External dust removal device suitable for substrate carrying table of exposure machine
By designing an external dust removal device on the substrate stage of the exposure machine, and using a plasma blower to remove dust particles and enhance the stability of the device, the problem of high cost in cleanrooms for small and medium-sized enterprises is solved, achieving efficient dust removal and stability, and ensuring the clarity and accuracy of the exposed pattern.
Patent Information
- Application Number
- CN202423191750.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-23
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-12-23
AI Technical Summary
Small and medium-sized manufacturing enterprises face high costs in building cleanrooms, which can lead to dust particles adhering to the surface of the exposure machine platform, affecting the electrical performance and reliability of the PCB board.
Design an external dust removal device suitable for exposure machine substrate stage, using a plasma blower to remove dust particles, and increase the stability of the device through an auxiliary support mechanism to adapt to exposure machine stages of different heights.
It effectively removes dust particles, ensuring the clarity and accuracy of the exposed pattern, reducing electrostatic dust adsorption, saving dust removal costs, improving economic efficiency, and the device has good stability.
Smart Images
Figure CN223501296U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of circuit board technology, and in particular to an external dust removal device suitable for the substrate stage of an exposure machine. Background Technology
[0002] Exposure machines are an indispensable piece of equipment in the PCB manufacturing process. They are mainly used to accurately transfer circuit patterns from photomasks to PCB substrates coated with photoresist, achieving precise pattern replication. In actual production, due to the high cost of building cleanrooms, small and medium-sized enterprises may not have a complete cleanroom environment, which may cause dust particles to adhere to the surface of the exposure machine stage, resulting in defects in the exposed pattern, which will directly affect the electrical performance and reliability of the PCB.
[0003] To address the aforementioned issues, an external dust removal device suitable for the substrate stage of an exposure machine has been developed. Utility Model Content
[0004] In order to overcome the shortcomings of the high cost of building a cleanroom in actual production, which may prevent small and medium-sized enterprises from having a complete cleanroom environment, resulting in dust particles adhering to the surface of the exposure machine stage and causing defects in the exposure pattern, which will directly affect the electrical performance and reliability of the PCB board, this utility model provides an external dust removal device suitable for the substrate stage of the exposure machine.
[0005] The technical solution of this utility model is: an external dust removal device suitable for a substrate stage of an exposure machine, comprising a mounting component, suction cups connected to both the front and rear sides of the left side of the mounting component, a moving mechanism provided on the upper right side of the mounting component, a plasma blower slidably connected to the moving mechanism, a plasma module connected to the lower part of the plasma blower, a blower pipe connected to the upper part of the plasma blower, an air outlet connected to the blower pipe, a mounting base slidably connected to the upper left side of the mounting component, a sliding groove opened on the upper left side of the mounting component, the mounting base being mounted on the sliding groove by fasteners, a connector slidably connected to the upper part of the mounting base, a sensor provided on the connector, a first latch slidably connected to the upper right side of the mounting base, a spring connected between the first latch and the mounting base, and an auxiliary support mechanism provided on the right side of the mounting component.
[0006] In one embodiment, the auxiliary support mechanism includes a first connecting rod, which is rotatably connected to the right side of the mounting member. A second connecting rod is slidably connected to the first connecting rod, and a rack is connected to the second connecting rod. An adjustment assembly is connected to the first connecting rod, and the adjustment assembly includes a mounting frame, a worm gear, and a worm. The mounting frame is connected to the lower part of the first connecting rod, and the worm gear is rotatably connected to the mounting frame. The worm gear meshes with the worm and the rack. A gripping element is rotatably connected to the lower part of the second connecting rod.
[0007] In one embodiment, the moving mechanism includes a slide rail, the upper right side of the mounting component is connected to the slide rail, side plates are connected to both the front and rear sides of the slide rail, the slide rail is slidably connected to the plasma hair dryer, a second latch is slidably connected to the rear side of the plasma hair dryer, the second latch is slidably connected to the slide rail, and the second latch plays a locking role for the plasma hair dryer and the slide rail.
[0008] In one embodiment, the connector provides support for the air outlet.
[0009] In one embodiment, the first latch is provided with a circular assisted component.
[0010] In one embodiment, the gripping element has anti-slip texture on its lower part.
[0011] By adopting the above technical solutions, the beneficial effects of this utility model are:
[0012] This invention uses a plasma blower to remove dust particles from the surface of the exposure machine stage, thereby reducing the interference of dust particles on the exposure process, ensuring the clarity and accuracy of the exposed pattern, saving dust removal costs, and improving economic efficiency. At the same time, the plasma blower can effectively remove static electricity generated during the operation of the exposure machine, which can effectively reduce the dust adsorption by static electricity. The auxiliary support mechanism increases the force points of the device, making the device more stable and preventing the device from falling due to insufficient suction force of the suction cup. Through the cooperation of the first latch and the connecting piece, the height of the vacuum cleaner output end can be flexibly adjusted to meet the dust removal needs of exposure machine stages of different heights. Attached Figure Description
[0013] Figure 1 This is a schematic diagram of the first three-dimensional structure of this utility model.
[0014] Figure 2 This is a schematic diagram of the second three-dimensional structure of the present invention.
[0015] Figure 3This is a partial cross-sectional three-dimensional structural diagram of the present invention.
[0016] Figure 4 This is a partial cross-sectional three-dimensional structural diagram of the auxiliary support mechanism of this utility model.
[0017] Figure 5 This is a partial cross-sectional three-dimensional structural diagram of the moving mechanism of this utility model.
[0018] In the attached diagram, the following are the reference numerals: 1-mounting component, 2-suction cup, 3-plasma blower, 4-mounting base, 41-slide groove, 5-connector, 6-first latch, 7-spring, 8-auxiliary support mechanism, 81-first connecting rod, 82-adjustment component, 83-second connecting rod, 84-grip component, 9-moving mechanism, 91-slide rail, 92-side plate, 93-second latch, 10-sensor. Detailed Implementation
[0019] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.
[0020] An external dust removal device suitable for the substrate stage of an exposure machine, such as Figures 1-3 As shown, the device includes a mounting component 1. Suction cups 2 are connected to both the front and rear sides of the left side of the mounting component 1. A moving mechanism 9 is provided on the upper right side of the mounting component 1. A plasma hair dryer 3 is slidably connected to the moving mechanism 9. A plasma module is connected to the lower part of the plasma hair dryer 3. A blower pipe is connected to the upper part of the plasma hair dryer 3. An air outlet is connected to the blower pipe. A mounting base 4 is slidably connected to the upper left side of the mounting component 1. A sliding groove 41 is opened on the upper left side of the mounting component 1. The mounting base 4 is installed on the sliding groove 41 by fasteners. A connector 5 is slidably connected to the upper part of the mounting base 4. A sensor 10 is provided on the connector 5. The connector 5 supports the air outlet. A first latch 6 is slidably connected to the upper right side of the mounting base 4. A circular assisting part is provided on the first latch 6. A spring 7 is connected between the first latch 6 and the mounting base 4. An auxiliary support mechanism 8 is provided on the right side of the mounting component 1.
[0021] like Figure 1 , Figure 2 and Figure 4 As shown, the auxiliary support mechanism 8 includes a first connecting rod 81, which is rotatably connected to the right side of the mounting component 1. A second connecting rod 83 is slidably connected to the first connecting rod 81, and a rack is connected to the second connecting rod 83. An adjustment component 82 is connected to the first connecting rod 81. The adjustment component 82 includes a mounting frame, a worm gear, and a worm. The mounting frame is connected to the lower part of the first connecting rod 81. A worm gear is rotatably connected to the mounting frame, and a worm gear is also rotatably connected to the mounting frame. The worm gear meshes with the worm and the rack. A gripping component 84 is rotatably connected to the lower part of the second connecting rod 83. The gripping component 84 has anti-slip textures on its lower part.
[0022] like Figure 1 , Figure 2 and Figure 5 As shown, the moving mechanism 9 includes a slide rail 91. The upper right side of the mounting part 1 is connected to the slide rail 91. Side plates 92 are connected to both the front and rear sides of the slide rail 91. The slide rail 91 is slidably connected to the plasma hair dryer 3. The rear side of the plasma hair dryer 3 is slidably connected to a second latch 93. The second latch 93 is slidably connected to the slide rail 91. The second latch 93 locks the plasma hair dryer 3 and the slide rail 91.
[0023] It should be noted that the exposure machine is an indispensable piece of equipment in the PCB manufacturing process. It is mainly used to accurately transfer circuit patterns from a photomask to a PCB substrate coated with photoresist, achieving precise pattern replication. In actual production, due to the high cost of building a cleanroom, small and medium-sized enterprises may not have a complete cleanroom environment. This can lead to dust particles adhering to the surface of the exposure machine stage, causing defects in the exposed pattern and directly affecting the electrical performance and reliability of the PCB. Therefore, dust removal is necessary for the exposure machine stage. First, the mounting component 1 is attached to the side of the exposure machine stage using suction cup 2. Then, according to the actual dust removal needs, slide the plasma blower 3 to a suitable position and lock it using the second latch 93. Next, adjust the mounting base 4 to a suitable position according to the position of the plasma blower 3 and fix it. Then, according to the height of the exposure machine stage surface, move the first latch 6 to the right to compress the spring 7. Then, adjust the connecting piece 5 to a suitable height so that the height of the output end of the plasma blower 3 is adapted to the dust removal height of the exposure machine stage. The connecting piece 5 supports the air outlet of the plasma blower 3, making the plasma blower 3 more stable during operation. Then, release the first latch 6, and the spring 7 returns to its original position. The first locking bolt 6 locks the connector 5 and mounting base 4 again. Sensor 10 senses the distance between the exposure machine cover and the worktable. When the cover flips upwards, disengaging from the worktable, the distance between the two sensors 10 increases, triggering a start signal to the plasma blower 3. The plasma blower 3 removes dust particles from the surface of the exposure machine stage. Simultaneously, the plasma blower 3 effectively removes static electricity generated during exposure machine operation, reducing static dust adsorption and minimizing interference from dust particles during the exposure process, ensuring the clarity and accuracy of the exposed pattern. When the cover and worktable... When in contact, the sensor 10 is close enough that the plasma blower 3 stops operating. Because the suction cup 2 may not be able to hold the device for long periods of time, the suction force may be insufficient, causing the device to fall. To enhance the overall stability of the device, the force points of the device can be increased by the auxiliary support mechanism 8, making the device more stable. Rotating the worm gear drives the worm wheel to rotate, which in turn drives the rack to rotate, causing the second connecting rod 83 to slide on the first connecting rod 81. This adjusts the first connecting rod 81 and the second connecting rod 83 to a suitable support height. The anti-slip texture on the lower part of the gripping part 84 can increase the friction with the ground, thus making the device more stable.
[0024] Although this disclosure has been shown and described with reference to specific exemplary embodiments thereof, those skilled in the art will understand that various changes in form and detail may be made to this disclosure without departing from the spirit and scope of the disclosure as defined by the appended claims and their equivalents. Therefore, the scope of this disclosure should not be limited to the above embodiments, but should be defined not only by the appended claims, but also by their equivalents.
Claims
1. An external dust removal device suitable for a substrate stage of an exposure machine, characterized in that: The device includes a mounting component (1), with suction cups (2) connected to both the front and rear sides of the left side of the mounting component (1). A moving mechanism (9) is provided on the upper right side of the mounting component (1), and a plasma hair dryer (3) is slidably connected to the moving mechanism (9). A plasma module is connected to the lower part of the plasma hair dryer (3), and a blower pipe is connected to the upper part of the plasma hair dryer (3). An air outlet is connected to the blower pipe. A mounting base (4) is slidably connected to the upper left side of the mounting component (1). The mounting component (1) has a sliding groove (41) on the upper left side. The mounting base (4) is mounted on the sliding groove (41) by fasteners. The upper part of the mounting base (4) is slidably connected to a connector (5). A sensor (10) is provided on the connector (5). The upper right side of the mounting base (4) is slidably connected to a first latch (6). A spring (7) is connected between the first latch (6) and the mounting base (4). An auxiliary support mechanism (8) is provided on the right side of the mounting component (1).
2. The external dust removal device for an exposure machine substrate stage as described in claim 1, characterized in that: The auxiliary support mechanism (8) includes a first connecting rod (81), the first connecting rod (81) is rotatably connected to the right side of the mounting component (1), a second connecting rod (83) is slidably connected to the first connecting rod (81), a rack is connected to the second connecting rod (83), an adjustment component (82) is connected to the first connecting rod (81), the adjustment component (82) includes a mounting frame, a worm gear and a worm, the mounting frame is connected to the lower part of the first connecting rod (81), the worm gear is rotatably connected to the mounting frame, the worm gear is also rotatably connected to the mounting frame, the worm gear meshes with the worm, the worm gear meshes with the rack, and a gripping component (84) is rotatably connected to the lower part of the second connecting rod (83).
3. An external dust removal device for an exposure machine substrate stage as described in claim 2, characterized in that: The moving mechanism (9) includes a slide rail (91). The upper right side of the mounting part (1) is connected to the slide rail (91). Side plates (92) are connected to both the front and rear sides of the slide rail (91). The slide rail (91) is slidably connected to the plasma hair dryer (3). The rear side of the plasma hair dryer (3) is slidably connected to a second latch (93). The second latch (93) is slidably connected to the slide rail (91). The second latch (93) locks the plasma hair dryer (3) and the slide rail (91).
4. An external dust removal device for an exposure machine substrate stage as described in claim 1, characterized in that: The connector (5) provides support for the air outlet.
5. An external dust removal device for an exposure machine substrate stage as described in claim 1, characterized in that: The first latch (6) is provided with a circular assisting component.
6. An external dust removal device for an exposure machine substrate stage as described in claim 2, characterized in that: The gripping component (84) has anti-slip textures on its lower part.