Single-wafer detection all-in-one machine for solar silicon wafers

Abstract

The utility model discloses a single-wafer detection all-in-one machine for solar silicon wafers, which comprises a front-section conveying rail, an AOI detection mechanism and an IV detection mechanism, and the AOI detection mechanism is positioned between the front-section conveying rail and the IV detection mechanism; a single-piece conveying rail is arranged on the front-section conveying rail; the AOI detection mechanism comprises a four-station rotary table, a back face AOI detection instrument assembly, a front face AOI detection instrument assembly and an AOI detection conveying rail. And the IV detection mechanism comprises a working platform, an index plate assembly and a detection mechanism. According to the single-wafer detection all-in-one machine for the solar silicon wafer, the single silicon wafer is conveyed, AOI detection and IV detection are carried out in sequence, automatic work is carried out, a probe is accurately connected with a grid line on the single silicon wafer, the detection efficiency is improved, the productivity is improved along with the improvement, and the integrated multifunctional structure meets the requirements of production before and after.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of silicon wafer production, especially to a solar silicon wafer single wafer detection all-in-one machine. BACKGROUND

[0002] The crystalline silicon photovoltaic solar silicon wafer needs to be subjected to AOI detection and IV detection after printing, the Chinese full name of AOI detection is automatic optical detection, which is a device for detecting common defects encountered in printing production based on optical principles; IV detection refers to testing the current-voltage characteristic curve (IV curve) of a photovoltaic module, and only the silicon wafer that passes the detection can enter the next production process equipment. The existing single wafer needs to be matched with multiple devices in the above-mentioned AOI detection and IV detection process, which affects the front and rear connection process of detection and processing, and the production capacity is relatively low. UTILITY MODEL CONTENT

[0003] One purpose of the utility model is to provide a solar silicon wafer single wafer detection all-in-one machine, which detects single wafers, integrates AOI detection and IV detection, saves the process and steps, and improves the detection capacity.

[0004] To achieve this purpose, the utility model adopts the following technical scheme:

[0005] A solar silicon wafer single wafer detection all-in-one machine, comprising a front section conveying rail, an AOI detection mechanism and an IV detection mechanism, the AOI detection mechanism is between the front section conveying rail and the IV detection mechanism;

[0006] A single wafer conveying rail is arranged on the front section conveying rail;

[0007] The AOI detection mechanism comprises a four-station rotary table, a back AOI detection instrument assembly, a front AOI detection instrument assembly and an AOI detection conveying rail, the four-station rotary table is located at the front end of the AOI detection conveying rail, the back AOI detection instrument assembly is located below the front end of the four-station rotary table, and the front AOI detection is installed above the AOI detection conveying rail;

[0008] The IV detection mechanism comprises a workbench, a protractor assembly and a detection mechanism, the protractor assembly is located in the middle of the workbench, the detection mechanism is located in front of the protractor assembly, the detection mechanism comprises a UVW base, an upper probe holder and a lower probe holder, a UVW deviation correction alignment assembly is installed at the lower end of the UVW base, the UVW deviation correction alignment assembly comprises two groups of X-axis modules and a group of Y-axis modules, the upper probe holder and the lower probe holder are respectively movable on the UVW base along the vertical direction, and detection probes are installed on the upper probe holder and the lower probe holder.

[0009] As a preferred technical scheme, the front-stage conveying rail is provided with a temporary storage linear module, and a driving end of the temporary storage linear module is provided with a temporary storage frame.

[0010] As a preferred technical scheme, the front-stage conveying rail is provided with a material supplementing linear module, a driving end of the material supplementing linear module is connected with a material supplementing longitudinal module, the material supplementing longitudinal module moves laterally at the side of the single-piece conveying rail, and a driving end of the material supplementing longitudinal module is connected with a material supplementing frame.

[0011] As a preferred technical scheme, the middle part of the single-piece conveying rail is provided with a clamping plate positioning mechanism, the clamping plate positioning mechanism comprises a clamping plate positioning motor, a clamping plate positioning synchronous belt and a clamping plate positioning rotating wheel, a driving end of the clamping plate positioning motor is connected with a clamping plate positioning wheel, the clamping plate positioning synchronous belt is in transmission connection with the clamping plate positioning wheel, a clamping plate positioning support is installed on the clamping plate positioning synchronous belt, and the clamping plate positioning rotating wheel rotates at the upper end of the clamping plate positioning support.

[0012] As a preferred technical scheme, the front end of the single-piece conveying rail is provided with a blowing and cooling pipe, and the rear end of the single-piece conveying rail is provided with an ion static electricity removing air knife.

[0013] As a preferred technical scheme, the upper part of the four-station rotary table is provided with an AOI rotating shaft, and the periphery of the four-station rotary table is provided with four AOI adsorption modules.

[0014] As a preferred technical scheme, the two sides of the index plate assembly are respectively provided with a front single-piece rail and a rear single-piece rail, and the front single-piece rail and the rear single-piece rail are both used for conveying silicon wafers through rail motors and rail belts.

[0015] As a preferred technical scheme, the two sides of the front single-piece rail and the side edges of the rear single-piece rail are respectively provided with first walking arms and second walking arms, the first walking arms and the second walking arms are both provided with walking linear modules, the driving ends of the walking linear modules are connected with moving plates, and the inner side ends of the moving plates are fixed with negative pressure adsorption plates.

[0016] As a preferred technical scheme, the X-axis module and the Y-axis module each comprise a motor mounting base, a module motor, an adjusting lead screw and an adjusting sliding table, the module motor is fixed on the motor mounting base, a driving end of the module motor is in transmission connection with the adjusting lead screw, the adjusting lead screw is in threaded connection with an adjusting nut of the adjusting sliding table, the adjusting sliding table slides along a length direction of the adjusting lead screw, the adjusting sliding table is provided with a connecting bearing, the connecting bearing slides on the adjusting sliding table, a moving direction of the connecting bearing is perpendicular to a moving direction of the adjusting sliding table, edges of the UVW base are locked in the connecting bearing, and two groups of the X-axis module and one group of the Y-axis module jointly control T-axis steering of the UVW base on one side.

[0017] As a preferred technical scheme, the UVW base is provided with an upper linear module and a lower linear module, the upper linear module controls vertical movement of the upper probe frame, and the lower linear module controls vertical movement of the lower probe frame.

[0018] The solar silicon wafer single wafer detection all-in-one machine is used for conveying single wafers, and sequentially undergoes AOI detection and IV detection, and is automatically operated, so that the probe is accurately connected to the gate line on the single wafer, detection efficiency is improved, production capacity is increased, the integrated multifunctional structure meets the needs of front and rear production. BRIEF DESCRIPTION OF DRAWINGS

[0019] The utility model will be further explained in detail in the basis of drawings and embodiments.

[0020] Figure 1 It is a whole structure schematic diagram of the solar silicon wafer single wafer detection all-in-one machine of the embodiment;

[0021] Figure 2 It is a structure schematic diagram of the front conveying track of the embodiment;

[0022] Figure 3 It is a structure schematic diagram of the air blowing cooling pipe of the embodiment;

[0023] Figure 4 It is a structure schematic diagram of the clamping plate positioning mechanism of the embodiment;

[0024] Figure 5 It is a structure schematic diagram of the ion static electricity removing air knife of the embodiment;

[0025] Figure 6 It is a structure schematic diagram of the AOI detection mechanism of the embodiment;

[0026] Figure 7This is a schematic diagram of the IV detection mechanism described in the embodiment;

[0027] Figure 8 This is a structural schematic diagram of the X-axis module (or Y-axis module) described in the embodiment;

[0028] Figure 9 This is a schematic diagram of the upper probe holder as described in the embodiment;

[0029] Figure 10 This is a schematic diagram of the lower probe holder as described in the embodiment.

[0030] Figures 1 to 10 middle:

[0031] 1. Front conveyor rail; 101. Single-piece conveyor rail; 102. Temporary storage frame; 103. Material replenishment rack; 104. Clamping plate positioning mechanism; 105. Clamping plate positioning motor; 106. Clamping plate positioning support; 107. Clamping plate positioning wheel; 108. Air blowing cooling pipe; 109. Ion antistatic air knife;

[0032] 2. AOI inspection mechanism; 201. Four-station turntable; 202. Rear AOI inspection instrument assembly; 203. Front AOI inspection instrument assembly; 204. AOI inspection conveyor rail; 205. AOI rotating shaft; 206. AOI adsorption module;

[0033] 3. IV testing mechanism; 301. Working platform; 302. Indexing plate assembly; 303. Testing mechanism; 304. UVW base; 305. Upper probe holder; 306. Lower probe holder; 307. X-axis module; 308. Front single-piece track; 309. Rear single-piece track; 310. First traveling arm; 311. Second traveling arm; 312. Moving plate; 313. Motor mounting base; 314. Module motor; 315. Adjusting screw; 316. Adjusting slide; 317. Connecting bearing; 318. Upper linear module; 319. Lower linear module. Detailed Implementation

[0034] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0035] like Figures 1 to 10 As shown in this embodiment, a single-wafer inspection machine for solar silicon wafers includes a front conveyor rail 1, an AOI inspection mechanism 2, and an IV inspection mechanism 3, with the AOI inspection mechanism 2 located between the front conveyor rail 1 and the IV inspection mechanism 3.

[0036] Specifically, the front conveying track 1 is provided with a single wafer conveying track 101; the AOI detection mechanism 2 comprises a four-station turntable 201, a back AOI detection instrument assembly 202, a front AOI detection instrument assembly 203 and an AOI detection conveying track 204, the four-station turntable 201 is located at the front end of the AOI detection conveying track 204, the back AOI detection instrument assembly 202 is located below the front end of the four-station turntable 201, and the front AOI detection instrument assembly 203 is located above the AOI detection conveying track 204; the IV detection mechanism 3 comprises a workbench 301, a protractor assembly 302 and a detection mechanism 303, the protractor assembly 302 is located in the middle of the workbench 301, and the detection mechanism 303 is located in front of the protractor assembly 302; the detection mechanism 303 comprises a UVW base 304, an upper probe frame 305 and a lower probe frame 306, the UVW base 304 is provided with a UVW deviation correction alignment assembly at the lower end, the UVW deviation correction alignment assembly comprises two groups of X-axis modules 307 and a group of Y-axis modules, the upper probe frame 305 and the lower probe frame 306 are respectively movable on the UVW base 304 along the vertical direction, and detection probes are installed on the upper probe frame 305 and the lower probe frame 306.

[0037] After the printed single wafer is taken out from the sintering furnace, the single wafer enters the single wafer conveying track 101, at the end of the single wafer conveying track 101, the AOI detection mechanism 2 takes the single wafer to the back AOI detection instrument assembly 202 through the four-station turntable 201 for back detection, then turns to the AOI detection conveying track 204, and the single wafer is conveyed to the front AOI detection instrument assembly 203 by the AOI detection conveying track 204 for front detection, then the protractor assembly 302 on the IV detection mechanism 3 controls the single wafer to reach the detection mechanism 303, under the joint action of the two groups of X-axis modules 307 and the group of Y-axis modules, the lower probe frame 306 and the upper probe frame 305 on the UVW base 304 are aligned to the position of the single wafer for IV detection.

[0038] The front conveying track 1 is provided with a temporary storage linear module, the driving end of the temporary storage linear module is provided with a temporary storage frame 102, the temporary storage frame 102 moves transversely at the side of the single wafer conveying track 101, the temporary storage frame 102 moves transversely at the side of the front conveying track 1, when one side of the temporary storage linear module is full, the other side starts to be placed, and the full side can be manually unloaded.

[0039] The front section conveying rail 1 is provided with a replenishment linear module, the driving end of the replenishment linear module is connected with a replenishment longitudinal module, the replenishment longitudinal module moves transversely at the side of the single wafer conveying rail 101, the driving end of the replenishment longitudinal module is connected with a replenishment rack 103, the replenishment rack 103 moves up and down along the vertical direction, after the replenishment linear module approaches the front section conveying rail 1, the up and down transverse module above the front section conveying rail 1 controls the up and down suction module to suck up the single wafer on the replenishment rack 103 and place it into the front section conveying rail 1, in order to ensure the height of the uppermost wafer, every time a single wafer is taken, the replenishment longitudinal module controls the replenishment rack 103 to rise by one wafer position, until all the wafers on the replenishment rack 103 are taken away, then the replenishment linear module moves away from the front section conveying rail 1 transversely, and then repeats the above process after the replenishment rack 103 is filled with wafers again.

[0040] The middle part of the single wafer conveying rail 101 is provided with a clamping plate positioning mechanism 104, the clamping plate positioning mechanism 104 includes a clamping plate positioning motor 105, a clamping plate positioning synchronous belt and a clamping plate positioning rotating wheel 107, the driving end of the clamping plate positioning motor 105 is connected with a clamping plate positioning wheel, the clamping plate positioning synchronous belt is in transmission connection with the clamping plate positioning wheel, the clamping plate positioning synchronous belt is installed with a clamping plate positioning support 106, the clamping plate positioning rotating wheel 107 rotates at the upper end of the clamping plate positioning support 106, the clamping plate positioning motor 105 drives the movement of the clamping plate positioning synchronous belt by controlling the rotation of the clamping plate positioning wheel, and then the clamping plate positioning support 106 approaches the middle part of the single wafer conveying rail 101, so as to adjust the position of the single wafer.

[0041] The front end of the single wafer conveying rail 101 is provided with a blowing cooling pipe 108, and the rear end of the single wafer conveying rail 101 is provided with an ion static electricity removing air knife 109, the blowing cooling pipe 108 performs cooling treatment, and the ion static electricity removing air knife 109 is responsible for static electricity removal.

[0042] The upper part of the four-station turntable 201 is provided with an AOI rotating shaft 205, the periphery of the four-station turntable 201 is provided with four AOI suction modules 206, the rotation of the AOI rotating shaft 205 drives the four AOI suction modules 206 to transfer the single wafer counterclockwise.

[0043] The front single wafer track 308 and the rear single wafer track 309 are arranged on two sides of the indexing disc assembly 302 respectively, and the front single wafer track 308 and the rear single wafer track 309 are both used for conveying the silicon wafer through track motor driving track belts; the first walking arm 310 and the second walking arm 311 are arranged on two sides of the front single wafer track 308 and the side of the rear single wafer track 309 respectively; the walking linear module is arranged on the first walking arm 310 and the second walking arm 311; the moving plate 312 is connected to the driving end of the walking linear module; the negative pressure adsorption plate is fixed to the inner side end of the moving plate 312; the front single wafer track 308 is used for moving the single wafer to the indexing disc assembly 302; the first walking arm 310 and the second walking arm 311 are used for controlling the up and down movement of the double half wafers on the indexing disc assembly 302; the negative pressure adsorption plate is used for adsorbing the half wafer; and the rear single wafer track 309 is used for discharging the single wafer from the indexing disc assembly 302.

[0044] The X-axis module 307 and the Y-axis module both include the motor mounting seat 313, the module motor 314, the adjusting screw rod 315 and the adjusting sliding table 316; the module motor 314 is fixed to the motor mounting seat 313; the driving end of the module motor 314 is in transmission connection with the adjusting screw rod 315; the adjusting screw rod 315 is in screw connection with the adjusting nut of the adjusting sliding table 316; the adjusting sliding table 316 slides along the length direction of the adjusting screw rod 315; the connecting bearing 317 is arranged on the adjusting sliding table 316; the connecting bearing 317 slides on the adjusting sliding table 316; the moving direction of the connecting bearing 317 is perpendicular to the moving direction of the adjusting sliding table 316; the edge of the UVW base 304 is locked in the connecting bearing 317; the two groups of X-axis modules 307 and the group of Y-axis modules are used for controlling the T-axis steering of one side of the UVW base 304; in the UVW alignment, the two groups of X-axis modules 307 and the group of Y-axis modules are used for realizing the X-axis translation, the Y-axis translation and the T-axis rotation of the upper probe frame 305 and the lower probe frame 306, and meet the alignment requirements.

[0045] The UVW base 304 is provided with the upper linear module 318 and the lower linear module 319; the upper linear module 318 is used for controlling the vertical movement of the upper probe frame 305; the lower linear module 319 is used for controlling the vertical movement of the lower probe frame 306; the upper linear module 318 makes the upper probe frame 305 move downward and press on the upper surface of the single silicon wafer; and the lower linear module 319 makes the lower probe frame 306 move upward and contact the gate line on the single silicon wafer, so that the circuit is formed and the IV detection can be performed.

[0046] It should be noted that the above specific embodiments only serve as the preferred embodiments of the present application and the applied technical principles, and any changes or replacements easily thought by those skilled in the art within the technical range disclosed by the present application should be covered in the protection range of the present application.

Claims

1. A single-chip detection all-in-one machine for solar silicon wafers, characterized in that, The front section conveying track, the AOI detection mechanism and the IV detection mechanism are included, and the AOI detection mechanism is between the front section conveying track and the IV detection mechanism; A single-piece conveying track is arranged on the front section conveying track; The AOI detection mechanism includes a four-station turntable, a back AOI detection instrument assembly, a front AOI detection instrument assembly and an AOI detection conveying track, the four-station turntable is located at the front end of the AOI detection conveying track, the back AOI detection instrument assembly is located below the front end of the four-station turntable, and the front AOI detection instrument assembly is arranged above the AOI detection conveying track; The IV detection mechanism includes a work platform, a protractor assembly and a detection mechanism, the protractor assembly is located in the middle of the work platform, the detection mechanism is located in front of the protractor assembly, the detection mechanism includes a UVW base, an upper probe rack and a lower probe rack, a UVW deviation correction alignment assembly is arranged at the lower end of the UVW base, the UVW deviation correction alignment assembly includes two groups of X-axis modules and a group of Y-axis modules, the upper probe rack and the lower probe rack are movably arranged on the UVW base along the vertical direction, and detection probes are arranged on the upper probe rack and the lower probe rack.

2. The solar silicon wafer single-piece detection all-in-one machine according to claim 1, characterized in that, A temporary storage linear module is arranged on the front section conveying track, and a temporary storage frame is arranged at the driving end of the temporary storage linear module. 3.The solar silicon wafer single-piece detection all-in-one machine according to claim 1, wherein A material supplementing linear module is arranged on the front section conveying track, a material supplementing longitudinal module is connected to the driving end of the material supplementing linear module, the material supplementing longitudinal module moves transversely on the side of the single-piece conveying track, a material supplementing frame is connected to the driving end of the material supplementing longitudinal module, and the material supplementing frame moves up and down along the vertical direction.

4. The solar silicon wafer single-piece detection all-in-one machine according to claim 1, characterized in that, A clamping plate positioning mechanism is arranged in the middle of the single-piece conveying track, the clamping plate positioning mechanism includes a clamping plate positioning motor, a clamping plate positioning synchronous belt and a clamping plate positioning rotating wheel, a clamping plate positioning wheel is connected to the driving end of the clamping plate positioning motor, the clamping plate positioning synchronous belt is in transmission connection with the clamping plate positioning rotating wheel, a clamping plate positioning support is arranged on the clamping plate positioning synchronous belt, and the clamping plate positioning rotating wheel rotates on the upper end of the clamping plate positioning support.

5. The solar silicon wafer single-piece detection all-in-one machine according to claim 1, characterized in that, A blowing and cooling pipe is arranged at the front end of the single-piece conveying track, and an ion static electricity removing air knife is arranged at the rear end of the single-piece conveying track.

6. The solar silicon wafer single-piece detection all-in-one machine according to claim 1, characterized in that, An AOI rotating shaft is arranged above the four-station turntable, and four AOI adsorption modules are arranged on the periphery of the four-station turntable.

7. The solar silicon wafer single-piece detection all-in-one machine according to claim 1, characterized in that, Front and rear single-piece tracks are arranged on the two sides of the protractor assembly, and the front and rear single-piece tracks are driven by track motors and track belts to convey silicon wafers. 8.The solar silicon wafer single-piece detection all-in-one machine according to claim 7, characterized in that, First and second walking arms are arranged on the two sides of the front single-piece track and the side edges of the rear single-piece track, walking linear modules are arranged on the first and second walking arms, moving plates are connected to the driving ends of the walking linear modules, and negative pressure adsorption plates are fixed to the inner side ends of the moving plates.

9. The solar silicon wafer single-piece detection all-in-one machine according to claim 1, characterized in that, The X-axis module and the Y-axis module each comprise a motor mounting base, a module motor, an adjusting screw rod and an adjusting sliding table, the module motor is fixed on the motor mounting base, the driving end of the module motor is in transmission connection with the adjusting screw rod, the adjusting screw rod is in screw connection with the adjusting nut of the adjusting sliding table, the adjusting sliding table slides along the length direction of the adjusting screw rod, the adjusting sliding table is provided with a connecting bearing, the connecting bearing slides on the adjusting sliding table, the moving direction of the connecting bearing is perpendicular to the moving direction of the adjusting sliding table, the edge of the UVW base is locked in the connecting bearing, two groups of the X-axis module plus one group of the Y-axis module jointly control the T-axis steering of the UVW base on one side.

10. The solar silicon wafer single-piece detection all-in-one machine according to claim 1, characterized in that, The UVW base is provided with an upper linear module and a lower linear module, the upper linear module controls the vertical movement of the upper probe frame, and the lower linear module controls the vertical movement of the lower probe frame.

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