Silicon spraying monitoring device for single crystal furnace

Abstract

The utility model provides a silicon spraying monitoring device for a single crystal furnace, and aims to solve the technical problem that abnormal accidents are expanded due to the fact that silicon spraying is not found in time in the operation process of the existing single crystal furnace. The device comprises a furnace body; the flow guide structure is arranged in the furnace body; the brightness monitoring module is arranged at the lower part of the flow guide structure; wherein the output end of the brightness monitoring module is electrically connected with the input end of the control system, and the control system receives communication data of the brightness monitoring module and judges whether silicon is sprayed or not. According to the utility model, the operation process can be monitored in real time, once improper operation or equipment abnormity is found, measures can be taken immediately, accidents are prevented from expanding, the equipment can automatically judge silicon spraying after silicon spraying, and the system can automatically carry out the most effective operation after silicon spraying, so that the problem that crystal pulling personnel operate on a coil base, and the working efficiency is high is solved. And personal safety loss caused by explosion after silicon spraying is prevented.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon production technology, and in particular to a monocrystalline furnace silicon spray monitoring device. Background Technology

[0002] In the monocrystalline silicon production industry, with increasing market competition and continuous advancements in production technology, factories are constantly expanding their production capacity to meet global market demand. During this process, furnaces are becoming larger, and the amount of material fed at one time is also increasing, which not only improves production efficiency but also reduces unit costs. However, this also places higher demands on the operational skills of the production process. Silicon spraying is usually caused by improper operation, such as unstable temperature control, excessively fast feeding speed, or incorrect operating posture. During production, insufficient furnace operation experience among employees, untimely inspections, or errors in operation can lead to the malfunction of the silicon spraying furnace. In particular, some new employees experience silicon spraying, which not only wastes raw materials but may also damage equipment and even threaten the safety of operators. To reduce this phenomenon, pre-job training is usually provided to new employees to ensure they fully understand the production process and operating procedures. Regular skills refresher training is also conducted for existing employees to ensure their operational level keeps pace with the development of production processes. However, optimizing the production process and equipment, as well as improving the on-site management system, are also necessary. Therefore, a silicon spraying monitoring device for monocrystalline furnaces is designed. Summary of the Invention

[0003] In view of the above situation and to overcome the defects of the prior art, the purpose of this utility model is to provide a silicon spraying monitoring device for single crystal furnaces, which solves the technical problem that existing single crystal furnaces fail to detect silicon spraying in time during operation, leading to the expansion of abnormal accidents.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A single-crystal furnace silicon spraying monitoring device includes: a furnace body; a flow guiding structure disposed within the furnace body; and a brightness monitoring module disposed below the flow guiding structure. The output terminal of the brightness monitoring module is electrically connected to the input terminal of a control system, and the control system receives communication data from the brightness monitoring module and determines whether silicon spraying has occurred.

[0006] This invention enables real-time monitoring of the operation process. Upon detecting improper operation or equipment malfunction, immediate measures can be taken to prevent the accident from escalating. Through a triple guarantee of early warning mechanism, automatic judgment, and automatic response strategy, the problem of silicon spraying during single crystal furnace operation is effectively solved. This not only improves equipment stability and crystal quality but also reduces losses caused by operational errors. After silicon spraying, the equipment automatically determines that silicon has been sprayed and the system automatically performs the most effective operation (raising the guide tube, lowering the crucible, shutting off the main heater, and issuing an alarm), resolving the issue of personnel operating on the furnace platform and preventing personal safety losses from explosions after silicon spraying.

[0007] Optionally, the inner side of the flow guiding structure includes a vertical section and an inclined section disposed at the top of the vertical section. The inclined section gradually expands outward from one end of the vertical section, and the brightness monitoring module is disposed on the lower inner wall of the vertical section.

[0008] Optionally, the flow guiding structure includes: a flow guiding cylinder, which is disposed in the furnace body by means of a support member; and a water-cooled screen, which is disposed inside the flow guiding cylinder; wherein the brightness monitoring module is disposed on the lower inner wall of the water-cooled screen.

[0009] Optionally, the water-cooled screen includes a vertical part and an inclined part integrally connected to the upper end of the vertical part. The inclined part gradually expands outward from one end of the vertical part, and the brightness monitoring module is installed on the inner wall of the vertical part.

[0010] Optionally, a heat-insulating carbon felt is provided between the water-cooled screen and the flow guide tube.

[0011] Optionally, there may be multiple brightness monitoring modules.

[0012] Optionally, there are two brightness monitoring modules, which are symmetrically arranged on the inner walls of both sides of the flow guiding structure.

[0013] Optionally, there are four brightness monitoring modules, with two of them located on the lower inner wall of the flow guiding structure.

[0014] Optionally, it also includes: a monitoring camera, installed on the furnace body and electrically connected to the input terminal of the control system; the monitoring camera is used to monitor the diameter change of the crystal rod and transmit communication data to the control system, the control system receives the communication data of the monitoring camera and determines whether to spray silicon.

[0015] Optionally, it also includes a lifting structure electrically connected to the control system. The lifting structure is driven to connect with the flow guiding structure. The flow guiding structure can move vertically up and down at a preset distance under the drive of the lifting structure. The control system receives communication data from the brightness monitoring module and / or the monitoring camera, and controls the opening and closing of the lifting structure according to the judgment result.

[0016] Optionally, it also includes a crucible lifting structure electrically connected to the control system. The crucible lifting structure is connected to the crucible drive. The crucible can be vertically lifted and lowered at a preset distance under the drive of the crucible lifting rod structure. The control system receives communication data from the brightness monitoring module and / or the monitoring camera, and controls the opening and closing of the crucible lifting structure according to the judgment result.

[0017] Optionally, it also includes a main heater electrically connected to the control system, wherein the control system receives communication data from the brightness monitoring module and / or the monitoring camera, and controls the opening and closing of the main heater according to the judgment result.

[0018] Optionally, it may also include an alarm module electrically connected to the control system, wherein the control system receives communication data from the brightness monitoring module and / or the monitoring camera, and controls the activation and deactivation of the alarm module according to the judgment result.

[0019] Optionally, the monitoring camera is a CCD camera.

[0020] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0021] This invention enables real-time monitoring of the operation process. Upon detecting improper operation or equipment malfunction, immediate measures can be taken to prevent the accident from escalating. Through a triple guarantee of early warning mechanism, automatic judgment, and automatic response strategy, the problem of silicon spraying during single crystal furnace operation is effectively solved. This not only improves equipment stability and crystal quality but also reduces losses caused by operational errors. After silicon spraying, the equipment automatically determines that silicon has been sprayed and the system automatically performs the most effective operation (raising the guide tube, lowering the crucible, shutting off the main heater, and issuing an alarm), resolving the issue of personnel operating on the furnace platform and preventing personal safety losses from explosions after silicon spraying. Attached Figure Description

[0022] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the structure of this utility model.

[0024] Figure 2 This is a schematic diagram of the flow guiding structure in this utility model.

[0025] Reference numerals in the attached drawings: 1. Furnace body; 2. Flow guiding structure; 2a. Vertical section; 2b. Inclined section; 21. Flow guiding tube; 22. Water-cooled screen; 3. Brightness monitoring module; 4. Monitoring camera; 5. Lifting structure; 6. Crucible. Detailed Implementation

[0026] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of the embodiments of this utility model application. Therefore, the drawings and description are considered to be exemplary in nature and not restrictive.

[0027] In the description of the embodiments of this utility model application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", "end", "side" etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, are only for the convenience of describing the embodiments of this utility model application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of this utility model application.

[0028] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the embodiments of this utility model application, "multiple" means two or more, unless otherwise explicitly specified.

[0029] In the embodiments of this utility model application, unless otherwise explicitly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this utility model application according to the specific circumstances.

[0030] In the embodiments of this utility model application, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature being directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature being directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0031] The following disclosure provides many different implementations or examples for carrying out different structures of the embodiments of this utility model application. To simplify the disclosure of the embodiments of this utility model application, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the embodiments of this utility model application. Furthermore, reference numerals and / or reference letters may be repeated in different examples of the embodiments of this utility model application; such repetition is for simplification and clarity and does not in itself indicate a relationship between the various implementations and / or arrangements discussed.

[0032] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0033] like Figure 1 and Figure 2 As shown in the figure, this utility model application provides a single crystal furnace silicon spraying monitoring device to solve the above-mentioned problems. It includes a flow guiding structure 2 disposed within the furnace body 1 and a brightness monitoring module 3 disposed below the flow guiding structure 2. The output terminal of the brightness monitoring module is electrically connected to the input terminal of the control system. The brightness monitoring module 3 can monitor brightness changes in real time and transmit the measurement results to the control system. The control system receives the communication data from the brightness monitoring module 3 and determines whether silicon spraying is necessary based on preset values.

[0034] When in use, when the brightness value of the brightness monitoring module 3 changes, the brightness monitoring module 3 will convert the monitoring result into a specific value and transmit it to the control system. The control system receives the brightness value output by the brightness monitoring module 3. When the brightness value is 0 (when the brightness is blocked), the control system determines that it is silicon spraying.

[0035] As an implementation scenario, in this scenario, when silicon spraying occurs inside the furnace body 1, the molten silicon will be sprayed onto the brightness monitoring module 3. At this time, the brightness of the brightness monitoring module 3 will be blocked. The brightness monitoring module 3 converts the monitoring result into a specific value and transmits it to the control system. The control system receives the brightness value output by the brightness monitoring module 3. When the brightness value is 0, the control system determines that silicon spraying has occurred.

[0036] Optionally, the flow guiding structure 2 is installed inside the furnace body 1 via a support member.

[0037] Optionally, the inner side of the flow guiding structure 2 includes a vertical section 2a and an inclined section 2b disposed at the top of the vertical section 2a, the inclined section 2b being gradually extended outward from one end of the vertical section 2a.

[0038] Optionally, the brightness monitoring module 3 is installed on the inner wall of the lower part of the vertical section 2a.

[0039] Optionally, there may be multiple brightness monitoring modules 3. For example, there may be two brightness monitoring modules 3, symmetrically arranged on the inner walls of both sides of the flow guide structure 2. Alternatively, four brightness monitoring modules 3 may be configured, distributed on the lower inner wall of the vertical section 2a.

[0040] Optionally, the size of the brightness monitoring module 3 can be set to be manually adjustable, and its size, length and width can be set as needed.

[0041] In one embodiment, a monitoring camera 4 is installed on the furnace cover of the furnace body 1. The monitoring camera 4 is used to observe the crystal pulling state inside the furnace body, and the output terminal of the monitoring camera 4 is electrically connected to the input terminal of the control system.

[0042] Optionally, monitoring camera 4 is a CCD camera. During use, the CCD determines when silicon sputtering monitoring begins: monitoring is activated in four states: crucible placement, shoulder placement, shoulder rotation, and equal diameter. Monitoring is not performed in other states. The CCD camera can monitor the diameter of the crystal ingot. For example, the model capture at the crucible placement, shoulder placement, and shoulder rotation along the lower edge of the guide tube can be a full-screen view. After equal diameter, the model capture is a half-screen view because the equal-diameter single crystal ingot will obscure half of the CCD screen.

[0043] Optionally, the CCD is located diagonally above the flow guide structure 2, and two brightness monitoring modules 3 are set on the left and right sides of the CCD monitoring position.

[0044] When in use, if silicon spraying occurs at the lower edge of the flow guide structure 2 and a change in diameter is detected, it is determined to be silicon spraying. Under normal circumstances, the model captures a fixed diameter value at the lower edge of the flow guide structure 2. After silicon spraying occurs, the lower edge of the flow guide structure 2 will become larger, and the model captures a larger diameter value, which is then determined to be silicon spraying.

[0045] In one embodiment, the monitoring device further includes a lifting structure 5, a crucible lifting structure, a main heater, and an alarm module.

[0046] The lifting structure 5 is driven and connected to the flow guiding structure 2. Driven by the lifting structure 5, the flow guiding structure 2 can move vertically up and down at a preset distance. The input end of the lifting structure 5 is electrically connected to the output end of the control system, which regulates the upward or downward movement of the lifting structure 5. The crucible lifting structure is driven and connected to the crucible 6. Driven by the crucible lifting rod structure, the crucible 6 can move upward or downward, and the output end of the control system is electrically connected to the input end of the crucible lifting structure. The input ends of the main heater and the alarm module are both electrically connected to the output end of the control system, which regulates the opening and closing of the main heater and the alarm module.

[0047] In operation, when the control system receives a signal from the brightness monitoring module 3 and / or the monitoring camera 4 indicating silicon sputtering, the control system activates the lifting structure 5. The lifting structure 5 then raises the flow guide structure 2 a certain distance. Simultaneously, the control system lowers the crucible 6, shuts down the main heater, and issues an alarm signal. When a silicon sputtering event occurs, the equipment can quickly assess the situation and immediately activate the emergency plan (automatically adjusting furnace parameters, such as raising the flow guide, lowering the crucible, shutting down the main heater, and issuing an alarm) to restore normal operation as quickly as possible. By monitoring the single crystal furnace's operating status and crystal pulling operation in real time, the system will immediately issue an alarm upon detecting any signs that may lead to silicon sputtering, reminding operators to take timely measures and thus preventing silicon sputtering caused by operational errors. The equipment's ability to quickly assess the situation when a silicon sputtering event occurs prevents the problem from escalating due to delays caused by human error.

[0048] Optionally, the control system is an existing PLC controller, and the brightness monitoring module 3 is preferably a brightness monitoring module similar to the welding brightness monitoring function.

[0049] A method for monitoring silicon spraying in a single crystal furnace: After silicon spraying, the molten silicon will be sprayed onto the brightness monitoring modules 3 on the left and right sides of the flow guiding structure 2. When the brightness monitoring module 3 detects that the brightness is blocked, it is determined that silicon spraying has occurred. At the same time, during silicon spraying, the lower edge diameter of the flow guiding structure 2 will increase, that is, the lower edge radius of the flow guiding structure 2 is greater than 310mm and the lower edge becomes an irregular shape, which is also determined to be silicon spraying.

[0050] In this implementation scenario, the flow guiding structure 2 includes a flow guiding cylinder 21 and a water-cooled screen 22. The water-cooled screen 22 is disposed inside the flow guiding cylinder 21, and a heat-insulating carbon felt is provided between the water-cooled screen 22 and the flow guiding cylinder 21. The brightness monitoring module 3 is disposed at the lower part of the water-cooled screen 22. Specifically, the water-cooled screen 22 includes a vertical part and an inclined part integrally connected to the upper end of the vertical part. The inclined part gradually expands outward from one end of the vertical part, and the brightness monitoring module 3 is installed on the inner wall of the vertical part.

[0051] As a monitoring method: after silicon spraying, the molten silicon will be sprayed onto the brightness monitoring modules 3 on both sides of the guide tube 21. When the brightness monitoring module 3 detects that the brightness is blocked, it is determined that silicon spraying has occurred. At the same time, during silicon spraying, the lower edge diameter of the guide tube 21 will increase, that is, the lower edge radius of the guide tube 21 is greater than 310mm and the lower edge becomes an irregular shape, which is also determined to be silicon spraying. When the brightness monitoring module 3 and the monitoring camera 4 issue commands at the same time, the control system receives the signals and performs emergency response: automatically raising the guide tube to half distance (100mm), automatically lowering the crucible position by 150mm, automatically shutting off the main heater power to zero, and simultaneously triggering an alarm on the furnace platform, such as issuing a red "Silicon spraying, do not approach" warning. When in use, the brightness monitoring module 3 and the monitoring camera 4 work together to make a judgment. Specifically, the brightness monitoring module 3 judges the image on the water-cooled screen. When the brightness monitoring module 3 on the water-cooled screen is blocked, it is judged as silicon spraying. The monitoring camera 4 judges the size of the guide tube opening. When the lower edge diameter of the guide tube is smaller than the target diameter, or the guide tube opening diameter is smaller than the actual diameter, it is judged as silicon spraying.

[0052] In another implementation scenario, the flow guiding structure 2 includes a flow guiding cylinder, which includes a vertical section and an inclined section integrally connected to the top of the vertical section. The inclined section gradually expands outward from one end of the vertical section, and the brightness monitoring module is installed on the inner wall of the lower part of the vertical section.

[0053] In practical applications, upgrading the furnace control system can improve the precise control of temperature, reduce silicon spraying caused by temperature fluctuations, select a furnace type more suitable for large-scale production, and improve the accuracy of the feeding system, which can also effectively reduce the waste of raw materials.

[0054] This invention is an early warning mechanism to prevent silicon spraying, preventing the escalation of abnormal accidents caused by production personnel failing to detect them in time. Through a brightness inspection module and monitoring camera, high accuracy and real-time performance are ensured in the detection process. When the system detects silicon spraying, it immediately activates the emergency plan, automatically adjusting furnace parameters such as raising the guide tube, lowering the crucible, shutting down the main heater, and issuing an alarm to restore normal operation as quickly as possible. Furthermore, the system can automatically collect and record relevant data, providing strong support for subsequent fault analysis and improvement.

[0055] Any aspects not described in detail in this embodiment are techniques known in the art.

[0056] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various variations or substitutions within the technical scope disclosed in this utility model, and these should all be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A single crystal furnace silicon injection monitoring device, characterized in that, include: Furnace body (1); A flow guiding structure (2) is installed inside the furnace body (1); A brightness monitoring module (3) is located at the lower part of the flow guiding structure (2); The output terminal of the brightness monitoring module (3) is electrically connected to the input terminal of the control system. The control system receives the communication data from the brightness monitoring module (3) and determines whether to spray silicon.

2. The single crystal furnace silicon spray monitoring device according to claim 1, characterized in that, The inner side of the flow guiding structure (2) has a vertical section (2a) and an inclined section (2b) disposed at the top of the vertical section (2a). The inclined section (2b) gradually expands outward from one end of the vertical section (2a). The brightness monitoring module (3) is disposed on the lower inner wall of the vertical section (2a).

3. The single crystal furnace silicon spray monitoring device according to claim 1, characterized in that, The flow guiding structure (2) includes: The guide tube (21) is installed inside the furnace body (1) by means of a support member; A water-cooled screen (22) is disposed inside the guide tube (21); The brightness monitoring module (3) is located on the lower inner wall of the water-cooled screen (22).

4. The single crystal furnace silicon spraying monitoring device according to claim 3, characterized in that, The water-cooled screen (22) includes a vertical part and an inclined part integrally connected to the upper end of the vertical part. The inclined part gradually expands outward from one end of the vertical part, and the brightness monitoring module (3) is installed on the inner wall of the vertical part.

5. The single crystal furnace silicon spray monitoring device according to claim 3, characterized in that, A heat-insulating carbon felt is provided between the water-cooled screen (22) and the flow guide tube (21).

6. The single crystal furnace silicon spray monitoring device according to claim 1, characterized in that, There are multiple brightness monitoring modules (3).

7. The single crystal furnace silicon spray monitoring device according to claim 1, characterized in that: There are two brightness monitoring modules (3), and the two brightness monitoring modules (3) are symmetrically arranged on the inner walls of the two sides of the flow guiding structure (2); or, There are four brightness monitoring modules (3), with two of them located on the lower inner wall of the flow guiding structure (2).

8. The single crystal furnace silicon spray monitoring device according to claim 1, characterized in that, Also includes: A monitoring camera (4) is installed on the furnace body (1) and electrically connected to the input terminal of the control system; The monitoring camera (4) is used to monitor the diameter change of the crystal rod and transmit the communication data to the control system. The control system receives the communication data of the monitoring camera (4) and determines whether to spray silicon.

9. The single crystal furnace silicon spray monitoring device according to claim 8, characterized in that: It also includes a lifting structure (5) electrically connected to the control system. The lifting structure (5) is driven to connect with the flow guiding structure (2). The flow guiding structure (2) can be vertically raised and lowered at a preset distance under the drive of the lifting structure (5). The control system receives communication data from the brightness monitoring module (3) and / or the monitoring camera (4) and adjusts the lifting structure (5) according to the judgment result. And / or, it also includes a crucible lifting structure electrically connected to the control system, the crucible lifting structure being driven to the crucible (6), the crucible (6) being able to be vertically lifted and lowered at a preset distance under the drive of the crucible lifting rod structure, the control system receiving communication data from the brightness monitoring module (3) and / or the monitoring camera (4), and adjusting the crucible lifting structure according to the judgment result; And / or, it also includes a main heater electrically connected to the control system, the control system receiving communication data from the brightness monitoring module (3) and / or the monitoring camera (4), and adjusting the main heater according to the judgment result; And / or, it also includes an alarm module electrically connected to the control system, wherein the control system receives communication data from the brightness monitoring module (3) and / or the monitoring camera (4) and adjusts the alarm module according to the judgment result.

10. The single crystal furnace silicon spray monitoring device according to claim 8, characterized in that, The monitoring camera (4) is a CCD camera.

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