Base plate vertical conveying mechanism

Abstract

The base plate vertical conveying mechanism comprises a support, a driving motor, a driving gear, a supporting frame and a rack, the supporting frame is fixed to the top of the support, the two ends of the supporting frame are open, the gear and the rack are arranged in the supporting frame, the rack is guided by the supporting frame, and the driving motor drives the driving gear to rotate. The rack is meshed with the gear, a hanging piece is arranged at the bottom of the rack, the hanging piece extends out of the bottom of the supporting frame and is used for hanging a base plate, and the driving motor is installed on the support and is used for driving the gear to rotate. According to the substrate vertical conveying mechanism, substrates can be continuously conveyed among a plurality of substrate vertical conveying mechanisms, and the stability is good.

Description

Technical Field

[0001] This utility model relates to a substrate transmission mechanism, belonging to the field of object orientation transportation technology. Background Technology

[0002] In the production of semiconductor wafers and solar cells, substrates need to be transported between various devices, typically requiring them to be mounted vertically for transport. Existing transport mechanisms mainly use chain drives, fixing the vertical substrate to a chain, and using a drive sprocket to move the chain, thus moving the vertical substrate. Chain drives have the problem of not being able to move independently of the chain mechanism, preventing the substrate from moving across different chain areas, making it difficult to adjust the transport distance appropriately as needed. Utility Model Content

[0003] To address the shortcomings of the existing technology, this utility model provides a vertical substrate conveying mechanism, which aims to solve the problem that the substrate conveying distance cannot be flexibly adjusted as needed.

[0004] The technical solution of this utility model is as follows: A vertical substrate conveying mechanism includes a bracket, a drive motor, a drive gear, a support frame, and a rack. The support frame is fixed to the top of the bracket, and both ends of the support frame are open. The gear and the rack are disposed inside the support frame. The rack is guided by the support frame and meshes with the gear. A suspension member is provided at the bottom of the rack. The suspension member extends from the bottom of the support frame for suspending the substrate. The drive motor is mounted on the bracket for driving the gear to rotate.

[0005] Furthermore, in order to improve the stability of the substrate operation, the bracket is provided with a guide gear that meshes with the rack, the guide gear is mounted on the guide bracket, and a compression spring is provided between the guide bracket and the bracket.

[0006] Furthermore, the guide bracket includes a gear shaft that supports the guide gear, the gear shaft is connected to the bracket via a telescopic guide rod, and the compression spring is sleeved on the telescopic guide rod.

[0007] Furthermore, the drive gears are disposed at both ends of the support frame, and the guide gears are located between the two drive gears.

[0008] Furthermore, the bottom of the support frame is provided with a conveying groove, the suspension member extends out from the conveying groove, the top surfaces on both sides of the conveying groove are support surfaces, and the bottom of the rack is provided with pulleys that run on the support surfaces.

[0009] Furthermore, the side of the conveying trough is provided with transverse guide wheels, and the suspension member is located between the transverse guide wheels on both sides.

[0010] Compared with the prior art, the advantages of the technical solution provided by this utility model are as follows:

[0011] This invention employs a rack and pinion transmission to convert rotary motion into linear motion. The rack can continuously transport substrates across multiple vertical substrate conveying mechanisms, allowing substrates to be transferred from one device to another according to specific conveying requirements. Using a guide gear to apply pressure to the rack improves the stability of its movement, particularly when transferring the rack between stationary vertical substrate conveying mechanisms. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the vertical transfer mechanism for the substrate.

[0013] Figure 2 is Figure 1 A schematic diagram of the partial structure viewed in AA direction.

[0014] Figure 3 This is a schematic diagram of the guide gear. Detailed Implementation

[0015] The present invention will be further described below with reference to the embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention. After reading this description, any modifications of the present invention in various equivalent forms by those skilled in the art will fall within the scope defined by the appended claims.

[0016] Please combine Figures 1 to 3 As shown, the vertical substrate conveying mechanism of this embodiment includes a bracket 1, a drive motor 2, a drive gear 3, a support frame 4, and a rack 5. The bracket 1 is the basic structure of the entire conveying mechanism, and the drive motor 2, drive gear 3, support frame 4, and rack 5 are all mounted on the bracket 1. The bracket 1 is a cuboid frame structure, and its height is determined by the height of the substrate 6 to be conveyed.

[0017] A support frame 4 is fixedly installed on the top of the bracket 1. The support frame 4 is used to support the drive gear 3 and the rack 5. Specifically, the support frame 4 includes a front plate 401 and a rear plate 402 structure, which are used to install the drive gear 3 and the drive rack 5. The lateral width of the support frame 4 is the same as that of the bracket 1, and the two ends of the support frame 4 are open. In this way, when multiple substrate vertical conveying mechanisms are combined in the lateral direction, the substrate 6 can be conveyed between different substrate vertical conveying mechanisms.

[0018] A fixing block 7 is fixedly installed on the inner side of the front plate 401 and the rear plate 402 at the bottom position, forming a conveying groove 8 between the two fixing blocks 7. The top surface of the fixing block 7 is a support surface, which is used to support the operation of the rack 5. A support shaft 9 is inserted between the upper parts of the front plate 401 and the rear plate 402. The drive gear 3 is installed on the support shaft 9. The support shaft 9 is supported by bearings on the front plate 401 and the rear plate 402, and one end of the support shaft 9 extends out from the front plate. The drive motor 2 is fixedly installed on the bracket 1 via a reducer 10. The output shaft of the reducer 10 is connected to a clutch 11. The other end of the clutch 11 is connected to a transmission shaft 12. The transmission shaft 12 is connected to the support shaft 9 via a universal joint 13. Thus, the speed of the drive motor 2 is slowed down by the action of the reducer 10, and the motion is transmitted to the drive gear 3 through the clutch 11. The opening and closing of the clutch 11 realizes the driving motion and stopping.

[0019] A rack 5, meshing with the drive gear 3, is positioned below the drive gear 3. A pulley axle 14 is fixedly mounted on the bottom surface of the rack 5, and pulleys 15 are mounted on both ends of the pulley axle 14. The pulleys 15 run on the support surface. Thus, when the drive gear 3 rotates, it moves the drive rack 5 laterally along the support frame 4. A suspension member 16 is also fixedly connected to the bottom of the rack 5. The suspension member 16 extends downward from the conveying groove 8 between the two fixed blocks 7, and its lower end is used to suspend the substrate. To further improve the stability of the substrate in the front-to-back direction during conveying, in this embodiment, transverse guide wheels 21 are provided on the side of the conveying groove 8, i.e., the opposite side of the fixed blocks 7, and the suspension member 16 is located between the transverse guide wheels 21 on both sides.

[0020] To ensure the stable transfer of substrate 6 between multiple vertical substrate conveying mechanisms, drive gears 3 are located at both ends of the support frame 4, and two corresponding drive motors 2 are also provided. Between the two drive gears 3, a guide gear 17 for pressing down the rack 5 is also provided, and the guide gear 17 meshes with the rack 5. The guide gear 17 is mounted on a guide bracket, which includes a gear shaft 18 supporting the guide gear 17. Both ends of the gear shaft 18 are connected to the bracket 1 via telescopic guide rods 19. A compression spring 20 is sleeved on the telescopic guide rod 19. In this way, the compression spring 20 reduces the gap between the guide gear 17 and the rack 5. At the same time, the presence of the guide gear 17 ensures that when one end of the rack 5 is disengaged from one drive gear 3, and the other end has not yet meshed with the drive gear 3 of the next vertical substrate conveying mechanism, there are still two gears (one drive gear 3 and one guide gear 17) maintaining meshing with the rack 5, which improves the longitudinal stability of the substrate 6 when it moves laterally.

Claims

1. A vertical substrate conveying mechanism, characterized in that, The device includes a bracket, a drive motor, a drive gear, a support frame, and a rack. The support frame is fixed to the top of the bracket and has openings at both ends. The gear and rack are disposed inside the support frame. The rack is guided by the support frame and meshes with the gear. A suspension member is provided at the bottom of the rack and extends from the bottom of the support frame to suspend a base plate. The drive motor is mounted on the bracket to drive the gear to rotate.

2. The substrate vertical conveying mechanism according to claim 1, characterized in that, The bracket is provided with a guide gear that meshes with the rack, the guide gear is mounted on the guide bracket, and a compression spring is provided between the guide bracket and the bracket.

3. The substrate vertical conveying mechanism according to claim 2, characterized in that, The guide bracket includes a gear shaft that supports the guide gear. The gear shaft is connected to the bracket via a telescopic guide rod, and the compression spring is sleeved on the telescopic guide rod.

4. The substrate vertical conveying mechanism according to claim 2, characterized in that, The drive gears are located at both ends of the support frame, and the guide gears are located between the two drive gears.

5. The substrate vertical conveying mechanism according to claim 1, characterized in that, The bottom of the support frame is provided with a conveying groove, the suspension member extends out from the conveying groove, the top surfaces on both sides of the conveying groove are support surfaces, and the bottom of the rack is provided with pulleys that run on the support surfaces.

6. The substrate vertical conveying mechanism according to claim 5, characterized in that, The side of the conveying trough is provided with transverse guide wheels, and the suspension member is located between the transverse guide wheels on both sides.

Images