Carrying platform jacking mechanism and detection equipment

Abstract

The utility model relates to a carrying table jacking mechanism and detection equipment, and the carrying table jacking mechanism comprises a jacking fixing plate which is provided with at least two jacking assemblies, and the at least two jacking assemblies are connected through a synchronous transmission mechanism; the jacking plate is located on one side of the jacking fixing plate, the jacking plate is provided with jacking blocks corresponding to the jacking assemblies, and at least two jacking blocks are distributed on the different sides of the jacking plate; and the driving piece is installed on the jacking fixing plate, the driving piece is connected with one jacking assembly, the driving piece is configured to drive the jacking assembly to move, and meanwhile the synchronous transmission mechanism drives the at least two jacking assemblies to synchronously jack the jacking block. According to the jacking device, the synchronous transmission mechanism is arranged to connect the at least two jacking assemblies, when the driving part drives one jacking assembly to jack, the synchronous transmission mechanism can synchronously drive the other jacking assemblies to synchronously jack the jacking plate together, the stability of the jacking plate in the jacking process is improved, and the jacking plate is not prone to clamping stagnation.

Description

Technical Field

[0001] This application relates to the field of wafer inspection technology, specifically to a stage lifting mechanism and inspection equipment. Background Technology

[0002] Currently, in the field of wafer inspection, the stage lifting mechanism is one of the most crucial components. It is primarily used to transfer wafer products with robotic arms, ensuring stable transport and positioning of the wafers. Furthermore, due to the high precision and value of wafer products, the stability and accuracy requirements for the stage lifting mechanism are extremely high.

[0003] In related technologies, current stage lifting mechanisms typically involve setting up an independent cylinder on each side of the lifting plate, allowing the cylinders on both sides to lift the lifting plate from opposite sides, achieving dual-cylinder lifting. However, when the cylinders on both sides of the lifting plate are lifting, there can sometimes be a height difference between them, causing the two sides of the lifting plate to rise asynchronously. This results in poor stability of the wafer during the lifting process and the lifting plate is prone to jamming.

[0004] Therefore, it is necessary to design a new platform lifting mechanism to overcome the above problems. Summary of the Invention

[0005] This application provides a platform lifting mechanism and testing equipment, which can solve the technical problems of poor lifting stability and easy jamming of the lifting plate in related technologies.

[0006] In a first aspect, embodiments of this application provide a platform lifting mechanism, comprising: a lifting fixing plate, wherein at least two lifting components are mounted on the lifting fixing plate and the at least two lifting components are connected by a synchronous transmission mechanism; a lifting plate located on one side of the lifting fixing plate, wherein the lifting plate is provided with a lifting block corresponding to each of the lifting components, and at least two of the lifting blocks are distributed on different sides of the lifting plate; and a driving member mounted on the lifting fixing plate and connected to one of the lifting components, wherein the driving member is configured to drive the lifting component to move, and simultaneously drive at least two of the lifting components to synchronously lift the lifting blocks through the synchronous transmission mechanism.

[0007] In conjunction with the first aspect, in one embodiment, the lifting assembly includes a rotating shaft rotatably mounted on the lifting fixing plate, and a lifting member is provided below the lifting block corresponding to the rotating shaft; the rotating shafts of the at least two lifting assemblies are connected through the synchronous transmission mechanism, and one of the rotating shafts is rotatably connected to the driving member.

[0008] In conjunction with the first aspect, in one embodiment, the lifting member includes: a fixing block fixed to the rotating shaft; and a lifting roller rotatably mounted on the fixing block, wherein the axis of the lifting roller is parallel to the axis of the rotating shaft.

[0009] In conjunction with the first aspect, in one embodiment, when the lifting plate moves from the lifting state to the reset state, there is a gap between the lifting block and the lifting roller.

[0010] In conjunction with the first aspect, in one embodiment, the synchronous transmission mechanism includes: two transmission blocks, each fixed to a different rotating shaft; and a transmission rod, the two ends of which are rotatably connected to the two transmission blocks.

[0011] In conjunction with the first aspect, in one embodiment, the lifting plate is fixedly provided with a mounting base, and a vacuum adsorption assembly is threadedly connected to the mounting base.

[0012] In conjunction with the first aspect, in one embodiment, the mounting base has a first mounting hole and a second mounting hole coaxially arranged, the first mounting hole communicating with the second mounting hole, and the first mounting hole having an internal thread; the vacuum adsorption assembly has a threaded connection section and a sealing section, the threaded connection section being inserted into the first mounting hole; the sealing section being installed in the second mounting hole, and the sealing section being at least partially inserted into the lifting plate, and a sealing ring being provided at the mating surface of the mounting base, the lifting plate, and the sealing section.

[0013] In conjunction with the first aspect, in one embodiment, the platform lifting mechanism further includes a platform fixing plate, the platform fixing plate and the lifting fixing plate being located on opposite sides of the lifting plate; the platform fixing plate is fixedly provided with a lifting guide rail, and the lifting plate is slidably mounted on the lifting guide rail.

[0014] In conjunction with the first aspect, in one embodiment, a return spring is further provided between the platform fixing plate and the lifting plate.

[0015] Secondly, embodiments of this application provide a testing device, which includes the aforementioned platform lifting mechanism.

[0016] The beneficial effects of the technical solutions provided in this application include:

[0017] By setting up a synchronous transmission mechanism to connect at least two lifting components, when the driving component drives one of the lifting components to lift, the synchronous transmission mechanism can synchronously drive the other lifting components to lift the lifting blocks on different sides of the lifting plate synchronously. This allows the different sides of the lifting plate to rise synchronously through a single driving component, improving the stability of the lifting plate during the lifting process and making it less prone to jamming. This solves the technical problems of poor lifting stability and easy jamming of the lifting plate in related technologies. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A three-dimensional structural schematic diagram of a platform lifting mechanism provided in an embodiment of this application;

[0020] Figure 2 A top view of the platform lifting mechanism provided in an embodiment of this application;

[0021] Figure 3 A side view of the platform lifting mechanism provided in an embodiment of this application;

[0022] Figure 4 This is a structural schematic diagram of the platform lifting mechanism provided in an embodiment of this application from another perspective;

[0023] Figure 5 This is a schematic diagram of the structure of the lifting plate provided in the embodiments of this application;

[0024] Figure 6 A cross-sectional view of the vacuum adsorption assembly installed on the lifting plate according to an embodiment of this application;

[0025] Figure 7 This is a schematic diagram of the structure of a testing device provided in an embodiment of this application.

[0026] In the picture:

[0027] 1. Lifting and fixing plate;

[0028] 2. Lifting assembly; 21. Rotary shaft; 22. Lifting component; 221. Fixing block; 222. Lifting roller; 23. Mounting block; 24. Connecting seat;

[0029] 3. Synchronous transmission mechanism; 31. Transmission block; 32. Transmission rod;

[0030] 4. Lifting plate; 41. Lifting block; 42. Upper and lower limit buffer assembly;

[0031] 51. Driving components; 52. DD motor;

[0032] 6. Mounting base; 61. First mounting hole; 62. Second mounting hole;

[0033] 7. Vacuum adsorption assembly; 71. Suction cup connecting rod; 72. Vacuum suction cup; 73. Threaded connection section; 74. Sealing section;

[0034] 8. Platform fixing plate; 81. Lifting guide rail;

[0035] 9. Return spring; 10. Ceramic stage. Detailed Implementation

[0036] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present application.

[0037] This application provides a platform lifting mechanism and testing equipment, which can solve the technical problems of poor lifting stability and easy jamming of the lifting plate in related technologies.

[0038] See Figure 1 and Figure 2 As shown, an embodiment of this application provides a platform lifting mechanism, which may include: a lifting fixing plate 1, on which at least two lifting components 2 are mounted, and the at least two lifting components 2 are connected by a synchronous transmission mechanism 3; a lifting plate 4, located on one side of the lifting fixing plate 1, and the lifting plate 4 is provided with a lifting block 41 corresponding to each of the lifting components 2, and at least two of the lifting blocks 41 are distributed on different sides of the lifting plate 4; a driving member 51, which is mounted on the lifting fixing plate 1, and the driving member 51 is connected to one of the lifting components 2, the driving member 51 being configured to drive the lifting component 2 to move, and simultaneously drive at least two of the lifting components 2 to synchronously lift the lifting blocks 41 through the synchronous transmission mechanism 3.

[0039] In this embodiment, the lifting fixing plate 1 can be fixed to the X-axis, Y-axis, or Z-axis of the detection equipment. Two lifting components 2, or three or four equal numbers of lifting components 2 can be installed on the lifting fixing plate 1. Preferably, two lifting components 2 are provided, distributed on the left and right sides of the lifting plate 4, allowing the lifting plate 4 to be lifted from both sides. Simultaneously, a lifting block 41 is provided on each of the left and right sides of the lifting plate 4 (of course, when there are multiple lifting components 2, multiple lifting blocks 41 can also be provided accordingly, for example, four symmetrically arranged on the four sides of the lifting plate 4). Each lifting block 41 is located above a corresponding lifting component 2. The lifting block 41 may or may not contact the lifting component 2. During the lifting process, the lifting block 41 will contact the lifting component 2, causing the lifting component 2 to lift the lifting block 41. In this embodiment, the driving component 51 can be, for example, a single lifting cylinder or a servo motor providing power. See also... Figure 7 As shown, the platform lifting mechanism may also include a DD motor 52, and the lifting plate 4 may be installed on the DD motor 52 so that the DD motor 52 can drive the lifting plate 4 to rotate coaxially. The DD motor 52 and the lifting fixing plate 1 are fixed together to the X-axis, Y-axis or Z-axis of the testing equipment.

[0040] In this embodiment, at least two lifting components 2 are connected by a synchronous transmission mechanism 3. When the driving component 51 drives one of the lifting components 2 to lift, the synchronous transmission mechanism 3 can synchronously drive the other lifting components 2 to lift the lifting blocks 41 on different sides of the lifting plate 4. This allows the different sides of the lifting plate 4 to rise synchronously with a single driving component 51, improving the stability of the lifting plate 4 during the lifting process and ensuring the stability of the wafer during the lifting process. Furthermore, since the different sides of the lifting plate 4 rise synchronously, the lifting plate 4 is less likely to tilt during the rising process, thus preventing jamming. This solves the technical problems of poor lifting stability and easy jamming of the lifting plate 4 in related technologies.

[0041] Furthermore, in one embodiment, see... Figure 1 and Figure 4As shown, the lifting assembly 2 may include a rotating shaft 21, which is rotatably mounted on the lifting fixing plate 1, and a lifting member 22 is provided below the lifting block 41 corresponding to the rotating shaft 21; the rotating shafts 21 of at least two lifting assemblies 2 are connected by the synchronous transmission mechanism 3, and one of the rotating shafts 21 is rotatably connected to the driving member 51. In this embodiment, two mounting blocks 23 are fixed on the lifting fixing plate 1 corresponding to the mounting position of each lifting assembly 2, and both ends of each rotating shaft 21 are rotatably mounted to the two mounting blocks 23 by bearings, so that the rotating shaft 21 can rotate relative to the lifting fixing plate 1; a lifting member 22 is fixed near one of the mounting blocks 23 for each rotating shaft 21, preferably located directly below the lifting block 41, and a connecting seat 24 can be fixed near one of the rotating shafts 21, so that the rotating shaft 21 is rotatably connected to the driving member 51 through the connecting seat 24.

[0042] In this embodiment, the lifting cylinder is used as an example to illustrate the driving component 51. The telescopic rod of the lifting cylinder is rotatably connected to the connecting seat 24. When the telescopic rod extends out of the lifting cylinder, it drives the left rotating shaft 21 to rotate around the axis of the rotating shaft 21. At the same time, the rotating shaft 21 drives the lifting component 22 on it to rotate. During the rotation, the lifting component 22 can gradually contact the lifting block 41 and lift the lifting block 41 gradually. After the rotating shaft 21 connected to the driving component 51 rotates, the rotating shaft 21 can transmit power to the right rotating shaft 21 connected to the synchronous transmission mechanism 3 through the synchronous transmission mechanism 3, thereby synchronously driving the right rotating shaft 21 to rotate synchronously. This causes the lifting component 22 on the right rotating shaft 21 and the lifting component 22 on the left rotating shaft 21 to synchronously lift the lifting blocks 41 on both sides of the lifting plate 4 upward. In this embodiment, a rotating shaft 21 and a lifting member 22 thereon are used as the lifting assembly 2. The lifting block 41 can be raised simply by directly driving the rotating shaft 21 to rotate around its axis. The lifting assembly 2 has a simple structure, and the power can be smoothly transmitted to the lifting member 22 through the lifting cylinder. In this embodiment, the left lifting member 22 is located to the right of the left rotating shaft 21, and the right lifting member 22 is located to the right of the right rotating shaft 21. Figure 4 (As shown).

[0043] See Figure 1As shown, in some preferred embodiments, the lifting member 22 may include: a fixing block 221, which is fixed to the rotating shaft 21; and a lifting roller 222, which is rotatably mounted on the fixing block 221, and the axis of the lifting roller 222 is parallel to the axis of the rotating shaft 21. In this embodiment, the fixing block 221 is fixed relative to the rotating shaft 21, and a groove is formed in the fixing block 221. The lifting roller 222 is accommodated in the groove, and the lifting roller 222 can rotate relative to the fixing block 221 about its axis. When lifting is not required (i.e., both the lifting plate 4 and the rotating shaft 21 are in the reset state), the lifting roller 222 and the rotating shaft 21 can be located almost on the same horizontal plane. When the driving member 51 drives the rotating shaft 21 to rotate, the roller... The shaft 21 synchronously drives the fixed block 221 to rotate around the axis of the shaft 21, and also drives the lifting roller 222 to rotate around the axis of the shaft 21. The lifting roller 222 gradually rises, thereby lifting the lifting block 41 upward. During the process of lifting the lifting block 41, the lifting roller 222 can also roll around its axis, so that the friction between the lifting roller 222 and the lifting block 41 is rolling friction, which can reduce the wear on the lifting block 41 and the lifting roller 222.

[0044] Based on the above technical solution, preferably, when the lifting plate 4 moves from the lifting state to the reset state, there is a gap between the lifting block 41 and the lifting roller 222 (see...). Figure 3 (As shown). In this embodiment, during the process of lifting the lifting block 41 upward, the lifting roller 222 is in contact with the lifting block 41. After the lifting plate 4 completes the lifting, the lifting plate 4 will move downward to the reset state. At the same time, the driving component 51 will also synchronously drive the rotating shaft 21 and the lifting roller 222 on it to rotate to the reset state (it should be understood that the rotation here is the same angle in the opposite direction to the lifting process). At this time, the lifting roller 222 is not in contact with the lifting block 41, ensuring that the lifting plate 4 will not interfere with the lifting block 41 during the rotation of the DD motor 52.

[0045] Furthermore, in one embodiment, see... Figure 1 and Figure 4As shown, the synchronous transmission mechanism 3 may include: two transmission blocks 31, each fixed to a different rotating shaft 21; and a transmission rod 32, with both ends of the transmission rod 32 rotatably connected to the two transmission blocks 31. In this embodiment, the left transmission block 31 is fixed to one end of the left rotating shaft 21, and the right transmission block 31 is fixed to one end of the right rotating shaft 21. Both the left and right rotating blocks can rotate relative to the lifting fixed plate 1, and the left and right transmission blocks 31 are connected by the transmission rod 32, so that the left and right transmission blocks 31, the transmission rod 32, and the lifting fixed plate 1 together form a parallelogram mechanism. This parallelogram mechanism is used to achieve synchronous lifting on both sides, increasing the stability of the overall structure.

[0046] Furthermore, in some embodiments, see Figure 1 and Figure 4 As shown, the platform lifting mechanism may further include a platform fixing plate 8, which is located on opposite sides of the lifting plate 4, along with the lifting fixing plate 1. The platform fixing plate 8 is fixedly provided with lifting guide rails 81, and the lifting plate 4 is slidably mounted on the lifting guide rails 81. In this embodiment, a ceramic platform 10 can be fixed on the platform fixing plate 8, which is used to support the wafer. The platform fixing plate 8 is located above the lifting plate 4, and both the platform fixing plate 8 and the lifting plate 4 are mounted to the DD motor 52, allowing them to rotate together. Preferably, four lifting guide rails 81 are fixed around the platform fixing plate 8, evenly distributed along the circumference of the platform fixing plate 8. Slider blocks can be provided on the four sides of the lifting plate 4, with each slider corresponding to one of the lifting guide rails 81. This allows the lifting plate 4 to be guided by the lifting guide rails 81 during lifting and lowering, enhancing the stability of wafer handling.

[0047] Preferred, see Figure 1 As shown, a return spring 9 can also be provided between the platform fixing plate 8 and the lifting plate 4. In this embodiment, multiple return springs 9 can be provided between the platform fixing plate 8 and the lifting plate 4. When the lifting plate 4 is being lifted, the return spring 9 is compressed. After the lifting plate 4 has finished lifting, the return spring 9 can help the lifting plate 4 move downward to reset, so that the lifting plate 4 can be smoothly reset even after long-term use.

[0048] See Figures 2 to 4 As shown, the lifting plate 4 is also provided with an upper and lower limit buffer assembly 42 at the position corresponding to the lifting block 41. The upper and lower limit buffer assembly 42 connects the lifting plate 4 to the platform fixing plate 8. During the descent of the lifting plate 4, the upper and lower limit buffer assembly 42 can buffer the lifting plate 4, so that the lifting plate 4 descends slowly. The upper and lower limit buffer assembly 42 can limit the upper and lower limit positions of the lifting plate 4 to prevent the lifting plate 4 from moving down too much.

[0049] Furthermore, in one embodiment, see... Figure 5 As shown, the lifting plate 4 is fixedly provided with a mounting base 6, and a vacuum adsorption assembly 7 is threadedly connected to the mounting base 6. In this embodiment, the mounting base 6 can be detachably fixed to the lifting plate 4 by bolts or screws. The mounting base 6 has internal threads, and the vacuum adsorption assembly 7 can have external threads, so that the vacuum adsorption assembly 7 can be detachably installed to the lifting plate 4 through the internal and external threads. At the same time, the internal and external threads extend in a direction perpendicular to the lifting plate 4. By screwing on a single vacuum adsorption assembly 7, the height of a single vacuum adsorption assembly 7 can be finely adjusted to adapt to the flatness of the ceramic stage 10 surface, solving the problem of wafer product offset when wafers are placed on the ceramic stage 10, achieving consistency in wafer loading position, and improving the stability of subsequent inspection processes. In this embodiment, three vacuum adsorption assemblies 7 are preferably installed on the lifting plate 4.

[0050] See Figure 6 As shown, based on the above technical solution, preferably, the mounting base 6 has a first mounting hole 61 and a second mounting hole 62 coaxially arranged, the first mounting hole 61 and the second mounting hole 62 are connected, and the first mounting hole 61 is provided with an internal thread; the vacuum adsorption assembly 7 has a threaded connection section 73 and a sealing section 74, the threaded connection section 73 is inserted into the first mounting hole 61; the sealing section 74 is installed in the second mounting hole 62, and the sealing section 74 is at least partially inserted into the lifting plate 4, and a sealing ring is provided at the joint surface of the mounting base 6, the lifting plate 4 and the sealing section 74.

[0051] In this embodiment, the length of the threaded connection section 73 is preferably set to be greater than the length of the first mounting hole 61 along its axial direction, so that the threaded connection section 73 can be properly connected with the internal thread in the first mounting hole 61 regardless of whether the vacuum adsorption assembly 7 moves upward or downward, ensuring the connection strength of the vacuum adsorption assembly 7. The vacuum adsorption assembly 7 includes a suction cup connecting rod 71 and a vacuum suction cup 72 installed at one end of the suction cup connecting rod 71. The aforementioned threaded connection section 73 and sealing section 74 are both provided on the suction cup connecting rod 71. The outer diameter of the sealing section 74 is greater than the outer diameter of the threaded connection section 73, and the sealing section 74 is located below the threaded connection section 73, so as to form a seal at the bottom of the suction cup connecting rod 71 with the lifting plate 4 and the mounting base 6, preventing air leakage at the contact point between the suction cup connecting rod 71, the lifting plate 4, and the mounting base 6.

[0052] In this embodiment of the application, when the platform lifting mechanism is working, the telescopic rod of the lifting cylinder can extend and retract to drive the rotating shaft 21 to rotate. At the same time, the parallelogram mechanism drives the rotating shaft 21 on the other side to rotate, so as to realize the synchronous lifting of the lifting blocks 41 on both sides. The up and down lifting of the lifting blocks 41 drives the lifting plate 4 and the vacuum adsorption component 7 on the lifting plate 4 to move up and down, thereby realizing the wafer picking and placing process.

[0053] See Figure 7 As shown in the illustration, this application embodiment also provides a testing device, which may include the aforementioned stage lifting mechanism. The stage lifting mechanism in this embodiment can be any of the stage lifting mechanisms provided in the above embodiments and achieve the corresponding functions, which will not be elaborated further here. The testing device in this embodiment is mainly used for wafer testing, and the testing device may be equipped with an X-axis, a Y-axis, and a Z-axis. The aforementioned stage lifting mechanism is mounted on the X-axis, Y-axis, or Z-axis.

[0054] In the description of this application, it should be noted that the terms "upper," "lower," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Unless otherwise expressly specified and limited, the terms "installed," "connected," and "linked" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication between two elements. For those skilled in the art, the specific meaning of the above terms in this application can be understood according to the specific circumstances.

[0055] It should be noted that in this application, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0056] The above description is merely a specific embodiment of this application, enabling those skilled in the art to understand or implement this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features claimed herein.

Claims

1. A platform lifting mechanism, characterized in that, It includes: A lifting fixing plate (1) is provided, wherein at least two lifting components (2) are installed on the lifting fixing plate (1), and the at least two lifting components (2) are connected by a synchronous transmission mechanism (3); A lifting plate (4) is located on one side of the lifting fixing plate (1), and the lifting plate (4) is provided with a lifting block (41) for each of the lifting components (2), and at least two of the lifting blocks (41) are distributed on different sides of the lifting plate (4); A drive unit (51) is mounted on the lifting fixing plate (1) and is connected to one of the lifting components (2). The drive unit (51) is configured to drive the lifting component (2) to move and simultaneously drive at least two of the lifting components (2) to lift the lifting block (41) synchronously through the synchronous transmission mechanism (3).

2. The platform lifting mechanism as described in claim 1, characterized in that, The lifting assembly (2) includes a rotating shaft (21), which is rotatably mounted on the lifting fixing plate (1), and a lifting component (22) is provided below the lifting block (41) corresponding to the rotating shaft (21); The shafts (21) of the at least two lifting components (2) are connected by the synchronous transmission mechanism (3), and one of the shafts (21) is rotatably connected to the drive member (51).

3. The platform lifting mechanism as described in claim 2, characterized in that, The lifting component (22) includes: A fixing block (221) is fixed to the rotating shaft (21); A lifting roller (222) is rotatably mounted on the fixed block (221), and the axis of the lifting roller (222) is parallel to the axis of the rotating shaft (21).

4. The platform lifting mechanism as described in claim 3, characterized in that, When the lifting plate (4) moves from the lifting state to the reset state, there is a gap between the lifting block (41) and the lifting roller (222).

5. The platform lifting mechanism as described in claim 2, characterized in that, The synchronous transmission mechanism (3) includes: Two transmission blocks (31), each of which is fixed to a different rotating shaft (21); A transmission rod (32) is rotatably connected to two transmission blocks (31) at both ends.

6. The platform lifting mechanism as described in claim 1, characterized in that, The lifting plate (4) is fixedly provided with a mounting base (6), and a vacuum adsorption assembly (7) is threadedly connected to the mounting base (6).

7. The platform lifting mechanism as described in claim 6, characterized in that, The mounting base (6) has a first mounting hole (61) and a second mounting hole (62) arranged coaxially. The first mounting hole (61) communicates with the second mounting hole (62), and the first mounting hole (61) is provided with an internal thread. The vacuum adsorption assembly (7) has a threaded connection section (73) and a sealing section (74). The threaded connection section (73) is inserted into the first mounting hole (61). The sealing section (74) is installed in the second mounting hole (62), and the sealing section (74) is at least partially inserted into the lifting plate (4). A sealing ring is provided at the mating surface of the mounting base (6), the lifting plate (4), and the sealing section (74).

8. The platform lifting mechanism as described in claim 1, characterized in that, The platform lifting mechanism also includes a platform fixing plate (8), which is located on opposite sides of the lifting plate (4) and the lifting fixing plate (1). The platform fixing plate (8) is fixedly provided with a lifting guide rail (81), and the lifting plate (4) is slidably installed on the lifting guide rail (81).

9. The platform lifting mechanism as described in claim 8, characterized in that, A return spring (9) is also provided between the platform fixing plate (8) and the lifting plate (4).

10. A testing device, characterized in that, It includes the platform lifting mechanism as described in claim 1.

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