Drying device for electronic special gas

Abstract

The utility model provides an electronic special gas drying device, which relates to the technical field of electronic special gas treatment and comprises a drying and impurity removing part, a heating part arranged on one side of the drying and impurity removing part and a cooling part arranged on one side of the heating part, one side of the drying and impurity removing part is communicated with a gas inlet pipe, driving motors are arranged at the two ends of the drying and impurity removing part, the output ends of the driving motors are connected with turbulent flow paddles, the turbulent flow paddles are located in the drying and impurity removing part, a drying adsorption coating is arranged on the surface of each turbulent flow paddle, and the turbulent flow paddles rotate to dry and remove impurities of the electronic special gas and control the flowing direction of the electronic special gas; the drying and impurity removing part is used for carrying out preliminary filtration and impurity removal on the electronic special gas; the cooling part is used for cooling and centrifuging the electronic special gas; through the arrangement of the drying and impurity removing part, the heating part and the cooling part, the electronic special gas is deeply dried, and the drying efficiency and the drying quality of the electronic special gas are remarkably improved.

Description

Technical Field

[0001] This utility model relates to the field of electronic special gas processing technology, and in particular to a drying device for electronic special gases. Background Technology

[0002] Electronic specialty gases, also known as electronic special gases, refer to gases with specific uses in the production of semiconductors and other electronic products. These gases play a crucial role in high-tech fields such as chip manufacturing, LCD panel manufacturing, and solar cell manufacturing. The purity, dryness, and quality of electronic specialty gases have an extremely important impact on the performance, yield, and reliability of electronic products.

[0003] Traditional electronic specialty gas drying devices use simple adsorbents to remove moisture, but the adsorbents have limited adsorption capacity, low drying efficiency, and require frequent replacement, increasing costs and operational complexity, and failing to meet the stringent requirements of electronic specialty gases for ultra-low moisture content. Utility Model Content

[0004] The purpose of this invention is to provide a drying device for electronic special gases, thereby solving the technical problems existing in the prior art.

[0005] To achieve the aforementioned objectives, the technical solution adopted by this utility model is as follows:

[0006] A drying device for electronic specialty gases includes: a drying and impurity removal component, a heating component disposed on one side of the drying and impurity removal component, and a cooling component disposed on one side of the heating component; one side of the drying and impurity removal component is connected to an air inlet pipe, and both ends of the component are equipped with drive motors. The output end of the drive motors is connected to a turbulence propeller, which is located inside the drying and impurity removal component and has a drying adsorption coating on its surface. The turbulence propeller dries and removes impurities from the electronic specialty gases by rotation and controls their flow direction; the drying and impurity removal component is used for preliminary filtration and impurity removal of the electronic specialty gases; the cooling component is used for cooling and centrifugal treatment of the electronic specialty gases.

[0007] Furthermore, one side of the heating component is connected to the drying and impurity removal component through a first air pipe, and a one-way valve is provided inside the first air pipe; a heating furnace is provided on the top of the heating component, and the output end of the heating furnace is connected to a heating water pipe, which is distributed in a meandering manner inside the heating component.

[0008] Furthermore, one side of the cooling component is connected to the heating component via a second air pipe, and an air pump is provided on the second air pipe; the other side of the cooling component is provided with an air outlet pipe, and a solenoid valve is provided on the air outlet pipe; fans are provided on both sides of the inner wall of the cooling component, and a turbulence fan is provided on the opposite side of the fans; during operation, the rotation of the fans and the turbulence fan drives the electronic special gas inside the cooling component to rotate at high speed.

[0009] Furthermore, both the heating component and the cooling component are provided with a water storage component at their bottom, and the water storage component is provided with a drain pipe at its bottom, and the drain pipe is provided with a valve.

[0010] Furthermore, the heating furnace is connected to the heating component via a fixed bracket, which is used to fix the heating furnace and the heating water pipe.

[0011] Furthermore, the heating component has guide plates on both sides of its inner wall, and the guide plates have a preset tilt angle.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] The present invention incorporates a drying and impurity removal component, a turbulence impurity remover, and a drying adsorption coating to perform preliminary filtration and impurity removal on electronic specialty gases. Furthermore, the inclusion of heating and cooling components enables deep drying of the electronic specialty gases, significantly improving drying efficiency and quality, and resulting in good economic benefits. Attached Figure Description

[0014] Figure 1 This is the front view of the present invention;

[0015] Figure 2 This is a schematic diagram of the internal structure of the heating component of this utility model;

[0016] In the diagram: 1. Drying and impurity removal component; 2. Heating component; 3. Water storage component; 4. Cooling component; 5. Heating furnace; 6. Guide plate; 7. Fixed bracket; 8. Heating water pipe; 9. First air pipe; 10. One-way valve; 11. Drain pipe; 12. Valve; 13. Fan; 14. Turbulence fan; 15. Air outlet pipe; 16. Air inlet pipe; 17. Pressure monitor; 18. Drive motor; 19. Turbulence propeller; 20. Drying and adsorption coating; 21. Air pump; 22. Second air pipe. Detailed Implementation

[0017] To make the content of this utility model easier to understand, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of this utility model. Identical components are represented by the same reference numerals. It should be noted that the terms "front," "rear," "left," "right," "up," and "down" used in the following description refer to directions in the accompanying drawings, while the terms "inner" and "outer" refer to directions toward or away from the geometric center of a specific component, respectively.

[0018] like Figure 1-2As shown, this embodiment provides a drying device for electronic specialty gases, including: a drying and impurity removal component 1, a heating component 2 disposed on one side of the drying and impurity removal component 1, and a cooling component 4 disposed on one side of the heating component 2; one side of the drying and impurity removal component 1 is connected to an air inlet pipe 16, and a pressure monitoring instrument 17 is provided on the air inlet pipe 16. The pressure monitoring instrument 17 is used to monitor the air pressure inside the device. Drive motors 18 are provided at both ends of the drying and impurity removal component 1, and the output end of the drive motor 18 is connected to a baffle 19. The working dimension of the baffle 19 is adapted to the working dimension of the inner wall diameter of the drying and impurity removal component 1. The baffle 19 is located on the drying... The impurity removal component 1 has a drying and adsorption coating 20 on its surface. The drying and adsorption coating 20 is a zeolite molecular sieve or activated alumina. The zeolite molecular sieve has a uniform microporous structure and can adsorb moisture and other impurities in the electronic special gas according to the molecular size. The turbulence propeller 19 dries and removes impurities from the electronic special gas by rotating and controls its flow direction. The turbulence propeller 19 is driven to rotate by the drive motor 18, and the turbulence propeller 19 drives the electronic special gas inside the drying and impurity removal component 1 to flow towards the first gas pipe 9. The drying and impurity removal component 1 is used to perform preliminary filtration and impurity removal of the electronic special gas. The cooling component 4 is used to cool and centrifuge the electronic special gas.

[0019] Furthermore, both the heating component 2 and the cooling component 4 are provided with a water storage component 3 at their bottom, and the water storage component 3 is provided with a drain pipe 11 at its bottom, and a valve 12 is provided on the drain pipe 11.

[0020] Furthermore, one side of the heating component 2 is connected to the drying and impurity removal component 1 via a first air pipe 9, and a one-way valve 10 is provided inside the first air pipe 9; the top of the heating component 2 is fixedly connected to the heating furnace 5 via a fixed bracket 7; the output end of the heating furnace 5 is connected to a heating water pipe 8, which is distributed in a meandering manner inside the heating component 2; the fixed bracket 7 is used to fix the heating furnace 5 and the heating water pipe 8; guide plates 6 are provided on both sides of the inner wall of the heating component 2, and the guide plates 6 have a preset tilt angle; during operation, the heating furnace 5 inputs hot water into the heating water pipe 8 to heat the electronic special gas inside the heating component 2. The electronic special gas disrupts the equilibrium state between the liquid water inside by heating, and the evaporated water flows into the water storage component 3 through the guide plates 6 set on both sides.

[0021] Furthermore, one side of the cooling component 4 is connected to the heating component 2 via a second air pipe 22, and an air pump 21 is provided on the second air pipe 22; the other side of the cooling component 4 is provided with an air outlet pipe 15, and an electromagnetic valve is provided on the air outlet pipe 15; fans 13 are provided on both sides of the inner wall of the cooling component 4, and a turbulence fan 14 is provided on the opposite side of the fans 13; during operation, the rotation of the fans 13 and the turbulence fan 14 drives the electronic special gas inside the cooling component 4 to rotate at high speed; during operation, the fans 13 and the turbulence fan 14 are started at the same time, so that the temperature of the electronic special gas drops rapidly, causing the water vapor in the gas to condense into liquid water, and the centrifugal force generated by the high-speed rotation causes the heavier liquid water to be thrown to the inner walls on both sides of the cooling component 4, and the water is discharged through the water storage component 3 provided at the bottom.

[0022] Working principle: During use, the electronic special gas is introduced into the drying and impurity removal component 1 through the air inlet pipe 16 for preliminary filtration and impurity removal. Then, the electronic special gas enters the heating component 2 through the first air pipe 9, where the moisture inside the electronic special gas is evaporated by heating. After that, the electronic special gas enters the cooling component 4 through the second air pipe 22, where it is centrifuged by low-temperature cooling and high-speed centrifugation. Finally, the dried electronic special gas is discharged from the device through the air outlet pipe 15.

[0023] The above description is only a preferred embodiment of this utility model patent and is not intended to limit this utility model patent. Any modifications, equivalent substitutions and improvements made within the spirit and principles of this utility model patent should be included within the protection scope of this utility model patent.

Claims

1. A drying apparatus for electronic special gases, characterized in that: include: The drying and impurity removal component (1), the heating component (2) disposed on one side of the drying and impurity removal component (1), and the cooling component (4) disposed on one side of the heating component (2); the drying and impurity removal component (1) is connected to the air inlet pipe (16) on one side, and is equipped with a drive motor (18) at both ends. The output end of the drive motor (18) is connected to the turbulence propeller (19). The turbulence propeller (19) is located inside the drying and impurity removal component (1) and is provided with a drying adsorption coating (20) on its surface. It dries and removes impurities from the electronic special gas by rotating and controls its flow direction; the drying and impurity removal component (1) is used to perform preliminary filtration and impurity removal on the electronic special gas; the cooling component (4) is used to cool and centrifuge the electronic special gas.

2. The drying apparatus for electronic special gases according to claim 1, characterized in that: The heating component (2) is connected to the drying and impurity removal component (1) on one side through the first air pipe (9), and the first air pipe (9) is provided with a one-way valve (10); the heating component (2) is provided with a heating furnace (5) on the top, and the output end of the heating furnace (5) is connected to a heating water pipe (8), which is distributed in a meandering manner inside the heating component (2).

3. The drying apparatus for electronic special gases according to claim 2, characterized in that: The cooling component (4) is connected to the heating component (2) on one side via a second air pipe (22), and an air pump (21) is provided on the second air pipe (22); the cooling component (4) is provided with an air outlet pipe (15) on the other side, and an electromagnetic valve is provided on the air outlet pipe (15); fans (13) are provided on both sides of the inner wall of the cooling component (4), and a turbulence fan (14) is provided on the opposite side of the fans (13); during operation, the rotation of the fans (13) and the turbulence fan (14) drives the electronic special gas inside the cooling component (4) to rotate at high speed.

4. The drying apparatus for electronic special gases according to claim 3, characterized in that: Both the heating component (2) and the cooling component (4) are provided with a water storage component (3) at the bottom. The water storage component (3) is provided with a drain pipe (11) at the bottom. The drain pipe (11) is provided with a valve (12).

5. The drying apparatus for electronic special gases according to claim 2, characterized in that: The heating furnace (5) is connected to the heating component (2) via a fixed bracket (7), which is used to fix the heating furnace (5) and the heating water pipe (8).

6. The drying apparatus for electronic special gases according to claim 2, characterized in that: The heating component (2) has guide plates (6) on both sides of its inner wall, and the guide plates (6) have a preset tilt angle.

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