Niobium-zirconium alloy rolling target material purification device

Abstract

The niobium-zirconium alloy rolling target purifying device comprises a purifying base, a supporting frame is assembled on one side of the top end of the purifying base, and a bearing body is assembled at the lower end of the side wall of the supporting frame; a bearing ring is assembled on the side wall of the bearing body, a purification kettle is assembled in the bearing ring, the outer wall of the purification kettle is sleeved with a stabilizing ring, and the stabilizing ring and the bearing ring are arranged in an attached mode; the upper end of the side wall of the supporting frame is provided with a lifter, the driving end of the lifter is provided with a bearing plate, the lower end of the bearing plate is provided with a fixing plate, the periphery of the lower end of the fixing plate is provided with fixing columns, and the lower ends of the fixing columns are provided with a top cover. Through the arrangement of the niobium-zirconium alloy rolling target material purification device, the interior of the purification kettle is fully stirred, so that the problems that raw materials in the kettle body are non-uniformly stirred and an ideal stirring effect cannot be achieved due to the phenomenon of insufficient stirring of a purification device in the prior art are solved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of isostatic pressing forming machine, concretely is niobium zirconium alloy rolling target material purification device. BACKGROUND

[0002] With the continuous improvement of the comprehensive performance and use environment requirements of electronic products, the performance of sputtering target material is also required to be higher and higher. Although molybdenum has become an ideal electrode and wiring material of flat panel display, thin film solar cell and barrier material of semiconductor, but in the application, it is found that molybdenum still has problems in corrosion resistance (discoloration) and adhesion (film peeling). Research and practice show that adding alloy elements such as niobium to molybdenum sputtering target material can balance the specific impedance, stress, corrosion resistance and other performances of sputtering thin film after sputtering, and more and more people are favored. At present, molybdenum niobium alloy sputtering target material has been applied in the preparation of functional thin films such as touch screen (mobile phone, public display and the like), liquid crystal display, and has shown remarkable advantages and broad application prospect.

[0003] In the process of preparing the target material, in order to manufacture the target material with higher purity, it is usually necessary to carry out dissolution and purification operation on the noble metal, generally the noble metal and the dissolving solution are put into the dissolving device, the noble metal raw material is heated and stirred, so as to accelerate the dissolution of the noble metal, but the purification device in the prior art often has the phenomenon of insufficient stirring, which leads to uneven stirring of the raw material in the kettle body, cannot reach the ideal stirring effect, is not conducive to the rapid progress of the dissolution reaction, and affects the dissolution efficiency of the noble metal, so the prior art needs to be improved. UTILITY MODEL CONTENTS

[0004] The utility model aims at providing niobium zirconium alloy rolling target material purification device, to solve the problem that the purification device in the prior art often has the phenomenon of insufficient stirring, which leads to uneven stirring of the raw material in the kettle body, cannot reach the ideal stirring effect, is not conducive to the rapid progress of the dissolution reaction, and affects the dissolution efficiency of the noble metal.

[0005] In order to achieve the above object, the utility model provides the following technical scheme: niobium zirconium alloy rolling target material purification device, including purification base, the top end one side of purification base is equipped with support frame, the side wall lower end of support frame is equipped with bearing body;

[0006] The side wall of the bearing body is equipped with a bearing ring, the inside of the bearing ring is equipped with a purification kettle, the outer wall of the purification kettle is sleeved with a stable ring, and the stable ring and the bearing ring are arranged in close contact.

[0007] The side wall upper end of the support frame is equipped with an elevator, the driving end of the elevator is equipped with a bearing plate, the lower end of the bearing plate is equipped with a fixed plate, the lower end of the fixed plate is installed with a fixed column around, and the lower end of the fixed column is installed with a top cover.

[0008] The upper end of the top cover is provided with a through slot, the through slot is installed with a driving plate, the driving plate is equipped with a stirring shaft, the lower end of the stirring shaft is installed with a stirring vane, and the stirring vane is arranged in the interior of the purification kettle.

[0009] The side wall of the fixed plate is installed with an electric push rod, the end of the electric push rod is installed with a motor a, and the stirring shaft is connected with the driving end of the motor a.

[0010] The upper end of the purification base is installed with a motor b, and the purification kettle is connected with the driving end of the motor b.

[0011] The upper end of the driving plate is provided with an adjusting slide, the adjusting slide is equipped with a sliding seat, and the stirring shaft is installed in the sliding seat.

[0012] The outer wall of the sliding seat is uniformly and equidistantly provided with rotating cavities along the axis, the rotating cavities are internally installed with rolling balls, the two sides of the adjusting slide are internally provided with stable cavities, and the rolling balls are arranged in the stable cavities.

[0013] The outer upper end of the sliding seat is sleeved with a limiting ring a, the outer lower end of the sliding seat is sleeved with a limiting ring b, the limiting ring a is arranged at the upper end of the driving plate, and the limiting ring b is arranged at the lower end of the driving plate.

[0014] The lower end of the outer wall of the two sides of the purification kettle is equipped with a discharge pipe, the discharge pipe is equipped with a valve, and the internal bottom end of the purification kettle is equipped with a taper head.

[0015] Compared with the prior art, the niobium-zirconium alloy rolling target material purification device has the advantages that the structure design is reasonable,

[0016] The rotating mechanism is arranged between the purification base and the purification kettle, so that the purification kettle is driven to rotate, the stirring shaft which can move left and right and rotate in the opposite direction is arranged in the interior of the purification kettle, the interior of the purification kettle is fully stirred, and the problems that the existing purification device is not fully stirred, the raw materials in the kettle body are not uniformly stirred, and the ideal stirring effect cannot be achieved are solved. Attached Figure Description

[0017] Figure 1 This is a front-view three-dimensional structural schematic diagram of the present invention;

[0018] Figure 2 This is a schematic diagram of the internal structure of the purification vessel of this utility model;

[0019] Figure 3 This is a schematic diagram of the driver board of this utility model;

[0020] Figure 4 This is a schematic diagram of the slide block of this utility model.

[0021] In the diagram: 1. Purification base; 2. Support frame; 3. Bearing body; 4. Lifting machine; 5. Motor b; 6. Discharge pipe; 7. Bearing ring; 8. Stabilizing ring; 9. Top cover; 10. Through groove; 11. Electric push rod; 12. Motor a; 13. Fixed column; 14. Fixed plate; 15. Bearing plate; 16. Cone head; 17. Stirring fan blade; 18. Purification kettle; 19. Stirring shaft; 20. Drive plate; 21. Adjusting slide; 22. Stabilizing cavity; 23. Slide seat; 24. Rotating cavity; 25. Ball bearing; 26. Limiting ring a; 27. Limiting ring b. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figures 1-4 This utility model provides a technical solution:

[0024] In this technical solution, the niobium-zirconium alloy rolling target purification device includes a purification base 1. A support frame 2 is mounted on one side of the top of the purification base 1, and a carrier body 3 is mounted on the lower end of the side wall of the support frame 2. A carrier ring 7 is mounted on the side wall of the carrier body 3, and a purification vessel 18 is mounted inside the carrier ring 7. A stabilizing ring 8 is fitted on the outer wall of the purification vessel 18, and the stabilizing ring 8 and the carrier ring 7 are fitted together. A lifting machine 4 is mounted on the upper end of the side wall of the support frame 2. A carrier plate 15 is mounted on the drive end of the lifting machine 4. A fixing plate 14 is mounted on the lower end of the carrier plate 15. Fixing columns 13 are installed around the lower end of the fixing plate 14, and a top cover 9 is installed on the lower end of the fixing columns 13. A through groove 10 is opened on the upper end of the top cover 9, and a driving plate 20 is installed at the through groove 10. A stirring shaft 19 is mounted on the driving plate 20, and a stirring fan blade 17 is installed on the lower end of the stirring shaft 19. The stirring fan blade 17 is located inside the purification vessel 18.

[0025] In the technical scheme, the support frame 2 is vertically installed at the upper end of the purification base, the bearing ring 7 is installed at the upper end of the purification base 1 through the bearing body 3, the purification kettle 18 can rotate inside the bearing ring 7, and the rotation stability can be improved through the fit of the stable ring 8 and the bearing ring 7, the top cover 9 can be driven to move at the upper end of the purification kettle 18 through the elevator 4, and the stirring shaft 19 can rotate inside the purification kettle 18, so that the stirring fan blade 17 is started to stir.

[0026] In some technical schemes, the side wall of the fixed plate 14 is provided with an electric push rod 11, the end of the electric push rod 11 is provided with a motor a 12, and the stirring shaft 19 is connected to the driving end of the motor a 12.

[0027] In the technical scheme, the electric push rod 11 can drive the stirring shaft 19 to move left and right on the driving plate 20, and then move transversely inside the purification kettle 18.

[0028] In some technical schemes, the upper end of the purification base 1 is provided with a motor b 5, and the purification kettle 18 is connected to the driving end of the motor b 5.

[0029] In the technical scheme, the motor b 5 can drive the purification kettle 18 to rotate, and the rotation directions of the motor b 5 and the motor a 12 are opposite.

[0030] In some technical schemes, the upper end of the driving plate 20 is provided with an adjusting slide 21, the adjusting slide 21 is assembled with a sliding seat 23, and the stirring shaft 19 is installed in the sliding seat 23.

[0031] In the technical scheme, the stirring shaft 19 moves in the adjusting slide 21 through the sliding seat 23, so as to move inside the purification kettle 1.

[0032] In some technical schemes, the outer wall of the sliding seat 23 is uniformly and equidistantly provided with rotating cavities 24 along the axis, the rotating cavities 24 are internally provided with rolling balls 25, the two sides of the adjusting slide 21 are internally provided with stable cavities 22, and the rolling balls 25 are arranged in the stable cavities 22.

[0033] In the technical scheme, the rolling balls 25 can roll in the rotating cavities 24, so as to improve the stability of the sliding seat 23 moving in the adjusting slide 21.

[0034] In some technical schemes, the outer upper end of the sliding seat 23 is sleeved with a limiting ring a 27, the outer lower end of the sliding seat 23 is sleeved with a limiting ring b 26, the limiting ring a 27 is arranged at the upper end of the driving plate 20, and the limiting ring b 26 is arranged at the lower end of the driving plate 20.

[0035] In the technical scheme, the cross-sectional area of the limiting ring a27 and the cross-sectional area of the limiting ring b26 are both larger than the cross-sectional area of the adjusting slide 21, so that the sliding seat 23 is limited in the adjusting slide 21.

[0036] In some technical schemes, the discharge pipe 6 is arranged at the lower end of the outer wall of the purification kettle 18, and a valve is arranged on the discharge pipe 6; and a conical head 16 is arranged at the bottom of the interior of the purification kettle 18.

[0037] In the technical scheme, the discharge is performed through the discharge pipe 6, and the conical head 16 is arranged to facilitate the discharge of the interior of the purification kettle 18.

[0038] Working principle:

[0039] Firstly, the purification base 1 is moved to a designated position, then raw materials are added into the purification kettle 18, then the lifting machine 4 drives the top cover 9 downward, and a gap is left between the top cover 9 and the purification kettle 18, then the motor b5 is started to drive the purification kettle 18 to rotate, and the motor a12 is started to drive the stirring shaft 19 and the stirring fan blade 17 to stir in the interior of the purification kettle 18, and the electric push rod 11 can also be extended and retracted to drive the stirring shaft 19 and the stirring fan blade 17 to move transversely in the purification kettle 18, so as to improve the stirring efficiency and the working efficiency of the purification kettle 18.

[0040] It should be noted that, in the present document, the terms such as first and second, and the like are used merely to differentiate one entity or action from another, and do not necessarily require or imply any such actual relationship or order between such entities or actions. In addition, the terms "comprising", "containing" or any other variant thereof are intended to cover a non-exclusive inclusion, so that a process, method, article or apparatus that includes a list of elements not only includes those elements, but also includes other elements not explicitly listed, or inherent to such process, method, article or apparatus.

[0041] Although the present application has been described with reference to the embodiments above, various improvements can be made and equivalent replacements can be made to the components in the embodiments without departing from the scope of the present application. In particular, as long as there is no structural conflict, each feature in the embodiments disclosed in the present application can be combined with each other in any manner, and the combinations are not exhaustively described in the present specification only for the purpose of saving space and resources. Therefore, the present application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A niobium-zirconium alloy rolled target material purification device comprising a purification base (1), characterized in that: The top end of the purification base (1) is equipped with a support frame (2), and the lower end of the side wall of the support frame (2) is equipped with a bearing body (3); The side wall of the bearing body (3) is equipped with a bearing ring (7), the inside of the bearing ring (7) is equipped with a purification kettle (18), the outer wall of the purification kettle (18) is equipped with a stable ring (8), and the stable ring (8) and the bearing ring (7) are arranged in close contact; The upper end of the side wall of the support frame (2) is equipped with a lifting machine (4), the driving end of the lifting machine (4) is equipped with a bearing plate (15), the lower end of the bearing plate (15) is equipped with a fixed plate (14), the lower end of the fixed plate (14) is surrounded by a fixed column (13), and the lower end of the fixed column (13) is equipped with a top cover (9); The upper end of the top cover (9) is provided with a through slot (10), the through slot (10) is provided with a driving plate (20), the driving plate (20) is equipped with a stirring shaft (19), the lower end of the stirring shaft (19) is equipped with a stirring fan blade (17), and the stirring fan blade (17) is arranged in the inside of the purification kettle (18).

2. The niobium-zirconium alloy rolled target material purification apparatus according to claim 1, characterized by, The side wall of the fixed plate (14) is provided with an electric push rod (11), the end of the electric push rod (11) is provided with a motor a (12), and the driving end of the stirring shaft (19) is connected with the motor a (12).

3. The niobium-zirconium alloy rolled target material purification apparatus according to claim 1, characterized by, The upper end of the purification base (1) is provided with a motor b (5), and the driving end of the purification kettle (18) is connected with the motor b (5).

4. The niobium-zirconium alloy rolled target material purification apparatus according to claim 1, characterized by The upper end of the driving plate (20) is provided with an adjusting slide (21), the adjusting slide (21) is equipped with a sliding seat (23), and the stirring shaft (19) is arranged in the sliding seat (23).

5. The niobium-zirconium alloy rolled target material purification apparatus according to claim 4, characterized by The outer wall of the sliding seat (23) is uniformly and equidistantly provided with rotating cavities (24) along the axis, the rotating cavities (24) are internally provided with rolling balls (25), and the two sides of the adjusting slide (21) are internally provided with stable cavities (22), and the rolling balls (25) are arranged in the stable cavities (22).

6. The niobium-zirconium alloy rolled target material purification apparatus according to claim 5, characterized by The outer end of the sliding seat (23) is equipped with a limiting ring a (27), the outer lower end of the sliding seat (23) is equipped with a limiting ring b (26), the limiting ring a (27) is arranged at the upper end of the driving plate (20), and the limiting ring b (26) is arranged at the lower end of the driving plate (20).

7. The niobium-zirconium alloy rolled target material purification apparatus according to claim 1, characterized by The lower end of the outer wall of the purification kettle (18) is equipped with a discharge pipe (6), and the discharge pipe (6) is equipped with a valve, and the inside of the purification kettle (18) is equipped with a conical head (16).

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