Gas shunting device

Abstract

The utility model discloses a gas shunting device which is arranged at the tail end of a gas inlet pipe of a vapor deposition furnace and comprises a mounting ring, a gas inlet disc is fixedly arranged at one end of the mounting ring, and a plurality of coaxial flow guide gas hoods are fixedly arranged on one end face, far away from the mounting ring, of the gas inlet disc; a plurality of annularly distributed vent holes are formed between every two adjacent flow guide gas hoods on the gas inlet disc, a ventilation middle hole is formed in the position, corresponding to the flow guide gas hood on the innermost side, of the gas inlet disc, and the vent holes and the ventilation middle hole are used for conveying gas to the space between the multiple flow guide gas hoods and conducting layered dispersion in the circumferential direction. According to the gas shunting device, gas is uniformly dispersed to each direction of the furnace chamber in a layered manner in the circumferential direction, so that the uniformity of a product is improved, and the quality of the product is improved.

Description

Technical Field

[0001] This utility model relates to the field of gas diversion technology, and in particular to a gas diversion device. Background Technology

[0002] In the production of PBN products, chemical vapor deposition (CVD) technology is used. Boron trichloride (BCl3), ammonia (NH3), and carrier gas (N2) are mixed at controlled flow rates and proportions and then fed into a high-temperature reactor. The reaction temperature in the high-temperature furnace ranges from 1600 to 2000°C, and a certain reaction pressure is controlled. The reaction time is controlled according to the required thickness. The gases react to form PBN, which covers the substrate. After the substrate is removed from the furnace, the PBN product, such as a crucible or plate, is obtained. Graphite is generally chosen as the substrate and is processed into different shapes as needed.

[0003] During the gasification process, due to the large amount of boron trichloride, it is difficult to mix evenly with ammonia. After entering the deposition chamber from the gas pipe, the gas exhibits a distribution that is thicker in the middle and thinner at the edges. Therefore, the gas dispersion is poor throughout the furnace, resulting in poor product uniformity. Thus, it is necessary to mix and distribute the gas evenly in all directions within the furnace chamber during the reaction process. This application proposes a gas diversion device, installed at the end of the gas inlet pipe of a vapor deposition furnace, to evenly distribute the gas in all directions within the furnace chamber, thereby improving product quality. Utility Model Content

[0004] In view of the above-mentioned defects or deficiencies in the prior art, it is desirable to provide a gas diversion device.

[0005] This utility model provides a gas diversion device, which is installed at the end of the gas inlet pipe of a vapor deposition furnace. It includes a mounting ring, an inlet plate fixedly mounted at one end of the mounting ring, and multiple coaxial guide gas hoods fixedly mounted on the end face of the inlet plate away from the mounting ring. The inlet plate has a number of vent holes arranged in a ring shape between every two adjacent guide gas hoods, and a central vent hole is provided on the inlet plate corresponding to the innermost guide gas hood. The vent holes and the central vent hole are used to transport gas between the multiple guide gas hoods and disperse it in a circumferential direction in a hierarchical manner.

[0006] Furthermore, the air guide shroud is coaxially arranged with the air intake disc.

[0007] Furthermore, the air guide shroud is cone-shaped, and the small-diameter end of the air guide shroud is fixedly mounted on the air intake plate.

[0008] Furthermore, the height of the plurality of air guide hoods increases sequentially from the outside to the inside.

[0009] Furthermore, the size of the ventilation hole and the vent diameter can be adjusted according to the actual situation.

[0010] Furthermore, the mounting ring, air intake plate, and air guide shroud are all made of graphite material.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] This utility model discloses a gas diversion device, which is installed at the end of the gas inlet pipe of a vapor deposition furnace. Through the setting of a central vent, annularly distributed vent holes, and a coaxial guide hood, the gas introduced into the deposition chamber is uniformly dispersed in layers in a circumferential direction. This avoids the drawbacks of gas accumulation in the middle and thinning at the edges that occur in previous gas inlet methods. It is used to improve the uniformity of the thickness of PBN plates, PBN crucibles, and other products, thereby improving product quality.

[0013] It should be understood that the content described in the utility model description section is not intended to limit the key or important features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model.

[0014] Other features of this invention will become readily apparent from the following description. Attached Figure Description

[0015] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0016] Figure 1 A schematic diagram of the structure of a gas diversion device provided in an embodiment of this utility model;

[0017] Figure 2 A top view of the gas diversion device;

[0018] Figure 3 This is a schematic diagram of the cross-section of a gas diversion device.

[0019] The following are labeled in the diagram: 1. Mounting ring; 2. Air inlet plate; 3. Air guide shroud; 4. Vent hole; 5. Vent center hole. Detailed Implementation

[0020] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the relevant invention and not intended to limit it. Furthermore, it should be noted that, for ease of description, only the parts relevant to the invention are shown in the accompanying drawings.

[0021] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0022] During the CVD process, the uniformity of the thickness of PBN products is affected by the airflow direction. Therefore, the gas fed into the high-temperature reactor should be dispersed as uniformly as possible to improve the quality of the product.

[0023] Please refer to Figures 1-3 The present invention provides a gas splitting device, which is installed at the end of the gas inlet pipe of a vapor deposition furnace. The device includes a mounting ring 1, which is used to connect to the end of the gas inlet pipe, thereby achieving the purpose of installing the entire device at the end of the gas inlet pipe and dispersing the gas entering the deposition furnace uniformly. The installation method can be a threaded connection, bolt connection or other fixing method.

[0024] An air intake plate 2 is fixedly installed at one end of the mounting ring 1. Multiple coaxial air guide hoods 3 are fixedly installed on the end face of the air intake plate 2 away from the mounting ring 1. The multiple air guide hoods 3 are nested in layers to disperse the gas in a layered manner along the circumferential direction. The air guide hoods 3 are coaxially arranged with the air intake plate 2.

[0025] In a preferred embodiment, the air guide shroud 3 is cone-shaped, and the small-diameter end of the air guide shroud 3 is fixedly mounted on the air inlet plate 2. The cone-shaped air guide shroud 3 can disperse the gas in an expanded manner.

[0026] Among them, the height of multiple air guide hoods 3 increases sequentially from the outside to the inside.

[0027] The air intake plate 2 has several vent holes 4 arranged in a ring shape between every two adjacent air guide hoods 3. The air intake plate 2 has a central vent hole 5 corresponding to the innermost air guide hood 3. The vent holes 4 and the central vent hole 5 are used to transport gas between multiple air guide hoods 3 and then disperse it in a circumferential manner.

[0028] In a preferred embodiment, the diameter of the ventilation hole 5 and the ventilation hole 4 is adjusted according to the actual situation; in addition, the spacing between two adjacent air guide covers 3 is also adjusted according to the actual situation.

[0029] In a preferred embodiment, the mounting ring 1, the air intake plate 2, and the air guide shroud 3 are all made of graphite material.

[0030] The working principle of this utility model:

[0031] Install the mounting ring 1 at the end of the inlet pipe, and introduce gas into the inlet pipe. The gas enters the gas splitting device through the inlet pipe and is then evenly dispersed onto the substrate in the deposition furnace. The gas reacts to generate PBN, which covers the substrate.

[0032] Specifically, the gas enters the corresponding guide gas hood 3 through the vent 4 and the vent hole 5, and then the gas is evenly dispersed in a layered manner in the circumferential direction to all directions of the furnace cavity, thereby improving the uniformity of the product and improving the quality of the product.

[0033] In the description of this specification, the terms "connection," "installation," and "fixing," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0034] In the description of this specification, the terms "one embodiment," "some embodiments," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0035] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A gas splitting device, installed at the end of the gas inlet pipe of a vapor deposition furnace, characterized in that, The device includes a mounting ring, one end of which is fixedly provided with an air inlet plate. On the end face of the air inlet plate away from the mounting ring, multiple coaxial air guide hoods are fixedly provided. The air inlet plate has several vent holes arranged in a ring shape between every two adjacent air guide hoods. The air inlet plate has a central vent hole corresponding to the innermost air guide hood. The vent holes and the central vent hole are used to deliver gas between the multiple air guide hoods and disperse it in a circumferential manner.

2. The gas diversion device according to claim 1, characterized in that, The air guide shroud is coaxially arranged with the air intake plate.

3. The gas diversion device according to claim 1, characterized in that, The air guide shroud is cone-shaped, and the small-diameter end of the air guide shroud is fixedly mounted on the air intake plate.

4. The gas diversion device according to claim 1, characterized in that, The height of the multiple air guide hoods increases sequentially from the outside to the inside.

5. The gas splitting device according to claim 1, characterized in that, The size of the ventilation hole and the diameter of the ventilation opening are adjusted according to the actual situation.

6. The gas diversion device according to claim 1, characterized in that, The mounting ring, air intake plate, and air guide cover are all made of graphite material.

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