Silane filling device

Abstract

The utility model discloses a silane filling device which comprises a first buffer tank, a compressor unit, a collecting pipe set and a second buffer tank, the air outlet end of the first buffer tank is communicated with a passivation replacement system, and the air outlet end of the passivation replacement system is communicated with a normal filling system. The gas outlet end of the normal filling system and the gas outlet end of the passivation replacement system are both communicated with the second buffer tank. According to the silane filling device, the first buffer tank, the compressor unit, the collecting pipe set, the second buffer tank, the normal filling system, the passivation replacement system, the vacuum pump set, the rectifying tower and the auxiliary compressor are arranged, the compressor unit can be matched with the collecting pipe set, the collecting pipe set is used for collecting silane pumped out by the compressor unit, a single filling position is connected with the multiple collecting pipe sets, and the working efficiency is improved. One or more compressor units can be adopted for filling according to the required production rhythm, and the situation that the working capacity of the compressor units is wasted or the filling speed is increased is avoided.

Description

Technical Field

[0001] This utility model belongs to the field of silane production technology, and specifically relates to a silane filling device. Background Technology

[0002] Silane (SiH4) is a highly reducing gas. Due to its flammable and explosive properties, special safety measures must be taken during filling operations. To ensure the safety of the operation process, before filling with silane, the system is usually purged and evacuated using inert gases such as nitrogen or helium to thoroughly remove air and moisture from the system and prevent them from reacting with the silane in a potentially dangerous manner.

[0003] In the silane production process, after silane is produced by the silane production unit, it is stored in a silane tank area. From there, it enters the filling system and is filled into tank trucks for final sale. Currently, a common method is to use a single compressor or two compressors to supply gas to a filling panel, from which the gas is filled into the tank trucks. Substandard silane is treated as waste gas. This method has drawbacks: high energy consumption, difficulty in controlling the filling speed, disruption of normal filling during maintenance, and waste of substandard silane. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a silane filling device to solve the problems of high energy consumption, difficulty in controlling the filling speed, disruption of normal filling during maintenance, and waste of substandard silane in existing silane filling devices.

[0005] The technical objective of this utility model is achieved through the following technical solution:

[0006] A silane filling device includes a first buffer tank, a compressor unit, a manifold assembly, and a second buffer tank. The outlet of the first buffer tank is connected to a passivation and replacement system, and the outlet of the passivation and replacement system is connected to a normal filling system. The outlets of both the normal filling system and the passivation and replacement system are connected to the second buffer tank. The inlets of the first buffer tank, the second buffer tank, the normal filling system, and the passivation and replacement system are all connected to a nitrogen purification system and a helium purification system. Each of the first buffer tank, the second buffer tank, the normal filling system, and the passivation and replacement system is equipped with a vacuum pump assembly. The outlet of the second buffer tank is connected to an auxiliary compressor, and the outlet of the auxiliary compressor is connected to a distillation column.

[0007] Preferably, the number of compressor units is six, and the outlet of each compressor unit is connected to the manifold assembly.

[0008] Preferably, the buffer tank is connected to the passivation and replacement system, and the passivation and replacement system is connected to the normal filling system via a compressor unit and a manifold assembly.

[0009] Preferably, the air inlet of the buffer tank is connected to an external silane source, and the vacuum pump group includes three vacuum pumps.

[0010] Preferably, the exhaust gas ends of buffer tank one, buffer tank two, normal filling system and passivation replacement system are all connected to an exhaust gas treatment system, and the normal filling system and passivation replacement system are all equipped with a detection system.

[0011] Preferably, the nitrogen purification system includes a nitrogen source and a nitrogen purification element, wherein the inlet end of the nitrogen purification element is connected to the nitrogen source.

[0012] Preferably, the helium purification system includes a helium source and a helium purification element, wherein the inlet of the helium purification element is connected to the helium source.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] This silane filling device, consisting of a buffer tank, a compressor unit, a manifold assembly, a second buffer tank, a normal filling system, a passivation and replacement system, a vacuum pump unit, a distillation column, and an auxiliary compressor, offers the advantage of multi-speed filling. The compressor unit and manifold assembly work together, with the manifold assembly collecting the silane pumped by the compressor unit. A single filling station connects to multiple manifold assemblies, allowing for simultaneous filling using one or more compressor units according to the required production pace. This avoids wasting compressor capacity or slowing down the filling speed. Attached Figure Description

[0015] Figure 1 This is a system schematic diagram of the silane filling device.

[0016] Figure 2 This is a schematic diagram of the passivation replacement system in this silane filling device.

[0017] Figure 3 This is a schematic diagram of the normal filling system in this silane filling device.

[0018] Figure 4 This is a schematic diagram of buffer tank two in this silane filling device.

[0019] Figure 5 This is a schematic diagram of the nitrogen purification system in this silane filling device.

[0020] Figure 6 This is a schematic diagram of the helium purification system in this silane filling device.

[0021] Figure 7 This is a schematic diagram of the vacuum pump unit in this silane filling device.

[0022] In the above attached diagrams: 1. Buffer tank one; 2. Compressor unit; 3. Manifold assembly; 4. Buffer tank two; 5. Normal filling system; 6. Passivation and replacement system; 7. Vacuum pump assembly; 8. Tail gas treatment system; 9. Nitrogen purification system; 901. Nitrogen source; 902. Nitrogen purification component; 10. Helium purification system; 1001. Helium source; 1002. Helium purification component; 11. Detection system; 12. Distillation column; 13. Auxiliary compressor. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] As shown in the figure Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 , Figure 6 and Figure 7 As shown, this silane filling device mainly consists of a buffer tank 1, a compressor unit 2, a manifold unit 3, and a buffer tank 4. The outlet of the buffer tank 1 is connected to a passivation and replacement system 6, and the outlet of the passivation and replacement system 6 is connected to a normal filling system 5. The outlets of both the normal filling system 5 and the passivation and replacement system 6 are connected to the buffer tank 4. The inlet of the buffer tank 1, the buffer tank 4, the normal filling system 5, and the passivation and replacement system 6 are all connected to a nitrogen purification system 9 and a helium purification system 10. Vacuum pump units 7 are installed in the buffer tank 1, the buffer tank 4, the normal filling system 5, and the passivation and replacement system 6. The outlet of the buffer tank 4 is connected to an auxiliary compressor 13, and the outlet of the auxiliary compressor 13 is connected to a distillation column 12.

[0025] In actual manufacturing, the specific implementation method is as follows: there are six compressor units 2, and the outlet end of the compressor unit 2 is connected to the manifold group 3.

[0026] In actual manufacturing, the specific implementation method is as follows: the buffer tank 1 and the passivation replacement system 6, and the passivation replacement system 6 and the normal filling system 5 are all connected through the compressor unit 2 and the manifold group 3.

[0027] In actual manufacturing, the specific implementation method is as follows: the air inlet of buffer tank 1 is connected to an external silane source, and the vacuum pump group 7 includes three vacuum pumps.

[0028] In actual manufacturing, the specific implementation method is as follows: the exhaust gas ends of buffer tank 1, buffer tank 2, normal filling system 5 and passivation replacement system 6 are all connected to exhaust gas treatment system 8, and detection system 11 is installed in both normal filling system 5 and passivation replacement system 6.

[0029] In actual manufacturing, the nitrogen purification system 9 mainly consists of a nitrogen source 901 and a nitrogen purification component 902. Specifically, the inlet end of the nitrogen purification component 902 is connected to the nitrogen source 901.

[0030] In actual manufacturing, the helium purification system 10 mainly consists of a helium source 1001 and a helium purification component 1002. Specifically, the inlet end of the helium purification component 1002 is connected to the helium source 1001.

[0031] In actual manufacturing, the specific implementation method is as follows: the normal filling system 5 and the passivation replacement system 6 contain filling positions, filling valve groups and pipelines, and each system is equipped with a filling position with a weighing system.

[0032] During use, the high-purity nitrogen and high-purity helium provided by the nitrogen purification system 9 and the helium purification system 10 are used for nitrogen replacement and helium replacement, respectively. After the vacuum pump group 7 evacuates the system and checks for leaks, the system is ready for operation. After the product passes the test system 11, it can be filled normally.

[0033] During normal filling, the passivated tank truck is connected to the filling system 5. Silane from buffer tank 1 enters the filling system 5 directly for pressurization. Once a certain pressure is reached, depending on the filling position's requirements, different numbers of compressor units 2 are activated to pressurize the tank truck through manifold assembly 3. During normal filling, the filling speed can be controlled by adjusting the flow rate of compressor unit 2, or multiple filling speeds can be achieved through the coordination of compressor unit 2 and manifold assembly 3. In cases of insufficient product supply, a single compressor unit can be used. Unit 2 fills multiple tanks. When filling efficiency is urgently needed, multiple compressor units 2 can be used to fill one filling tank. When compressor unit 2 is undergoing maintenance, other compressor units 2 can also fill one or more designated filling tanks without affecting normal production. The filling system is equipped with remote pressure gauges and temperature gauges for real-time monitoring. If the specified parameters are exceeded, the system will automatically shut off the valves and compressor unit 2. After filling to the set pressure and weight values, the system will automatically shut off the valves and compressor unit 2. The tanker will then be manually disconnected and replaced with a new tanker for filling.

[0034] If the product fails quality inspection or the tanker contains substandard products, the product can be sent to compressor unit 2 and pressurized by auxiliary compressor 13, and the substandard product can be sent to distillation tower 12 for recycling.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A silane filling device, comprising a buffer tank (1), a compressor unit (2), a manifold assembly (3), and a second buffer tank (4), characterized in that, The outlet of the first buffer tank (1) is connected to the passivation and replacement system (6), the outlet of the passivation and replacement system (6) is connected to the normal filling system (5), the outlets of the normal filling system (5) and the passivation and replacement system (6) are both connected to the second buffer tank (4), the inlet of the first buffer tank (1), the second buffer tank (4), the normal filling system (5) and the passivation and replacement system (6) are all connected to the nitrogen purification system (9) and the helium purification system (10), the first buffer tank (1), the second buffer tank (4), the normal filling system (5) and the passivation and replacement system (6) are all equipped with a vacuum pump group (7), the outlet of the second buffer tank (4) is connected to the auxiliary compressor (13), and the outlet of the auxiliary compressor (13) is connected to the distillation column (12).

2. The silane filling device according to claim 1, characterized in that: The number of compressor units (2) is six, and the outlet of the compressor unit (2) is connected to the manifold group (3).

3. The silane filling device according to claim 1, characterized in that: The buffer tank (1) is connected to the passivation and replacement system (6), and the passivation and replacement system (6) is connected to the normal filling system (5) through the compressor unit (2) and the manifold unit (3).

4. A silane filling device according to claim 1, characterized in that: The air inlet of the buffer tank (1) is connected to an external silane source, and the vacuum pump group (7) includes three vacuum pumps.

5. A silane filling device according to claim 1, characterized in that: The exhaust gas ends of the buffer tank one (1), buffer tank two (4), normal filling system (5) and passivation replacement system (6) are all connected to the exhaust gas treatment system (8), and the normal filling system (5) and passivation replacement system (6) are all equipped with detection systems (11).

6. A silane filling device according to claim 1, characterized in that: The nitrogen purification system (9) includes a nitrogen source (901) and a nitrogen purification component (902), the inlet of which is connected to the nitrogen source (901).

7. A silane filling device according to claim 1, characterized in that: The helium purification system (10) includes a helium source (1001) and a helium purification component (1002), the inlet of which is connected to the helium source (1001).

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