Bonding chopper and welding equipment

Abstract

The utility model relates to a bonding chopper and welding equipment, and relates to the technical field of semiconductor equipment, the bonding chopper comprises a chopper main body and a chopper head part, the chopper head part is arranged at the bottom end of the chopper main body, the top side of the chopper main body is provided with a wire hole, and the wire hole sequentially penetrates through the chopper main body and the chopper head part, extends to the bottom end of the chopper head part and is used for accommodating a metal wire. An exhaust hole is further formed in the top side of the chopper body, communicates with the middle section of the wire hole and is used for exhausting gas in the wire hole. Compared with the prior art, according to the embodiment of the utility model, the exhaust hole is additionally arranged and can be communicated to the middle section of the wire hole, so that high-temperature gas generated in the high-temperature welding process can be exhausted in time, the high-temperature gas is prevented from being focused to oxidize a metal wire in the chopper, the strength of a metal welding layer is improved, and the welding effect is ensured.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and more specifically, to a bonding cleaver and welding equipment. Background Technology

[0002] With the rapid development of the semiconductor industry, chip packaging typically requires bonding chip pads to substrate pads using wire bonding. Existing wire bonding generally uses aluminum or gold wire as the bonding wire, and welding is performed using ultrasound. Ultrasonic waves from an ultrasonic generator generate high-frequency vibrations, which are then transmitted to a welding cutter via an amplitude transformer. When the cutter contacts the bonding wire and the workpiece, under pressure and vibration, the surfaces of the metals to be welded rub against each other, breaking down the oxide film and causing plastic deformation. This results in the two clean metal surfaces coming into close contact, achieving the welding purpose.

[0003] However, the existing cleaver structure is prone to generating high-temperature gas during the high-temperature welding process. This high-temperature gas cannot be discharged in time and is prone to oxidizing the metal wires in the cleaver, resulting in low strength of the metal weld layer. This leads to welding problems such as weld ball falling off and failing tensile tests. Utility Model Content

[0004] The purpose of this application is to provide a bonding cleaver and welding equipment that can promptly discharge the high-temperature gas generated during the high-temperature welding process, prevent the high-temperature gas from focusing and oxidizing the metal wire in the cleaver, improve the strength of the metal weld layer, and ensure the welding effect.

[0005] To achieve the above objectives, the embodiments of this utility model are implemented through the following scheme.

[0006] In a first aspect, this utility model provides a bonding cleaver, including a cleaver body and a cleaver head. The cleaver head is disposed at the bottom end of the cleaver body, and a wire hole is provided on the top side of the cleaver body. The wire hole passes through the cleaver body and the cleaver head in sequence and extends to the bottom end of the cleaver head for accommodating a metal wire. A vent hole is also provided on the top side of the cleaver body, and the vent hole is connected to the middle section of the wire hole for discharging gas from the wire hole.

[0007] In an optional embodiment, the wire hole extends along the centerline of the chopping blade body, and there are two vent holes, which are symmetrically distributed on both sides of the wire hole.

[0008] In an optional embodiment, the main body of the cleaver is further provided with two venting grooves. One end of the venting groove is connected to the venting hole, and the other end extends to the middle section of the wire hole to connect the wire hole and the venting hole. The two venting grooves are distributed in a V-shape on both sides of the wire hole.

[0009] In an optional embodiment, the bonding cleaver further includes a valve assembly connected to the top side of the cleaver body and disposed on the vent hole, for sealing the vent hole or opening the vent hole under air pressure.

[0010] In an optional embodiment, the valve assembly includes a stop member, a plug plate, and an elastic element. The plug plate is disposed at the opening of the vent hole. The stop member is detachably connected to the blade body. The elastic element is disposed between the plug plate and the stop member to provide elastic force to the plug plate toward the vent hole, so that the plug plate blocks the vent hole.

[0011] In an optional embodiment, the diameter of the plug plate is adapted to the diameter of the vent hole so that the plug plate is fitted inside the vent hole.

[0012] In an optional embodiment, the valve assembly further includes a valve plate disposed on the side of the plug plate away from the cutter head component and covering the opening of the vent hole, the elastic member abutting against the valve plate so that the valve plate abuts against the plug plate.

[0013] In an optional embodiment, the stop member includes a stop plate, a guide post, and a fixing post. The guide post is disposed at the center of the stop plate, and the fixing post is disposed on both sides of the guide post and parallel to the guide post. The fixing post passes through the valve plate and is connected to the main body of the chopping blade. The elastic element is sleeved outside the guide post, and the guide post passes through the valve plate and is connected to the valve plate.

[0014] In an optional embodiment, the top side surface of the chopping blade body is further provided with screw holes, the screw holes being located on both sides of the vent hole, the stop plate being provided with mounting holes, and the fixing post passing through the mounting holes and being assembled with the screw holes.

[0015] On the other hand, this utility model embodiment provides a welding device, including a robotic arm and the aforementioned bonding cleaver, wherein the cleaver body is connected to the robotic arm.

[0016] Through the above technical solution, this utility model embodiment provides a bonding wedge. A blade head is provided at the bottom end of the wedge body, and the bottom end of the blade head can directly contact the object to be welded. A wire hole is provided on the top side of the wedge body, which can accommodate a metal wire and sequentially penetrates the wedge body and the blade head, extending to the bottom end of the blade head to provide welding wire and ensure welding operation. An vent hole is also provided on the top side of the wedge body, connecting to the middle section of the wire hole, which can discharge high-temperature gas from the wire hole. Compared with the prior art, this utility model embodiment, by adding a vent hole that connects to the middle section of the wire hole, can promptly discharge high-temperature gas generated during the high-temperature welding process, preventing the high-temperature gas from focusing and oxidizing the metal wire in the wedge, improving the strength of the metal weld layer, and ensuring the welding effect.

[0017] Other features and advantages of this application will be described in detail in the following detailed description section. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1 A partial structural schematic diagram of the bonding cleaver provided in an embodiment of this application from a first-view perspective;

[0020] Figure 2 A perspective view of the bonding cleaver provided in the embodiments of this application from a second perspective;

[0021] Figure 3 A schematic diagram of the overall structure of the bonding cleaver provided in an embodiment of this application from a first-view perspective;

[0022] Figure 4 This is an exploded view of the bonding cleaver provided in an embodiment of this application.

[0023] icon:

[0024] 100-Bonded cleaver; 110-Cleaver body; 130-Cleaver head; 150-Wire hole; 170-Vent hole; 171-Vent groove; 190-Valve assembly; 191-Stop component; 192-Plug plate; 193-Elastic element; 194-Valve plate; 195-Stop plate; 196-Guide post; 197-Fixing post; 198-Screw hole; 199-Mounting hole. Detailed Implementation

[0025] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0026] In the description of this application, it should be noted that the terms "inner" and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0027] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "setup" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0028] See Figure 1 and Figure 2 This utility model provides a bonding wedge 100, which can promptly discharge the high-temperature gas generated during the high-temperature welding process, avoid the high-temperature gas from focusing and oxidizing the metal wire in the wedge, improve the strength of the metal welding layer, and ensure the welding effect.

[0029] The bonding cleaver 100 provided in this embodiment of the utility model includes a cleaver body 110 and a cleaver head 130. The cleaver head 130 is disposed at the bottom end of the cleaver body 110, and a wire hole 150 is provided on the top side of the cleaver body 110. The wire hole 150 passes through the cleaver body 110 and the cleaver head 130 in sequence and extends to the bottom end of the cleaver head 130 for accommodating metal wire. A vent hole 170 is also provided on the top side of the cleaver body 110. The vent hole 170 is connected to the middle section of the wire hole 150 for venting gas in the wire hole 150.

[0030] In this embodiment of the invention, a blade head 130 is provided at the bottom end of the blade body 110. The bottom end of the blade head 130 can directly contact the object to be welded. A wire hole 150 is provided on the top side of the blade body 110. The wire hole 150 can accommodate a metal wire and passes through the blade body 110 and the blade head 130 in sequence, extending to the bottom end of the blade head 130 to provide welding wire and ensure the welding action. The setting of the blade head 130 and the welding principle can be referred to the blade structure in existing ultrasonic welding technology. A vent hole 170 is also provided on the top side of the blade body 110. The vent hole 170 is connected to the middle section of the wire hole 150, which can discharge the high-temperature gas in the wire hole 150, avoiding the high-temperature gas from focusing and oxidizing the metal wire in the blade, improving the strength of the metal welding layer, and ensuring the welding effect.

[0031] It should be noted that the main body 110 of the cleaver in this embodiment is used for ultrasonic welding. During welding, the metal wire passes through the wire hole 150 and the cleaver head 130 to achieve welding. The metal wire of the cleaver head 130 uses the principle of ultrasonic waves, which are transmitted to the solder balls and pads and other metal surfaces to be welded, causing the temperature of the welding area to rise. A certain pressure is then applied, causing plastic deformation at the interface between the solder balls and pads and the solder wire itself. The metal surfaces rub against each other to form molecular fusion, thus achieving the purpose of welding. Some of the high-temperature gas generated during the welding process enters the wire hole 150, and this part of the high-temperature gas can be discharged in time through the exhaust hole 170 to prevent the accumulation of high-temperature gas in the wire hole 150 from causing the total metal wire in the wire hole 150 to melt and maintain the ductility of the metal wire.

[0032] In some embodiments, the wire hole 150 extends along the centerline of the chopping blade body 110, and there are two vent holes 170 symmetrically distributed on both sides of the wire hole 150. Specifically, the wire hole 150 extends from top to bottom and extends to the end face of the blade head 130. In this embodiment, the blade head 130 is tapered to facilitate welding. The axis of the wire hole 150 coincides with the centerline of the chopping blade body 110 and the blade head 130, thereby ensuring welding accuracy. By providing two symmetrically arranged vent holes 170, high-temperature gas can be discharged evenly, and the venting effect can be improved, further enhancing venting efficiency.

[0033] In some embodiments, the main body 110 of the cleaver is further provided with two exhaust grooves 171. One end of the exhaust groove 171 is connected to the exhaust hole 170, and the other end extends to the middle section of the wire hole 150, for connecting the wire hole 150 and the exhaust hole 170. The two exhaust grooves 171 are distributed in a V-shape on both sides of the wire hole 150. Specifically, the two ends of the exhaust groove 171 are respectively connected to the middle section of the wire hole 150 and the exhaust hole 170, and the exhaust grooves 171 are distributed in a V-shape, which allows the high-temperature gas to be discharged into the exhaust hole 170 in a timely manner during the rising process, thereby ensuring the exhaust effect.

[0034] See Figures 2 to 4 Furthermore, the bonding cleaver 100 also includes a valve assembly 190, which is connected to the top side of the cleaver body 110 and disposed on the vent hole 170. The valve assembly 190 is used to seal the vent hole 170 or open it under air pressure. In its natural state, the valve assembly 190 seals the vent hole 170, preventing external impurities from entering. When high-temperature gas is present in the wire hole 150, the vent hole 170, and the vent groove 171, the vent hole 170 will open under air pressure, thereby venting the gas. Of course, in other preferred embodiments of this invention, the valve assembly 190 can be omitted, leaving the vent hole 170 in a normally open state.

[0035] The valve assembly 190 includes a stop member 191, a plug plate 192, and an elastic element 193. The plug plate 192 is disposed at the opening of the vent hole 170. The stop member 191 is detachably connected to the blade body 110. The elastic element 193 is disposed between the plug plate 192 and the stop member 191, and is used to provide a spring force to the plug plate 192 toward the vent hole 170, so that the plug plate 192 blocks the vent hole 170. Specifically, the elastic element 193 can be a spring, which is pressed between the plug plate 192 and the stop member 191, thereby providing a certain spring force to ensure that the plug plate 192 can block the vent hole 170. It is worth noting that the spring force is set relatively small, so that the plug plate 192 can open under a small air pressure, ensuring the venting effect.

[0036] In some embodiments, the diameter of the plug plate 192 is adapted to the diameter of the vent hole 170 so that the plug plate 192 is fitted inside the vent hole 170. Specifically, the plug plate 192 is cylindrical and fits precisely into the vent hole 170, and the plug plate 192 is clearance-fitted or tightly fitted to the inner wall of the vent hole 170.

[0037] Furthermore, the valve assembly 190 also includes a valve plate 194, which is disposed on the side of the plug plate 192 away from the cutter head 130 and covers the opening of the vent hole 170. The elastic member 193 abuts against the valve plate 194 so that the valve plate 194 abuts against the plug plate 192. By providing the valve plate 194, it is possible to ensure that the plug plate 192 is inserted in place, and at the same time, it can cover the vent hole 170 from the surface, thereby improving the shielding effect of the vent hole 170.

[0038] In some embodiments, the stop member 191 includes a stop plate 195, a guide post 196, and a fixing post 197. The guide post 196 is disposed at the center of the stop plate 195, and the fixing posts 197 are disposed on both sides of the guide post 196 and parallel to the guide post 196. The fixing posts 197 pass through the valve plate 194 and are connected to the blade body 110. The elastic element 193 is sleeved on the guide post 196, and the guide post 196 passes through the valve plate 194 and is connected to the valve plate 194. Specifically, each stop plate 195 may be provided with two fixing posts 197, which fix the stop plate 195. The guide posts 196 can provide positioning and guiding for the spring.

[0039] Furthermore, the top surface of the main body 110 of the splitting blade is provided with screw holes 198, which are located on both sides of the vent hole 170. The stop plate 195 is provided with mounting holes 199, and the fixing post 197 passes through the mounting hole 199 and is assembled with the screw holes. Specifically, the fixing post 197 is a bolt structure, which is movably inserted through the mounting hole 199. At the same time, the guide post 196 is fixedly connected to the valve plate 194 and the plug plate 192. In actual use, the valve plate 194, the plug plate 192 and the stop plate 195 can move synchronously and disengage from the vent hole 170, thereby realizing venting.

[0040] This utility model embodiment also provides a welding device, including a robotic arm and a bonding cutter 100. The bonding cutter 100 includes a cutter body 110 and a cutter head 130. The cutter head 130 is located at the bottom end of the cutter body 110, and a wire hole 150 is provided on the top side of the cutter body 110. The wire hole 150 passes through the cutter body 110 and the cutter head 130 and extends to the bottom end of the cutter head 130 for accommodating metal wire. A vent hole 170 is also provided on the top side of the cutter body 110, which connects to the middle section of the wire hole 150 for venting gas from the wire hole 150. The cutter body 110 is connected to the robotic arm, and the movement of the cutter body 110 is achieved by the robotic arm.

[0041] For details regarding other components of the welding equipment and the welding principle, please refer to the relevant descriptions in the existing technology.

[0042] In summary, through the above technical solutions, this utility model embodiment provides a bonding cutter 100 and a welding device. A cutter head 130 is provided at the bottom end of the cutter body 110, which can directly contact the object to be welded. A wire hole 150 is provided on the top side of the cutter body 110, which can accommodate a metal wire and sequentially penetrates the cutter body 110 and the cutter head 130, extending to the bottom end of the cutter head 130 to provide welding wire and ensure welding operation. Furthermore, an exhaust hole 170 is provided on the top side of the cutter body 110, which connects to the middle section of the wire hole 150, allowing the high-temperature gas in the wire hole 150 to be discharged. Compared to the prior art, this utility model embodiment, by adding an exhaust hole 170 that connects to the middle section of the wire hole 150, can promptly discharge the high-temperature gas generated during the high-temperature welding process, preventing the high-temperature gas from focusing and oxidizing the metal wire in the cutter, thus improving the strength of the metal weld layer and ensuring the welding effect.

[0043] It should be noted that, where there is no conflict, the features in the embodiments of this application can be combined with each other.

[0044] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A bonding cleaver, characterized in that, The device includes a chopping blade body and a blade head. The blade head is located at the bottom end of the chopping blade body, and a wire hole is provided on the top side of the chopping blade body. The wire hole passes through the chopping blade body and the blade head in sequence and extends to the bottom end of the blade head for accommodating a metal wire. A vent hole is also provided on the top side of the chopping blade body, which connects to the middle section of the wire hole for venting gas from the wire hole.

2. The bonding cleaver according to claim 1, characterized in that, The wire hole extends along the centerline of the main body of the cleaver, and there are two vent holes, which are symmetrically distributed on both sides of the wire hole.

3. The bonding cleaver according to claim 2, characterized in that, The main body of the splitting blade is also provided with two venting grooves. One end of the venting groove is connected to the venting hole, and the other end extends to the middle section of the wire hole to connect the wire hole and the venting hole. The two venting grooves are distributed in a V-shape on both sides of the wire hole.

4. The bonding cleaver according to claim 1, characterized in that, The bonding cleaver also includes a valve assembly connected to the top side of the cleaver body and disposed on the vent hole, for sealing the vent hole or opening the vent hole under air pressure.

5. The bonding cleaver according to claim 4, characterized in that, The valve assembly includes a stop member, a plug plate, and an elastic element. The plug plate is disposed at the opening of the vent hole. The stop member is detachably connected to the blade body. The elastic element is disposed between the plug plate and the stop member and is used to provide elastic force to the plug plate toward the vent hole so that the plug plate blocks the vent hole.

6. The bonding cleaver according to claim 5, characterized in that, The diameter of the plug plate is adapted to the diameter of the exhaust hole so that the plug plate is fitted inside the exhaust hole.

7. The bonding cleaver according to claim 6, characterized in that, The valve assembly further includes a valve plate disposed on the side of the plug plate away from the blade head and covering the opening of the vent hole, the elastic element abutting against the valve plate so that the valve plate abuts against the plug plate.

8. The bonding cleaver according to claim 7, characterized in that, The stop component includes a stop plate, a guide post, and a fixing post. The guide post is located at the center of the stop plate, and the fixing post is located on both sides of the guide post and parallel to the guide post. The fixing post passes through the valve plate and is connected to the main body of the chopping blade. The elastic element is sleeved outside the guide post, and the guide post passes through the valve plate and is connected to the valve plate.

9. The bonding cleaver according to claim 8, characterized in that, The top side surface of the chopping blade body is also provided with screw holes, which are located on both sides of the vent hole. The stop plate is provided with mounting holes, and the fixing post passes through the mounting holes and is assembled with the screw holes.

10. A welding device, characterized in that, It includes a robotic arm and a bonding cleaver as described in any one of claims 1-9, wherein the cleaver body is connected to the robotic arm.

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