Tail gas heating processor

Abstract

The utility model discloses a tail gas heating treater which comprises a reaction cavity, a lining cover arranged in the reaction cavity and a temperature adjusting mechanism arranged in the lining cover, a waste gas channel surrounding the lining cover is formed between the inner wall of the reaction cavity and the outer wall of the lining cover, the top of the reaction cavity is connected with a gas inlet communicated with the waste gas channel, and a gas outlet communicated with the gas inlet is formed in the top of the reaction cavity. A heat conduction component wrapping the temperature adjusting mechanism is arranged in the lining cover, an air inlet pipe connected with an external air source is connected to the lining cover, vent holes are formed in the lining cover, and a vortex air channel communicating the vent holes with the air inlet pipe is arranged in the heat conduction component. The reaction cavity, the lining cover, the air inlet and the heat conduction part are all made of aluminum nitride ceramics. The aluminum nitride reaction cavity, the lining cover, the air inlet and the heat conduction component are corrosion-resistant, good in heat conduction effect and long in service life.

Description

Technical Field

[0001] This utility model relates to the semiconductor field, specifically to an exhaust gas heating processor. Background Technology

[0002] The main function of waste gas treatment equipment is to treat and purify generated waste gas to reduce negative impacts on the environment and human health. These devices are commonly used in industrial production, semiconductor plants, photovoltaic plants, and other waste gas treatment facilities. Their working principle is as follows: first, the heating rod is turned on to heat the reaction chamber. When the temperature inside the reaction chamber reaches the operating temperature, the waste gas to be treated is sent into the reaction chamber, and oxygen is introduced to react with it. After the reaction is complete, the reaction products are sent to a water tank for washing to ensure that the emitted gases comply with environmental regulations and standards.

[0003] This type of waste gas treatment device has the following drawbacks: 1. Because the waste gas from CVD, DIFF, IMP, and cleaning processes in semiconductor factories contains a large amount of fluoride ions and corrosive gases, it is highly corrosive to the existing stainless steel reaction chamber. If it is damaged by corrosion, the entire reaction chamber needs to be replaced, which is too costly. 2. The heating rod is located inside the reaction chamber and is in direct contact with the fluoride ions and corrosive gases in the waste gas, making it easily corroded. The maintenance cycle is short, and the service life of the heating rod is short. Utility Model Content

[0004] Based on this, and in response to the above problems, this utility model provides an exhaust gas heating processor.

[0005] The objective of this utility model can be achieved through the following technical solutions:

[0006] An exhaust gas heating processor includes a reaction chamber, an inner liner disposed inside the reaction chamber, and a temperature regulating mechanism disposed inside the inner liner. An exhaust gas channel surrounding the inner liner is formed between the inner wall of the reaction chamber and the outer wall of the inner liner. An air inlet communicating with the exhaust gas channel is connected to the top of the reaction chamber. A heat-conducting component is disposed inside the inner liner to enclose the temperature regulating mechanism. An air inlet pipe connected to an external air source is connected to the inner liner. A vent hole is opened on the inner liner. A vortex air passage communicating with the vent hole and the air inlet pipe is provided inside the heat-conducting component. The reaction chamber, the inner liner, the air inlet, and the heat-conducting component are all made of aluminum nitride ceramic.

[0007] By adopting the above technical solution, aluminum nitride, a novel ceramic material, possesses excellent thermal conductivity, is non-toxic, corrosion-resistant, and has a thermal expansion coefficient matching that of silicon. Therefore, using aluminum nitride ceramic for the reaction chamber, inner liner, and air inlet provides corrosion resistance and extends service life. Furthermore, the uniform heating surface of the aluminum nitride ceramic inner liner reduces expansion cracking caused by heat generated by the temperature control mechanism, thus extending the service life of the inner liner. The aluminum nitride ceramic reaction chamber improves overall load-bearing capacity, increases structural strength, and is less prone to cracking. In addition, the heat-conducting components enclose the temperature control mechanism. When the temperature control mechanism generates heat, the ultra-high thermal conductivity of aluminum nitride allows the reaction chamber and inner liner to heat up synchronously, quickly reaching the operating temperature. Simultaneously, it avoids direct contact between the temperature control mechanism and the exhaust gas, thereby extending the service life of the temperature control mechanism. The vortex airflow channel allows the air entering the exhaust flow channel to form a vortex, ensuring sufficient contact and reaction with the exhaust gas to be treated, thereby improving treatment efficiency.

[0008] In a specific embodiment of this utility model: the reaction chamber, the inner liner and the air inlet are all made of aluminum nitride ceramic containing adhesive.

[0009] In a specific embodiment of this utility model: the heat-conducting component is aluminum nitride ceramic without binder.

[0010] In a specific embodiment of this utility model: the temperature regulating mechanism adopts a heating coil.

[0011] In a specific embodiment of this utility model: the wall thickness of the reaction chamber is 18mm to 20mm, and the wall thickness of the inner liner is 12mm to 13mm.

[0012] In a specific embodiment of this utility model: a shell is fitted around the reaction chamber, and an insulation sleeve is fitted on the shell.

[0013] In a specific embodiment of this utility model: the heat-conducting component consists of two halves.

[0014] In summary, the reaction chamber, inner liner, air inlet, and heat-conducting components of this invention are all made of aluminum nitride ceramic, which is corrosion-resistant and extends service life. Furthermore, the aluminum nitride ceramic inner liner and reaction chamber improve the overall load-bearing capacity, increase structural strength, and are less prone to cracking. In addition, the heat-conducting components enclose the heating coil, not only preventing the heating coil from directly contacting the exhaust gas and extending its service life, but also providing excellent thermal conductivity, allowing the reaction chamber and inner liner to heat up synchronously and quickly reach the operating temperature. Attached Figure Description

[0015] The present invention will be further described below with reference to the accompanying drawings.

[0016] Figure 1This is a schematic diagram of the structure of an exhaust gas heating processor according to the present invention. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0018] Please see Figure 1 As shown, this utility model is an exhaust gas heating processor, including a reaction chamber 10, an inner liner 11 connected to the top wall of the reaction chamber 10, and a temperature regulating mechanism 12 disposed inside the inner liner 11. An exhaust gas channel 13 is formed between the inner wall of the reaction chamber 10 and the outer wall of the inner liner 11, surrounding the inner liner. An exhaust gas inlet 14 communicating with the exhaust gas channel 13 is connected to the top of the reaction chamber 10. Here, exhaust gas refers to gases containing large amounts of fluoride ions and corrosive gases found in semiconductor factory CVD, DIFF, IMP, and cleaning processes. A control valve is connected to the inlet 14 outside the reaction chamber. In this embodiment, the reaction chamber 10, the inner liner 11, and the air inlet 14 are all made by uniformly mixing aluminum nitride powder and binder at a mass ratio of 100:3-8, adding the mixture to their respective molds, gradually applying pressure to 100MPa-300MPa, pressing for 2-3 minutes to form a preform, and then firing at 1600℃-1800℃ for 2-10 hours to produce binder-containing aluminum nitride ceramic. Since aluminum nitride powder is easily hydrolyzed, the binder is a uniform mixture of toluene and paraffin wax at a weight ratio of 3-5:1. Aluminum nitride is a novel ceramic material with excellent thermal conductivity, non-toxicity, corrosion resistance, and a thermal expansion coefficient matching that of silicon. Thus, the reaction chamber, inner liner, and air inlet made of binder-containing aluminum nitride are corrosion-resistant, have a long service life, low cost, good toughness, and are less prone to cracking. Furthermore, the thermal uniformity of the heating surface of the aluminum nitride inner liner can reduce the expansion and cracking of the inner liner caused by the heat generated by the temperature regulation mechanism, extending its service life and providing good toughness. Furthermore, the reaction chamber, made of aluminum nitride, improves the overall load-bearing capacity, increases structural strength, and is less prone to cracking. The wall thickness of the reaction chamber is 18mm–20mm, and the wall thickness of the inner liner is 12mm–13mm.

[0019] In this embodiment, the temperature regulating mechanism 12 includes a heating coil 121. The coil provides strong temperature control, allowing for more precise control of the heating process. A heat-conducting component 122, which encloses the heating coil 121, is provided inside the inner liner 11. A vent 123 is provided on the inner liner 11. A vortex air passage 124, communicating with the vent 123, is provided inside the heat-conducting component 122. An air inlet pipe 125, connected to an external air source, is connected to the inner liner 11, and the air inlet pipe 125 communicates with the air passage 124. The vortex air passage allows oxygen entering the waste gas flow passage to form a vortex, ensuring sufficient contact and reaction with the waste gas to be treated, thereby improving treatment efficiency.

[0020] In this embodiment, the heat-conducting component 122 is formed by adding aluminum nitride powder into a corresponding mold, gradually applying pressure to 100-300 MPa and pressing for 2-3 minutes to form a preform, and then firing at 1600℃-1800℃ for 2-10 hours to produce a binder-free aluminum nitride ceramic. The heat-conducting component 122 consists of two halves. With this structure, the heat-conducting component encloses the heating coil. Utilizing the ultra-high thermal conductivity of aluminum nitride, when the heating coil generates heat, the reaction chamber and the inner liner can be heated synchronously, quickly reaching the working temperature of 750-800℃. At the same time, it avoids direct contact between the heating coil and the exhaust gas, thereby extending the service life of the heating coil.

[0021] In the fabrication of the reaction chamber 10, the inner liner 11, and the air inlet, a dry pressing method is used to form the preform. This is because dry-pressed preforms have accurate dimensions and high mechanical strength after firing. First, aluminum nitride powder and a binder are added to the corresponding metal mold. Pressure is slowly applied to 100–300 MPa using a press for 2–3 minutes, causing the powder to come close together within the mold and bond firmly through internal friction, forming a dense preform. Then, the preform is placed in an oven and fired at 1600–1800℃ for 2–10 hours to shape the preform. Similarly, in the fabrication of the heat-conducting component 122, a dry pressing method is also used. Aluminum nitride powder is added to the corresponding metal mold, and pressure is slowly applied to 100–300 MPa using a press for 2–3 minutes to form a dense preform. Then, the preform is placed in an oven and fired at 1600–1800℃ for 2–10 hours to shape the preform. Finally, the formed reaction chamber 10, inner liner 11, air inlet and heat conduction components are connected together by threaded connection.

[0022] The reaction chamber 10 is fitted with a shell 101. An insulation sleeve 102 is also fitted onto the shell 101.

[0023] Additionally, it includes a water tank 20 and a water washing tower 21. Both the water washing tower 21 and the reaction chamber 10 are fixed to the water tank 20, and the bottoms of both are connected to the water tank 20. Clean water 201 is placed inside the water tank 20. A first spray system 211 and a second spray system 212 are arranged at intervals from top to bottom inside the water washing tower 21. An air outlet 213 is opened at the top of the water washing tower, and a control valve is connected to the air outlet 213 outside the water washing tower. A drain pipe 202 is connected to the side of the water tank, and a valve is connected to the drain pipe 202. A liquid level sensor is installed inside the water tank, connected to the valve, for controlling the liquid level in the water tank and replacing the water in the tank with fresh water.

[0024] The above describes the exhaust gas heating processor of this utility model. Its specific working principle is as follows: During operation, the heating coil is first activated. Utilizing the rapid thermal conductivity of aluminum nitride, the reaction chamber and inner liner are heated synchronously, quickly reaching the operating temperature of 750-800℃. Simultaneously, the gas source is opened, and oxygen enters the reaction chamber 10 from the inlet pipe 125, through the gas passage 124, and through the vent 123. When the temperature of the reaction chamber 10 reaches the operating temperature, the control valve on the inlet 14 is opened, and exhaust gas enters the reaction chamber 10 through the exhaust gas passage 13 to react with the oxygen.

[0025] After the waste gas to be treated has fully reacted with oxygen in the reaction chamber 10, the reaction products enter the water tank 20 and are sprayed with water mist through the first spray system 211 and the second spray system 212. After circulating cooling and water washing treatment, the clean air is discharged from the air outlet 213 at the top of the water washing tower.

[0026] In summary, the reaction chamber, inner liner, air inlet, and heat-conducting components of this invention are all made of aluminum nitride, which is corrosion-resistant and extends service life. Furthermore, the aluminum nitride inner liner and reaction chamber improve overall load-bearing capacity, increase structural strength, and are less prone to cracking. In addition, the heat-conducting components enclose the heating coil, not only preventing the heating coil from directly contacting the exhaust gas and extending its service life, but also providing excellent thermal conductivity, allowing the reaction chamber and inner liner to heat up synchronously and quickly reach operating temperature.

[0027] The above description provides a detailed account of one embodiment of the present invention. However, this description is merely a preferred embodiment and should not be construed as limiting the scope of the present invention. All equivalent variations and improvements made within the scope of the claims of the present invention should still fall within the patent coverage of the present invention.

Claims

1. A tail gas heating processor, characterized in that, The device includes a reaction chamber, an inner liner inside the reaction chamber, and a temperature control mechanism inside the inner liner. An exhaust gas channel surrounds the inner liner between the inner wall of the reaction chamber and the outer wall of the inner liner. An air inlet communicating with the exhaust gas channel is connected to the top of the reaction chamber. A heat-conducting component is disposed inside the inner liner to enclose the temperature control mechanism. An air inlet pipe connected to an external air source is connected to the inner liner. A vent hole is opened on the inner liner. The heat-conducting component has a vortex air passage communicating with the vent hole and the air inlet pipe. The reaction chamber, inner liner, air inlet, and heat-conducting component are all made of aluminum nitride ceramic.

2. The exhaust gas heating processor according to claim 1, characterized in that, The reaction chamber, inner liner, and air inlet are all made of aluminum nitride ceramic with adhesive.

3. The exhaust gas heating processor according to claim 1, characterized in that, The thermally conductive component is an aluminum nitride ceramic without binder.

4. The exhaust gas heating processor according to claim 1, characterized in that, The temperature regulation mechanism uses a heating coil.

5. The exhaust gas heating processor according to claim 1, characterized in that, The reaction chamber is covered by a shell, and an insulation sleeve is fitted on the shell.

6. The exhaust gas heating processor according to claim 1, characterized in that, The reaction chamber has a wall thickness of 18mm to 20mm, and the inner liner has a wall thickness of 12mm to 13mm.

7. The exhaust gas heating processor according to claim 1, characterized in that, The heat-conducting component consists of two halves.

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