Adsorption carrying platform

Abstract

The utility model provides an adsorption carrying table. The adsorption carrying table comprises a bearing seat; the adsorption assembly is arranged on the bearing seat; the tray is provided with a bearing position for placing a workpiece, and a through hole is formed in the position, corresponding to the bearing position, of the tray; the lifting supporting device is movably arranged on the bearing base in a lifting mode in the first direction, the lifting supporting device ascends to support the tray, the lifting supporting device descends to drive the tray to descend so that the tray can abut against the bearing base, and the adsorption end of the adsorption assembly penetrates through the penetrating hole and adsorbs the workpiece. According to the adsorption carrying table provided by the invention, when the sizes and specifications of the workpieces are different, only the trays of different sizes and specifications need to be replaced, so that the adsorption carrying table can be suitable for the workpieces of different sizes and specifications, the universality of the adsorption carrying table is improved, and the reduction of the equipment cost is facilitated. In addition, the adsorption end of the adsorption assembly penetrates through the penetrating hole and is directly adsorbed to the workpiece, and adsorption is firmer and more reliable.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of wafer processing, and more particularly to an adsorption stage. BACKGROUND

[0002] In the peeling process of a wafer, the wafer needs to be placed on an adsorption stage, and the wafer is adsorbed and fixed by negative pressure. However, due to the multiple size specifications of wafers, the adsorption stage of the related technology cannot be applied to wafers of different size specifications, and the versatility is poor. CONTENT OF THE UTILITY MODEL

[0003] The embodiment of the application provides an adsorption stage which can be compatible with workpieces of different size specifications and improve versatility.

[0004] The technical scheme adopted by the embodiment of the application is as follows: an adsorption stage is provided, comprising:

[0005] a bearing seat;

[0006] an adsorption assembly arranged on the bearing seat;

[0007] a tray, the tray being provided with a bearing position for placing a workpiece, and the tray being provided with a through hole at a position corresponding to the bearing position; and

[0008] a lifting support device movably arranged on the bearing seat along a first direction, the lifting support device being raised to support the tray, and the lifting support device being lowered to drive the tray to be lowered, so that the tray is abutted on the bearing seat, and an adsorption end of the adsorption assembly passes through the through hole and adsorbs the workpiece.

[0009] Further, the bearing seat is provided with a gas passage in communication with an external gas source, the adsorption assembly is arranged in the bearing seat, and an adsorption end of the adsorption assembly is exposed outside the bearing seat, and one end of the adsorption assembly away from the adsorption end is in communication with the adsorption end and the gas passage, respectively.

[0010] Further, the lifting support device comprises:

[0011] a support mechanism; and

[0012] a driving mechanism in transmission connection with one end of the support mechanism, for driving the support mechanism to be movably arranged on the bearing seat along the first direction, and the other end of the support mechanism being used for supporting the tray.

[0013] Further, the driving mechanism comprises:

[0014] a fixing seat arranged on the bearing seat;

[0015] A movable seat is arranged on the fixed seat, and the supporting mechanism is connected with the movable seat;

[0016] A movable shaft is arranged on the movable seat;

[0017] A transmission member is provided with an inclined slot, and one end of the movable shaft extends into the inclined slot; and

[0018] A driving member is used to drive the transmission member to move in a second direction, so that one end of the movable shaft slides in the inclined slot, and the movable seat is lifted or lowered relative to the fixed seat in the first direction;

[0019] The first direction and the second direction are arranged at an angle.

[0020] Further, the inclined slot comprises a first end and a second end, and the first end and the second end are different in distance in the first direction and the second direction, the supporting mechanism comprises a feeding and discharging station and a machining station, when the movable shaft is located at the first end, the supporting mechanism is located at the feeding and discharging station, and when the movable shaft is located at the second end, the supporting mechanism is located at the machining station.

[0021] Further, the driving mechanism further comprises:

[0022] A guide rail is arranged on the fixed seat and extends in the first direction; and

[0023] A sliding block is slidingly installed on the guide rail, and the movable seat is connected with the sliding block.

[0024] Further, the supporting mechanism comprises:

[0025] A base; and

[0026] At least two supporting members are drivingly connected with the base, and the supporting members are arranged on the base and used to support the side end of the tray.

[0027] Further, the bearing position comprises at least two, and each bearing position is provided with the perforation,

[0028] The adsorption assembly comprises at least two, and the adsorption end of one adsorption assembly passes through one perforation.

[0029] Further, the bearing seat is provided with at least two spaced positioning members, and when the tray abuts against the bearing seat, each positioning member abuts against the opposite two side edges of the tray.

[0030] Further, the adsorption loading platform further comprises a seat body and a driving assembly, the driving assembly is in transmission connection with the bearing seat, and is used for driving the bearing seat to be movably arranged on the seat body along the first direction.

[0031] The adsorption loading platform provided by the embodiment of the present application has the beneficial effects that: the adsorption loading platform comprises a bearing seat, an adsorption assembly, a tray and a lifting support device, the tray is provided with a bearing position for placing a workpiece, the tray is provided with a through hole at a position corresponding to the bearing position, and the lifting support device is movably arranged on the bearing seat along a first direction. When the workpiece needs to be fixed, the lifting support device is raised, at this time, the tray with the workpiece placed thereon is placed on the lifting support device and is lowered through the lifting support device, so as to drive the tray to be lowered and make the tray abut against the bearing seat, and the adsorption end of the adsorption assembly passes through the through hole and adsorbs the workpiece, so that the workpiece is fixed. When the size specifications of the workpieces are inconsistent, only the tray with different size specifications needs to be replaced, so that the adsorption loading platform can be applicable to workpieces with different size specifications, the universality of the adsorption loading platform is improved, and the equipment cost is reduced. In addition, the adsorption end of the adsorption assembly passes through the through hole and directly adsorbs the workpiece, and the adsorption is more firm and reliable. BRIEF DESCRIPTION OF DRAWINGS

[0032] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0033] Figure 1 The three-dimensional structure schematic diagram of the adsorption loading platform provided by the embodiment of the present application is shown in the figure.

[0034] Figure 2 The three-dimensional structure schematic diagram of the adsorption loading platform provided by the embodiment of the present application is shown in the figure.

[0035] Figure 3 The three-dimensional structure schematic diagram of the adsorption loading platform provided by the embodiment of the present application is shown in the figure. Figure 2 The three-dimensional structure schematic diagram of the adsorption loading platform provided by the embodiment of the present application is shown in the figure.

[0036] Figure 4 The three-dimensional structure schematic diagram of the lifting support device provided by the embodiment of the present application is shown in the figure.

[0037] Figure 5 The three-dimensional structure schematic diagram of the driving mechanism provided by the embodiment of the present application is shown in the figure.

[0038] Figure 6 The three-dimensional structure schematic diagram of the movable shaft and the transmission part used in the embodiment of the present application is shown in the figure.

[0039] Wherein, the reference signs in the figures:

[0040] 10, bearing seat; 11, gas passage; 12, support seat; 13, bearing table; 20, adsorption assembly; 30, tray; 31, bearing position; 32, perforation; 40, lifting support device; 50, support mechanism; 51, base; 52, support piece; 60, driving mechanism; 61, fixed seat; 62, movable seat; 63, movable shaft; 64, transmission piece; 641, inclined groove; 6411, first end; 6412, second end; 65, driving piece; 66, guide rail; 67, sliding block; 70, positioning piece; 80, seat body. DETAILED DESCRIPTION

[0041] In order to make the technical problems, technical solutions and beneficial effects of the present application clearer, the present application will be further described in detail below in conjunction with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application and not to limit the present application.

[0042] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0043] It should be understood that the terms "length", "width", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the purpose of facilitating the description of the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0044] In addition, the terms "first", "second" are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "multiple" is two or more, unless otherwise specifically limited.

[0045] Please refer to Figure 1 and Figure 2 , the adsorption bearing table provided by the embodiments of the present application will be described. The adsorption bearing table provided by the embodiments of the present application comprises a bearing seat 10, an adsorption assembly 20, a tray 30 and a lifting support device 40. The adsorption assembly 20 is arranged on the bearing seat 10.

[0046] The tray 30 is provided with a bearing position 31 for placing a workpiece, which can be a wafer. The tray 30 is provided with a through hole 32 at a position corresponding to the bearing position 31. Specifically, a groove can be arranged at the bearing position 31 to limit the workpiece and prevent the workpiece from moving.

[0047] The lifting support device 40 is movably arranged on the bearing seat 10 in the first direction. The lifting support device 40 is raised to support the tray 30, and the lifting support device 40 is lowered to drive the tray 30 to descend, so that the tray 30 abuts against the bearing seat 10, and the suction end of the suction assembly 20 passes through the through hole 32 and suctions the workpiece.

[0048] When it is necessary to fix the workpiece, first, the workpiece is placed on the tray 30;

[0049] Then, the lifting support device 40 is raised, and at this time, the tray 30 on which the workpiece is placed can be placed on the lifting support device 40;

[0050] Next, the lifting support device 40 is lowered, thereby driving the tray 30 to descend, so that the tray 30 abuts against the bearing seat 10, and the suction end of the suction assembly 20 passes through the through hole 32 and suctions the workpiece, thereby achieving the fixation of the workpiece.

[0051] When the size specifications of the workpieces are inconsistent, only the tray 30 with different size specifications needs to be replaced, so that the suction table can be applicable to workpieces with different size specifications, the universality of the suction table is improved, and the equipment cost is reduced.

[0052] Please refer to Figure 1 , the “first direction” is defined as the Z-axis direction, and the “second direction” is defined as the X-axis or Y-axis direction.

[0053] Among them, it can be understood that the through hole 32 refers to a hole penetrating through the bottom surface and the top surface of the tray 30.

[0054] The suction table provided by the embodiment of the present application is provided with the through hole 32, so that the suction end of the suction assembly 20 can pass through the through hole 32 and directly suction the workpiece, the suction is more firm and reliable, and the structure is simple.

[0055] Please refer to Figure 2 and Figure 3 The bearing seat 10 can be provided with a gas passage 11 communicating with an external gas source, the suction assembly 20 is installed in the bearing seat 10, the suction end of the suction assembly 20 is exposed outside the bearing seat 10, and the end of the suction assembly 20 away from the suction end is in communication with the suction end and the gas passage 11, respectively. The gas passage 11 is arranged in the bearing seat 10, so that the suction assembly 20 can be supplied with gas.

[0056] Please refer to Figure 3 and Figure 4The lifting support device 40 can include a support mechanism 50 and a driving mechanism 60. The driving mechanism 60 is in transmission connection with one end of the support mechanism 50, and is used to drive the support mechanism 50 to be movably arranged on the bearing seat 10 along a first direction, and the other end of the support mechanism 50 is used to support the tray 30. Through the driving of the driving mechanism 60, the movement of the support mechanism 50 along the first direction is realized, and since the tray 30 is placed on the support mechanism 50, the tray 30 can be driven to move along the first direction.

[0057] Please refer to Figure 5 and Figure 6 The driving mechanism 60 can include a fixed seat 61, a movable seat 62, a movable shaft 63, a transmission member 64, and a driving member 65. The fixed seat 61 is arranged on the bearing seat 10. The movable seat 62 is arranged on the fixed seat 61, and the support mechanism 50 is connected with the movable seat 62. The movable shaft 63 is arranged on the movable seat 62.

[0058] The transmission member 64 is internally provided with an inclined groove 641, and one end of the movable shaft 63 extends into the inclined groove 641.

[0059] The driving member 65 is used to drive the transmission member 64 to move along a second direction, so that one end of the movable shaft 63 slides in the inclined groove 641, and drives the movable seat 62 to move up and down relative to the fixed seat 61 along the first direction. The driving member 65 can be a linear cylinder or a linear motor.

[0060] The first direction and the second direction are arranged at an angle, specifically, the first direction and the second direction can be arranged at 90°.

[0061] When it is needed to realize the lifting of the support mechanism 50, first, the driving member 65 drives the transmission member 64 to move along the second direction. Since the fixed seat 61 is arranged on the bearing seat 10, the movable seat 62 is movably arranged on the fixed seat 61 along the first direction, and the movable shaft 63 is arranged on the movable seat 62, and one end of the movable shaft 63 extends into the inclined groove 641 of the transmission member 64. When the transmission member 64 moves along the second direction, at this time, the movable shaft 63 slides along the inclined groove 641, thereby driving the movable seat 62 to move up and down along the first direction, thereby realizing the lifting movement of the support mechanism 50. Through the cooperation of the transmission member 64 and the movable shaft 63, the driving of the driving member 65 along the second direction can be converted into the lifting of the movable seat 62 along the first direction, and the overall height space can be saved, and the structure is more compact.

[0062] It can be understood that the extension direction of the inclined groove 641 is located between the first direction and the second direction.

[0063] Please refer to Figure 6The inclined groove 641 can include a first end 6411 and a second end 6412, and the first end 6411 and the second end 6412 are different in distance in the first direction and the second direction. The supporting mechanism 50 includes a loading and unloading station and a processing station. When the movable shaft 63 is located at the first end 6411, the supporting mechanism 50 is located at the loading and unloading station, and at this time, the tray 30 can be loaded and unloaded. When the movable shaft 63 is located at the second end 6412, the supporting mechanism 50 is located at the processing station, and at this time, the workpiece on the tray 30 is adsorbed by the adsorption assembly 20, and the workpiece can be processed.

[0064] Please refer to Figure 5 The driving mechanism 60 can further include a guide rail 66 and a sliding block 67. The guide rail 66 is arranged on the fixed seat 61 and extends in the first direction. The sliding block 67 is slidingly installed on the guide rail 66, and the movable seat 62 is connected with the sliding block 67. Through the cooperation of the guide rail 66 and the sliding block 67, the accuracy of the movement of the movable seat 62 can be improved, and deviation can be avoided.

[0065] It can be understood that the driving mechanism 60 is not limited to the above arrangement, for example, the driving mechanism 60 can further include a rotary driving assembly and a gear and rack, the rotary driving assembly is arranged on the carrier seat 10, the gear is connected with the driving end of the rotary driving assembly, the supporting mechanism 50 is connected with the rack, and the gear and the rack are engaged, so as to convert the rotary driving force of the rotary driving assembly into the lifting movement of the supporting mechanism 50 in the first direction.

[0066] Please refer to Figure 4 The supporting mechanism 50 can include a base 51 and at least two supporting members 52. The driving mechanism 60 is drivingly connected with the base 51, and the supporting members 52 are arranged on the base 51 and used for supporting the side ends of the tray 30. Through the supporting members 52, the tray 30 can be supported.

[0067] Please refer to Figure 2 and Figure 3 The carrier positions 31 can include at least two, each of the carrier positions 31 is provided with a through hole 32, and the adsorption assembly 20 can include at least two, and the adsorption end of one adsorption assembly 20 passes through one through hole 32. Thus, the workpieces in the carrier positions 31 can be respectively adsorbed and fixed. Through the arrangement of multiple carrier positions 31, the adsorption and fixation of multiple workpieces can be realized at the same time, and the work efficiency is improved. Specifically, the sizes of the carrier positions 31 of the same tray 30 can be the same or different, so that workpieces of different sizes can be placed.

[0068] Please refer to Figure 2 and Figure 3The positioning members 70 are arranged on the bearing seat 10 in at least two intervals. When the tray 30 is placed on the bearing seat 10, the positioning members 70 are respectively arranged on the opposite sides of the tray 30, so that the tray 30 is limited, the position of the tray 30 is more accurate, and the quality and consistency of the processing are ensured.

[0069] Please refer to Figure 1 The adsorption support platform can further include a seat body 80 and a driving assembly (not shown in the figure). The driving assembly is in transmission connection with the bearing seat 10 and is used for driving the bearing seat 10 to be movably arranged on the seat body 80 along the first direction. The bearing seat 10 is driven by the driving assembly to move relative to the seat body 80 along the first direction, so that the height of the bearing seat 10 along the first direction can be adjusted according to actual needs.

[0070] Please refer to Figure 2 and Figure 3 The bearing seat 10 can include a support seat 12 and a bearing platform 13. The bearing platform 13 is arranged on the support seat 12 in intervals along the first direction, and the adsorption assembly 20 is arranged on the bearing platform 13. The lifting support device 40 is arranged on the support seat 12 and can be movably arranged on the bearing platform 13 along the first direction. When the lifting support device 40 is lifted, the tray 30 can be placed on the lifting support device 40 at this time. When the workpiece on the tray 30 needs to be adsorbed, the lifting support device 40 is lowered, so that the tray 30 is lowered, and the adsorption end of the adsorption assembly 20 passes through the through hole 32 and adsorbs the workpiece.

[0071] The above only describes the preferred embodiments of the present application and is not used to limit the present application. Any modification, equivalent replacement and improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims

1. An adsorption stage, characterized by, The application relates to a supporting platform for a workpiece, which comprises a supporting base, an adsorption assembly arranged on the supporting base, a tray provided with supporting positions for placing workpieces, and a lifting supporting device arranged on the supporting base and capable of lifting and lowering along a first direction. The supporting base is provided with a gas channel connected with an external gas source, the adsorption assembly is arranged in the supporting base, and the adsorption end of the adsorption assembly is exposed outside the supporting base. The lifting supporting device comprises a supporting mechanism and a driving mechanism. The driving mechanism comprises a fixed base arranged on the supporting base, a movable base arranged on the fixed base and connected with the supporting mechanism, a movable shaft arranged on the movable base, a transmission member provided with an inclined slot, and a driving member for driving the transmission member to move along a second direction so that the end of the movable shaft slides in the inclined slot and drives the movable base to lift and lower along the first direction relative to the fixed base. The first direction and the second direction are arranged at an angle.

2. The chuck of claim 1 wherein, The inclined slot comprises a first end and a second end, the first end and the second end are different in distance along the first direction and the second direction, the supporting mechanism comprises a loading and unloading station and a machining station, when the movable shaft is located at the first end, the supporting mechanism is located at the loading and unloading station, and when the movable shaft is located at the second end, the supporting mechanism is located at the machining station.

3. The chuck of claim 1 wherein, The driving mechanism further comprises a guide rail arranged on the fixed base along the first direction and a sliding block slidably arranged on the guide rail and connected with the movable base. The supporting mechanism comprises a base and at least two supporting members arranged on the base and connected with the driving mechanism. The supporting positions comprise at least two, each of the supporting positions is provided with the through hole, 4. The chuck of claim 3 wherein, The adsorption assembly comprises at least two, and the adsorption end of one of the adsorption assemblies passes through one of the through holes. The supporting base is provided with at least two positioning members arranged at intervals, and each of the positioning members is arranged on the opposite side edges of the tray when the tray is arranged on the supporting base. The supporting platform further comprises a base body and a driving assembly connected with the supporting base and arranged on the base body and capable of lifting and lowering along the first direction. ​ ​ ​ ​ 5. The chuck of claim 4 wherein, ​ 6. The chuck of claim 4 wherein, ​ ​ ​ 7. The chuck of claim 3 wherein, ​ ​ ​ 8. The chuck of any of claims 1-7, wherein, ​ ​ 9. The chuck of any of claims 1-7, wherein, ​ 10. The chuck of any of claims 1-7, wherein, ​

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