Device for disassembling upper electrode

Abstract

The utility model provides a device for disassembling an upper electrode. The device comprises a connecting piece, a separating piece and a buffering piece, the connecting piece comprises a chassis and a connecting wall; one end of the connecting wall is connected with the upper surface of the chassis, and the other end of the connecting wall extends towards one side far away from the chassis; a space for accommodating the upper electrode is defined between the connecting wall and the upper surface of the chassis; a plurality of first through holes are formed in the connecting wall at intervals in the direction perpendicular to the base plate, and a plurality of second through holes are formed in the connecting wall at intervals in the direction parallel to the base plate; the number of the separating pieces is multiple, each separating piece corresponds to one second through hole, the separating pieces penetrate through the corresponding second through holes and can move relative to the second through holes, and the ends, pointing to the axis of the base plate, of the separating pieces are in a sharp corner shape. According to the device, the efficiency of disassembling the upper electrode can be obviously improved, and the upper electrode can be prevented from falling off and being injured. When the device is used for disassembling the upper electrode, only one person takes about ten minutes, and an operator does not need to support the upper electrode with hands all the time.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, and in particular to a device for removing the upper electrode. Background Technology

[0002] In wafer manufacturing, etching machines are used to etch the wafers. For example... Figure 1 As shown, an etching machine typically includes a cooling plate 1, an upper electrode 2, and a retaining ring 3. The upper electrode 2 is fixed to the cooling plate 1 by the retaining ring 3 and screws, and a sealing ring is provided between the cooling plate 1 and the upper electrode 2.

[0003] During equipment maintenance, the upper electrode 2 needs to be removed from the cooling plate 1. Currently, removing the upper electrode 2 usually requires two or three people. One person supports the upper electrode 2 from below, while another person first removes the retaining ring 3 and then pulls or pries the upper electrode 2 off the cooling plate 1.

[0004] However, because the upper electrode 2 is exposed to high temperatures during use, the sealing ring between the upper electrode 2 and the cooling plate 1 easily softens. The softened sealing ring causes the upper electrode 2 to stick to the cooling plate 1, making it difficult to remove. Currently, removing one upper electrode 2 typically takes about one hour, resulting in low efficiency. Furthermore, if the upper electrode 2 is not supported during removal, it is prone to falling and causing injury. Utility Model Content

[0005] This invention provides a device for disassembling the upper electrode, in order to solve the technical problems of low efficiency in disassembling the upper electrode and the upper electrode being prone to falling and causing injury.

[0006] To solve the above-mentioned technical problems, this utility model provides a device for disassembling the upper electrode, including a connector, a separator, and a buffer.

[0007] The connector includes a chassis and a connecting wall; one end of the connecting wall is connected to the upper surface of the chassis, and the other end of the connecting wall extends away from the chassis; the connecting wall and the upper surface of the chassis enclose a space for accommodating the upper electrode; a plurality of first through holes are spaced apart on the connecting wall along a direction perpendicular to the upper surface of the chassis, and a plurality of second through holes are spaced apart on the connecting wall along a direction parallel to the upper surface of the chassis;

[0008] The number of the separating components is multiple, each of the separating components corresponds to one second through hole, the separating component passes through the corresponding second through hole and is movable relative to the second through hole, and the end of the separating component pointing towards the axis of the chassis is pointed.

[0009] One end of the buffer is connected to the upper surface of the chassis, and the other end of the buffer extends away from the chassis. The extension length of the other end of the buffer relative to the chassis is less than the extension length of the other end of the connecting wall relative to the chassis.

[0010] Preferably, the connecting wall is in the shape of a hollow cylinder.

[0011] Preferably, one end of the connecting wall is connected to the edge of the upper surface of the chassis.

[0012] Preferably, the chassis is disc-shaped.

[0013] Preferably, a third through hole is provided at the middle position of the chassis.

[0014] Preferably, the inner wall of the second through hole is provided with an internal thread, and the separator is connected to the internal thread through an external thread.

[0015] Preferably, the end of the separator furthest from the chassis is provided with a straight groove or a cross-shaped groove.

[0016] Preferably, the buffer includes a plurality of springs, which are spaced apart on the upper surface of the chassis.

[0017] Preferably, the plurality of the separators are spaced apart and evenly arranged on the connecting wall.

[0018] Preferably, a plurality of the first through holes are spaced apart and uniformly disposed on the connecting wall.

[0019] This utility model provides a device for disassembling an upper electrode, comprising a connector, a separator, and a buffer. When the upper electrode needs to be removed from the cooling plate, first remove the screws used to connect the retaining ring, then remove the retaining ring. Next, fix the device to the cooling plate using screws and the connecting wall, aligning the gap between the upper electrode and the cooling plate with the pointed end of the separator. When the separator is under force, it separates the upper electrode from the cooling plate. The upper electrode falls onto the buffer to prevent damage. Finally, loosen the screws to remove the device and the upper electrode. The unexpected advantage of this device is that it significantly improves the efficiency of disassembling the upper electrode and prevents the upper electrode from falling and causing injury. Using this device, disassembling the upper electrode can be completed by one person in about ten minutes, without requiring the operator to continuously support the upper electrode by hand. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of a cooling plate, upper electrode, and fixing ring in the prior art.

[0021] Figure 2This is a schematic diagram of a device for disassembling the upper electrode according to an embodiment of the present invention.

[0022] Figure 3 yes Figure 2 A schematic diagram of the structure mounted on the cooling plate.

[0023] Figure 4 This is a schematic diagram of a device for disassembling the upper electrode according to an embodiment of the present invention.

[0024] Figure 5 This is a schematic diagram showing the distribution of a first through hole and a separator on a connecting wall according to an embodiment of the present invention.

[0025] [The annotations in the attached figures are explained below]:

[0026] Cooling plate-1, upper electrode-2, retaining ring-3;

[0027] Connector-11, Separator-12, Buffer-13, Screw-14;

[0028] Chassis-111, Connecting wall-112;

[0029] First through hole-1121, second through hole-1122;

[0030] Third through hole -1111. Detailed Implementation

[0031] To make the objectives, advantages, and features of this utility model clearer, the following detailed description of a device for disassembling the upper electrode, in conjunction with the accompanying drawings, is provided. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the explanation of the embodiments of this utility model.

[0032] In the description of this utility model, the terms "first," "second," and other qualifiers are added for convenience of description and reference, and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with qualifiers such as "first" and "second" may explicitly or implicitly include one or more of that feature.

[0033] like Figures 2-5As shown, this embodiment provides a device for disassembling the upper electrode 2, including a connector 11, a separator 12, and a buffer 13; the connector 11 includes a base 111 and a connecting wall 112; one end of the connecting wall 112 is connected to the upper surface of the base 111, and the other end of the connecting wall 112 extends away from the base 111; the connecting wall 112 and the upper surface of the base 111 enclose a space for accommodating the upper electrode 2; a plurality of first through holes 1121 are spaced apart on the connecting wall 112 along a direction perpendicular to the upper surface of the base 111, and a plurality of first through holes 1121 are spaced apart on the connecting wall 112 along a direction parallel to the upper surface of the base 111. Multiple second through holes 1122 are spaced apart; there are multiple separating members 12, each separating member 12 corresponding to one second through hole 1122, the separating member 12 passes through the corresponding second through hole 1122 and is movable relative to the second through hole 1122, and one end of the separating member 12 pointing towards the axis of the chassis 111 is pointed; one end of the buffer member 13 is connected to the upper surface of the chassis 111, and the other end of the buffer member 13 extends away from the chassis 111, and the extension length of the other end of the buffer member 13 relative to the chassis 111 is less than the extension length of the other end of the connecting wall 112 relative to the chassis 111.

[0034] This embodiment provides a device for disassembling the upper electrode 2, comprising a connector 11, a separator 12, and a buffer 13. When the upper electrode 2 needs to be removed from the cooling plate 1, first remove the screw 14 used to connect the retaining ring, then remove the retaining ring. Next, fix the device to the cooling plate 1 using the screw 14 and the connecting wall 112, aligning the gap between the upper electrode 2 and the cooling plate 1 with the pointed end of the separator 12. When the separator 12 is subjected to force, it can separate the upper electrode 2 from the cooling plate 1. The upper electrode 2 falls onto the buffer 13, preventing damage to the upper electrode 2. Finally, loosen the screw 14 to remove the device and the upper electrode 2. The unexpected advantage of this device is that it significantly improves the efficiency of disassembling the upper electrode 2 and prevents the upper electrode 2 from falling and causing injury. Using this device, disassembling the upper electrode 2 can be completed by one person in about ten minutes, without requiring the operator to continuously support the upper electrode 2 by hand.

[0035] Preferred, such as Figure 2 As shown, the connecting wall 112 is hollow cylindrical, which makes the space formed by the connecting wall 112 and the upper surface of the chassis 111 cylindrical. The cylindrical space is convenient for storing the upper electrode 2 and prevents the upper electrode 2 from being scratched.

[0036] Preferred, such as Figure 2As shown, one end of the connecting wall 112 is connected to the edge of the upper surface of the chassis 111, which allows the chassis 111 to have a smaller cross-section. If one end of the connecting wall 112 is close to the middle of the chassis 111, the edge of the chassis 111 will extend outward and occupy space.

[0037] Preferred, such as Figure 2 As shown, the chassis 111 is disc-shaped, which makes it easier to manufacture the chassis 111.

[0038] Preferred, such as Figure 3 As shown, a third through hole 1111 is provided in the middle of the chassis 111. The operator can observe the condition of the upper electrode 2 through the third through hole 1111 to confirm whether the upper electrode 2 has detached from the cooling plate 1.

[0039] Preferred, such as Figure 2 As shown, the inner wall of the second through hole 1122 is provided with an internal thread, and the separator 12 is connected to the internal thread through an external thread. The threaded connection facilitates the reciprocating movement of the separator 12 towards the axis of the chassis 111.

[0040] Preferred, such as Figure 2 As shown, the end of the separator 12 furthest from the chassis 111 is provided with a slotted or cross-shaped groove. Force can be applied to the slotted or cross-shaped groove of the separator 12 using a screwdriver to improve the efficiency of disassembling the upper electrode 2. The separator 12 can be made of plastic materials such as Teflon to ensure good strength and elasticity. The pointed head of the separator 12 can be triangular or flat. In other embodiments, a handle for rotating the separator 12 can be provided at the end of the separator 12 furthest from the chassis 111.

[0041] Preferred, such as Figure 2 As shown, the buffer 13 includes a plurality of springs, which are spaced apart on the upper surface of the chassis 111. The springs prevent the upper electrode 2 from being damaged by the chassis 111. In other embodiments, the buffer 13 may also include an elastic material such as sponge.

[0042] Preferred, such as Figure 2 and Figure 5 As shown, multiple separating elements 12 are spaced apart and evenly arranged on the connecting wall 112, so that force can be applied to the gap between the upper electrode 2 and the cooling plate 1 from multiple directions, preventing the upper electrode 2 from being damaged due to uneven force.

[0043] Preferred, such as Figure 3 and Figure 5As shown, multiple first through holes 1121 are spaced apart and evenly arranged on the connecting wall 112, which allows the device to be stably fixed on the cooling plate 1. The cooling plate 1 is provided with screw holes for connecting the fixing ring. After the fixing ring is removed, the device can be fixed through the original screw holes.

[0044] In summary, this utility model provides a device for disassembling the upper electrode 2, comprising a connector 11, a separator 12, and a buffer 13. When it is necessary to remove the upper electrode 2 from the cooling plate 1, first remove the screw 14 used to connect the fixing ring, then remove the fixing ring, and then fix the device to the cooling plate 1 using the screw 14 and the connecting wall 112, aligning the gap between the upper electrode 2 and the cooling plate 1 with the pointed end of the separator 12. When the separator 12 is subjected to force, it can separate the upper electrode 2 from the cooling plate 1. The upper electrode 2 falls onto the buffer 13 to prevent damage to the upper electrode 2. Finally, loosen the screw 14 to remove the device and the upper electrode 2. The unexpected effect of this device is that it can significantly improve the efficiency of disassembling the upper electrode 2 and prevent the upper electrode 2 from falling and causing injury. Using this device, disassembling the upper electrode 2 can be completed by one person in about ten minutes, without the need for the operator to hold the upper electrode 2 by hand.

[0045] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the present utility model.

Claims

1. A device for disassembling an upper electrode, characterized in that, Includes connectors, separators, and buffers; The connector includes a chassis and a connecting wall; one end of the connecting wall is connected to the upper surface of the chassis, and the other end of the connecting wall extends away from the chassis; the connecting wall and the upper surface of the chassis enclose a space for accommodating the upper electrode; a plurality of first through holes are spaced apart on the connecting wall along a direction perpendicular to the upper surface of the chassis, and a plurality of second through holes are spaced apart on the connecting wall along a direction parallel to the upper surface of the chassis; The number of the separating components is multiple, each of the separating components corresponds to one second through hole, the separating component passes through the corresponding second through hole and is movable relative to the second through hole, and the end of the separating component pointing towards the axis of the chassis is pointed. One end of the buffer is connected to the upper surface of the chassis, and the other end of the buffer extends away from the chassis. The extension length of the other end of the buffer relative to the chassis is less than the extension length of the other end of the connecting wall relative to the chassis.

2. The device for disassembling the upper electrode as described in claim 1, characterized in that, The connecting wall is in the shape of a hollow cylinder.

3. The device for disassembling the upper electrode as described in claim 1, characterized in that, One end of the connecting wall is connected to the edge of the upper surface of the chassis.

4. The device for disassembling the upper electrode as described in claim 1, characterized in that, The chassis is disc-shaped.

5. The device for disassembling the upper electrode as described in claim 1, characterized in that, A third through hole is provided in the middle of the chassis.

6. The apparatus for disassembling the upper electrode as described in claim 1, characterized in that, The inner wall of the second through hole is provided with an internal thread, and the separator is connected to the internal thread through an external thread.

7. The apparatus for disassembling the upper electrode as described in claim 6, characterized in that, The end of the separator furthest from the chassis is provided with a straight groove or a cross-shaped groove.

8. The device for disassembling the upper electrode as described in claim 1, characterized in that, The buffer includes a plurality of springs, which are spaced apart on the upper surface of the chassis.

9. The device for disassembling the upper electrode as described in claim 1, characterized in that, The multiple separating components are spaced apart and evenly arranged on the connecting wall.

10. The apparatus for disassembling the upper electrode as described in claim 1, characterized in that, Multiple first through holes are spaced apart and evenly arranged on the connecting wall.

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