Winding device for production of semiconductor film-reducing film

Abstract

The utility model discloses a take-up device for the production of semiconductor viscosity reduction film, including: the bottom plate, the outer side of the bottom plate is fixedly connected with a drive motor, the output end of the drive motor is fixedly connected with a positive and negative screw rod, the two sides of the top of the bottom plate are in sliding connection with a mobile seat, the utility model relates to the technical field of take-up. According to the device, fixing assemblies are arranged, in the process of fixing a mandrel, the fixing assemblies on the two sides are inserted into the two ends of the mandrel correspondingly, when the edge of the mandrel makes contact with a top plate, the top plate slides along the outer wall of a fixing barrel at the moment, a telescopic oil pipe is forced to be compressed, and hydraulic oil in the telescopic oil pipe is extruded into an oil storage barrel at the moment; the piston rod slides towards the outer side of the oil storage barrel, at the moment, the movable rod slides along the surface of the limiting column through the sliding groove and drives the supporting plate to expand outwards to make contact with the inner wall of the mandrel under limiting of the limiting column, and therefore the mandrel can be fixed, and the adaptability of the device to mandrels of different specifications is enhanced.

Description

Technical Field

[0001] This utility model relates to the field of winding technology, specifically to a winding device for the production of semiconductor anti-adhesion films. Background Technology

[0002] In the semiconductor manufacturing field, anti-adhesion films, as an important auxiliary material, play a crucial role in chip manufacturing, packaging, and other processes. With the continuous development of the semiconductor industry, the requirements for the production efficiency and quality of semiconductor anti-adhesion films are increasing. The winding process, as a vital link in the production flow, has a direct impact on the quality of the final product and production efficiency due to the performance of the equipment used.

[0003] In existing technologies, many winding devices have relatively simple and fixed fixed structures, making it difficult to quickly and conveniently adjust the winding mandrels of different lengths to meet installation requirements. This results in a significant amount of time being spent readjusting the device or even replacing some parts when it is necessary to change mandrels of different lengths for winding operations in actual production, which seriously affects production efficiency. Utility Model Content

[0004] To address the shortcomings of existing technologies, the technical solution adopted by this utility model is as follows: a winding device for semiconductor anti-adhesion film production, comprising: a base plate, a drive motor fixedly connected to the outer side of the base plate, a positive and negative lead screw fixedly connected to the output end of the drive motor, and movable seats slidably connected to both sides of the top of the base plate. A servo motor is fixedly connected to the outer side of the movable seats. The drive motor on the outer side of the base plate provides power to rotate the positive and negative lead screws, thereby driving the movable seats to move to adjust the position of the fixing component; the fixing component is used to fix the winding mandrel; the servo motor can drive the fixing component to rotate to realize the winding action.

[0005] The pressing assembly is fixedly connected at its bottom to the top of the base plate. The pressing assembly presses the anti-adhesion film during the winding process to ensure the tightness and flatness of the winding.

[0006] A fixed assembly is rotatably connected to the outer side of the moving seat away from the servo motor. The fixed assembly includes a fixed cylinder, a top plate slidably connected to the outer wall of the fixed cylinder, a telescopic oil pipe fixedly connected to the outer side of the top plate, an oil reservoir fixedly connected to the outer side of the telescopic oil pipe, a piston rod slidably connected to the inner wall of the oil reservoir, a movable rod rotatably connected to the side of the piston rod away from the oil reservoir, a support plate rotatably connected to the end of the movable rod away from the piston rod, a compression spring fixedly connected to the side of the piston rod near the movable rod, and a limit post fixedly connected to the inner wall of the fixed cylinder. During the fixing of the mandrel, the fixed assemblies on both sides are inserted into the two ends of the mandrel respectively. When the edge of the mandrel contacts the top plate, the top plate slides along the outer wall of the fixed cylinder, forcing the telescopic oil pipe to be compressed. At this time, the hydraulic oil in the telescopic oil pipe is squeezed into the oil reservoir. As the hydraulic oil in the oil reservoir gradually increases, the piston rod slides towards the outer side of the oil reservoir.

[0007] Preferably, the two sides of the positive and negative lead screws are rotatably connected to the inner wall of the base plate, the bottom of the movable seat is threadedly connected to the outer wall of the positive and negative lead screws, and the output end of the servo motor is fixedly connected to the outer side of the fixed assembly. When the positive and negative lead screws rotate, the movable seat will move along the axial direction of the positive and negative lead screws. Because the positive and negative lead screws have positive and negative threads, the two movable seats can move relative to each other or towards each other.

[0008] Preferably, the outer side of the fixed cylinder is rotatably connected to the top of the movable seat, the telescopic oil pipe is located inside the fixed cylinder, the outer side of the oil reservoir is fixedly connected to the inner wall of the fixed cylinder, and the end of the compression spring away from the piston rod is fixedly connected to the inner wall of the fixed cylinder. When the piston rod slides towards the outer side of the oil reservoir, the compression spring is compressed.

[0009] Preferably, the inner wall of the movable rod is slidably connected to the outer wall of the limiting post through a sliding groove, and the sliding groove is opened in the wall of the movable rod. The movable rod slides along the surface of the limiting post through the sliding groove, and under the limitation of the limiting post, it drives the support plate to expand outward and contact the inner wall of the mandrel.

[0010] Preferably, the clamping assembly includes a mounting plate, an arc-shaped connecting rod rotatably connected to the top of the mounting plate, a pressure roller rotatably connected to the top of the arc-shaped connecting rod, a crossbar fixedly connected to the outer wall of the arc-shaped connecting rod, and an air spring rotatably connected to the outer wall of the crossbar. When the thickness of the anti-adhesion film increases, the pressure roller will rotate under the pushing of the anti-adhesion film, causing the arc-shaped connecting rod to gradually deflect. The deflection of the arc-shaped connecting rod will pull the crossbar, and the crossbar will in turn pull the air spring to extend.

[0011] Preferably, the bottom of the mounting plate is fixedly connected to the top of the base plate, and the bottom end of the air spring is rotatably connected to the top of the mounting plate. During the extension process, the air spring generates a downward elastic force, which acts on the anti-adhesion film through the arc-shaped connecting rod and the pressure roller, so that the pressure roller can always press the anti-adhesion film with appropriate pressure.

[0012] The beneficial effects of this utility model are as follows:

[0013] 1. This utility model uses positive and negative lead screws. When the positive and negative lead screws rotate, the moving seats move along the axial direction of the lead screws. Because the positive and negative lead screws have positive and negative threads, the two moving seats can move relative to each other or towards each other. This allows for flexible adjustment of the distance between the fixed components connected to the two moving seats according to the winding requirements, so as to adapt to winding mandrels of different lengths and other situations.

[0014] 2. This utility model, by setting a fixing component, allows the fixing components on both sides to be inserted into the two ends of the mandrel during the fixing process. When the edge of the mandrel contacts the top plate, the top plate slides along the outer wall of the fixing cylinder, forcing the telescopic oil pipe to be compressed. At this time, the hydraulic oil in the telescopic oil pipe is squeezed into the oil storage cylinder, and the piston rod slides towards the outside of the oil storage cylinder. At this time, the movable rod slides along the surface of the limiting post through the sliding groove, and under the limitation of the limiting post, it drives the support plate to expand outward and contact the inner wall of the mandrel, thereby fixing the mandrel and enhancing the device's adaptability to mandrels of different specifications.

[0015] 3. This invention, by setting up a pressing component, ensures that during the winding process, as the semiconductor anti-adhesion film is continuously wound onto the mandrel, the thickness of the anti-adhesion film gradually increases. At this time, due to the elasticity of the air spring, the air spring automatically adjusts its extension or contraction state according to the change in the thickness of the anti-adhesion film, ensuring that the pressure roller can always press the anti-adhesion film with appropriate pressure, guaranteeing the tightness and flatness of the anti-adhesion film during winding, and preventing wrinkles and other defects. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of this utility model;

[0017] Figure 2 This is a structural schematic diagram of the fixing component of this utility model;

[0018] Figure 3 This is a schematic diagram of the structure of the oil storage cylinder of this utility model;

[0019] Figure 4 This is a structural schematic diagram of the clamping assembly of this utility model.

[0020] In the diagram: 1. Base plate; 2. Drive motor; 3. Positive and negative lead screws; 4. Moving seat; 5. Fixed assembly; 6. Servo motor; 7. Clamping assembly; 51. Fixed cylinder; 52. Top plate; 53. Telescopic oil pipe; 54. Oil reservoir; 55. Piston rod; 56. Movable rod; 57. Support plate; 58. Compression spring; 59. Slide groove; 50. Limiting post; 71. Mounting plate; 72. Arc-shaped connecting rod; 73. Pressure roller; 74. Crossbar; 75. Air spring. Detailed Implementation

[0021] The present invention will now be described in further detail with reference to the accompanying drawings and specific embodiments. The embodiments of the present invention are given for illustrative and descriptive purposes only, and are not intended to be exhaustive or to limit the present invention to the disclosed forms. Many modifications and variations will be apparent to those skilled in the art. The embodiments were chosen and described to better illustrate the principles and practical applications of the present invention, and to enable those skilled in the art to understand the present invention and design various embodiments with various modifications suitable for a particular purpose.

[0022] Example: Please refer to Figure 1 - Figure 4 This utility model provides a technical solution: a winding device for producing semiconductor anti-adhesion films, comprising:

[0023] A base plate 1 is fixedly connected to a drive motor 2 on its outer side. A positive and negative lead screw 3 is fixedly connected to the output end of the drive motor 2. Movable seats 4 are slidably connected to both sides of the top of the base plate 1. A servo motor 6 is fixedly connected to the outer side of the movable seats 4. The drive motor 2 on the outer side of the base plate 1 provides power to rotate the positive and negative lead screw 3, which in turn drives the movable seats 4 to move to adjust the position of the fixing component 5. The fixing component 5 is used to fix the winding mandrel. The servo motor 6 can drive the fixing component 5 to rotate to realize the winding action. The pressing component 7 presses the anti-adhesion film during the winding process to ensure the tightness and flatness of the winding.

[0024] Fixed component 5 is rotatably connected to the outer side of the movable base 4 away from the servo motor 6. Fixed component 5 includes a fixed cylinder 51, a top plate 52 slidably connected to the outer wall of the fixed cylinder 51, a telescopic oil pipe 53 fixedly connected to the outer side of the top plate 52, an oil reservoir 54 fixedly connected to the outer side of the telescopic oil pipe 53, a piston rod 55 slidably connected to the inner wall of the oil reservoir 54, a movable rod 56 rotatably connected to the side of the piston rod 55 away from the oil reservoir 54, a support plate 57 rotatably connected to the end of the movable rod 56 away from the piston rod 55, a compression spring 58 fixedly connected to the side of the piston rod 55 near the movable rod 56, a limit post 50 fixedly connected to the inner wall of the fixed cylinder 51, and a positive and negative lead screw. The two sides of the movable seat 4 are rotatably connected to the inner wall of the base plate 1. The bottom of the movable seat 4 is threadedly connected to the outer wall of the positive and negative lead screw 3. The output end of the servo motor 6 is fixedly connected to the outer side of the fixed assembly 5. The outer side of the fixed cylinder 51 is rotatably connected to the top of the movable seat 4. The telescopic oil pipe 53 is located inside the fixed cylinder 51. The outer side of the oil reservoir 54 is fixedly connected to the inner wall of the fixed cylinder 51. The end of the compression spring 58 away from the piston rod 55 is fixedly connected to the inner wall of the fixed cylinder 51. The inner wall of the movable rod 56 is slidably connected to the outer wall of the limiting post 50 through the slide groove 59. The slide groove 59 is opened in the wall of the movable rod 56. When the positive and negative lead screw 3 rotates, the movable seat 4 will move along the axial direction of the positive and negative lead screw 3. Because the positive and negative lead screw 3 has positive and negative threads, the two moving seats 4 can move relative to each other or towards each other. This allows for flexible adjustment of the distance between the fixed components 5 connected to the two moving seats 4 according to the winding requirements, so as to adapt to different lengths of winding mandrels. During the process of fixing the mandrel, the fixed components 5 on both sides are inserted into the two ends of the mandrel. When the edge of the mandrel contacts the top plate 52, the top plate 52 slides along the outer wall of the fixed cylinder 51 and forces the telescopic oil pipe 53 to be compressed. At this time, the hydraulic oil in the telescopic oil pipe 53 is squeezed into the oil storage cylinder 54. As the hydraulic oil in the oil storage cylinder 54 gradually increases, the piston rod 55 slides towards the outside of the oil storage cylinder 54. At this time, the compression spring 58 is compressed, and the movable rod 56 slides along the surface of the limiting post 50 through the slide groove 59. Under the limitation of the limiting post 50, it drives the support plate 57 to expand outward and contact the inner wall of the mandrel. This fixes the mandrel and enhances the device's adaptability to mandrels of different specifications.

[0025] The clamping assembly 7 is fixedly connected at its bottom to the top of the base plate 1. The clamping assembly 7 includes a mounting plate 71, an arc-shaped connecting rod 72 rotatably connected to the top of the mounting plate 71, a pressure roller 73 rotatably connected to the top of the arc-shaped connecting rod 72, a crossbar 74 fixedly connected to the outer wall of the arc-shaped connecting rod 72, and an air spring 75 rotatably connected to the outer wall of the crossbar 74. The bottom of the mounting plate 71 is fixedly connected to the top of the base plate 1, and the bottom end of the air spring 75 is rotatably connected to the top of the mounting plate 71. During the winding process, as the semiconductor anti-adhesion film is continuously wound onto the mandrel, the thickness of the anti-adhesion film gradually increases. At this time, due to the elasticity of the air spring 75 at the top of the mounting plate 71, the air spring 75 will automatically adjust its extension or contraction state according to the change in the thickness of the anti-adhesion film. When the thickness of the anti-adhesion film increases, the pressure roller 73 will rotate under the pushing of the anti-adhesion film, causing the arc-shaped connecting rod 72 to gradually deflect. The deflection of the arc-shaped connecting rod 72 will pull the crossbar 74, and the crossbar 74 will in turn pull the air spring 75 to extend. During the extension process, the air spring 75 will generate a downward elastic force. This elastic force acts on the anti-adhesion film through the arc-shaped connecting rod 72 and the pressure roller 73, so that the pressure roller 73 can always press the anti-adhesion film with appropriate pressure, ensuring the tightness and flatness of the anti-adhesion film during the winding process, and preventing wrinkles and other defects.

[0026] Working principle:

[0027] In use, the drive motor 2 on the outside of the base plate 1 provides power to rotate the positive and negative lead screws 3, which in turn drives the moving seat 4 to move to adjust the position of the fixing component 5; the fixing component 5 is used to fix the mandrel of the winding; the servo motor 6 can drive the fixing component 5 to rotate to realize the winding action; the pressing component 7 presses the anti-adhesion film during the winding process to ensure the tightness and flatness of the winding.

[0028] When the positive and negative lead screws 3 rotate, the moving seats 4 will move along the axial direction of the positive and negative lead screws 3. Since the positive and negative lead screws 3 have positive and negative threads, the two moving seats 4 can move relative to each other or towards each other, so as to flexibly adjust the distance between the fixed components 5 connected to the two moving seats 4 according to the winding requirements, so as to adapt to winding mandrels of different lengths and other situations.

[0029] During the process of fixing the mandrel, the fixing components 5 on both sides are inserted into the two ends of the mandrel respectively. When the edge of the mandrel contacts the top plate 52, the top plate 52 slides along the outer wall of the fixing cylinder 51 and forces the telescopic oil pipe 53 to be compressed. At this time, the hydraulic oil in the telescopic oil pipe 53 is squeezed into the oil storage cylinder 54. As the hydraulic oil in the oil storage cylinder 54 gradually increases, the piston rod 55 slides towards the outside of the oil storage cylinder 54. At this time, the compression spring 58 is compressed, and the movable rod 56 slides along the surface of the limiting post 50 through the slide groove 59. Under the limitation of the limiting post 50, it drives the support plate 57 to expand outward and contact the inner wall of the mandrel. Thus, the mandrel can be fixed, which enhances the adaptability of the device to mandrels of different specifications.

[0030] During the winding process, as the semiconductor anti-adhesion film is continuously wound onto the mandrel, its thickness gradually increases. At this time, due to the elasticity of the air spring 75 at the top of the mounting plate 71, the air spring 75 automatically adjusts its extension or contraction state according to the change in the thickness of the anti-adhesion film. When the thickness of the anti-adhesion film increases, the pressure roller 73 rotates under the pushing action of the anti-adhesion film, causing the arc-shaped connecting rod 72 to gradually deflect. The deflection of the arc-shaped connecting rod 72 pulls the crossbar 74, which in turn pulls the air spring 75 to extend. During the extension process, the air spring 75 generates a downward elastic force. This elastic force acts on the anti-adhesion film through the arc-shaped connecting rod 72 and the pressure roller 73, ensuring that the pressure roller 73 can always press the anti-adhesion film with appropriate pressure, guaranteeing the tightness and flatness of the anti-adhesion film during winding and preventing wrinkles and other defects.

[0031] Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. All other embodiments obtained by those skilled in the art and related fields based on the embodiments of this utility model without creative effort should fall within the protection scope of this utility model. Structures, devices, and operating methods not specifically described and explained in this utility model, unless otherwise specified or limited, shall be implemented according to conventional means in the art.

Claims

1. A winding device for producing semiconductor anti-adhesion films, characterized in that, include: A base plate (1) is fixedly connected to a drive motor (2) on the outside of the base plate (1). A positive and negative lead screw (3) is fixedly connected to the output end of the drive motor (2). A movable seat (4) is slidably connected to both sides of the top of the base plate (1). A servo motor (6) is fixedly connected to the outside of the movable seat (4). A clamping assembly (7) is fixedly connected at its bottom to the top of a base plate (1); A fixed assembly (5) is rotatably connected to the side of the movable seat (4) away from the servo motor (6) on its outer side. The fixed assembly (5) includes a fixed cylinder (51). A top plate (52) is slidably connected to the outer wall of the fixed cylinder (51). A telescopic oil pipe (53) is fixedly connected to the outer side of the top plate (52). An oil reservoir (54) is fixedly connected to the outer side of the telescopic oil pipe (53). A piston rod (55) is slidably connected to the inner wall of the oil reservoir (54). A movable rod (56) is rotatably connected to the side of the piston rod (55) away from the oil reservoir (54). A support plate (57) is rotatably connected to the end of the movable rod (56) away from the piston rod (55). A compression spring (58) is fixedly connected to the side of the piston rod (55) near the movable rod (56). A limit post (50) is fixedly connected to the inner wall of the fixed cylinder (51).

2. The winding device for producing semiconductor anti-adhesion films according to claim 1, characterized in that: The two sides of the positive and negative lead screw (3) are rotatably connected to the inner wall of the base plate (1), the bottom of the moving seat (4) is threadedly connected to the outer wall of the positive and negative lead screw (3), and the output end of the servo motor (6) is fixedly connected to the outer side of the fixed assembly (5).

3. The winding device for producing semiconductor anti-adhesion films according to claim 1, characterized in that: The outer side of the fixed cylinder (51) is rotatably connected to the top of the movable seat (4), the telescopic oil pipe (53) is located inside the fixed cylinder (51), the outer side of the oil storage cylinder (54) is fixedly connected to the inner wall of the fixed cylinder (51), and the end of the compression spring (58) away from the piston rod (55) is fixedly connected to the inner wall of the fixed cylinder (51).

4. The winding device for producing semiconductor anti-adhesion films according to claim 1, characterized in that: The inner wall of the movable rod (56) is slidably connected to the outer wall of the limiting post (50) through a sliding groove (59), and the sliding groove (59) is opened in the wall of the movable rod (56).

5. A winding device for producing semiconductor anti-adhesion films according to claim 1, characterized in that: The clamping assembly (7) includes a mounting plate (71), an arc-shaped connecting rod (72) is rotatably connected to the top of the mounting plate (71), a pressure roller (73) is rotatably connected to the top of the arc-shaped connecting rod (72), a crossbar (74) is fixedly connected to the outer wall of the arc-shaped connecting rod (72), and an air spring (75) is rotatably connected to the outer wall of the crossbar (74).

6. A winding device for producing semiconductor anti-adhesion films according to claim 5, characterized in that: The bottom of the mounting plate (71) is fixedly connected to the top of the base plate (1), and the bottom end of the air spring (75) is rotatably connected to the top of the mounting plate (71).

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