Cleaning machine blanking table with precise cooling function

Abstract

The utility model relates to a cleaning machine blanking table capable of accurately cooling, which comprises two rails, a plurality of cooling devices, a plurality of cooling devices and a plurality of cooling devices, the flower basket is placed on the track and perpendicular to the length direction of the track, and silicon wafers are stored in the flower basket; the air knife is erected at the upper end of the track and corresponds to the position above the flower basket; the moving mechanism is arranged between the two rails in parallel; the supporting plate is fixed on the moving mechanism; the telescopic cylinders are arranged at four corners of the supporting plate, and the upper ends of the telescopic cylinders are provided with telescopic piston rods; the supporting table is connected to piston rods of the two telescopic air cylinders on the same side; a piston rod of the telescopic cylinder extends out and drives the supporting table to ascend, the supporting table supports the basket, the lower end of the basket is separated from the track, the moving mechanism is started and drives the supporting plate to move in the length direction of the track, the basket moves to pass the position below the air knife, the air knife blows silicon wafers in the basket, and all the silicon wafers in the basket can be accurately cooled.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer production equipment technology, and in particular to a cleaning machine unloading platform with precise cooling. Background Technology

[0002] Both the cleaning and drying processes of silicon wafers require high temperatures. After drying, the wafers need to be cooled; otherwise, their electrical conductivity will increase. The unloading station typically includes a conveyor line and an air knife at the end of the conveyor belt. The conveyor line simultaneously transports several baskets of wafers to the end of the conveyor belt in each batch, after which the air knife activates to blow air. Because the air knife is fixed at the end of the conveyor belt, it can only cool the wafers in the baskets closest to the end of the conveyor belt within the same batch. It cannot reach the wafers in the baskets furthest from the end of the conveyor belt within the same batch, resulting in uneven cooling of the wafers. In other words, the cooling of wafers in several baskets within the same batch is inaccurate, affecting the quality of the silicon wafers.

[0003] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model discloses a precision-cooled unloading platform for a cleaning machine, which solves the problem of uneven cooling of silicon wafers inside the basket by the air knife of the unloading platform.

[0005] The technical solution adopted in this utility model is as follows:

[0006] A precision-cooled unloading platform for a cleaning machine includes: two horizontally symmetrical tracks; a basket placed on the tracks, perpendicular to the track length, storing silicon wafers; an air knife mounted on the upper end of the tracks, positioned above the basket; a moving mechanism parallel to the two tracks; a support plate fixed to the moving mechanism; telescopic cylinders located at the four corners of the support plate, each with a telescopic piston rod at its upper end; and a support platform connected to the piston rods of the two telescopic cylinders on the same side. The piston rods extend and drive the support platform upwards, supporting the basket and disengaging its lower end from the tracks. The moving mechanism then drives the support plate to move along the track length.

[0007] A further technical solution is that the moving mechanism includes: a lead screw, which is arranged in parallel between the two rails; a lead screw motor, which is threadedly connected to the lead screw; two slide rods, which are arranged in parallel and symmetrically on the left and right sides of the lead screw and located between the two rails; and a slider, which is slidably sleeved on the slide rod; wherein the support plate is fixed to the upper end of the lead screw motor and the slider.

[0008] A further technical solution is that the unloading platform of the cleaning machine includes: a bracket, which is arranged parallel to the track above; wherein the air knife is fixed to the lower end of the bracket.

[0009] A further technical solution is that the air knife has several parts, which are fixed at intervals along the length direction of the bracket at the lower end of the bracket.

[0010] A further technical solution is that the telescopic cylinder is located at the lower end of the support plate, and the piston rod of the telescopic cylinder passes through the support plate and connects to the support platform.

[0011] A further technical solution is that the flower basket includes: two plates symmetrically placed on the track; at least two toothed rods vertically connected to the front and rear sides between the two plates; and at least two support rods vertically connected to the lower ends between the two plates; wherein the toothed rods and the support rods form a space for accommodating silicon wafers.

[0012] A further technical solution is that the flower basket includes: limiting rods, having at least two rods, vertically connected to the lower ends of the front and rear sides between the two plates; the support platform includes: a groove, formed on the support platform, for the two limiting rods to be inserted.

[0013] A further technical solution is that the unloading platform of the cleaning machine includes: support legs, which are disposed at the lower end of the track.

[0014] A further technical solution is that the lead screw motor, slider, support plate, telescopic cylinder and support platform are in two sets, the two sets of lead screw motors are threadedly connected to the same lead screw, and the two sets of sliders are sleeved on the same pair of limit rods.

[0015] The beneficial effects of this utility model embodiment are as follows:

[0016] (I) The unloading platform of the cleaning machine of this utility model includes a track, a basket, an air knife, a moving mechanism, a support plate, a telescopic cylinder and a support platform. The basket for storing silicon wafers is placed on the track. The piston rod of the telescopic cylinder extends and drives the support platform to rise. The support platform supports the basket. The lower end of the basket is separated from the track. The moving mechanism is started and drives the support plate to move along the length of the track. The basket moves past the air knife. The air knife blows through the silicon wafers in the basket, which can accurately cool all the silicon wafers in the basket.

[0017] (ii) Furthermore, the flower basket includes two limiting rods, which are vertically connected to the lower ends of the front and rear sides between the two plates. The support platform includes a groove, which is formed on the support platform for the two limiting rods to be inserted into, so as to limit the flower basket when it is moved and improve the stability of the flower basket when it is moved.

[0018] (III) Furthermore, the screw motor, slider, and support plate are in two sets. The two sets of screw motors are threadedly connected to the same screw, the two sets of sliders are sleeved on the same pair of limit rods, and the two sets of support plates are respectively fixed to the same set of screw motors and sliders. One set of support plates supports the basket and moves it through the air knife for cooling, while the other set of support plates supports the cooled basket and moves it to the unloading area at the end of the screw. This allows for simultaneous cooling and transportation, improving the working efficiency of the unloading platform. Attached Figure Description

[0019] Figure 1 This is a top view of the unloading platform of the cleaning machine according to this utility model.

[0020] Figure 2 This is a schematic diagram of the formal structure of the material unloading platform of the cleaning machine of this utility model.

[0021] Figure 3 This is an isometric view of the flower basket in the unloading platform of the cleaning machine of this utility model.

[0022] In the picture:

[0023] 1. Track; 11. Support leg; 2. Moving mechanism; 21. Lead screw; 22. Lead screw motor; 23. Slide bar; 24. Slider; 3. Support plate; 4. Telescopic cylinder; 41. Piston rod; 5. Support platform; 51. Groove; 6. Flower basket; 61. Plate; 62. Gear; 63. Support rod; 64. Limiting rod; 7. Bracket; 8. Air knife; 9. Silicon wafer. Detailed Implementation

[0024] The specific embodiments of this utility model are described below with reference to the accompanying drawings.

[0025] To make the objectives, technical solutions, and advantages of this utility model clearer, the device proposed by this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer according to the following description. It should be noted that the accompanying drawings are in a very simplified form and use non-precise proportions, only used to conveniently and clearly assist in illustrating the purpose of the embodiments of this utility model. Please refer to the accompanying drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only used to complement the content disclosed in the specification, for those skilled in the art to understand and read, and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationships, or adjustments to the size, without affecting the effects and objectives that this utility model can produce, should still fall within the scope of the technical content disclosed in this utility model.

[0026] Example:

[0027] This embodiment discloses a cleaning machine unloading platform with precise cooling.

[0028] like Figure 1 and Figure 2 As shown, the unloading platform of the cleaning machine includes a track 1, a basket 6, an air knife 8, a moving mechanism 2, a support plate 3, a telescopic cylinder 4, and a support platform 5.

[0029] Track 1 has two tracks, arranged symmetrically in a horizontal configuration.

[0030] like Figure 3 As shown, the basket 6 is placed on the track 1, perpendicular to the length of the track 1, and stores silicon wafers 9 inside. Exemplarily, the basket 6 includes a plate 61, toothed rods 62, and support rods 63. There are two plates 61, symmetrically placed on the track 1, parallel to the length of the track 1. There are four toothed rods 62, vertically connected to the front and rear sides between the two plates 61. There are two support rods 63, vertically connected to the lower end between the two plates 61. The toothed rods 62 and the support rods 63 together form a space to accommodate the silicon wafers 9.

[0031] The air knife 8 is mounted on the upper end of the track 1, positioned above the flower basket 6. For example, the washing machine's unloading platform includes a support 7, which is parallel to the track 1 above. The air knife 8 is fixed to the lower end of the support 7. Specifically, there are several air knives 8, fixed at intervals along the length of the support 7 at the lower end of the support 7.

[0032] The moving mechanism 2 is arranged parallel to the two tracks 1. A support plate 3 is fixed to the moving mechanism 2. Exemplarily, the moving mechanism 2 includes a lead screw 21, a lead screw motor 22, a slide bar 23, and a slider 24. The lead screw 21 is arranged parallel to the two tracks 1, and the lead screw motor 22 is threadedly connected to the lead screw 21. There are two slide bars 23, arranged parallel and symmetrically on the left and right sides of the lead screw 21, located between the two tracks 1. The slider 24 is slidably sleeved on the slide bar 23. The support plate 3 is fixed to the upper ends of the lead screw motor 22 and the slider 24.

[0033] Telescopic cylinders 4 are located at the four corners of the support plate 3, and have telescopic piston rods 41 at their upper ends. The support platform 5 is connected to the piston rods 41 of the two telescopic cylinders 4 on the same side. For example, the telescopic cylinders 4 are located at the lower end of the support plate 3, and the piston rods 41 of the telescopic cylinders 4 pass through the support plate 3 to connect to the support platform 5. The telescopic cylinders 4 do not interfere with the track 1, and provide the support platform 5 with sufficient lifting space.

[0034] like Figures 1-3As shown, the flower basket 6 further includes two limiting rods 64, which are vertically connected to the lower ends of the front and rear sides between the two plates 61. The support platform 5 includes a groove 51, which is formed on the support platform 5 to allow the two limiting rods 64 to be inserted, so as to limit the flower basket 6 when it is moved and prevent it from shaking.

[0035] like Figure 2 As shown, the unloading platform of the washing machine further includes a support leg 11, which is located at the lower end of the track 1 to support the track 1.

[0036] like Figure 1 As shown, furthermore, the lead screw motor 22, slider 24, support plate 3, telescopic cylinder 4, and support platform 5 are in two sets. The two sets of lead screw motors 22 are threadedly connected to the same lead screw 21, and the two sets of sliders 24 are sleeved on the same pair of limit rods 64. The two sets of support plates 3 are respectively fixed to the lead screw motor 22 and slider 24 of the same set. One set of support platform 5 supports the basket 6 and moves it through the air knife 8 for cooling, while the other set of support platform 5 supports the cooled basket 6 and moves it to the unloading area at the end of the lead screw 21. This allows for simultaneous cooling and transportation, improving the working efficiency of the unloading platform.

[0037] In this embodiment, the piston rod 41 extends and drives the support platform 5 to rise. The support platform 5 supports the flower basket 6, and the lower end of the flower basket 6 is separated from the track 1. The lead screw motor 22 starts and moves relative to the lead screw 21. The lead screw motor 22 drives the support plate 3 to move along the length direction of the track 1. The flower basket 6 moves past the air knife 8. The air knife 8 blows through the silicon wafers 9 inside the flower basket 6, which can accurately cool all the silicon wafers 9 inside the flower basket 6.

[0038] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0039] The embodiments described above are merely illustrative of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A precisely cooled material unloading platform for a cleaning machine, characterized in that, The unloading platform of the cleaning machine includes: The track (1) has two tracks, arranged symmetrically in a horizontal direction; A flower basket (6) is placed on the track (1) perpendicular to the length direction of the track (1) and contains silicon wafers (9). The wind knife (8) is mounted on the upper end of the track (1) and is positioned above the flower basket (6); The moving mechanism (2) is arranged in parallel between the two tracks (1); The support plate (3) is fixed to the moving mechanism (2); Telescopic cylinders (4) are located at the four corners of the support plate (3) and have telescopic piston rods (41) at the upper end; The support platform (5) is connected to the piston rods (41) of the two telescopic cylinders (4) on the same side; The piston rod (41) extends and drives the support platform (5) to rise, the support platform (5) supports the flower basket (6), the lower end of the flower basket (6) is disengaged from the track (1), and the moving mechanism (2) drives the support plate (3) to move along the length of the track (1).

2. The precision cooling unloading platform for a cleaning machine according to claim 1, characterized in that, The moving mechanism (2) includes: A lead screw (21) is arranged parallel to the two rails (1); A lead screw motor (22) is threadedly connected to the lead screw (21); The slide bar (23) has two rods, which are arranged in parallel and symmetrically on the left and right sides of the lead screw (21) and located between the two rails (1); The slider (24) is slidably sleeved on the slider (23); The support plate (3) is fixed to the upper end of the lead screw motor (22) and the slider (24).

3. The precision cooling unloading platform for a cleaning machine according to claim 1, characterized in that, The unloading platform of the cleaning machine includes: The bracket (7) is arranged parallel above the track (1); The air knife (8) is fixed to the lower end of the bracket (7).

4. The precision cooling unloading platform for a cleaning machine according to claim 3, characterized in that, The air knife (8) has several units, which are fixed at intervals along the length of the bracket (7) at the lower end of the bracket (7).

5. The precision cooling unloading platform for a cleaning machine according to claim 1, characterized in that, The telescopic cylinder (4) is located at the lower end of the support plate (3), and the piston rod (41) of the telescopic cylinder (4) passes through the support plate (3) and connects to the support platform (5).

6. The precision cooling unloading platform for a cleaning machine according to claim 1, characterized in that, The flower basket (6) includes: The plate (61) has two pieces, which are symmetrically placed on the track (1); The rack (62) has at least two members, which are vertically connected to the front and rear sides between the two plates (61); the support rod (63) has at least two members, which are vertically connected to the lower end between the two plates (61); The toothed rod (62) and the support rod (63) together form a space to accommodate the silicon wafer (9).

7. The precision cooling unloading platform for a cleaning machine according to claim 6, characterized in that, The flower basket (6) includes: Limiting rods (64) have at least two, which are vertically connected to the lower ends of the front and rear sides between the two plates (61); The support platform (5) includes: A groove (51) is formed on the support platform (5) for the two limiting rods (64) to be inserted.

8. The precision cooling unloading platform for a cleaning machine according to claim 1, characterized in that, The unloading platform of the cleaning machine includes: Support leg (11) is located at the lower end of the track (1).

9. The precision cooling unloading platform for a cleaning machine according to claim 2, characterized in that, The lead screw motor (22), slider (24), support plate (3), telescopic cylinder (4) and support platform (5) are in two sets. The two sets of lead screw motors (22) are threadedly connected to the same lead screw (21), and the two sets of sliders (24) are sleeved on the same pair of limit rods (64).

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