Wafer fixing tool

Abstract

The utility model discloses a wafer fixing tool, which comprises a workpiece sucker, the lower surface of the workpiece sucker is provided with a corresponding adsorption hole, the adsorption hole is connected to an external vacuum pump, the upper surface of the workpiece sucker is connected to an output shaft of a corresponding rotary motor through a corresponding connecting sleeve, and the upper surface of the workpiece sucker is provided with a rotating shaft. Corresponding communicating holes are respectively formed in two sides of the connecting sleeve; the piece falling prevention mechanism comprises a set of clamping driving plates which penetrate through the communicating holes and extend to the outer side of the workpiece suction cup, and the clamping driving plates are downwards and fixedly connected with piece falling prevention clamping plates respectively; the driving device comprises a horizontal driving mechanism used for driving the clamping driving plates to move oppositely or oppositely, and a lifting driving mechanism used for driving the horizontal driving mechanism to ascend and descend. According to the utility model, the arrangement of the wafer falling prevention mechanism can be realized on the premise that the workpiece is not interfered, so that the stability of adsorption and fixation of the wafer workpiece with the downward surface is effectively ensured.

Description

Technical Field

[0001] This utility model relates to the technical field of auxiliary components for wafer inspection, specifically a wafer fixing fixture. Background Technology

[0002] To improve the evaporation accuracy of wafers, the evaporation material needs to be deposited onto the bottom surface of the wafer glass stage. After evaporation, the wafer needs to be tested by a probe card before entering the next production process. Since the evaporation material is deposited on the bottom surface of the wafer glass stage, the testing process requires a wafer fixing fixture to hold the wafer face down, allowing it to engage with the probe card located on the bottom side, thus completing the testing.

[0003] Most existing wafer clamping fixtures use adsorption to hold the workpiece in place. However, simply adsorbing the wafer to the bottom of the chuck poses a risk of it falling off during inspection. To address this, some manufacturers have begun to incorporate clamping mechanisms on the bottom of the chuck. However, existing clamping mechanisms occupy a relatively large space, and their placement on the bottom of the chuck can easily interfere with the workpiece.

[0004] Therefore, the research objective of this utility model is to design a wafer fixing fixture that can implement the anti-drop mechanism without interfering with the workpiece, thereby effectively ensuring the stability of the wafer workpiece being adsorbed and fixed face down. Summary of the Invention

[0005] In view of the technical problems existing in the prior art, the present invention provides a wafer fixing fixture that can effectively solve the technical problems existing in the prior art.

[0006] The technical solution of this utility model is:

[0007] A wafer fixing fixture, comprising:

[0008] The workpiece suction cup has corresponding suction holes on its lower surface. The suction holes are connected to an external vacuum pump through corresponding vacuum connectors. The upper surface of the workpiece suction cup is connected to the output shaft of a corresponding rotary motor through corresponding connecting sleeves. Corresponding connecting holes are provided on both sides of the connecting sleeves.

[0009] The anti-dropping mechanism includes a set of clamping drive plates that pass through the connecting hole and extend to the outside of the workpiece suction cup. Each clamping drive plate is fixed downward to an anti-dropping clamping plate located on the bottom side of the workpiece suction cup.

[0010] The driving device includes a horizontal driving mechanism for driving a set of clamping drive plates to move relative to or opposite to each other, and a lifting driving mechanism for driving the horizontal driving mechanism to move up and down.

[0011] A corresponding inverted T-shaped mounting seat is fixedly connected to the workpiece suction cup inside the connecting sleeve. A corresponding T-shaped movable seat is installed on one side of the inverted T-shaped mounting seat in a height-adjustable manner. A corresponding drive seat plate is fixedly connected to the upper surface of the T-shaped movable seat. The drive seat plate is folded down on the side near the inverted T-shaped mounting seat and a set of mating plates with clearance holes in the middle are fixedly connected thereto. A corresponding guide rail mounting plate is fixedly connected to the side of the mating plate that is not connected to the drive seat plate.

[0012] The horizontal drive mechanism includes a dual-axis motor fixedly mounted on a drive base plate between a set of docking plates. The output shaft end of the dual-axis motor is fixedly connected to a set of drive screws with opposite rotation directions. The drive screws extend through to the outside of the clearance hole. Corresponding screw seats are respectively driven and connected to the drive screws. The screw seats are movably mounted on the corresponding guide rail mounting plates. The inner ends of the clamping drive plate are respectively fixed to the corresponding screw seats.

[0013] The lifting drive mechanism includes an electric cylinder fixed to one end of the inverted T-shaped mounting base away from the dual-axis motor, and the output shaft end of the electric cylinder is connected to the T-shaped moving base.

[0014] The guide rail mounting plate has corresponding guide rails on both sides, and the lead screw seat is L-shaped and is slidably mounted on the guide rail by a corresponding slider.

[0015] A corresponding guide sleeve is fixed to the side of the lead screw seat that is not connected to the guide rail. The lead screw seat is connected to the drive lead screw through the cooperation of the guide sleeve and the drive lead screw.

[0016] The ends of the clamping drive plate are respectively fixed downward to corresponding positioning blocks, and the anti-drop clamping plates are respectively fixed to the bottom ends of the corresponding positioning blocks.

[0017] The anti-drop clamping plate includes a clamping plate body connected to the positioning block. The end of the clamping plate body not connected to the positioning block is integrally formed with a corresponding arc-shaped connecting arm. The two ends of the arc-shaped connecting arm are integrally formed with corresponding locking teeth inward.

[0018] The anti-drop clamping plate is made of elastic steel plate. When the clamping teeth of the anti-drop clamping plate are clamped to the periphery of the workpiece, the clamping plate body and the arc-shaped connecting arm are pressed downward.

[0019] Advantages of this utility model:

[0020] 1) This utility model features a connecting sleeve on the upper surface of the workpiece suction cup, through which the workpiece suction cup is fixedly connected to the output shaft end of the rotary motor. This provides a stable installation of the workpiece suction cup and allows for the clamping drive plate to be installed inside the connecting sleeve, which has a connecting hole. An anti-drop clamping plate is then fixed to the end of the clamping drive plate. In this way, the opening and closing of the anti-drop clamping plate can be controlled by driving a set of clamping drive plates to move relative to or opposite to each other via a horizontal drive mechanism. Furthermore, a lifting drive mechanism drives the horizontal drive mechanism, i.e., the clamping drive plates, to move up and down. This allows for the installation of the anti-drop mechanism without interfering with the workpiece, effectively ensuring support for the bottom surface of the wafer workpiece and thus ensuring the stable adsorption and fixation of the wafer workpiece when it is face down.

[0021] 2) This utility model features an inverted T-shaped mounting base fixed to the workpiece suction cup inside the connecting sleeve. A T-shaped movable base is jacked up and down on one side of the inverted T-shaped mounting base. A drive base plate is fixed to the upper surface of the T-shaped movable base. The side of the drive base plate closest to the inverted T-shaped mounting base is folded downwards and fixed to a set of mating plates with clearance holes in the center. A guide rail mounting plate is fixed to the side of the mating plate not connected to the drive base plate. In this way, the dual-axis motor of the horizontal drive mechanism can be fixedly installed between the set of mating plates. By driving a set of drive screws with opposite rotation directions through the dual-axis motor, the screw seat, i.e., the clamping drive plate, can be moved relative to or away from each other. This achieves the anti-dropping mechanism with low space occupation, effectively improving the practical effect of this utility model.

[0022] 3) The guide rail mounting plate of this utility model has corresponding guide rails on both sides. The lead screw seat is L-shaped and is slidably mounted on the guide rail on one side by a corresponding slider. A corresponding guide sleeve is fixed to the side of the lead screw seat that is not connected to the guide rail. The lead screw seat is connected to the drive lead screw through the cooperation of the guide sleeve and the drive lead screw. By using the L-shaped lead screw seat and the guide sleeve, a stable drive installation of the clamping drive plate is achieved under the premise of simple and compact structure, thereby effectively improving the practical effect of this utility model.

[0023] 4) The anti-drop clamping plate of this utility model includes a clamping plate body connected to a positioning block. One end of the clamping plate body not connected to the positioning block is integrally formed with a corresponding arc-shaped connecting arm. Both ends of the arc-shaped connecting arm are integrally formed with corresponding locking teeth pointing inwards. The anti-drop clamping plate is made of elastic steel plate. When the locking teeth of the anti-drop clamping plate are engaged with the periphery of the workpiece, the clamping plate body and the arc-shaped connecting arm are pressed downwards. This effectively achieves anti-drop clamping of the wafer workpiece through minute elastic deformation under low contact surface conditions, further improving the fixation effect on the wafer workpiece. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the wafer fixing fixture of this utility model.

[0025] Figure 2 This is an assembly diagram of the anti-dropping mechanism of this utility model.

[0026] Figure 3 This is a schematic diagram of the bottom side structure of the workpiece suction cup of this utility model.

[0027] In the attached diagram: 1. Workpiece suction cup; 101. Adsorption hole; 2. Vacuum connector; 3. Connecting sleeve; 301. Connecting hole; 4. Rotary motor; 5. Anti-drop mechanism; 5. Clamping drive plate; 501. Anti-drop clamping plate; 502. Clamping plate body; 5021. Arc-shaped connecting arm; 5022. Clamping tooth; 5023. Horizontal drive mechanism; 6. Dual-axis motor; 601. Drive screw; 602. Screw seat; 603. Lifting drive mechanism; 7. Inverted T-shaped mounting seat; 8. T-shaped moving seat; 9. Drive seat plate; 10. Clearance hole; 11. Butt plate; 12. Guide rail mounting plate; 13. Guide rail; 14. Slider; 15. Guide sleeve; 16. Positioning block; 17. Detailed Implementation

[0028] To facilitate understanding by those skilled in the art, the structure of this utility model will now be described in further detail with reference to the accompanying drawings:

[0029] refer to Figure 1-3 A wafer fixing fixture, comprising:

[0030] The workpiece suction cup 1 has a corresponding suction hole 101 on its lower surface. The suction hole 101 is connected to an external vacuum pump through a corresponding vacuum connector 2. The upper surface of the workpiece suction cup 1 is connected to the output shaft of a corresponding rotary motor 4 through a corresponding connecting sleeve 3. The two sides of the connecting sleeve 3 are respectively provided with corresponding connecting holes 301.

[0031] The anti-dropping mechanism 5 includes a set of clamping drive plates 501 that penetrate the connecting hole 301 and extend to the outside of the workpiece suction cup 1. The clamping drive plates 501 are respectively fixed downward to anti-dropping clamping plates 502 located on the bottom side of the workpiece suction cup 1.

[0032] The driving device includes a horizontal driving mechanism 6 for driving a set of clamping drive plates 501 to move relative to or opposite to each other, and a lifting driving mechanism 7 for driving the horizontal driving mechanism 6 to move up and down.

[0033] This invention, through the design of a connecting sleeve, not only securely mounts the workpiece suction cup but also allows for the installation of a clamping drive plate inside the connecting sleeve, which has a connecting hole. The anti-drop clamping plate is then fixed to the end of the clamping drive plate. In this way, the opening and closing of the anti-drop clamping plate 502 can be controlled simply by driving a set of clamping drive plates 501 to move relative to or opposite to each other via the horizontal drive mechanism 6. Then, the horizontal drive mechanism 6, i.e., the clamping drive plates 501, is driven to move up and down via the lifting drive mechanism 7. This allows for the installation of the anti-drop mechanism 5 without interfering with the workpiece, effectively ensuring support for the bottom surface of the wafer workpiece and thus ensuring the stable adsorption and fixation of the wafer workpiece when it is face down.

[0034] A corresponding inverted T-shaped mounting seat 8 is fixedly connected to the workpiece suction cup 1 inside the connecting sleeve 3. A corresponding T-shaped movable seat 9 is installed on one side of the inverted T-shaped mounting seat 8 in a height-adjustable manner. A corresponding drive seat plate 10 is fixedly connected to the upper surface of the T-shaped movable seat 9. The drive seat plate 10 is folded down on the side near the inverted T-shaped mounting seat 8 and a set of docking plates 12 with a clearance hole 11 in the middle is fixedly connected thereto. A set of corresponding guide rail mounting plates 13 is fixedly connected to the side of the docking plate 12 that is not connected to the drive seat plate 10.

[0035] The horizontal drive mechanism 6 includes a dual-axis motor 601 fixedly mounted on a drive base plate 10 between a set of docking plates 12. The output shaft end of the dual-axis motor is fixedly connected to a set of drive screws 602 with opposite rotation directions. The drive screws 602 extend through to the outside of the clearance hole 11. Corresponding screw seats 603 are respectively connected to the drive screws. The screw seats 603 are movably mounted on the corresponding guide rail mounting plates 13. The inner ends of the clamping drive plate 501 are respectively fixed to the corresponding screw seats 603.

[0036] The lifting drive mechanism 7 includes an electric cylinder fixed to one end of the inverted T-shaped mounting base 8 away from the dual-axis motor 601, and the output shaft end of the electric cylinder is connected to the T-shaped moving base 9.

[0037] This invention features an inverted T-shaped mounting base 8 fixedly attached to the workpiece suction cup 1 inside the connecting sleeve 3. A T-shaped movable base 9 is jacked up and down on one side of the inverted T-shaped mounting base 8. A drive base plate 10 is fixedly attached to the upper surface of the T-shaped movable base 9. The side of the drive base plate 10 closest to the inverted T-shaped mounting base 8 is folded downwards and fixedly connected to a set of mating plates 12 with clearance holes 11 in the center. A guide rail mounting plate 13 is fixedly attached to the side of the mating plate 12 not connected to the drive base plate 10. In this way, the dual-axis motor 601 of the horizontal drive mechanism 6 can be fixedly installed between the set of mating plates 12. The dual-axis motor 12 drives a set of drive screws 602 with opposite rotation directions to rotate, thereby driving the screw seat 603, i.e., the clamping drive plate 501, to move relative to or away from each other. This achieves the anti-dropping mechanism with minimal space occupation, effectively improving the practical effect of this invention.

[0038] The guide rail mounting plate 13 is provided with corresponding guide rails 14 on both sides. The lead screw seat 603 is L-shaped and is slidably mounted on the guide rail 14 by a corresponding slider 15.

[0039] The lead screw seat 603 is fixedly connected to a corresponding guide sleeve 16 on the side not connected to the guide rail 14. The lead screw seat 603 is connected to the drive lead screw 602 through the cooperation of the guide sleeve 16 and the drive lead screw 602.

[0040] By incorporating the L-shaped lead screw seat 603 and the guide sleeve 16, a stable drive installation of the clamping drive plate 501 can be achieved while maintaining a simple and compact structure, thereby effectively improving the practical effect of this utility model.

[0041] The clamping drive plate 501 has a corresponding positioning block 17 fixedly connected downwards at its end, and the anti-drop clamping plate 502 is fixedly connected to the bottom end of the corresponding positioning block 17.

[0042] The anti-drop clamping plate 502 includes a clamping plate body 5021 connected to the positioning block. The clamping plate body 5021, which is not connected to the positioning block 17, is integrally formed with a corresponding arc-shaped connecting arm 5022. The two ends of the arc-shaped connecting arm 5022 are integrally formed with corresponding locking teeth 5023.

[0043] The anti-drop clamping plate 502 is made of elastic steel plate. When the clamping teeth 5023 of the anti-drop clamping plate 502 are clamped to the periphery of the workpiece, the clamping plate body 5021 and the arc-shaped connecting arm 5022 are pressed downward. This effectively achieves anti-drop clamping of the wafer workpiece through slight elastic deformation under low contact surface conditions, thereby further improving the fixing effect of the wafer workpiece.

[0044] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A wafer fixing fixture, characterized in that, include: The workpiece suction cup (1) has a corresponding suction hole (101) on its lower surface. The suction hole (101) is connected to an external vacuum pump through a corresponding vacuum connector (2). The upper surface of the workpiece suction cup (1) is connected to the output shaft of a corresponding rotary motor (4) through a corresponding connecting sleeve (3). The two sides of the connecting sleeve (3) are respectively provided with corresponding connecting holes (301). The anti-dropping mechanism (5) includes a set of clamping drive plates (501) that pass through the connecting hole (301) and extend to the outside of the workpiece suction cup (1). The clamping drive plates (501) are respectively fixed downward to the anti-dropping clamping plates (502) located on the bottom side of the workpiece suction cup (1). The drive unit includes a horizontal drive mechanism (6) for driving a set of clamping drive plates (501) to move relative to or opposite to each other, and a lifting drive mechanism (7) for driving the horizontal drive mechanism (6) to move up and down.

2. The wafer fixing fixture according to claim 1, characterized in that, A corresponding inverted T-shaped mounting seat (8) is fixedly connected to the workpiece suction cup (1) inside the connecting sleeve (3). A corresponding T-shaped moving seat (9) is installed on one side of the inverted T-shaped mounting seat (8) in a height-adjustable manner. A corresponding drive seat plate (10) is fixedly connected to the upper surface of the T-shaped moving seat (9). The drive seat plate (10) is folded down on the side near the inverted T-shaped mounting seat (8) and a set of docking plates (12) with a clearance hole (11) in the middle are fixedly connected. A set of corresponding guide rail mounting plates (13) are fixedly connected to the side of the docking plate (12) that is not connected to the drive seat plate (10).

3. The wafer fixing fixture according to claim 2, characterized in that, The horizontal drive mechanism (6) includes a dual-axis motor (601) fixedly installed on a drive base plate (10) between a set of docking plates (12). The output shaft end of the dual-axis motor is fixedly connected to a set of drive screws (602) with opposite rotation directions. The drive screws (602) extend through to the outside of the clearance hole (11). The drive screws (602) are respectively connected to corresponding screw seats (603). The screw seats (603) are movably installed on the corresponding guide rail mounting plate (13). The inner end of the clamping drive plate (501) is fixedly connected to the corresponding screw seats (603).

4. The wafer fixing fixture according to claim 3, characterized in that, The lifting drive mechanism (7) includes an electric cylinder fixed to one end of the inverted T-shaped mounting base (8) away from the dual-axis motor (601), and the output shaft end of the electric cylinder is connected to the T-shaped moving base (9).

5. A wafer fixing fixture according to claim 3, characterized in that, The guide rail mounting plate (13) is provided with corresponding guide rails (14) on both sides. The lead screw seat (603) is L-shaped and is slidably mounted on the guide rail (14) by a corresponding slider (15) on one side.

6. A wafer fixing fixture according to claim 5, characterized in that, The lead screw seat (603) is fixed to a corresponding guide sleeve (16) on the side not connected to the guide rail (14). The lead screw seat (603) is connected to the drive lead screw (602) through the cooperation of the guide sleeve (16) and the drive lead screw (602).

7. A wafer fixing fixture according to claim 1, characterized in that, The clamping drive plate (501) has a corresponding positioning block (17) fixedly attached downwards at its end, and the anti-drop clamping plate (502) is fixedly attached to the bottom end of the corresponding positioning block (17).

8. A wafer fixing fixture according to claim 7, characterized in that, The anti-drop clamping plate (502) includes a clamping plate body (5021) connected to the positioning block. The clamping plate body (5021) not connected to the positioning block (17) is integrally formed with a corresponding arc-shaped connecting arm (5022). The two ends of the arc-shaped connecting arm (5022) are integrally formed with corresponding locking teeth (5023) inward.

9. A wafer fixing fixture according to claim 8, characterized in that, The anti-drop clamping plate (502) is made of elastic steel plate. When the clamping teeth (5023) of the anti-drop clamping plate (502) are clamped to the periphery of the workpiece, the clamping plate body (5021) and the arc-shaped connecting arm (5022) are pressed downward.

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