Quick-acting automatic gate valve

Abstract

The utility model relates to the field of gas control valves, in particular to a quick-acting automatic gate valve which comprises a valve body base, a ventilation pipeline is fixedly connected onto the valve body base, a pressure balance valve is communicated onto the ventilation pipeline, a protective shell is fixedly covered outside the valve body base, and an opening and closing driving mechanism and an opening and closing action mechanism are arranged on the valve body base. The opening and closing driving mechanism comprises a PLC control system, the opening and closing action mechanism comprises a gate plate, the PLC control system sends out a signal, and the gate plate is driven by the opening and closing action mechanism to be inserted into the ventilation pipeline so as to close the ventilation pipeline. According to the utility model, the cylinder automatically controlled by the PLC is used as a driving part, the response and action speed is high, the action in-place accuracy is high, the pipeline on-off control action can be timely and effectively completed, and the gas backflow during the downtime of the vacuum pump is prevented; after the flashboard is closed, the pressure balance valve performs balance adjustment on internal and external pressure of the pipeline to prevent flashboard opening faults; the heating pipe surrounds the ventilation pipeline, so that impurities are prevented from being deposited at the ventilation pipeline.

Description

TECHNICAL FIELD

[0001] The utility model relates to gas control valve field especially a quick action's automatic gate valve. BACKGROUND

[0002] More tail gas containing impurities and harmful substances is generated in semiconductor process, a vacuum pump is usually used to make negative pressure environment in the system, so that the tail gas flows according to predetermined flow direction and is discharged. A shut-off valve needs to be added on the communication pipeline of the vacuum pump, so as to shut off the pipeline in time when the vacuum pump is down, to prevent gas from backflowing, so as to affect product yield. But due to the large diameter of the pipeline, the commonly used shut-off valve cannot act in time or act out of position, which affects the shut-off effect. SUMMARY

[0003] The utility model aims at solving above-mentioned problem, provides a quick action's automatic gate valve, and its technical scheme is as follows:

[0004] A quick action's automatic gate valve, including valve body base, the valve body base is fixedly connected with the air pipe, the air pipe is connected with the pressure balance valve, the valve body base outer fixed cover is equipped with the protective housing, the valve body base is provided with the opening and closing drive mechanism and the opening and closing action mechanism, the opening and closing drive mechanism includes PLC control system, the opening and closing action mechanism includes the shutter, the PLC control system sends signal and is driven by the opening and closing action mechanism and inserts the shutter into the air pipe to close the air pipe.

[0005] On the basis of the above-mentioned scheme, the opening and closing drive mechanism includes drive cylinder, cylinder support seat, cylinder transmission shaft, cylinder transmission connecting rod and rotating shaft, the cylinder support seat is fixedly installed on the valve body base, the drive cylinder is installed on the cylinder support seat, the cylinder transmission shaft is connected at the piston rod end of drive cylinder, one end of cylinder transmission connecting rod is hinged with the cylinder transmission shaft, the other end is fixedly connected with the rotating shaft, the rotating shaft is rotatably arranged on the cylinder support seat, the opening and closing action mechanism includes first transmission connecting rod, second transmission connecting rod and shutter, two ends of the second transmission connecting rod are hinged with the shutter and one end of the first transmission connecting rod respectively, the other end of the first transmission connecting rod is fixedly connected with the rotating shaft, the shutter moves along the direction close to and away from the air pipe.

[0006] On the basis of the above-mentioned scheme, the slide is arranged in the cylinder support seat, the transmission roller is rotatably installed at the end of the cylinder transmission shaft, and the transmission roller rotates in the slide.

[0007] Preferably, the opposite sides of the shutter are connected with shutter guide rails, the opposite outer sides of the shutter guide rails are parallel to the side surface of the installation chamber in the valve body base, the guide roller is rotatably installed on the shutter guide rail, the guide roller is parallel to the bottom surface of the installation chamber and rolls on the side surface of the installation chamber.

[0008] On the basis of the above scheme, the edge of the gate plate close to the air pipe is provided with a slope surface, and the gate plate spring is arranged between the gate plate and the gate plate guide rail.

[0009] Preferably, a heating pipe is further included, which is fixedly installed in the valve body base and annularly arranged outside the air pipe.

[0010] Preferably, the air pipe comprises an air inlet flange, a sealing cylinder and an air outlet flange arranged in sequence, the air outlet flange is installed on the valve body base, the connecting ring is fixedly connected outside the end of the sealing cylinder, and the insertion position of the gate plate is arranged between the connecting ring and the valve body base.

[0011] On the basis of the above scheme, a first sealing ring is arranged between the connecting ring and the sealing cylinder, and a second sealing ring is arranged at the end of the connecting ring towards the gate plate, and the first sealing ring and the second sealing ring are clamped on the connecting ring.

[0012] Preferably, a valve port connecting plate is further included, which is fixedly connected on the protective shell.

[0013] The beneficial effects of the utility model are as follows: the cylinder controlled by PLC is used as the driving component, the reaction and action speed are fast, the action is accurate, the pipeline on-off control action can be timely and effectively completed, and the gas backflow is prevented when the vacuum pump is out of service; the pressure balance valve is used to balance and adjust the pressure inside and outside the pipeline after the gate plate is closed, and the gate plate opening failure is prevented; the heating pipe is annularly arranged outside the air pipe, and the impurities can be effectively prevented from depositing at the air pipe. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 : the utility model structural diagram is shown;

[0015] Figure 2 : the utility model protective shell internal structure schematic view is shown;

[0016] Figure 3 : the utility model open-close drive mechanism structure schematic view is shown;

[0017] Figure 4 : the utility model open-close action mechanism structure schematic view is shown;

[0018] Figure 5 : the utility model air pipe axial section view is shown;

[0019] Figure 6 : the utility model heating pipe structure schematic view is shown. DETAILED DESCRIPTION

[0020] The utility model is further described below in combination with the drawings and examples:

[0021] In the present application, unless otherwise expressly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood in a broad sense, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0022] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "length", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, therefore it cannot be understood as a limitation on the present application. In addition, the terms "first", "second" are only for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features limited by "first", "second" can be explicitly or implicitly included one or more. In the description of the present application, unless otherwise stated, the meaning of "a plurality of" is two or more.

[0023] In the present application, unless otherwise expressly specified and limited, the "upper" or "lower" of the first feature in the second feature can include the direct contact of the first and second features, or the indirect contact of the first and second features through another feature between them. Moreover, the "upper", "upper" and "upper" of the first feature in the second feature include the vertical direction of the first feature above and obliquely above the second feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The "below", "below" and "below" of the first feature in the second feature include the vertical direction of the first feature below and obliquely below the second feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0024] As shown in Figures 1 to 6 A quick-acting automatic gate valve, comprising a valve body base 11, the valve body base 11 is fixedly connected with an air duct, a protective shell 12 is arranged outside the valve body base 11, which is used for protecting the elements on the valve body base 11, and a valve port connecting plate 13 is fixedly connected on the protective shell 12, so as to facilitate wiring and control of each element.

[0025] As shown in Figures 2 to 4As shown, the valve body base 11 is provided with an opening and closing driving mechanism and an opening and closing action mechanism, the opening and closing driving mechanism comprises a PLC control system, the opening and closing action mechanism comprises a shutter 43, the PLC control system sends a signal and drives the shutter 43 to insert into the ventilation pipeline to close the ventilation pipeline by the opening and closing action mechanism. The opening and closing driving mechanism comprises a driving cylinder 31, a cylinder support base 32, a cylinder transmission shaft 34, a cylinder transmission connecting rod 36 and a rotating shaft 37, the cylinder support base 32 is fixedly installed on the valve body base 11, the driving cylinder 31 is installed on the cylinder support base 32, the cylinder transmission shaft 34 is connected at the end of the piston rod of the driving cylinder 31, one end of the cylinder transmission connecting rod 36 is hinged with the cylinder transmission shaft 34, the other end is fixedly connected with the rotating shaft 37, and the rotating shaft 37 is rotatably arranged on the cylinder support base 32; the opening and closing action mechanism comprises a first transmission connecting rod 41, a second transmission connecting rod 42 and the shutter 43, two ends of the second transmission connecting rod 42 are respectively hinged with the shutter 43 and one end of the first transmission connecting rod 41, the other end of the first transmission connecting rod 41 is fixedly connected with the rotating shaft 37, and the shutter 43 moves along the direction close to and away from the ventilation pipeline. When the PLC control system receives a shutdown signal of the vacuum pump, a command is sent to control the piston rod of the driving cylinder 31 to act, so as to control the rotating shaft 37 to rotate through the cylinder transmission connecting rod 36, and the rotating action of the rotating shaft 37 drives the first transmission connecting rod 41 and the second transmission connecting rod 42 to rotate and expand, and then pushes the shutter 43 into the ventilation pipeline until the ventilation pipeline is closed. When the PLC control system receives a signal that the vacuum pump returns to a normal working state, a command is sent to control the piston rod of the driving cylinder 31 to act in the direction, so that the shutter 43 is away from the ventilation pipeline and the ventilation pipeline is opened.

[0026] In order to reduce the friction in the action process of the shutter 43 and prolong the service life of the element, a slide 33 is arranged in the cylinder support base 32, a transmission roller 35 is rotatably installed at the end of the cylinder transmission shaft 34, and the transmission roller 35 rotates in the slide 33; the opposite sides of the shutter 43 are connected with shutter guide rails 44, the opposite outer sides of the shutter guide rails 44 are parallel to the side surface of the installation chamber in the valve body base 11, a guide rail roller 45 is rotatably installed on the shutter guide rail 44, the guide rail roller 45 is parallel to the bottom surface of the installation chamber and rolls on the side surface of the installation chamber. Thus, rotation is used instead of sliding to reduce the friction between elements and improve the action speed of the element.

[0027] A slope surface is arranged on the edge of the side of the shutter 43 close to the ventilation pipeline, and a shutter spring 46 is abutted between the shutter 43 and the shutter guide rail 44. Thus, the shutter 43 can be smoothly inserted into the ventilation pipeline, and the height of the shutter 43 can be self-adaptively adjusted by the shutter spring 46 to improve the sealing performance.

[0028] A pressure balance valve 51 is communicated on the ventilation pipeline. As shown in the figure, Figure 5As shown, the ventilation pipeline comprises an air inlet flange 21, a sealing cylinder 22 and an air outlet flange 26 arranged in sequence, the air outlet flange 26 is installed on the valve body base 11, the connecting ring 23 is fixedly connected to the outer side of the end of the sealing cylinder 22, and the insertion position of the gate plate 43 is arranged between the connecting ring 23 and the valve body base 11. The air outlet flange 26 is connected with a vacuum pump, and the pressure balance valve 51 is communicated with the sealing cylinder 22. When the gate plate 43 is inserted into the ventilation pipeline to shut off the ventilation pipeline, the air pressure in the ventilation pipeline can be detected in real time through an air pressure detection valve (not shown in the figure), and the pressure balance valve 51 is balanced with the air pressure, so that the gate plate 43 cannot be opened due to excessive air pressure in the pipeline.

[0029] The first sealing ring 24 is arranged between the connecting ring 23 and the sealing cylinder 22, and the second sealing ring 25 is arranged at the end of the connecting ring 23 towards the gate plate 43 side. The first sealing ring 24 and the second sealing ring 25 are clamped on the connecting ring 23, so as to improve the sealing effect of the ventilation pipeline.

[0030] As shown in the drawings, the ventilation pipeline further comprises a heating pipe 61 fixedly installed in the valve body base 11 and arranged in a ring shape outside the ventilation pipeline. Figure 6 The temperature of the ventilation pipeline is raised by the heating pipe 61 to prevent impurities from depositing.

[0031] The utility model has been described above by way of example, but the utility model is not limited to the above-mentioned specific embodiments, and any modification or modification based on the utility model belongs to the scope of protection required by the utility model.

Claims

1. A fast-acting automatic gate valve, characterized by, The valve body base (11) is fixedly connected with a vent pipe, and a pressure balance valve (51) is connected with the vent pipe.

2. A fast-acting automatic gate valve according to claim 1, characterized in that, The opening and closing driving mechanism comprises a driving cylinder (31), a cylinder support seat (32), a cylinder transmission shaft (34), a cylinder transmission connecting rod (36) and a rotating shaft (37), the cylinder support seat (32) is fixedly installed on the valve body base (11), the driving cylinder (31) is installed on the cylinder support seat (32), the cylinder transmission shaft (34) is connected with the piston rod end of the driving cylinder (31), one end of the cylinder transmission connecting rod (36) is hinged with the cylinder transmission shaft (34), and the other end is fixedly connected with the rotating shaft (37), and the rotating shaft (37) is rotatably arranged on the cylinder support seat (32).

3. A fast-acting automatic gate valve according to claim 2, characterized in that The cylinder support seat (32) is provided with a slide (33), and the end of the cylinder transmission shaft (34) is rotatably installed with a transmission roller (35).

4. A fast-acting automatic gate valve according to claim 2, wherein The opposite sides of the gate plate (43) are connected with gate plate guide rails (44), the opposite outer sides of the gate plate guide rails (44) are parallel with the side surface of the installation chamber in the valve body base (11), the gate plate guide rails (44) are rotatably installed with guide rail rollers (45), the guide rail rollers (45) are parallel with the bottom surface of the installation chamber and roll on the side surface of the installation chamber.

5. A fast-acting automatic gate valve according to claim 4, characterized in that, The edge of the side of the gate plate (43) close to the vent pipe is provided with an inclined surface, and the gate plate spring (46) is abutted between the gate plate (43) and the gate plate guide rail (44).

6. A fast-acting automatic gate valve according to claim 1, wherein The valve body base (11) is fixedly installed with a heating pipe (61), and the heating pipe (61) is annularly arranged outside the vent pipe.

7. A fast-acting automatic gate valve according to claim 1, wherein The vent pipe comprises an air inlet flange (21), a sealing cylinder (22) and an air outlet flange (26) arranged in sequence, the air outlet flange (26) is installed on the valve body base (11), a connecting ring (23) is fixedly connected with the outer side of the end of the sealing cylinder (22), and the insertion position of the gate plate (43) is arranged between the connecting ring (23) and the valve body base (11).

8. A fast-acting automatic gate valve according to claim 7, characterized in that First sealing ring (24) is arranged between the connecting ring (23) and the sealing cylinder (22), and second sealing ring (25) is arranged at the end of the connecting ring (23) towards the side of the gate (43), and the first sealing ring (24) and the second sealing ring (25) are clamped on the connecting ring (23).

9. A fast-acting automatic gate valve according to claim 1, wherein The valve port connecting plate (13) is fixedly connected to the protective shell (12).

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