NA adjusting device and photoetching machine

Abstract

According to the NA adjusting device and the photoetching machine provided by the embodiment of the utility model, the NA plate on the rotating mechanism can be driven to perform linear displacement through the linear displacement mechanism, and a plurality of through holes with different sizes in the NA plate are circumferentially arranged around the rotating axis of the NA plate; therefore, in combination with the linear motion, the through holes with different sizes can reach designated positions to be aligned with a lens to focus a light beam when the NA plate is driven by the rotating mechanism to rotate, NA adjustment is achieved in an automatic mode, operation is convenient, errors are small, and motion precision and efficiency are guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to optical equipment technical field, specifically, relate to a kind of NA adjusting device and photoetching machine. BACKGROUND

[0002] Optical system in photoetching machine is responsible for the light beam emitted by light source is adjusted, focused and distributed through a series of optical elements, finally form high-quality optical pattern. With the continuous reduction of technology node, higher requirements are put forward for the resolution of optical system. Adjusting the resolution of optical system can be realized by changing the wavelength of exposure light source and adjusting the numerical aperture of lens. Higher numerical aperture (Numerical Aperture, NA) can make light beam more easily focused to smaller size, can provide higher resolution and focusing ability.

[0003] The traditional method of adjusting numerical aperture is to replace objective lens and add adjustable diaphragm before and after lens. It is cumbersome to operate and easy to introduce new error in the adjustment process, which reduces the accuracy and efficiency of NA adjustment. UTILITY MODEL CONTENT

[0004] The purpose of the utility model includes providing a kind of NA adjusting device and photoetching machine, realize NA adjustment by automated mode, it is easy to operate and error is small, guarantee movement accuracy and efficiency.

[0005] Embodiments of the utility model can be realized as follows:

[0006] In the first aspect, the utility model provides a kind of NA adjusting device, comprising:

[0007] Linear displacement mechanism;

[0008] Rotary mechanism is arranged in the linear displacement mechanism, the rotary mechanism can be driven by the linear displacement mechanism and carry out linear displacement along preset direction;

[0009] NA plate is arranged in the rotary mechanism, the NA plate can be driven by the rotary mechanism and rotate, and the rotation axis of the NA plate is perpendicular to the preset direction;

[0010] Wherein, the NA plate has a plurality of through holes, and the aperture of the plurality of through holes arranged in a circle around the rotation axis of the NA plate is different.

[0011] In optional implementation, the aperture of each through hole is different.

[0012] In optional implementation, all through holes are distributed in a radial pattern.

[0013] In optional implementation, the linear displacement mechanism comprises:

[0014] A mounting base, the rotating mechanism is connected to the mounting base through a sliding pair, the sliding pair is arranged along the preset direction;

[0015] A first motor fixed to the mounting base;

[0016] A transmission member connected between the output end of the first motor and the rotating mechanism.

[0017] In an optional embodiment, the transmission member comprises a driving wheel, a driven wheel and a synchronous belt;

[0018] The driving wheel and the driven wheel are both rotatably arranged on the mounting base, and the rotation axes of the two are both perpendicular to the preset direction and the rotation axis of the NA plate;

[0019] The output end of the first motor is fixedly connected with the driving wheel;

[0020] The synchronous belt is wound around the driving wheel and the driven wheel;

[0021] The rotating mechanism is fixedly connected with the synchronous belt.

[0022] In an optional embodiment, the transmission member further comprises a pressing plate, the pressing plate is fixed to the driving wheel to press the synchronous belt against the driving wheel.

[0023] In an optional embodiment, the mounting base comprises a mounting plate and a first connecting plate connected with each other;

[0024] The sliding pair is arranged on the mounting plate;

[0025] A receiving cavity is formed between the first connecting plate and the mounting plate, the stator of the first motor is fixed to the first connecting plate, the rotor of the first motor extends into the receiving cavity, and the transmission member is at least partially located in the receiving cavity.

[0026] In an optional embodiment, the NA adjusting device further comprises a displacement sensor and a marker, one of the displacement sensor and the marker is fixed to the rotating mechanism, and the other is fixed to the linear displacement mechanism.

[0027] In an optional embodiment, the rotating mechanism comprises a linkage, a second connecting plate and a second motor, the linkage is connected to the linear displacement mechanism through a sliding pair, the second connecting plate is connected with the linkage, the stator of the second motor is fixed to the second connecting plate, and the rotor of the second motor is fixedly connected with the NA plate.

[0028] In a second aspect, the utility model provides a photoetching machine, including any preceding embodiment of NA adjusting device.

[0029] The NA adjusting device and the photoetching machine have the beneficial effects that:

[0030] The linear displacement mechanism can drive the NA plate on the rotating mechanism to displace linearly, wherein the plurality of through holes of different sizes on the NA plate are arranged in a circle around the rotation axis of the NA plate, and thus the through holes of different sizes can reach the specified positions to align the lens to focus the light beam when the NA plate rotates under the driving of the rotating mechanism, so that the NA adjustment is realized in an automatic manner, the operation is convenient, the error is small, the motion precision and efficiency are ensured. BRIEF DESCRIPTION OF DRAWINGS

[0031] In order to more clearly illustrate the technical scheme of the embodiments of the present application, the drawings needed in the embodiments will be briefly introduced as follows, and it should be understood that the following drawings only show some embodiments of the present application, and therefore should not be regarded as a limitation on the scope, and for those skilled in the art, other related drawings can also be obtained without creative labor on the basis of these drawings.

[0032] Fig. 1 The structure schematic diagram of the NA adjusting device provided by the present embodiment under a first visual angle;

[0033] Fig. 2 The structure schematic diagram of the NA adjusting device provided by the present embodiment under a second visual angle;

[0034] Fig. 3 The structure schematic diagram of the NA adjusting device provided by the present embodiment under a third visual angle;

[0035] Fig. 4 The structure schematic diagram of the NA adjusting device provided by the present embodiment under a fourth visual angle.

[0036] Icon: 100-linear displacement mechanism; 110-mounting seat; 111-mounting plate; 112-first connecting plate; 120-first motor; 130-transmission member; 131-driving wheel; 132-driven wheel; 133-synchronous belt; 134-pressing plate; 200-rotating mechanism; 210-linkage; 220-second connecting plate; 230-second motor; 300-NA plate; 310-through hole; 400-sliding pair; 410-sliding rail; 420-sliding block; 500-sensor mounting portion; 510-marker. DETAILED DESCRIPTION

[0037] In order to make the purpose, technical scheme and advantages of the embodiments of the present application clearer, the technical scheme of the embodiments of the present application will be described clearly and completely in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings can be arranged and designed in various different configurations.

[0038] Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the claimed present application, but only represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative labor fall within the scope of protection of the present application.

[0039] It should be noted that: similar reference numbers and letters represent similar items in the following drawings, therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0040] In the description of the present application, it should be noted that if the terms "upper", "lower", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship of the product of the present application when it is usually placed, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element must have a particular orientation, be constructed and operated in a particular orientation, therefore, it cannot be understood as a limitation on the present application.

[0041] In addition, if the terms "first", "second" and the like appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance.

[0042] The embodiments will be described below in combination with the drawings Figs. 1 to 4 The NA adjusting device provided by the present application will be described in detail. It should be noted that the features in the embodiments of the present application can be combined with each other without conflict.

[0043] The embodiment of the application discloses a NA adjusting device which is mainly applied to a photoetching machine or other machines for focusing light beams, and the NA adjusting device comprises a linear displacement mechanism 100, a rotating mechanism 200 and a NA plate 300, the rotating mechanism 200 is arranged on the linear displacement mechanism 100, and the rotating mechanism 200 can be linearly displaced along a preset direction under the driving of the linear displacement mechanism 100; the NA plate 300 is arranged on the rotating mechanism 200, the NA plate 300 can be rotated under the driving of the rotating mechanism 200, and the rotation axis of the NA plate 300 is perpendicular to the preset direction; wherein the NA plate 300 has a plurality of through holes 310, and the plurality of through holes 310 which are arranged in a circle around the rotation axis of the NA plate 300 have different diameters.

[0044] In this way, the NA plate 300 on the rotating mechanism 200 can be linearly displaced by the linear displacement mechanism 100, and because the plurality of through holes 310 with different sizes on the NA plate 300 are arranged in a circle around the rotation axis of the NA plate 300, the through holes 310 with different sizes can reach the specified positions and align the lens to focus the light beams when the NA plate 300 is rotated under the driving of the rotating mechanism 200 in combination with the linear motion, so that the NA adjustment is realized in an automatic manner, the operation is convenient, the error is small, and the motion precision and efficiency are ensured.

[0045] The NA plate 300 can be arranged in different shapes as required, and in the embodiment, the NA plate 300 is circular, the center position of the NA plate 300 is connected with the rotating mechanism 200, and all the through holes 310 are distributed in a radial manner, that is, all the through holes 310 are divided into a plurality of rows which are arranged in a circle and are spaced apart around the center position of the NA plate 300, and each row has a plurality of through holes 310 which are arranged in a radial direction of the rotation axis. The through holes 310 in the adjacent two rows correspond to each other in the circumferential direction around the rotation axis of the NA plate 300. In this way, the position coordinates of each through hole 310 can be conveniently determined, and the through holes 310 can be accurately aligned with the lens.

[0046] Of course, in other embodiments, the NA plate 300 can also have other regular or irregular shapes, for example, a rectangle, a polygon and the like, as long as the plurality of through holes 310 are arranged in a circle around the rotation axis of the NA plate 300.

[0047] In the embodiment, the diameters of the through holes 310 are different, so that more NA adjustments can be realized. Of course, in some embodiments, the diameters of a part of the through holes 310 can be different, and the diameters of a part of the through holes 310 can be the same, as long as the NA plate 300 has a plurality of through holes 310 with different diameters.

[0048] In detail, the preset direction is the X axis, and of course can be the Y axis, and is selected according to actual requirements. The linear displacement mechanism 100 includes a mounting seat 110, a first motor 120 and a transmission member 130, mainly as a carrier of the entire NA adjusting device, plays a supporting and bearing role, and the mounting seat 110 is used for mounting to a machine table of a photolithography machine. The rotating mechanism 200 is connected to the mounting seat 110 through a sliding pair 400, the sliding pair 400 is arranged along the preset direction, that is, a slide rail 410 in the sliding pair 400 is arranged along the preset direction, and a sliding block 420 can slide and displace along the length direction of the slide rail 410, so that the sliding pair 400 can play a role of accurately guiding the displacement direction of the rotating mechanism 200, and at the same time, the friction force when the rotating mechanism 200 displaces relative to the mounting seat 110 is weakened, the load of the first motor 120 is reduced, and the energy consumption is reduced. The stator of the first motor 120 is fixed to the mounting seat 110, and the transmission member 130 is connected between the output end of the first motor 120 and the rotating mechanism 200, so that when the first motor 120 operates, power can be transmitted to the rotating mechanism 200 through the transmission member 130 to drive the rotating mechanism 200 to displace linearly in the preset direction, to realize the linear displacement requirement with high positioning accuracy, and to ensure the motion transmission accuracy. At the same time, the controller can connect the motor encoder signal line to control the accurate operation of the first motor 120, to realize the NA high-precision adjustment, and to meet the linear direction high-precision displacement requirement.

[0049] In the embodiment, the first motor 120 adopts a rotor motor, and the output end of the first motor 120 is a rotor thereof. The mounting seat 110 includes a mounting plate 111 and a first connecting plate 112 connected to each other; the sliding pair 400 is arranged on the mounting plate 111; a containing cavity is formed between the first connecting plate 112 and the mounting plate 111, the stator of the first motor 120 is fixed to the first connecting plate 112, the rotor of the first motor 120 extends into the containing cavity, and the transmission member 130 is at least partially located in the containing cavity, so as to play a role of protecting the transmission system.

[0050] The transmission member 130 can be a belt transmission mechanism to convert the torque provided by the first motor 120 into a linear driving force. Specifically, the transmission member 130 includes a driving wheel 131, a driven wheel 132, and a synchronous belt 133; the driving wheel 131 and the driven wheel 132 are both rotatably arranged on the mounting base 110, and the rotation axes of the two are perpendicular to the preset direction and the rotation axis of the NA plate 300, that is, the rotation axes of the driving wheel 131 and the driven wheel 132 are both along the Y-axis direction; the rotor of the first motor 120 is fixedly connected with the driving wheel 131 coaxially; the synchronous belt 133 is wound around the driving wheel 131 and the driven wheel 132; the rotation mechanism 200 is fixedly connected with the synchronous belt 133, so that when the rotor of the first motor 120 rotates, it can drive the driving wheel 131 to rotate, thereby driving the driven wheel 132 and the synchronous belt 133 to operate; since the rotation mechanism 200 is connected with the synchronous belt 133, it can be driven by the synchronous belt 133 to move linearly in the preset direction, that is, to realize the linear movement of the NA plate 300 in the preset direction; the range of linear movement is the distance between the driving wheel 131 and the driven wheel 132.

[0051] The synchronous belt 133 can be a steel belt, and the transmission member 130 further includes a pressing plate 134 fixed to the driving wheel 131 to press the synchronous belt 133 tightly on the driving wheel 131, so as to reduce the wear and fatigue between the synchronous belt 133 and the driving wheel 131, prevent slipping, prolong the service life, and ensure the efficient and stable operation of the linear displacement mechanism 100.

[0052] Of course, in some embodiments, the first motor 120 can also be a linear motor, and it is also feasible that the mover is connected with the rotation mechanism 200; in addition, the transmission member 130 can also be a gear rack mechanism, a ball screw, or other mechanisms that can convert torque into linear driving force.

[0053] In the present embodiment, the rotation mechanism 200 includes a linkage member 210, a second connecting plate 220, and a second motor 230; the linkage member 210 is connected to the linear displacement mechanism 100 through a sliding pair 400, specifically, the linkage member 210 is connected to the sliding block 420 of the sliding pair 400, so as to realize the sliding connection relative to the mounting plate 111. The second connecting plate 220 is connected with the linkage member 210, the stator of the second motor 230 is fixed to the second connecting plate 220, and the rotor of the second motor 230 is fixedly connected with the center point of the NA plate 300. In this way, the NA plate 300 is driven by directly connecting the rotor of the second motor 230 with the NA plate 300, and the rotation of the NA plate 300 is realized; moreover, the controller can be connected with the motor encoder signal line to control the accurate operation of the second motor 230, realize the high-precision adjustment of the NA, and the transmission form is simple, which meets the high-precision rotation requirement in the rotation direction. The rotation direction can be the direction of rotation around the Z-axis.

[0054] In addition, in order to more accurately control the displacement amount of the rotating mechanism 200 relative to the mounting plate 111 when the rotating mechanism 200 is linearly displaced, the NA adjusting device further comprises a displacement sensor and a marker 510, one of which is fixed to the linkage 210 of the rotating mechanism 200, and the other of which is fixed to the mounting base 110 of the linear displacement mechanism 100. For example, as shown in the figure, a sensor mounting portion 500 is provided on the mounting plate 111 of the mounting base 110, and a displacement sensor is provided on the sensor mounting portion 500. The displacement sensor is a photosensitive element, such as a laser displacement sensor, an optical grating ruler, etc. A sensor light shield is fixed at the connection between the linkage 210 of the rotating mechanism 200 and the synchronous belt 133. For example, the sensor light shield is fixed relative to the linkage 210 and the synchronous belt 133 by sequentially passing through the sensor light shield and the synchronous belt 133 and then locking into the linkage 210 through fasteners such as screws. The sensor light shield serves as the marker 510. Of course, the displacement sensor can also be a Hall sensor, an ultrasonic displacement sensor, etc. The specific type is not limited, as long as it can detect the displacement amount of the linkage 210.

[0055] In summary, the NA adjusting device of the embodiments of the present application has the following advantages. On the one hand, the steel belt transmission mechanism used in a limited rotation angle range has movement limiting and anti-slip functions, and has the functions of smooth transmission of the friction type belt transmission, buffering and vibration absorption in a complex machine environment, and improved motion transmission precision. On the other hand, compared with the rectangular NA plate 300, the numerical aperture of the circular NA plate 300 is arranged along the radial direction and the circumferential direction, which is easy to control by the motor rotation, the transmission form is simple, and the motion precision is improved. In addition, the small volume, compact structure, and simple transmission form of the motion system can meet the high positioning precision displacement and rotation requirements of the NA plate 300 in the X direction and around the Z direction.

[0056] In addition, the embodiments of the present application also disclose a photoetching machine comprising the NA adjusting device of the above-mentioned embodiments, and therefore have the corresponding structures and advantages, which will not be described here.

[0057] The above is only a specific implementation manner of the present application, but the protection scope of the present application is not limited thereto. Any person skilled in the art can easily think of changes or replacements within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A NA adjustment device, characterized by, The application relates to a NA adjusting device. The NA adjusting device comprises: a linear displacement mechanism (100); a rotating mechanism (200) arranged on the linear displacement mechanism (100), wherein the rotating mechanism (200) can be linearly displaced along a preset direction under the driving of the linear displacement mechanism (100); an NA plate (300) arranged on the rotating mechanism (200), wherein the NA plate (300) can be rotated under the driving of the rotating mechanism (200), and the rotation axis of the NA plate (300) is perpendicular to the preset direction; 2. The NA adjusting apparatus according to claim 1, wherein wherein the NA plate (300) has a plurality of through holes (310), and the diameters of the plurality of through holes (310) arranged in a circle around the rotation axis of the NA plate (300) are different.

3. The NA adjusting apparatus according to claim 1 or 2, characterized by, The diameters of each of the through holes (310) are different.

4. The NA adjusting apparatus according to claim 1, wherein All the through holes (310) are distributed in a radial manner. The linear displacement mechanism (100) comprises: a mounting base (110), wherein the rotating mechanism (200) is connected to the mounting base (110) through a sliding pair (400), and the sliding pair (400) is arranged along the preset direction; a first motor (120) fixed to the mounting base (110); 5. The NA adjusting apparatus according to claim 4, wherein a transmission member (130) connected between the output end of the first motor (120) and the rotating mechanism (200). The transmission member (130) comprises a driving wheel (131), a driven wheel (132) and a synchronous belt (133); the driving wheel (131) and the driven wheel (132) are both rotatably arranged on the mounting base (110), and the rotation axes of the two are both perpendicular to the preset direction and the rotation axis of the NA plate (300); the output end of the first motor (120) is fixedly connected with the driving wheel (131); the synchronous belt (133) is wound around the driving wheel (131) and the driven wheel (132); 6. The NA adjusting apparatus according to claim 5, wherein the rotating mechanism (200) is fixedly connected with the synchronous belt (133).

7. The NA adjusting apparatus according to claim 4, wherein The transmission member (130) further comprises a pressing plate (134) fixed to the driving wheel (131) to press the synchronous belt (133) against the driving wheel (131). The mounting base (110) comprises a mounting plate (111) and a first connecting plate (112) connected with each other; the sliding pair (400) is arranged on the mounting plate (111); 8. The NA adjusting apparatus according to claim 1, wherein a containing cavity is formed between the first connecting plate (112) and the mounting plate (111), the stator of the first motor (120) is fixed to the first connecting plate (112), the rotor of the first motor (120) extends into the containing cavity, and the transmission member (130) is at least partially located in the containing cavity. The NA adjusting device further comprises a displacement sensor and an identifier (510), one of the displacement sensor and the identifier (510) is fixed to the rotating mechanism (200), and the other is fixed to the linear displacement mechanism (100).

9. The NA adjusting apparatus according to claim 1, wherein The rotating mechanism (200) comprises a linkage (210), a second connecting plate (220) and a second motor (230), the linkage (210) is connected to the linear displacement mechanism (100) through a sliding pair (400), the second connecting plate (220) is connected with the linkage (210), and the stator of the second motor (230) is fixed to the second connecting plate (220), and the rotor of the second motor (230) is fixedly connected with the NA plate (300).

10. A lithographic machine characterized by, The NA adjusting device according to any one of claims 1-9.

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