Anti-damage silicon wafer fixing clamp

Abstract

The utility model relates to an anti-damage silicon wafer fixing clamp, which belongs to the technical field of silicon wafers and comprises a base provided with a fixing structure. An auxiliary structure is arranged on the outer wall of the base; the fixing structure comprises a connector communicated to the bottom wall of the base, the inner wall of the connector is communicated with a communicating pipe, a vacuum pump is arranged at the bottom of the base, the suction end of the vacuum pump is communicated with the end, away from the connector, of the communicating pipe, and an air outlet is formed in the top wall of the base. By arranging fixing and auxiliary structures, a silicon wafer is placed on the top wall of a base, a threaded rod is screwed to drive a rubber pad to push the silicon wafer to a proper position, then the threaded rod is screwed reversely to restore, finally a vacuum pump is started, and the vacuum pump fixes the silicon wafer on the top wall of the base through an air outlet formed in the base. The reasons of improper clamping force or shape mismatching are effectively avoided, and then scratches or indentations on the surface of the silicon wafer are effectively avoided.

Description

Technical Field

[0001] This utility model relates to the field of silicon wafer technology, and specifically to a silicon wafer fixing clamp that prevents damage. Background Technology

[0002] Silicon wafers, also known as silicon crystals, are substrate materials for semiconductor devices. They are made by purifying silicon, melting high-purity polycrystalline silicon to pull out single-crystal silicon rods, and then going through processes such as rolling, cutting, grinding, polishing, and cleaning. In the semiconductor manufacturing and processing process, the fixing fixtures for silicon wafers play a crucial role.

[0003] However, if the clamps used are not chosen properly, such as being too tight or too narrow, excessive pressure may be applied to the silicon wafer. Furthermore, if the clamps, fixtures, or other fasteners have improper clamping force or mismatched shapes, scratches or indentations may appear on the surface of the silicon wafer.

[0004] To address the aforementioned issues, this application proposes a damage-resistant silicon wafer fixing clamp. Utility Model Content

[0005] This utility model addresses the technical problems existing in the prior art by providing a silicon wafer fixing clamp that prevents damage.

[0006] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: a damage-proof silicon wafer fixing clamp, including a base, on which a fixing structure is provided;

[0007] The outer wall of the base is provided with an auxiliary structure;

[0008] The fixed structure includes a connector connected to the bottom wall of the base, the inner wall of the connector being connected to a connecting pipe, a vacuum pump being installed at the bottom of the base, the suction end of the vacuum pump being connected to the end of the connecting pipe away from the connector, and an air outlet being opened on the top wall of the base, the air outlet being connected to the inner wall of the connector.

[0009] The base has a support column installed on its bottom wall, a base is installed on the bottom wall of the support column, a balance block is installed on the outer wall of the base, and the inner wall of the balance block is fixedly connected to the outer wall of the vacuum pump. The balance block is used to support the vacuum pump.

[0010] The auxiliary structure includes a fixing block installed on the outer wall of the base. The fixing block has a strip groove, and a connecting block is installed on the strip groove. The inner wall of the connecting block is threaded with a threaded rod, and the outer wall of the threaded rod is rotatably connected with an abutment block. By setting the threaded rod, it is convenient for personnel to move the silicon wafer to a suitable position.

[0011] The outer wall of the abutment block and the fixed block are connected by a strip groove. The bottom wall of the abutment block and the top wall of the base are on the same horizontal plane. By setting the abutment block and the fixed block to slide together, the stability of the abutment block when moving is effectively improved.

[0012] A rubber pad is installed on the side of the abutment block away from the threaded rod. The outer wall of the rubber pad is slidably connected to the strip groove opened on the fixing block. By setting the rubber pad, the protection effect on the silicon wafer is effectively improved.

[0013] A spring is installed on one side of the abutment block adjacent to the threaded rod. The side of the spring away from the abutment block is fixedly connected to the outer wall of the connecting block. By setting the spring, the stability of the abutment block when it moves is further improved.

[0014] The beneficial effects of this utility model are:

[0015] By setting up a fixing and auxiliary structure, the silicon wafer is placed on the top wall of the base. After turning the threaded rod to drive the rubber pad to push the silicon wafer to the appropriate position, the threaded rod is turned in the opposite direction to restore it. Finally, the vacuum pump is started. The vacuum pump fixes the silicon wafer to the top wall of the base through the air outlet opened in the base, which effectively avoids scratches or indentations on the surface of the silicon wafer due to improper clamping force or shape mismatch. Attached Figure Description

[0016] Figure 1 This is a schematic diagram illustrating the overall structure of this utility model;

[0017] Figure 2 This is a top view schematic diagram of the base structure of this utility model;

[0018] Figure 3 This utility model is a schematic diagram illustrating the structure of the spring and the abutment block;

[0019] Figure 4 This utility model is shown in the schematic diagram of the connector and balance block structure.

[0020] The attached diagram lists the components represented by each number as follows:

[0021] 1. Base;

[0022] 2. Fixed structure; 201. Vacuum pump; 202. Connecting pipe; 203. Connector; 204. Air outlet; 205. Support column; 206. Base; 207. Balance weight;

[0023] 3. Auxiliary structure; 301. Fixing block; 302. Strip groove; 303. Connecting block; 304. Threaded rod; 305. Abutment block; 306. Rubber pad; 307. Spring. Detailed Implementation

[0024] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0025] In the description of this application, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0026] In the description of this application, the term "for example" is used to mean "used as an example, illustration, or description." Any embodiment described as "for example" in this application is not necessarily to be construed as being more preferred or advantageous than other embodiments. The following description is provided to enable any person skilled in the art to implement and use the present invention. Details are set forth in the following description for purposes of explanation. It should be understood that those skilled in the art will recognize that the present invention can be implemented without using these specific details. In other instances, well-known structures and processes will not be described in detail to avoid obscuring the description of the present invention with unnecessary detail. Therefore, the present invention is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed in this application.

[0027] Reference Figure 1-4 A silicon wafer fixing fixture for preventing damage includes a base 1, a fixing structure 2 on the base 1, and a connector 203 connected to the bottom wall of the base 1. The interior of the base 1 is hollow, and a connecting pipe 202 is connected to the inner wall of the connector 203. A vacuum pump 201 is provided at the bottom of the base 1. The suction end of the vacuum pump 201 is connected to the end of the connecting pipe 202 away from the connector 203. When the vacuum pump 201 is started, the vacuum pump 201 produces a vacuum suction effect on the base 1 through the connecting pipe 202 and the connector 203.

[0028] The top wall of the base 1 has an air outlet 204. The air outlet 204 of the base 1 is connected to the inner wall of the connector 203. Multiple air outlets 204 are distributed around the base 1. The silicon wafer is placed on the top wall of the base 1, and then the vacuum pump 201 is started to suck up the silicon wafer through the air outlet 204 of the base 1 to achieve the effect of fixing the silicon wafer.

[0029] Support columns 205 are installed on the bottom wall of the base 1. The three support columns 205 are equidistantly distributed around the circumference of the base 1. A base 206 is installed on the bottom wall of the support column 205. A balance block 207 is installed on the outer wall of the base 206. The inner wall of the balance block 207 is fixedly connected to the outer wall of the vacuum pump 201. The vacuum pump 201 is fixed in a certain way by the balance block 207.

[0030] Reference Figure 1-3 An auxiliary structure 3 is provided on the outer wall of the base 1. The auxiliary structure 3 includes a fixing block 301 installed on the outer wall of the base 1. The fixing block 301 has a strip groove 302. There are four fixing blocks 301, which are distributed at equal intervals around the circumference of the base 1. A connecting block 303 is installed on the strip groove 302 of the fixing block 301. Each fixing block 301 has a connecting block 303. The connecting block 303 is located away from the base 1. The inner wall of the connecting block 303 is threadedly connected to a threaded rod 304. Each connecting block 303 has a threaded rod 304. The outer wall of the threaded rod 304 is rotatably connected to an abutment block 305. Each threaded rod 304 has an abutment block 305. Tightening the threaded rod 304 causes the abutment block 305 to move toward the base 1.

[0031] The outer wall of the abutment block 305 is slidably connected to the fixed block 301 through a strip groove 302. The bottom wall of the abutment block 305 is at the same level as the top wall of the base 1. As the abutment block 305 moves, the silicon wafer is pushed to the appropriate position. A rubber pad 306 is installed on the side of the abutment block 305 away from the threaded rod 304. Each abutment block 305 has a rubber pad 306. The outer wall of the rubber pad 306 is slidably connected to the strip groove 302 of the fixed block 301. The rubber pad 306 effectively avoids wear caused by the abutment block 305 to the silicon wafer.

[0032] A spring 307 is installed on one side of the abutment block 305 adjacent to the threaded rod 304. Each abutment block 305 has a spring 307. The side of the spring 307 away from the abutment block 305 is fixedly connected to the outer wall of the connecting block 303. The spring 307, through its extension and contraction effect, plays a stabilizing role when the abutment block 305 moves.

[0033] Working principle:

[0034] This anti-damage silicon wafer fixing clamp places the silicon wafer on the top wall of the base 1. Then, by turning the threaded rod 304, the abutment block 305 and rubber pad 306 are moved to the outer wall of the silicon wafer. After the silicon wafer is pushed to the appropriate position by the rubber pad 306, the threaded rod 304 is turned back to its original position. Finally, the vacuum pump 201 is started. The vacuum pump 201 fixes the silicon wafer to the top wall of the base 1 through the connecting pipe 202, the connector 203, and the air outlet 204 opened in the base 1. This effectively avoids scratches or indentations on the surface of the silicon wafer due to improper clamping force or shape mismatch.

[0035] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0036] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A damage-resistant silicon wafer fixing clamp, comprising a base (1), characterized in that, A fixing structure (2) is provided on the base (1); The outer wall of the base (1) is provided with an auxiliary structure (3); The fixed structure (2) includes a connector (203) connected to the bottom wall of the base (1). The inner wall of the connector (203) is connected to a connecting pipe (202). A vacuum pump (201) is provided at the bottom of the base (1). The suction end of the vacuum pump (201) is connected to the end of the connecting pipe (202) away from the connector (203). An air outlet (204) is provided on the top wall of the base (1). The air outlet (204) of the base (1) is connected to the inner wall of the connector (203).

2. The anti-damage silicon wafer fixing clamp according to claim 1, characterized in that, The base (1) has a support column (205) installed on its bottom wall, a base (206) installed on the bottom wall of the support column (205), a balance block (207) installed on the outer wall of the base (206), and the inner wall of the balance block (207) is fixedly connected to the outer wall of the vacuum pump (201).

3. The anti-damage silicon wafer fixing clamp according to claim 1, characterized in that, The auxiliary structure (3) includes a fixing block (301) installed on the outer wall of the base (1). The fixing block (301) has a strip groove (302). A connecting block (303) is installed on the strip groove (302) of the fixing block (301). A threaded rod (304) is threadedly connected to the inner wall of the connecting block (303). An abutment block (305) is rotatably connected to the outer wall of the threaded rod (304).

4. The anti-damage silicon wafer fixing fixture according to claim 3, characterized in that, The outer wall of the abutment block (305) is slidably connected to the fixing block (301) by a strip groove (302), and the bottom wall of the abutment block (305) and the top wall of the base (1) are on the same horizontal plane.

5. The anti-damage silicon wafer fixing fixture according to claim 3, characterized in that, A rubber pad (306) is installed on the side of the abutment block (305) away from the threaded rod (304), and the outer wall of the rubber pad (306) is slidably connected to the strip groove (302) opened in the fixing block (301).

6. The anti-damage silicon wafer fixing clamp according to claim 3, characterized in that, A spring (307) is installed on one side of the abutment block (305) adjacent to the threaded rod (304), and the side of the spring (307) away from the abutment block (305) is fixedly connected to the outer wall of the connecting block (303).

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