Single silicon wafer storage and turnover machine for solar silicon wafers

By designing a single-wafer storage and flipping machine for solar silicon wafers, the problem of over-baking silicon wafers caused by the speed inconsistency between the front drying oven and the rear printing machine was solved. The machine realizes the buffering, cooling and flipping of silicon wafers, ensuring smooth production and meeting the speed compatibility requirements between equipment.

CN223520447UActive Publication Date: 2025-11-07FOLUNGWIN AUTOMATIC EQUIP CO LTD
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Patent Information

Application Number
CN202422924360.2
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-11-28
Publication Date
2025-11-07
Estimated Expiration
2034-11-28

AI Technical Summary

Technical Problem

On the solar silicon wafer production line, the processing speeds of the front drying oven and the rear printing machine are inconsistent, causing the silicon wafers to stay in the drying oven for too long, resulting in over-drying.

Method used

Design a single-wafer storage and flipping machine for solar silicon wafers, comprising a transport guide rail component, a cooling component, a single-wafer buffer component, a single-wafer flipping component, and a rotating component, to realize the functions of cooling, buffering, flipping, and rotating a single silicon wafer, and adapt to the speed differences of different equipment.

Benefits of technology

It effectively solves the problem of over-drying silicon wafers in the drying oven. Through buffering and flipping functions, it ensures smooth transfer of silicon wafers between different devices and avoids board blockage. It has cooling, flipping and rotation functions, and has a compact structure that meets production needs.

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Abstract

The utility model discloses a single-chip storage and turnover machine for solar silicon chips, which comprises a transportation guide rail component, a cooling component, a single-chip cache component, a single-chip turnover component and a rotating component, a section of single-chip conveying rail is arranged on the transportation guide rail component, the cooling component is positioned on one side of the front end of the transportation guide rail component, and the single-chip cache component is positioned on the other side of the front end of the transportation guide rail component. The upper end of the cooling component is located above the conveying guide rail component, the middle of the conveying guide rail component penetrates through the single-piece temporary storage component, the single-piece turning plate component is located behind the single-piece temporary storage component, and the rotating component is located on one side of the rear end of the conveying guide rail component. The single solar silicon wafer storage and turnover machine is used for caching single silicon wafers and temporarily storing excessive single solar silicon wafers under the condition that the speed of a front drying furnace is inconsistent with the speed of a rear printing furnace, so that the situation that the front speed is too high and the rear speed cannot follow up to block the single solar silicon wafers in the drying furnace, and the silicon wafers are over-dried is prevented; meanwhile, the functions of cooling, plate turning and direction rotating are achieved, the overall design is reasonable, the structure is compact, and production requirements are met.
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Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon wafer production, especially to a single piece storage and turnover plate machine of solar silicon wafer. BACKGROUND

[0002] In the printing process of solar silicon wafer on the production line, the silicon wafer needs to be dried by the front drying furnace and printed by the rear printing machine. The drying furnace and the printing machine have different processing speeds for single silicon wafer, resulting in inconsistent processing time. According to the front and rear speeds, the buffering capacity should be adapted to prevent the single silicon wafer from being in the drying furnace for too long, which causes over-drying of the silicon wafer. SUMMARY

[0003] One purpose of the utility model is to provide a single piece storage and turnover plate machine of solar silicon wafer, which meets the requirements of single piece cooling, buffering, turnover and rotation for front and rear equipment docking.

[0004] To achieve this purpose, the utility model adopts the following technical solutions:

[0005] A single piece storage and turnover plate machine of solar silicon wafer, comprising a transportation guide rail component, a cooling component, a single piece buffering component, a single piece turnover plate component and a rotating component, a single piece conveying track is arranged on the transportation guide rail component, the cooling component is located on the front end side of the transportation guide rail component, the upper end of the cooling component is above the transportation guide rail component, the middle part of the transportation guide rail component passes through the single piece buffering component, the single piece turnover plate component is behind the single piece buffering component, and the rotating component is located on the rear end side of the transportation guide rail component.

[0006] As a preferred technical solution, a clamping plate part is arranged on the transportation guide rail component, the clamping plate part is provided with a clamping plate motor, the driving end of the clamping plate motor is connected with a clamping plate support through a synchronous wheel and a synchronous belt transmission, the clamping plate support is located on both sides of the single piece conveying track, a clamping plate wheel rotates on the clamping plate support, and a sensor is installed on one side of the single piece conveying track.

[0007] As a preferred technical solution, the cooling component comprises a cooling support and a plurality of cooling fans, a cooling plate is installed on the upper end of the cooling support, the cooling fans are distributed on the cooling plate along the front and rear directions, the cooling fans are directly above the single piece conveying track, and a start key is installed on the cooling plate.

[0008] As a preferred technical solution, the single piece buffering component comprises a buffering lifting module and a buffering frame, the buffering frame is fixed on the driving end of the buffering lifting module, a single piece buffering position is arranged on the buffering frame, and buffering support rods are arranged on both sides in the single piece buffering position.

[0009] As a preferred technical scheme, the single-piece turning plate component comprises a turning plate side edge support, a turning plate motor and a turning plate wheel, the turning plate motor is fixed outside the turning plate side edge support, a turning plate shaft is connected to a driving end of the turning plate motor, the turning plate shaft passes through a middle part of the turning plate wheel, a plurality of turning plate grooves are arranged on the turning plate wheel, and a turning plate guide wheel is arranged at an outer end of the turning plate groove.

[0010] As a preferred technical scheme, the rotating component comprises a turning vertical moving module and a turning motor, a turning support is connected to a driving end of the turning vertical moving module, the turning motor is installed on the turning support, a turning adsorption plate is drivingly connected to a driving end of the turning motor, and the turning adsorption plate rotates at a lower end of the turning support.

[0011] As a preferred technical scheme, the rear end of the single-piece conveying rail is provided with a support rod, and the support rod is connected below the single-piece conveying rail.

[0012] The single-piece storage and turning plate machine for solar silicon wafers has the advantages that the single-piece storage and turning plate machine for solar silicon wafers is used for buffering single-piece silicon wafers, temporarily stores too many single-piece solar silicon wafers in the case that the speed of the front drying furnace is inconsistent with the printing speed, prevents the front speed from being too fast and the rear speed from being unable to keep up to cause plate blocking in the drying furnace and over-drying of the silicon wafers, and simultaneously has the functions of cooling, turning and rotating direction, is reasonable in overall design, compact in structure and in line with production requirements. BRIEF DESCRIPTION OF DRAWINGS

[0013] The utility model will be further explained in detail in the basis of drawings and embodiments.

[0014] Figure 1 FIG. 1 is a schematic view of the internal structure of the single-piece storage and turning plate machine for solar silicon wafers according to the embodiment;

[0015] Figure 2 FIG. 4 is a schematic view of the structure of the cooling component according to the embodiment;

[0016] Figure 3 FIG. 6 is a schematic view of the structure of the clamping plate part according to the embodiment;

[0017] Figure 4 FIG. 8 is a schematic view of the structure of the single-piece buffering component according to the embodiment;

[0018] Figure 5 FIG. 10 is a schematic view of the structure of the single-piece turning plate component according to the embodiment;

[0019] Figure 6 FIG. 12 is a schematic view of the structure of the rotating component according to the embodiment;

[0020] Figure 7This is a schematic diagram of the transport guide rail component described in the embodiment.

[0021] Figures 1 to 7 middle:

[0022] 1. Transport guide rail component; 2. Cooling component; 3. Single-piece buffer component; 4. Single-piece flip plate component; 5. Rotating component; 6. Clamping plate section; 7. Clamping plate motor; 8. Synchronous pulley; 9. Synchronous belt; 10. Clamping plate support; 11. Clamping plate wheel; 12. Sensor; 13. Cooling bracket; 14. Cooling fan; 15. Cooling plate; 16. Start button; 17. Buffer lifting module; 18. Buffer frame; 19. Single-piece buffer position; 20. Buffer support rod; 21. Flip plate side support; 22. Flip plate motor; 23. Flip plate wheel; 24. Flip plate groove; 25. Flip plate guide wheel; 26. Steering vertical movement module; 27. Steering motor; 28. Steering support; 29. ​​Steering suction plate; 30. Support rod. Detailed Implementation

[0023] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0024] like Figures 1 to 7 As shown in this embodiment, a single-wafer storage and flipping machine for solar silicon wafers includes a transport guide rail component 1, a cooling component 2, a single-wafer buffer component 3, a single-wafer flipping component 4, and a rotating component 5. A single-wafer conveying rail is provided on the transport guide rail component 1. The cooling component 2 is located on the front end side of the transport guide rail component 1, and the upper end of the cooling component 2 is above the transport guide rail component 1. The middle part of the transport guide rail component 1 passes through the single-wafer buffer component 3. The single-wafer flipping component 4 is located behind the single-wafer buffer component 3. The rotating component 5 is located on the rear end side of the transport guide rail component 1.

[0025] The single silicon wafers exiting the drying oven are transported by the transport guide component 1, first undergoing air cooling treatment by the cooling component 2, and then temporarily stored in the single wafer buffer component 3 which can be lifted up and down. Next, according to production needs, they are flipped 180° in the single wafer flipping component 4 (if flipping is not required, they can be moved directly from the middle of the single wafer flipping component 4 to the rear). Finally, also according to production needs, they are attracted and lifted by the rotating component 5, turning 90° on the plane to meet the orientation of the gate lines.

[0026] The transport rail part 1 is provided with a clamping plate part 6, the clamping plate part 6 is provided with a clamping plate motor 7, the driving end of the clamping plate motor 7 is drivingly connected with a clamping plate support 10 through a synchronous wheel 8 and a synchronous belt 9, the clamping plate support 10 is located on both sides of the single-piece conveying rail, the clamping plate support 10 is rotatably provided with a clamping plate wheel 11, one side of the single-piece conveying rail is provided with a sensor 12, the single-piece silicon wafer is continuously conveyed backward on the single-piece conveying rail of the transport rail part 1, when entering the clamping plate part, the clamping plate motor 7 controls the clamping plate supports 10 on both sides to move closer to the middle of the single-piece conveying rail through the synchronous wheel 8 and the synchronous belt 9, so that the position of the single-piece silicon wafer is arranged in the middle of the single-piece conveying rail, and the sensor 12 senses.

[0027] The cooling part 2 comprises a cooling support 13 and a plurality of cooling fans 14, the upper end of the cooling support 13 is provided with a cooling plate 15, the cooling fans 14 are distributed on the cooling plate 15 along the front-rear direction, the cooling fans 14 are located directly above the single-piece conveying rail, the cooling plate 15 is provided with a starting key 16, after the single-piece silicon wafer comes out of the high-temperature furnace, the single-piece silicon wafer is first located below the cooling support 13, after the starting key 16 is started, the cooling fans 14 work to blow and cool the single-piece silicon wafer.

[0028] The single-piece buffer part 3 comprises a buffer lifting module 17 and a buffer frame 18, the buffer frame 18 is fixed on the driving end of the buffer lifting module 17, the buffer frame 18 is provided with a single-piece buffer position 19, the two sides in the single-piece buffer position 19 are provided with a buffer support rod 3020, the cooled single-piece silicon wafer enters the buffer frame 18, and the two sides are supported by the buffer support rod 3020 of each layer, the buffer lifting module 17 controls the buffer frame 18 to realize lifting, and receives and discharges single-piece silicon wafers of different layers.

[0029] The single-piece turning plate part 4 comprises a turning plate side support 21, a turning plate motor 22 and a turning plate wheel 23, the turning plate motor 22 is fixed outside the turning plate side support 21, the driving end of the turning plate motor 22 is connected with a turning plate shaft, the turning plate shaft penetrates through the middle of the turning plate wheel 23, the turning plate wheel 23 is provided with a plurality of turning plate grooves 24, the outer end of the turning plate groove 24 is provided with a turning plate guide wheel 25, the single-piece silicon wafer from the single-piece buffer part 3 enters the single-piece turning plate part 4, when the single-piece silicon wafer enters the turning plate groove 24 under the action of the turning plate guide wheel 25, the turning plate motor 22 rotates the turning plate shaft to rotate the turning plate wheel 23, the single-piece silicon wafer in the turning plate groove 24 is turned by 180°, and then is output from the rear.

[0030] The rotating part 5 comprises a steering vertical moving module 26 and a steering motor 27, the driving end of the steering vertical moving module 26 is connected with a steering support 28, the steering motor 27 is installed on the steering support 28, the driving end of the steering motor 27 is drivingly connected with a steering adsorption plate 29, the steering adsorption plate 29 rotates at the lower end of the steering support 28, in order to connect the processing silicon wafer direction of the front and rear equipment, the steering vertical moving module 26 controls the steering adsorption plate 29 to move downwards, adsorbs the single silicon wafer, and then rotates 90° under the action of the steering motor 27 and is placed back into the single wafer conveying track to continue to convey backwards.

[0031] The rear end of the single wafer conveying track is provided with a supporting rod 30, the supporting rod 30 is connected below the single wafer conveying track, the length of the single wafer conveying track can be lengthened by the support of the supporting rod 30, and the demand of increasing functions is met.

[0032] It should be stated that the above specific embodiments are only the preferred embodiments of the present application and the applied technical principles, and any changes or replacements easily thought by those skilled in the art within the technical range disclosed by the present application should be covered in the protection range of the present application.

Claims

1. A single piece storage and flipping machine for solar silicon wafers, characterized by, Including transportation rail parts, cooling parts, single piece buffer parts, single piece flap parts and rotating parts, a single piece conveying rail is arranged on the transportation rail part, the cooling part is located on one side of the front end of the transportation rail part, the upper end of the cooling part is above the transportation rail part, the middle part of the transportation rail part passes through the single piece buffer part, the single piece flap part is behind the single piece buffer part, and the rotating part is located on one side of the rear end of the transportation rail part.

2. The single piece storage and flipping machine for solar silicon wafers of claim 1, wherein, The clamping plate part is provided on the transportation rail part, the clamping plate part is provided with a clamping plate motor, the driving end of the clamping plate motor is connected with a clamping plate support through a synchronous wheel and a synchronous belt transmission, the clamping plate support is located on both sides of the single piece conveying rail, a clamping plate wheel is rotatably arranged on the clamping plate support, and a sensor is arranged on one side of the single piece conveying rail.

3. The single piece storage and flipping machine for solar silicon wafers of claim 1, wherein, The cooling part includes a cooling bracket and a plurality of cooling fans, a cooling plate is installed at the upper end of the cooling bracket, the cooling fans are distributed on the cooling plate in the front-rear direction, the cooling fans are directly above the single piece conveying rail, and a start key is installed on the cooling plate.

4. The single piece storage and flipping machine for solar silicon wafers of claim 1, wherein, The single piece buffer part includes a buffer lifting module and a buffer frame, the buffer frame is fixed on the driving end of the buffer lifting module, a single piece buffer position is arranged on the buffer frame, and buffer support rods are arranged on both sides in the single piece buffer position.

5. The single piece storage and flipping machine for solar silicon wafers of claim 1, wherein, The single piece flap part includes a flap side support, a flap motor and a flap wheel, the flap motor is fixed outside the flap side support, a flap shaft is connected to the driving end of the flap motor, the flap shaft passes through the middle part of the flap wheel, a plurality of flap grooves are arranged on the flap wheel, and flap guide wheels are arranged at the outer ends of the flap grooves.

6. The single piece storage and flipping machine for solar silicon wafers of claim 1, wherein, The rotating part includes a steering vertical movement module and a steering motor, a steering support is connected to the driving end of the steering vertical movement module, the steering motor is installed on the steering support, a steering suction plate is drivingly connected to the driving end of the steering motor, and the steering suction plate rotates at the lower end of the steering support.

7. The single piece storage and flipping machine for solar silicon wafers of claim 1, wherein, A support rod is installed at the rear end of the single piece conveying rail, and the support rod is connected below the single piece conveying rail.