifting assembly (130) to load the processed silicon wafers.

2. The double-layer flower basket self-circulating feeding and receiving device according to claim 1, characterized in that, The first lifting component (110) and the second lifting component (130) are arranged opposite to each other.

3. The double-layer flower basket self-circulating feeding and receiving device according to claim 2, characterized in that, The first lifting assembly (110) includes a first guide post (111), a first flower basket fixing member (112), and a first driving member (113); The second lifting assembly (130) includes a second guide post (131), a second basket fixing member (132), and a second driving member (133). The first flower basket fixing member (112) is movably mounted on the first guide post (111), and the first flower basket fixing member (112) is located on the side of the first guide post (111) away from the first guide post (111). The first driving member (113) is located on the first guide post (111), and the first driving member (113) is configured to drive the first flower basket fixing member (112) to rise and fall. The first flower basket fixing member (112) is configured to fix the flower basket (200). The second flower basket fixing member (132) is movably mounted on the second guide post (131), and the second flower basket fixing member (132) is located on the side of the second guide post (131) opposite to the first guide post (111). The second driving member (133) is located on the second guide post (131), and the second driving member (133) is configured to drive the second flower basket fixing member (132) to rise and fall. The second flower basket fixing member (132) is configured to fix the flower basket (200).

4. The double-layer flower basket self-circulating feeding and receiving device according to claim 3, characterized in that, The first flower basket fixing component (112) includes a first mounting plate (114), a first bottom plate (115), a first top plate (116), a first conveyor belt (117), and a first clamping member (118). The first mounting plate (114) is movably mounted on the side of the first guide post (111) away from the second guide post (131). The first bottom plate (115) is disposed at the bottom of the first mounting plate (114). The first top plate (116) is disposed at the top of the first mounting plate (114). The first conveyor belt (117) is disposed at the top of the first bottom plate (115). The first clamping member (118) is disposed at the first top plate (116). The first conveyor belt (117) can transport the flower basket (200) in the second direction. The first clamping member (118) can apply pressure from the top of the flower basket (200) to the flower basket (200) to fix the flower basket (200). The second flower basket fixing member (132) includes a second mounting plate (134), a second bottom plate (135), a second top plate (136), a second conveyor belt (137), and a second clamping member (138). The second mounting plate (134) is movably mounted on the side of the second guide post (131) away from the first guide post (111). The second bottom plate (135) is disposed at the bottom of the second mounting plate (134). The second top plate (136) is disposed at the top of the second mounting plate (134). The second conveyor belt (137) is disposed at the top of the second bottom plate (135). The second clamping member (138) is disposed at the second top plate (136). The second conveyor belt (137) can transport the flower basket (200) in the second direction. The second clamping member (138) can apply pressure to the flower basket (200) from the top of the flower basket (200) to fix the flower basket (200).

5. The double-layer flower basket self-circulating feeding and receiving device according to any one of claims 1-4, characterized in that, The first transverse module (150) is at the same height as the first conveyor line (170). The first transverse module (150) can also transfer the basket (200) loaded with processed silicon wafers to the first conveyor line (170). The second conveyor line (180) is used to transfer the basket (200) carrying unprocessed silicon wafers to the first lifting assembly (110).

6. The double-layer flower basket self-circulating feeding and receiving device according to claim 5, characterized in that, The first transverse module (150) includes a first fixed plate (151), a first transmission component (152), and a first drive component (153); The first fixing plate (151) is disposed in the second direction of the first lifting assembly (110) and the second lifting assembly (130), and the first fixing plate (151) is disposed at the bottom end of the first lifting assembly (110) and the second lifting assembly (130). The first fixing plate (151) extends from the first lifting assembly (110) to the second lifting assembly (130). The first transmission component (152) is disposed on the first fixed plate (151), and the first drive component (153) is disposed on the first fixed plate (151) and is connected to the first transmission component (152) in a transmission manner. The first drive component (153) can drive the first transmission component (152) to reciprocate in the first direction. The bearing surface of the first transmission component (152) is on the same plane as the bearing surface of the first conveyor line (170), and the first transmission component (152) can drive the flower basket (200) to move in the second direction.

7. The double-layer flower basket self-circulating feeding and receiving device according to claim 6, characterized in that, The first transmission component (152) includes a first belt module (154) and a second belt module (155) arranged side by side in a first direction. The first drive component (153) is connected to both the first belt module (154) and the second belt module (155) in a transmission connection. The first drive component (153) is configured to drive either or both of the first belt module (154) and the second belt module (155) to reciprocate along the first fixed plate (151) in the first direction.

8. The double-layer flower basket self-circulating feeding and receiving device according to claim 6, characterized in that, The first conveyor line (170) includes a first conveyor belt (171) and a second conveyor belt (172) arranged side by side along the first direction. The first conveyor assembly (152) can convey baskets (200) loaded with processed silicon wafers to the first conveyor belt (171) or the second conveyor belt (172).

9. The double-layer flower basket self-circulating feeding and receiving device according to claim 5, characterized in that, The second conveyor line (180) includes a third transmission belt (181) and a fourth transmission belt (182) arranged side by side along the first direction; The double-layer flower basket self-circulating feeding and receiving device (100) further includes a second transverse module (190), which is located between the second conveyor line (180) and the first lifting component (110) and is at the same height as the second conveyor line (180). The second transverse module (190) can transport the flower baskets (200) on the third transmission belt (181) and the fourth transmission belt to the first lifting component (110).

10. The double-layer flower basket self-circulating feeding and receiving device according to claim 9, characterized in that, The second transverse module (190) includes a second fixed plate (191), a second transmission component (192), and a second drive component (193); The second fixing plate (191) is disposed on one side of the first lifting assembly (110) and the second lifting assembly (130) in the second direction, and is located above the first transverse module (150). The second fixing plate (191) extends from the first lifting assembly (110) to the second lifting assembly (130). The second transmission component (192) is disposed on the second fixed plate (191), the second drive component (193) is disposed on the second fixed plate (191), and the second drive component (193) is connected to the second transmission component (192) in a transmission manner. The second drive component (193) can drive the second transmission component (192) to reciprocate in the first direction. The bearing surface of the second transmission component (192) is on the same plane as the bearing surface of the second conveyor line (180), and the second transmission component (192) can drive the flower basket (200) to move in the second direction.

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