Vacuum sputtering coating target

Abstract

The utility model relates to the technical field of target materials, in particular to a vacuum sputter coating target which comprises a target body, an installation head is arranged at the end of the target body, an external thread part is arranged at the end, away from the target body, of the installation head, the installation head is in threaded connection with a fixing base through the external thread part, and a plurality of notches with triangular sections are formed in the end, away from the target body, of the external thread part. The notch is formed in the edge of the outer end of the external thread part, an internal thread part is arranged at the position, corresponding to the external thread part, of the fixing base, and a clamping locking part is arranged at the bottom of the internal thread part. And the triangular notches are matched with the clamping locking parts, so that the film coating target can be better fastened, and loosening during use is avoided.

Description

Technical Field

[0001] This utility model relates to the field of target technology, and in particular to a vacuum sputtering coating target. Background Technology

[0002] Sputtering targets, especially metal targets, are key materials used in thin film fabrication processes such as physical vapor deposition (PVD) and sputtering. The shape of metal targets can be designed according to specific application requirements and process equipment. Traditionally, some metal targets are fixed using threaded connections. However, during use, these threaded connections may loosen, causing the target to shift position and affecting the normal operation of the sputtering equipment. This requires manual troubleshooting and repair, which is time-consuming. Utility Model Content

[0003] The technical problem to be solved by this utility model is to address the above-mentioned technical deficiencies by providing a vacuum sputtering coating target, which adopts a triangular notch and a locking part to solve the problem of loosening of the coating target during use.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a vacuum sputtering coating target, including a target body, an installation head at the end of the target body, an external threaded part at the end of the installation head away from the target body, the installation head being threadedly connected to a fixed seat through the external threaded part, the end of the external threaded part away from the target body having multiple notches with triangular cross sections, the notches being located at the outer edge of the external threaded part, the fixed seat having an internal threaded part at the position corresponding to the external threaded part, and a locking part being provided at the bottom of the internal threaded part.

[0005] To further optimize this technical solution, the locking part includes a slider and a locking nut. One end of the slider is provided with a locking protrusion, the shape of which matches the shape of the notch. The bottom of the internal thread part is provided with a radial locking hole, and the slider slides through the locking hole. The outer radial side of the slider is provided with a locking nut, which is threaded into the locking hole.

[0006] To further optimize this technical solution, an inclined guide edge is provided on the inner side of the notch, and the angle between the guide edge and the rotation axis of the mounting head is an acute angle.

[0007] To further optimize this technical solution, the maximum outer diameter of the slider is smaller than the maximum outer diameter of the locking nut.

[0008] To further optimize this technical solution, the cross-section of the slider is made of a circle or a polygon.

[0009] Compared with the prior art, the present invention has the following advantages:

[0010] 1. The triangular notch and locking mechanism ensure a tighter fit for the coating target, preventing loosening during use.

[0011] 2. After tightening the mounting head, insert the slider into the snap-fit ​​hole so that the snap-fit ​​protrusion contacts the notch. Then screw in the locking nut to press the slider against the notch. The engagement of the snap-fit ​​protrusion and the notch ensures that the mounting head is reliably snapped in place, preventing loosening during use.

[0012] 3. Due to the design of the guide edge, when the locking nut is tightened, the slider will generate a radial clamping force F1 and an axial component force F2. The axial force F2 and the radial force F1 can reliably lock the mounting head into the fixed seat. Attached Figure Description

[0013] Figure 1 A partial cross-sectional view of a vacuum sputtering coating target;

[0014] Figure 2 This is a schematic diagram of one side of the mounting head structure of a vacuum sputtering coating target;

[0015] Figure 3 This is a schematic diagram of a localized explosion on a vacuum sputtering coating target.

[0016] In the figure: 1. Target body; 11. Mounting head; 110. Limiting plate; 12. External threaded part; 13. Notch; 131. Guide edge; 2. Fixing seat; 20. Snap-fit ​​hole; 21. Internal threaded part; 3. Slider; 31. Snap-fit ​​protrusion; 4. Locking nut. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that these descriptions are exemplary only and are not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0018] It should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer" used in this application to indicate orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings. They are used solely for the convenience of describing this disclosure and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0019] Combination Figures 1 to 3As shown, a vacuum sputtering coating target includes a target body 1, a mounting head 11, an external threaded portion 12, and a fixing seat 2. The mounting head 11 is provided at the end of the target body 1. The mounting head 11 includes a limiting disk 110 and an external threaded portion 12. The outer diameter of the limiting disk 110 is larger than the maximum outer diameter of the external threaded portion 12. The external threaded portion 12 is located at the end of the mounting head 11 away from the target body 1. In use, the mounting head 11 is threadedly connected to the fixing seat 2 through the external threaded portion 12. The end of the external threaded portion 12 away from the target body 1 is provided with multiple notches 13 with triangular cross sections. The notches 13 are located at the outer edge of the external threaded portion 12. The multiple notches 13 are arranged radially. The inner side of the notches 13 is provided with an inclined guide edge 131. The angle between the guide edge 131 and the rotation axis of the mounting head 11 is an acute angle.

[0020] The fixed base 2 is provided with an internal thread 21 at the position corresponding to the external thread 12, and the bottom of the internal thread 21 is provided with two symmetrical locking parts.

[0021] The locking part includes a slider 3 and a locking nut 4. The cross-section of the slider 3 is circular or polygonal, and the maximum outer diameter of the slider 3 is smaller than the maximum outer diameter of the locking nut 4. One end of the slider 3 is provided with a locking protrusion 31, the shape of which fits into the shape of the notch 13. The bottom of the internal thread part 21 is provided with a radial locking hole 20, and the slider 3 slides through the locking hole 20. The locking nut 4 is provided on the radially outer side of the slider 3, and the locking nut 4 is threaded into the locking hole 20.

[0022] When using, combine Figures 1 to 3 As shown, first screw the mounting head 11 into the internal thread 21 of the fixing seat 2. After tightening, insert the slider 3 into the snap-fit ​​hole 20 so that the snap-fit ​​protrusion 31 contacts the notch 13. Then screw in the locking nut 4 so that the slider 3 is pressed against the notch 13. The engagement of the snap-fit ​​protrusion 31 and the notch 13 can reliably snap the mounting head 11, preventing loosening during use. At the same time, due to the setting of the guide edge 131, when the locking nut 4 is tightened, it will generate a radial clamping force F1 on the slider 3, and also generate an axial component force F2. The axial force F2 and the radial force F1 can reliably snap the mounting head 11 into the fixing seat 2.

[0023] Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

Claims

1. A vacuum sputtering coating target, comprising a target body (1), wherein a mounting head (11) is provided at one end of the target body (1), and an external thread (12) is provided at one end of the mounting head (11) away from the target body (1), and the mounting head (11) is threadedly connected to a fixing seat (2) through the external thread (12), characterized in that: The external threaded portion (12) has multiple notches (13) with triangular cross sections at one end away from the target (1). The notches (13) are located at the edge of the outer end of the external threaded portion (12). The fixing seat (2) has an internal threaded portion (21) at the position corresponding to the external threaded portion (12). The bottom of the internal threaded portion (21) has a locking part.

2. The vacuum sputtering coating target according to claim 1, characterized in that: The locking part includes a slider (3) and a locking nut (4). One end of the slider (3) is provided with a locking protrusion (31). The shape of the locking protrusion (31) is fitted into the shape of the notch (13). The bottom of the internal thread part (21) is provided with a radial locking hole (20). The slider (3) slides through the locking hole (20). The locking nut (4) is provided on the radial outer side of the slider (3). The locking nut (4) is threaded into the locking hole (20).

3. The vacuum sputtering coating target according to claim 2, characterized in that: The notch (13) has an inclined guide edge (131) on its inner side, and the guide edge (131) and the rotation axis of the mounting head (11) form an acute angle.

4. The vacuum sputtering coating target according to claim 2, characterized in that: The maximum outer diameter of the slider (3) is smaller than the maximum outer diameter of the locking nut (4).

5. A vacuum sputtering coating target according to claim 4, characterized in that: The cross-section of the slider (3) is circular or polygonal.

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