Leveling detection device

Abstract

The utility model provides a leveling detection device. A supporting assembly in the leveling detection device is provided with a movable support. The support can extend into or out of an inner cavity of a supporting arm in the supporting assembly so as to adjust the supporting range of the supporting assembly. Therefore, based on the movable bracket, the supporting assembly can be adjusted into different supporting ranges, so that the device can be suitable for reaction chambers with different sizes, the detection cost is effectively reduced, the storage space is reduced, and equipment management is facilitated.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor manufacturing, especially relates to a leveling detection device. BACKGROUND

[0002] Physical vapor deposition (PVD) technology refers to a technology that under vacuum conditions, a material source surface is vaporized into gaseous atoms or molecules or partially ionized into ions by a physical method, so as to deposit a thin film with a specific function on a substrate surface. A heater is arranged in a reaction chamber of a PVD device to maintain the reaction temperature during the process. Since the uniformity of the reaction temperature has a direct impact on the thickness and quality of the thin film, during routine maintenance of the PVD device, a device engineer will use a horizontal calibration tool to detect the level of the heater in the chamber.

[0003] However, for different brands and different types of PVD devices, the sizes of their reaction chambers are different, so different sizes of horizontal calibration tools need to be used to detect the level of each heater. That is, a set of horizontal calibration tools of corresponding size needs to be prepared for each size of reaction chamber. This not only leads to the complexity and diversification of horizontal calibration tools, increasing the cost of device maintenance, but also increases the storage pressure in the wafer factory, which is not conducive to the rational use of space and centralized management.

[0004] Therefore, there is an urgent need for a new leveling detection device that can be applied to reaction chambers of different sizes. SUMMARY

[0005] The purpose of the utility model is to provide a leveling detection device to solve the technical problems of how to use a leveling detection device to detect the level of the heater in a reaction chamber of different sizes, how to reduce the detection cost, and how to reduce at least one of the storage and management pressure of the device.

[0006] To solve the above technical problems, the utility model provides a leveling detection device, comprising: a support assembly and a plurality of levels.

[0007] The support assembly comprises a main frame and a plurality of supports; the main frame comprises a plurality of support arms, and each support arm has an inner cavity; the plurality of supports are respectively accommodated in the inner cavities, and the supports and the corresponding support arms are slidably connected, so that the supports can extend into or out of the inner cavities of the support arms to adjust the support range of the support assembly.

[0008] The plurality of levels are connected to the main frame to detect the level of the object to be measured under the support of the support assembly.

[0009] Optionally, in the leveling detection device, a plurality of first clamping members are arranged on the cavity arms of the inner cavities of the support arms, and at least one second clamping member is correspondingly arranged on the outer periphery of the support frame; wherein the first clamping members are elastic protrusions, and the second clamping member is a groove; or the first clamping members are grooves, and the second clamping member is an elastic protrusion.

[0010] The elastic protrusion can be clamped in the groove to fix the position of the support frame relative to the support arm.

[0011] Optionally, in the leveling detection device, the plurality of first clamping members are distributed at a preset distance along the axial direction of the support arm, so that the second clamping member is in contact with different first clamping members when the support frame moves, so that the support assembly has different preset support ranges.

[0012] Optionally, in the leveling detection device, the support arm is further provided with a locking member, so that when the support frame moves to a preset position, the locking member abuts against the side wall of the support frame to lock the position of the support frame relative to the support arm; and,

[0013] The side wall of the support frame is further provided with a scale for reading the displacement of the support frame.

[0014] Optionally, in the leveling detection device, the inner cavity of the support arm is provided with a sliding rail, and the support frame is located on the sliding rail and can move along the sliding rail.

[0015] Optionally, in the leveling detection device, the main body frame further comprises a ring member; the plurality of support arms are arranged on the ring surface of the ring member and are rotationally symmetrically distributed relative to the ring core of the ring member.

[0016] Optionally, in the leveling detection device, one end of the support arm away from the ring core has an opening, and the support frame extends into or out of the inner cavity of the support arm through the opening.

[0017] Optionally, in the leveling detection device, one end of the plurality of support arms close to the ring core intersects the ring core, and a through hole is formed at the ring core; the leveling detection device further comprises a plug; the plug can be inserted into the through hole and extended to the surface of the object to be detected; and,

[0018] The center position of the object to be detected has a groove matched with the through hole, and when the ring core corresponds to the center position of the object to be detected, the plug can be inserted into the groove.

[0019] Optionally, in the leveling detection device, the support assembly further comprises a plurality of fixing blocks; the plurality of fixing blocks correspond to the plurality of supports one by one, and the fixing blocks are connected to the ends of the supports away from the ring core.

[0020] Optionally, in the leveling detection device, the plurality of levels are uniformly distributed on the main frame and fixedly connected to the main frame; and the detection ends of the levels penetrate the main frame and extend to the surface of the object to be detected to detect the levelness of the object to be detected.

[0021] In summary, the leveling detection device is provided. Compared with the prior art, the support assembly in the leveling detection device is provided with movable supports. The supports can extend into or out of the inner cavity of the support arm of the support assembly to adjust the support range of the support assembly. Therefore, based on the movable supports, the support assembly can be adjusted to different support ranges, so as to be applicable to reaction chambers of different sizes, effectively reduce detection cost, reduce storage space, and facilitate equipment management. BRIEF DESCRIPTION OF DRAWINGS

[0022] Those skilled in the art will understand that the provided drawings are for better understanding of the present application, and do not constitute any limitation on the scope of the present application. Among them:

[0023] Figure 1 is a top view of a leveling detection device in an embodiment of the present application.

[0024] Figure 2 is a structural schematic view of a main frame in an embodiment of the present application.

[0025] Figure 3 is a schematic view of the support adjustment of the support range under the hatch size in an embodiment of the present application.

[0026] Figure 4 is a schematic view of the support adjustment of the support range under another hatch size in an embodiment of the present application.

[0027] Figure 5 is a distribution schematic view of a first clamping piece and a second clamping piece in an embodiment of the present application.

[0028] Figure 6 is a schematic view of a locking piece and a scale in an embodiment of the present application.

[0029] Figure 7 is a schematic view of the contact of the bolt with the heater center position in an embodiment of the present application.

[0030] In the drawings:

[0031] 1-support assembly; 10-body frame; 100-support arm; 101-ring; 11-bracket; 12-fixing block;

[0032] 2-level meter;

[0033] 3-reaction chamber;

[0034] C-internal cavity; T-through hole; G-hatch; M-first clamping piece; N-second clamping piece; S-scale; P-locking piece; H-heater. DETAILED DESCRIPTION

[0035] To make the purposes, advantages and characteristics of the present application more clear, the following will make further detailed description of the present application in combination with the drawings and specific embodiments. It should be noted that the drawings are all very simplified and not drawn in proportion, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the present application. In addition, the structures shown in the drawings are often part of the actual structures. In particular, different proportions are sometimes used to show the different emphases of each drawing. It should also be understood that, unless specifically described or indicated, the terms "first", "second", "third" and the like in the description are only used to distinguish the components, elements, steps and the like in the description, and are not used to represent the logical relationship or sequence relationship between the components, elements, steps and the like. In addition, the X-axis direction, Y-axis direction and Z-axis direction referred to in the present application are three mutually perpendicular directions in a three-dimensional space.

[0036] Please refer to Figure 1 The present embodiment provides a leveling detection device, comprising: a support assembly 1 and a plurality of level meters 2; the support assembly 1 comprises a body frame 10 and a plurality of brackets 11; the body frame 10 comprises a plurality of support arms 100, and each support arm 100 has an internal cavity C; the plurality of brackets 11 are respectively accommodated in each internal cavity C, and the bracket 11 and the corresponding support arm 100 are slidably connected, so that the bracket 11 can extend into or out of the internal cavity C of the support arm 100 to adjust the support range of the support assembly 1; the plurality of level meters 2 are connected to the body frame 10 to detect the levelness of the object to be measured under the support of the support assembly 1.

[0037] It can be seen that, based on the movable bracket 11, the support assembly 1 can be adjusted to different support ranges, so as to be applicable to reaction chambers of different sizes, effectively reducing detection cost, reducing storage space, and facilitating equipment management.

[0038] The following will be described in combination with the drawings Figures 1 to 7 The leveling detection device provided by the present embodiment will be specifically described.

[0039] Please continue to refer to Figure 1The leveling detection device is used for detecting the levelness of an object to be detected. Exemplarily, the object to be detected includes but is not limited to a heater in a PVD device. Since the heater is located inside a reaction chamber of the PVD device, the leveling detection device includes a support assembly 1 and a plurality of levels 2. The support assembly 1 is connected to a top region of the reaction chamber and carries each of the levels 2, so as to provide a stable detection platform for each of the levels 2. Thus, each of the levels 2 can stably contact the heater under the support of the support assembly 1, so as to detect the levelness of the heater.

[0040] Further, the support assembly 1 includes a main frame 10 and a plurality of supports 11. The main frame 10 is a basic support skeleton of the support assembly 1, and each of the supports 11 is used for increasing the support range of the main frame 10, so that the support assembly 1 can adapt to the top size of the reaction chamber of different models. Specifically, the main frame 10 includes a plurality of support arms 100 and a ring member 101. The plurality of support arms 100 are arranged on the ring surface of the ring member 101 and are rotationally symmetrically distributed relative to the ring center of the ring member 101. Moreover, one end of each of the support arms 100 close to the ring center intersects the ring center, and the other end of each of the support arms 100 away from the ring center is connected to the ring wall of the ring member 101. In addition, the plurality of support arms 100 and the ring member 101 can be integrally formed. In this embodiment, the specific appearance of the ring member 101 is not limited, and the specific number of the support arms 100 is not limited. Exemplarily, as shown in Figure 2 the ring member 101 is a circular ring, and the main frame 10 includes four support arms 100. Moreover, the four support arms 100 are combined into a cross-shaped structure, and the center of the cross-shaped structure coincides with the ring center of the ring member 101. The four extending ends of the cross-shaped structure penetrate the body of the ring member 101.

[0041] Please continue to refer to Figure 2, a plurality of the supports 11 correspond to a plurality of the support arms 100 one by one, and each of the support arms 100 has an inner cavity C, and the corresponding support 11 is accommodated in the inner cavity C. In addition, the support 11 and the corresponding support arm 100 are slidably connected, and the end of the support arm 100 away from the ring core has an opening, and the support 11 can be inserted into or out of the inner cavity C of the support arm 100 through the opening. Preferably, a slide rail is arranged on the cavity arm of the inner cavity C of the support arm 100, and the support 11 is located on the slide rail, so that the support 11 can move along the slide rail. It can be understood that when the support 11 is completely inserted into the support arm 100, the support range of the support assembly 1 is the coverage range of the structure formed by the support arm 100 and the ring-shaped part 101. When each support 11 is extended out of the support arm 100, the range is increased, and the greater the distance of each support 11 extending out, the greater the coverage range of the support assembly 1. Therefore, the support assembly 1 provided in the embodiment realizes an adjustable support range, which can be applied to the leveling detection of the heater in the reaction chamber of different models. Different sizes of leveling detection devices are not required for different models of the reaction chamber, which effectively reduces the detection cost, occupies less storage space, and is beneficial to equipment management.

[0042] As shown in Figure 3 and Figure 4 , the sizes of the hatches G at the top of different types of reaction chambers 3 are different, so by adjusting the displacement of each support 11, different hatch G sizes can be adapted to meet the detection requirements. In other words, when leveling the detection of the heater, the hatch G at the top of the reaction chamber 3 needs to be opened, and then the leveling detection device is placed on the platform near the hatch G, and then the detection end of the level 2 can be inserted into the reaction chamber 3 through the hatch G to contact and detect the levelness of the heater. And because the sizes of the hatches G of different types of reaction chambers 3 are different, the size of the support range of the support assembly 1 can be adjusted under the movement of the support 11, so as to ensure that the support assembly 1 can be stably connected with the platform near the hatch G. As shown in Figure 3 , when the size of the hatch G is small, the displacement of the support 11 extending out of the support arm 100 is small; as shown in Figure 4 , when the size of the hatch G is large, the displacement of the support 11 extending out of the support arm 100 is large. It should be noted that in order to ensure the detection accuracy of the levelness of the heater, the displacement of each support 11 is the same, so as to ensure that the support assembly 1 itself is in a better horizontal state.

[0043] Preferably, to ensure that the bracket 11 can maintain the current position during the detection process after displacement adjustment, the bracket 11 is directly provided with a locking structure with the support arm 100. In an example, as shown in Figure 5 the cavity arm of the inner cavity C of the support arm 100 is provided with a plurality of first clamping pieces M, and the outer periphery of the bracket 11 is provided with at least one second clamping piece N. Optionally, the first clamping piece M is an elastic protrusion, and the second clamping piece N is a groove; or the first clamping piece M is a groove, and the second clamping piece N is an elastic protrusion. The elastic protrusion can be clamped in the groove to fix the position of the bracket 11 relative to the support arm 100. Preferably, a plurality of first clamping pieces M are distributed at a preset distance along the axial direction of the support arm 100, so that the second clamping piece N is connected with different first clamping pieces M when the bracket 11 moves, so that the support assembly 1 has different preset support ranges. In other words, according to the sizes of the hatches G of several typical reaction chambers 3, the displacement adjustment amount of the bracket 11 can be preset, and the first clamping piece M is arranged at the position corresponding to each displacement adjustment amount. When the bracket 11 moves to this position, the second clamping piece N on the bracket 11 is connected with the first clamping piece M at this position, so that the bracket 11 is locked at this position. Therefore, according to a plurality of preset displacement amounts, each first clamping piece M is distributed at a preset distance along the axial direction of the support arm 100.

[0044] For example Figure 5 the first clamping piece M is an elastic protrusion, and the second clamping piece N is a groove. In addition, three displacement amounts of the bracket 11 are preset, and the first clamping piece M is arranged at the corresponding position on the cavity wall of the support arm 100 corresponding to the three displacement amounts. When the bracket 11 moves by a first displacement amount, the first clamping piece M at the position corresponding to the first displacement amount is connected with the second clamping piece N on the bracket 11; when the bracket 11 moves by a second displacement amount, the first clamping piece M at the position corresponding to the second displacement amount is connected with the second clamping piece N on the bracket 11; similarly, when the bracket 11 moves by a third displacement amount, the first clamping piece M at the position corresponding to the third displacement amount is connected with the second clamping piece N on the bracket 11. It should be noted that the specific type of the elastic protrusion is not limited in the embodiment, which can be a spring protrusion or a protrusion made of rubber material, so as to be able to shrink under the extrusion action, facilitating the stretching and pushing of the bracket 11.

[0045] In another example, as shown in Figure 6As shown, the locking structure is a locking piece P. The locking piece P is used to lock the position of the support 11 relative to the support arm 100. That is, when the support 11 moves to a preset position, the locking piece P can be close to the support 11 and abut against the side wall of the support 11, so as to lock the position of the support 11. In this embodiment, the specific structure of the locking piece P is not limited. For example, the locking piece P is a bolt, and the side wall of the support arm 100 has a through hole matched with the bolt. The bolt can pass through the through hole of the side wall of the support arm 100 and extend into the inner cavity C to contact the support 11. In other examples, the locking piece P can also be a clamp, which can be arranged at the opening position of the support arm 100 to clamp the support 11. It should be noted that during the movement of the support 11, the locking piece P is spaced from the support 11 and can be lifted onto the support arm 100. In addition, when adjusting the support range, all the supports 11 have the same displacement amount to ensure the accuracy of the leveling detection. Therefore, the side wall of the support 11 is also provided with a scale S for reading the displacement amount of the support 11, so as to ensure that the displacement amount of each support 11 is the same.

[0046] Please refer to Figure 1 and Figure 7 The support assembly 1 further comprises a plurality of fixing blocks 12. The plurality of fixing blocks 12 correspond to the plurality of supports 11 one by one, and the fixing block 12 is connected to one end of the support 11 away from the ring core. Preferably, the material of the fixing block 12 can be metal or the like. The purpose is that the fixing block 12 has a certain weight, so that based on the action of gravity, the support assembly 1 can be fixed on the platform near the cabin door during detection to avoid shaking. In this embodiment, the specific appearance of the fixing block 12 is not limited and can be rectangular or arc-shaped.

[0047] Further, the ring core position where the plurality of support arms 100 intersect is also provided with a through hole T. In addition, the leveling detection device also includes a plug 3. The plug 3 is used to position the support assembly 1 at the center position of the heater H, ensuring the accuracy of the level reading. Specifically, the center position of the heater H has a groove matched with the plug 3. In the process of detecting the heater H, the heater H is first lifted to the detection station in the reaction chamber, and then the leveling detection device is placed on the platform beside the hatch. Secondly, the plug 3 is inserted into the through hole T, so that the plug 3 can contact the heater H. If the plug 3 just touches the groove at the center position of the heater H, it indicates that the center of the leveling detection device is aligned with the center of the heater H, and the reading of the level 2 can be performed. If the plug 3 does not touch the groove at the center position of the heater H, the position of the support assembly 1 needs to be moved until the plug 3 touches the groove at the center position of the heater H. Optionally, since the plug 3 is a separate component, a rope can be used to tie the plug 3 to the main frame 10, or an installation groove can be provided on the main frame 10 to accommodate the plug 3.

[0048] It should be noted that the plurality of levels 2 are uniformly distributed on the main frame 10 and are fixedly connected with the main frame 10. In addition, the detection end of the level 2 penetrates the main frame 10 and extends to the surface of the object to be detected to detect the levelness of the object to be detected. For example, four support arms 100 are provided in the main frame 10, and the four support arms 100 are arranged along the X-axis direction and the Y-axis direction, respectively, to form a cross-shaped structure. The leveling detection device is provided with four levels 2, which are respectively located on the support arms 100 to detect the levelness in the X-axis direction and the Y-axis direction. The detection end of the level 2 penetrates the side wall of the support arm 100 and does not pass through the inner cavity C, so it will not affect the movement of the bracket 11.

[0049] Preferably, the leveling detection device provided by the embodiment can not only be applied to PVD equipment, but also can be applied to atomic layer deposition (ALD) equipment and the like as the wafer process is iteratively updated, and the embodiment does not limit this.

[0050] To sum up, the leveling detection device provided by the embodiment is provided with a movable support 11, and the support 11 can extend into or out of the inner cavity C of the supporting arm 100 in the supporting assembly 1 to adjust the supporting range of the supporting assembly 1. Therefore, based on the movable support 11, the supporting assembly 1 can be adjusted to different supporting ranges, so as to be applicable to reaction cavities of different sizes, effectively reduce the detection cost, reduce the storage space, and facilitate the equipment management.

[0051] In addition, it should be recognized that, although the utility model has been disclosed as above with preferred embodiments, the above embodiments are not used to limit the utility model. For any skilled person in the art, many possible changes and modifications or equivalent embodiments of equivalent changes can be made to the technical scheme of the utility model by using the disclosed technical content without departing from the scope of the technical scheme of the utility model. Therefore, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the utility model without departing from the content of the technical scheme of the utility model still belongs to the protection scope of the technical scheme of the utility model.

Claims

1. A levelling detection device, characterized in that The leveling detection device comprises: a support assembly and a plurality of levels; the support assembly comprises a main frame and a plurality of supports; the main frame comprises a plurality of support arms, and each of the support arms has an inner cavity; the plurality of supports are respectively accommodated in the inner cavities, and the supports are slidably connected with the corresponding support arms, so that the supports can be extended into or out of the inner cavities of the support arms to adjust the support range of the support assembly; the plurality of levels are respectively connected with the main frame to detect the levelness of the object to be measured under the support of the support assembly.

2. Levelling detection device according to claim 1, characterized in that A plurality of first clamping members are arranged on the cavity arms of the inner cavities of the support arms, and at least one second clamping member is correspondingly arranged on the outer periphery of the support; wherein the first clamping member is an elastic protrusion, and the second clamping member is a groove; or the first clamping member is a groove, and the second clamping member is an elastic protrusion; the elastic protrusion can be clamped in the groove to fix the position of the support relative to the support arm.

3. Levelling detection device according to claim 2, characterized in that The plurality of first clamping members are spaced apart along the axial direction of the support arm at a predetermined distance, so that the second clamping member is connected with different first clamping members as the support moves, so that the support assembly has different predetermined support ranges.

4. The leveling detection device of claim 1, wherein, The support arm is also provided with a locking member, so that when the support moves to a predetermined position, the locking member abuts against the side wall of the support to lock the position of the support relative to the support arm; and a scale is further arranged on the side wall of the support for reading the displacement of the support.

5. The leveling detection device of claim 1, wherein, The inner cavity of the support arm is provided with a sliding rail, and the support is located on the sliding rail and can move along the sliding rail.

6. The leveling detection device of claim 1, wherein, The main frame further comprises a ring member; the plurality of support arms are arranged on the ring surface of the ring member and are rotationally symmetrically distributed relative to the ring core of the ring member.

7. Levelling detection device according to claim 6, characterized in that The end of the support arm away from the ring core has an opening, and the support extends into or out of the inner cavity of the support arm through the opening.

8. Levelling detection device according to claim 6, characterized in that The ends of the plurality of support arms close to the ring core intersect at the ring core, and a through hole is formed at the ring core; the leveling detection device further comprises a plug; the plug can be inserted into the through hole and extended to the surface of the object to be measured; and the center position of the object to be measured has a groove matched with the through hole, and when the ring core corresponds to the center position of the object to be measured, the plug can be inserted into the groove.

9. Levelling detection device according to any of claims 6-8, characterized in that The support assembly further comprises a plurality of fixing blocks; the plurality of fixing blocks correspond to the plurality of supports one by one, and the fixing blocks are connected with the ends of the supports away from the ring core.

10. The leveling detection device of claim 1, wherein, The plurality of levels are uniformly distributed on the main frame and are fixedly connected with the main frame; and the detection end of the level penetrates through the main frame and extends to the surface of the object to be measured to detect the levelness of the object to be measured.

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