Diluent filtering equipment for manufacturing semiconductors

Abstract

The utility model discloses diluent filtering equipment for manufacturing semiconductors, and relates to the technical field of diluent filtering equipment, the diluent filtering equipment for manufacturing semiconductors comprises a collecting cover, the collecting cover is of a box body structure with a one-way opening at the top end, and the top end of the collecting cover is connected with the collecting cover. According to the corrosion inhibitor collecting device, the collecting cover placed in the hopper is arranged, the groove used for collecting impurities is formed in the top end of the collecting cover, liquid seepage is conducted through the liquid seepage holes formed in the hopper, and the impurities in a corrosion inhibitor can be rapidly collected and treated through the groove in the top end of the collecting cover; by arranging the lifting push rod fixedly connected in the guide groove, when the device is used, the lifting push rod installed in the guide groove can be started to upwards push out the moving seat and the supporting frame fixedly connected to the top end face of the moving seat; by means of the design, workers can clean the interior of the temporary storage barrel more conveniently.

Description

TECHNICAL FIELD

[0001] The utility model relates to diluent filtering equipment technical field, specifically for a kind of diluent filtering equipment for manufacturing semiconductor. BACKGROUND

[0002] Semiconductor industry diluent is used for diluting high concentration solution chemical, and its main role is to dilute high concentration material to operable concentration, so as to carry out subsequent process steps.In the process of preparing semiconductor device, high concentration solution often causes security risks to equipment and operating personnel, and also affects the quality of final product.Therefore, using diluent can effectively reduce operation difficulty, improve production efficiency, and also ensure product quality, an existing patent diluent concentration equipment bag filter device, patent publication number CN216726017U includes filter, the filter is fixedly connected with first placement table, second placement table and flow guide plate, the top of first placement table and second placement table is fixedly connected with limit slot, first filter bag and second filter bag are respectively arranged in the limit slot.Its beneficial effects are that the diluent concentration equipment bag filter device can be taken out from the filter by hooking the first filter bag and the second filter bag through the hook ring, so that the first filter bag and the second filter bag can be conveniently cleaned, the cover plate can be clamped through the fixed ring by the hydraulic rod, which replaces the bolt fixing mode, improves the efficiency of cover plate opening, and the whole device structure is reasonable, convenient to use and practical.

[0003] For the related technology in the above, the inventor believes that the following defects exist: when using it, although multiple filter bags can be used for filtering, but after filtering is completed, there will be some residues on the filter structure, and the residues need to be cleaned after the whole filter screen is disassembled, but frequent disassembly and maintenance of the whole filter screen will increase the labor intensity of workers, so we propose a diluent filtering equipment for manufacturing semiconductor to solve the above problems. UTILITY MODEL CONTENTS

[0004] In view of the deficiencies of the prior art, the utility model provides a diluent filtering equipment for manufacturing semiconductor, which solves the problem that the residues on the filter structure need to be cleaned after the whole filter screen is disassembled, but frequent disassembly and maintenance of the whole filter screen will increase the labor intensity of workers.

[0005] In order to achieve the above object, the utility model discloses a diluent filtering equipment for manufacturing semiconductor, including the collection cover, the collection cover is the box structure of top one -way opening, and the top end surface of collection cover is fixedly connected with the flow -guiding column, and the main part of flow -guiding column is the frustum -shaped structure of thin top and thick bottom, and the top end surface of flow -guiding column is fixedly connected with the ring, and the main part of ring is the annular structure, and ring and flow -guiding column jointly constitute the structure of taking out.

[0006] Preferably, the collection cover is located in the position directly above the base, the main body of the base is a hollow structure, and the top end surface of the base is fixedly connected with a temporary storage barrel.

[0007] Preferably, the main body of the temporary storage barrel is a one-way opening structure on the upper side, and a drain pipe is fixedly connected to the bottom end surface of the temporary storage barrel, and the drain pipe is an L-shaped structure.

[0008] Preferably, the drain pipe penetrates the temporary storage barrel, and an electromagnetic valve is installed inside the drain pipe, and two longitudinal guide grooves are oppositely formed on the left and right sides of the outer circumferential surface of the temporary storage barrel.

[0009] Preferably, the inside of the guide groove is fixedly connected with a lifting push rod, and two lifting push rods are oppositely fixedly connected in the two guide grooves.

[0010] Preferably, the top end surface of the two lifting push rods is fixedly connected with a longitudinally arranged moving seat, and the outside of the moving seat is fixedly connected with a sliding block, and the sliding block is a structure protruding from the moving seat.

[0011] Preferably, the top end surface of the two moving seats is fixedly connected with a support frame of annular structure, and the bottom end of the support frame is fixedly connected with a hopper, and a through hole is annularly arranged in the inside of the hopper, the through hole is a liquid permeation hole, and the hopper and the liquid permeation hole jointly constitute a filtering structure.

[0012] The utility model provides a diluent filtering equipment for manufacturing semiconductor.Compared with the prior art, it has the following advantages:

[0013] The diluent filtering equipment for manufacturing semiconductor is placed in the hopper, and the top end of the collection cover is provided with a groove for collecting impurities, so that when the diluent is poured into the inside of the hopper, not only can the liquid be permeated through the liquid permeation hole in the hopper, but also the impurities in the corrosion inhibitor can be quickly collected and treated through the top end groove of the collection cover, thereby achieving a more practical purpose.

[0014] The diluent filtering equipment for manufacturing semiconductors, by being provided with the lifting push rod fixedly connected in the guide groove, can push the moving seat and the support frame fixedly connected on the top end face of the moving seat upward by starting the lifting push rod installed in the guide groove when in use, so that the inside of the temporary storage barrel can be cleaned more conveniently for the workers. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 It is a front side view structure schematic diagram of the diluent filtering equipment after part structure sectioning.

[0016] Figure 2 It is a top side view structure schematic diagram of the diluent filtering equipment.

[0017] Figure 3 It is a support frame and hopper combined structure schematic diagram of the diluent filtering equipment.

[0018] Figure 4 It is a left side view structure schematic diagram of the diluent filtering equipment.

[0019] Figure 5 It is a top view structure schematic diagram of the diluent filtering equipment.

[0020] Figure 6 It is a temporary storage barrel and drain pipe combined structure schematic diagram of the diluent filtering equipment.

[0021] In the figure: 1, base; 101, temporary storage barrel; 102, drain pipe; 103, guide groove; 2, lifting push rod; 201, moving seat; 202, sliding block; 3, support frame; 301, hopper; 302, liquid permeation hole; 303, collection cover; 304, flow guide column; 305, hanging ring. DETAILED DESCRIPTION

[0022] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0023] Please refer to Figures 1-6The utility model provides a technical scheme: a diluent filtering equipment for manufacturing semiconductor, including collection cover 303, collection cover 303 is the box structure of top one -way opening, and the top end surface of collection cover 303 is fixedly connected with flow guide column 304, the main part of flow guide column 304 is the frustum -shaped structure of upper thin lower thick, and the top end surface of flow guide column 304 is fixedly connected with the ring 305 of hanging, the main part of ring 305 of hanging is annular structure, and ring 305 of hanging and flow guide column 304 commonly constitute the structure of taking out,

[0024] Through the ring 305 of hanging of annular structure fixedly connected with the top end surface of flow guide column 304, it can be taken out collection cover 303 by using hook and other tools and ring 305 of hanging connection when using.

[0025] Refer to Figure 1 、 Figure 5 , collection cover 303 is located in the position of the top of pedestal 1, the main part of pedestal 1 is the openwork structure, and the top end surface of pedestal 1 is fixedly connected with the temporary storage bucket 101;

[0026] Through the top end surface of pedestal 1 fixedly connected with temporary storage bucket 101, it can be temporarily stored for the diluent after filtering when using.

[0027] Refer to Figure 2 、 Figure 3 , the main part of temporary storage bucket 101 is the upper one -way opening structure, and the bottom end surface of temporary storage bucket 101 is fixedly connected with drain pipe 102, and drain pipe 102 is L-shaped structure;

[0028] Through the bottom end surface of temporary storage bucket 101 fixedly connected with drain pipe 102, it can be discharged by using drain pipe 102 for diluent when using.

[0029] Refer to Figure 5 、 Figure 6 , drain pipe 102 and temporary storage bucket 101 are through, and the inside installation of drain pipe 102 is electromagnetic valve, and the outer circumferential surface of temporary storage bucket 101 is left and right two sides and is opened and is equipped with two longitudinal guide grooves 103;

[0030] Through the inside fixed connection of drain pipe 102 with electromagnetic valve, it can control the discharge efficiency of diluent in temporary storage bucket 101 when using.

[0031] Refer to Figure 1 、 Figure 2 , the inside fixed connection of guide groove 103 is lifting push rod 2, and lifting push rod 2 is equipped with two, and two lifting push rods 2 are fixedly connected in two guide grooves 103;

[0032] The lifting push rod 2 fixedly connected inside the guide groove 103 is longitudinally arranged, so that it can push and adjust the support frame 3 during use.

[0033] Referring to Figure 3 , Figure 6 The top end surface of the two lifting push rods 2 is fixedly connected with a longitudinally arranged moving seat 201, and the outer side of the moving seat 201 is fixedly connected with a sliding block 202, which is a structure protruding from the moving seat 201.

[0034] The two sliding blocks 202 are fixedly connected on the outer side of the moving seat 201, so that when the moving seat 201 moves, the sliding block 202 can guide it.

[0035] Referring to Figure 1 , Figure 2 The top end surface of the two moving seats 201 is fixedly connected with a ring-shaped support frame 3, and the bottom end of the support frame 3 is fixedly connected with a hopper 301. The inside of the hopper 301 is fixedly connected with a through hole, which is a liquid permeable hole 302, and the hopper 301 and the liquid permeable hole 302 together form a filtering structure.

[0036] The liquid permeable hole 302 is arranged in the inside of the hopper 301 in a ring array, which can remove impurities in the diluent.

[0037] When filtering impurities in the diluent, the temporary storage barrel 101 is placed on the ground through the base 1 fixedly connected to the bottom end surface of the temporary storage barrel 101, and the drain pipe 102 fixedly connected to the bottom end surface of the temporary storage barrel 101 is connected and limited with the external container at the same time. When the diluent is filtered, the diluent is poured into the hopper 301 through the top opening of the support frame 3, and when the diluent is poured into the inside of the hopper 301, the liquid is filtered by using the liquid permeable hole 302 arranged in the hopper 301.

[0038] When the diluent is poured into the hopper 301 for filtering, the impurities in the diluent can be collected by using the top groove of the collection cover 303 placed inside the hopper 301, and at the same time, after the subsequent filtering is completed, the collection cover 303 can be taken out and cleaned by connecting the hook and other tools with the hanging ring 305 fixedly connected to the top surface of the flow guide column 304, thereby achieving a more practical purpose.

[0039] As described above, the collection cover 303 with a top opening is provided, so that it can filter impurities during use.

[0040] Meanwhile, the contents not described in detail in this specification are all existing technologies known to those skilled in the art.

Claims

1. A diluent filtering apparatus for manufacturing a semiconductor, comprising a collection hood (303), characterized in that: The collecting cover (303) is a top one-way opening box structure, and the top surface of the collecting cover (303) is fixedly connected with a flow guide column (304), the main body of the flow guide column (304) is a tapered structure with a narrow top and a wide bottom, and the top surface of the flow guide column (304) is fixedly connected with a hanging ring (305), the main body of the hanging ring (305) is an annular structure, and the hanging ring (305) and the flow guide column (304) jointly form a taking-out structure.

2. The diluent filtering apparatus for manufacturing a semiconductor according to claim 1, wherein: The collecting cover (303) is located directly above the base (1), the main body of the base (1) is a hollow structure, and the top surface of the base (1) is fixedly connected with a temporary storage barrel (101).

3. The diluent filter apparatus for manufacturing a semiconductor according to claim 2, wherein: The main body of the temporary storage barrel (101) is an upper one-way opening structure, and the bottom surface of the temporary storage barrel (101) is fixedly connected with a drain pipe (102), which is an L-shaped structure.

4. The diluent filtering apparatus for manufacturing a semiconductor according to claim 3, wherein: The drain pipe (102) penetrates through the temporary storage barrel (101), and an electromagnetic valve is installed in the drain pipe (102), and two longitudinal guide grooves (103) are oppositely formed on the left and right sides of the outer circumferential surface of the temporary storage barrel (101).

5. The diluent filter apparatus for manufacturing a semiconductor according to claim 4, wherein: The inner side of the guide groove (103) is fixedly connected with a lifting push rod (2), and two lifting push rods (2) are oppositely fixedly connected in the two guide grooves (103).

6. The diluent filtering apparatus for manufacturing a semiconductor according to claim 5, wherein: The top surface of the lifting push rod (2) is fixedly connected with a longitudinally arranged moving seat (201), and the outer side of the moving seat (201) is fixedly connected with a sliding block (202), which is a structure protruding from the moving seat (201).

7. The diluent filter apparatus for manufacturing a semiconductor according to claim 6, wherein: The top surface of the moving seat (201) is fixedly connected with a support frame (3) of an annular structure, the bottom end of the support frame (3) is fixedly connected with a hopper (301), and the inside of the hopper (301) is annularly arrayed with through holes, which are liquid permeation holes (302), and the hopper (301) and the liquid permeation holes (302) jointly form a filtering structure.

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