AOI detection machine with high-speed detection mechanism

By introducing high-speed moving components and multi-dimensional moving alignment and picking components into the AOI inspection machine, combined with a TDI line array camera and a laser displacement sensor, efficient and accurate automated inspection is achieved, solving the problems of insufficient inspection speed, accuracy and efficiency in existing technologies.

CN223538744UActive Publication Date: 2025-11-11SHENZHEN JINGYUNDA AUTOMATION EQUIP CO LTD
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Patent Information

Application Number
CN202422570445.5
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-10-23
Publication Date
2025-11-11
Estimated Expiration
2034-10-23

AI Technical Summary

Technical Problem

Existing AOI inspection machines are insufficient in terms of inspection speed, accuracy and efficiency, making it difficult to meet the needs of efficient automated inspection.

Method used

It employs a high-speed moving component equipped with a TDI line array camera and a laser displacement sensor, combined with multiple adjustable components such as a vacuum platform, alignment and picking components, and conveying and unloading components to achieve automated workpiece processes and precise detection.

Benefits of technology

It improves the speed, accuracy, and efficiency of testing, reduces human intervention, and ensures the stability of the equipment and the reliability of the test results during long-term operation.

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Abstract

The utility model relates to an AOI detection machine with a high-speed detection mechanism, and relates to the field of high-end equipment manufacturing. By integrating the feeding assembly, the visual alignment assembly, the vacuum platform assembly, the material throwing assembly, the discharging assembly and the like, and the unique picking alignment assembly and the carrying discharging assembly, efficient and accurate detection operation is achieved. And meanwhile, the TDI linear array camera and the laser displacement sensor are carried by the high-speed moving assembly, so that the detection accuracy and the equipment stability are remarkably improved.
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Description

Technical Field

[0001] This application relates to high-end equipment manufacturing, and more particularly to an AOI inspection machine with a high-speed inspection mechanism. Background Technology

[0002] With the rapid development of the electronics manufacturing industry, automated optical inspection (AOI) equipment is playing an increasingly important role in product quality control. Although existing AOI inspection machines can achieve a certain degree of automation, there is still room for improvement in terms of inspection speed, accuracy, and efficiency.

[0003] Therefore, based on the above problems, the existing technology needs to be improved. Summary of the Invention

[0004] The purpose of this application is to improve the detection speed, accuracy, and efficiency of AOI inspection machines.

[0005] The above-mentioned technical objective of this application is achieved through the following technical solution: an AOI inspection machine with a high-speed inspection mechanism, comprising a cabinet, wherein a loading component, a vision alignment component, a vacuum platform, a throwing component, and a unloading component are sequentially arranged on the cabinet; an alignment pickup component is provided on the cabinet, and the workpiece on the loading component is transferred to the vacuum platform through the cooperation of the alignment pickup component and the vision alignment component; a conveying and unloading component is provided on the cabinet, and the workpiece on the vacuum platform is transferred to the throwing component or the unloading component through the conveying and unloading component; a high-speed moving component is provided on the cabinet, and a TDI line scan camera is provided on the high-speed moving component, and a laser displacement sensor is provided on the TDI line scan camera.

[0006] By adopting the above technical solution, and using a high-speed moving component equipped with a TDI linear array camera and a laser displacement sensor, high-precision detection can be achieved, ensuring accurate identification and measurement of workpiece defects. The components work collaboratively to automate the feeding, inspection, unloading, and discharge processes, reducing manual intervention and significantly improving overall work efficiency. The carefully designed components and their connections ensure stable performance during long-term operation, reducing the failure rate, guaranteeing the reliability of inspection results, and improving the inspection speed, accuracy, and efficiency of the AOI inspection machine.

[0007] Optionally, the feeding assembly includes a first frame, on which a first belt is provided. The first belt is connected to a first driving member, which drives the first belt to move relative to the first frame.

[0008] By adopting the above technical solution, the first driving component drives the first belt to move without manual operation, improving the efficiency and accuracy of feeding. The first driving component allows for precise adjustment of the first belt's speed to adapt to different production needs and process requirements. The first frame provides stable support for the first belt, ensuring a smooth and reliable feeding process and reducing workpiece position deviations caused by vibration or instability.

[0009] Optionally, the first frame is provided with positioning stops.

[0010] By adopting the above technical solution, the positioning stop can limit the position of the workpiece placed on the first belt, ensuring that the workpiece maintains an accurate posture and position during the feeding process, thereby improving the accuracy of subsequent operations such as inspection. It prevents the workpiece from shifting laterally or longitudinally during the movement of the first belt, ensuring the stability and reliability of the feeding process. This makes the feeding process more standardized and orderly, contributing to improved efficiency and quality of the entire production process.

[0011] Optionally, the visual alignment component includes a linear slide table mounted on the cabinet, and a visual alignment camera is mounted on the linear slide table. The height of the visual alignment camera from the cabinet is adjusted by the linear slide table.

[0012] By adopting the above technical solution, the linear slide can adjust the height of the vision alignment camera, making it adaptable to workpieces of various heights and sizes, thus expanding the applicability of the inspection machine. It can precisely adjust the camera height according to the specific conditions of the workpiece to obtain the optimal shooting angle and distance, thereby improving the accuracy and precision of vision alignment. Quickly adjusting the camera height reduces the time required for alignment, accelerating the entire inspection process.

[0013] Optionally, the vacuum platform includes a mounting platform, an adjusting slide rail on the mounting platform, an adjusting slider on the adjusting slide rail, and an adjusting slider that can be driven by a linear motor to slide on the adjusting slide rail. The adjusting slider has a receiving platform for receiving workpieces. The adjusting slider has a first mounting plate with a reading head on the first mounting plate and a magnetic strip on the mounting platform. The mounting platform also has a second mounting plate with a vacuum gauge on the second mounting plate.

[0014] By adopting the above technical solution, a linear motor drives the adjusting slider to slide on the adjusting rail, enabling high-precision position adjustment and ensuring the accuracy of the workpiece's position during the inspection process. The system consisting of the reading head and magnetic strip can monitor the position of the adjusting slider in real time, facilitating precise control and feedback, and improving the stability and repeatability of the inspection. The vacuum gauge allows for real-time monitoring of the vacuum level of the vacuum platform, ensuring the stability and reliability of the inspection environment, thereby improving inspection quality. The receiving platform can move with the adjusting slider, better adapting to workpieces of different shapes and sizes, and improving the equipment's versatility.

[0015] Optionally, the material throwing assembly includes a second frame, on which a second belt is provided. The second belt is connected to a second driving member, which drives the second belt to move relative to the second frame.

[0016] By adopting the above technical solution, the second drive component drives the second belt to move, enabling the rapid and efficient ejection of defective workpieces and improving production efficiency. The second frame provides stable support for the second belt, ensuring the stability of the ejection action and reducing the occurrence of malfunctions. Through control of the second drive component, defective workpieces can be precisely ejected to designated positions for easy subsequent processing.

[0017] Optionally, the feeding assembly includes a third frame, on which a third belt is provided. The third belt is connected to a third driving member, which drives the third belt to move relative to the third frame.

[0018] By adopting the above technical solution, the third drive component drives the third belt to move, enabling qualified workpieces to be delivered in an orderly manner and avoiding chaotic discharge. This achieves rapid discharge, improves the efficiency of the entire production process, and meets the needs of large-scale production. The third frame provides solid support for the third belt, ensuring the stability of the discharge process and reducing the probability of discharge failure. Through precise control of the third drive component, the discharge speed and position can be accurately controlled, facilitating seamless integration with subsequent processes.

[0019] Optionally, the alignment and pickup assembly includes a first mounting frame, a first X-axis slide rail on the first mounting frame, a first X-axis slider on the first X-axis slide rail, the first X-axis slide rail being slidable on the first X-axis slide rail, a first receiving plate on the first X-axis slider, a first Y-axis slide rail on the first receiving plate, a first Y-axis slider on the first Y-axis slide rail, and a telescopic drive on the first receiving plate, which pushes the first Y-axis slider to slide on the first Y-axis slide rail; a first Z-axis drive on the first Y-axis slider, a first lifting member on the first Z-axis drive, and a first pneumatic pickup member on the first lifting member, which drives the first pneumatic pickup member to move towards or away from the feeding assembly via the first Z-axis drive.

[0020] By adopting the above technical solution, the device possesses X, Y, and Z axis motion capabilities, enabling precise position adjustment in three-dimensional space for accurate workpiece pickup and alignment. Through the coordinated movement and precise drive of each axis, high-precision pickup and alignment operations are achieved, improving production quality. Flexible multi-axis motion can adapt to workpieces in different positions and orientations on the loading assembly, enhancing the equipment's versatility. The telescopic drive and the coordination of various drive components ensure fast and stable pickup and alignment actions, improving production efficiency. The entire process is automatically controlled by the drive components, reducing manual intervention and minimizing human error.

[0021] Optionally, the material handling assembly includes a second X-axis slider disposed on the first X-axis slide rail, a second receiving plate disposed on the second X-axis slider, a second Z-axis drive component disposed on the second receiving plate, a second lifting component disposed on the second Z-axis drive component, and a second pneumatic pickup component disposed on the second lifting component. The second pneumatic pickup component is driven by the second Z-axis drive component to move toward or away from the material handling assembly.

[0022] By adopting the above technical solution, the second Z-axis drive unit can precisely control the movement of the second pneumatic pickup unit, ensuring that the workpiece is accurately transported to the unloading assembly and improving unloading accuracy. By setting a second X-axis slider on the first X-axis slide rail, combined with the movement of the second Z-axis, the unloading action can be completed quickly, improving production efficiency. The reasonable structural design and coordinated operation of all components ensure stable unloading and reduce malfunctions and errors. The transport path and height can be flexibly adjusted according to the position of the unloading assembly and the specific conditions of the workpiece, demonstrating strong adaptability. Automatic control of unloading by the drive unit reduces manual labor intensity and improves the level of automation in production.

[0023] Optionally, the high-speed moving component includes a second mounting bracket, a second X-axis slide rail on the second mounting bracket, a third X-axis slider on the second X-axis slide rail, a third Z-axis drive on the third X-axis slider, a third lifting component on the third Z-axis drive, and the TDI line scan camera is mounted on the third lifting component.

[0024] By adopting the above technical solutions, the third Z-axis drive component and the third lifting component enable precise movement of the TDI line scan camera in the Z-axis direction, thereby achieving accurate focus adjustment and improving the clarity and accuracy of the inspection. The cooperation of the second X-axis slide rail and the third X-axis slider allows the camera to move flexibly in the X-axis direction, facilitating the inspection of workpieces at different positions and expanding the inspection range. The second mounting bracket provides stable support for the entire assembly, ensuring the positional accuracy and stability of the camera during movement and inspection, reducing inspection errors caused by vibration or shaking. The rapid and accurate focusing and position adjustment capabilities improve inspection efficiency and meet the needs of large-scale production. The camera's position and focus state can be flexibly adjusted according to different inspection tasks and workpiece characteristics, improving the equipment's versatility and adaptability.

[0025] In summary, this application has at least the following beneficial effect:

[0026] 1. By employing a high-speed moving component equipped with a TDI line array camera and a laser displacement sensor, automatic and precise focusing is achieved, significantly improving the accuracy of detection.

[0027] 2. An adjustable vacuum platform and a multi-dimensional moving alignment pickup assembly are preferred. Due to the flexibility and stability of these components, the equipment remains stable during long-term use, improving detection efficiency and accuracy. Attached Figure Description

[0028] Figure 1 This is a schematic diagram of the structure of an AOI inspection machine with a high-speed inspection mechanism;

[0029] Figure 2 This is a structural diagram of the feeding assembly;

[0030] Figure 3 This is a schematic diagram of the structure of the visual alignment component;

[0031] Figure 4 This is a schematic diagram of the vacuum platform.

[0032] Figure 5 This is a schematic diagram of the material throwing assembly;

[0033] Figure 6 This is a structural diagram of the feeding assembly;

[0034] Figure 7 This is a structural diagram of the alignment pickup component;

[0035] Figure 8 This is a structural diagram of the material handling and discharging assembly;

[0036] Figure 9 This is a schematic diagram of the structure of a high-speed moving component;

[0037] Figure 10 This is a schematic diagram of the structure of a TDI linear array camera and a laser displacement sensor;

[0038] Figure 11 This is a schematic diagram of the status of an AOI inspection machine with a high-speed inspection mechanism.

[0039] Figure Labels

[0040] 1. Cabinet; 2. Loading assembly; 21. First frame; 22. First belt; 23. First drive unit; 24. Positioning stop bar; 3. Vision alignment assembly; 31. Linear slide; 32. Vision alignment camera; 4. Vacuum platform; 41. Mounting platform; 42. Adjusting slide rail; 43. Adjusting slider; 44. Receiving platform; 45. First mounting plate; 46. Reading head; 47. Magnetic strip; 48. Second mounting plate; 49. Vacuum gauge; 5. Throwing assembly; 51. Second frame; 52. Second belt; 53. Second drive unit; 6. Unloading assembly; 61. Third frame; 62. Third belt; 63. Third drive unit; 7. Alignment pickup assembly; 71. First mounting bracket; 72. First X-axis slide rail; 73. First X-axis slider; 74. First receiving plate; 75. First Y-axis slide rail; 76. First Y-axis slider; 77. Telescopic drive component; 78. First Z-axis drive component; 79. First lifting component; 710. First pneumatic pickup component; 8. Material handling and discharge assembly; 81. Second X-axis slider; 82. Second receiving plate; 83. Second Z-axis drive component; 84. Second lifting component; 85. Second pneumatic pickup component; 9. High-speed moving assembly; 91. Second mounting bracket; 92. Second X-axis slide rail; 93. Third X-axis slider; 94. Third Z-axis drive component; 95. Third lifting component; 10. TDI line scan camera; 11. Laser displacement sensor. Detailed Implementation

[0041] The present application will be further described in detail below with reference to the accompanying drawings.

[0042] In this embodiment, refer to Figure 1-11An AOI inspection machine with a high-speed inspection mechanism is disclosed. The equipment includes a cabinet 1, on which a loading assembly 2, a vision alignment assembly 3, a vacuum platform 4, a throwing assembly 5, and a unloading assembly 6 are sequentially mounted. Furthermore, the cabinet 1 is also equipped with an alignment pickup assembly 7 and a conveying and unloading assembly 8 to transfer workpieces from the loading assembly 2 to the vacuum platform 4, and from the vacuum platform 4 to the throwing assembly 5 or the unloading assembly 6. Specifically, the AOI inspection machine in this embodiment is also equipped with a high-speed moving assembly 9, which is equipped with a TDI line scan camera 10 and a laser displacement sensor 11 to achieve precise focusing and accurate inspection of the workpieces on the vacuum platform 4.

[0043] The implementation principle of Example 1 is as follows: The workpiece enters the inspection area through the loading assembly 2, and the vision alignment assembly 3 performs preliminary positioning of the workpiece. Subsequently, the alignment and pickup assembly 7 precisely places the workpiece onto the vacuum platform 4. The high-speed moving assembly 9, equipped with a TDI line array camera 10 and a laser displacement sensor 11, automatically and accurately focuses on the workpiece to complete the inspection task. After the inspection is completed, the conveying and unloading assembly 8 moves the workpiece from the vacuum platform 4 to the throwing assembly 5 or the unloading assembly 6, completing the entire inspection process.

[0044] Example 2

[0045] Reference Figure 2 The difference in this embodiment lies in the specific design of the feeding assembly 2. The feeding assembly 2 includes a first frame 21 and a first belt 22. The first belt 22 is driven by a first drive member 23 to realize automatic feeding of the workpiece. In addition, a positioning stop bar 24 is also provided on the first frame 21 to ensure accurate positioning of the workpiece when it enters the detection area.

[0046] Example 3

[0047] Reference Figure 3 Based on Embodiment 2, this embodiment further specifies the design of the vision alignment component 3. The vision alignment component 3 includes a linear slide 31 mounted on the cabinet 1, and a vision alignment camera 32 is mounted on the linear slide 31. By adjusting the linear slide 31, the height of the vision alignment camera 32 can be precisely adjusted to accommodate workpieces of different sizes and shapes, ensuring a clear field of view and accurate positioning during the inspection process.

[0048] Example 4

[0049] Reference Figure 4Based on Example 3, this example details the design and working principle of the vacuum platform 4. The vacuum platform 4 includes a mounting platform 41, on which an adjusting slide rail 42 and an adjusting slider 43 are mounted. The adjusting slider 43 also has a receiving platform 44 for stably receiving the workpiece. Driven by a linear motor, the adjusting slider 43 can slide on the adjusting slide rail 42, achieving fine-tuning of the workpiece position. Furthermore, a first mounting plate 45 is mounted on the adjusting slider 43, and a reading head 46 is mounted on the first mounting plate 45. A magnetic strip 47 is mounted on the mounting platform 41. The reading head 46 and the magnetic strip 47 constitute a magnetic scale, preferably with a specification accuracy of 1µm. A second mounting plate 48 is mounted on the mounting platform 41, and a vacuum gauge 49 is mounted on the second mounting plate 48 for monitoring the workpiece position and vacuum status, ensuring the stability and accuracy of the detection process.

[0050] Example 5

[0051] Reference Figure 5 and Figure 6 This embodiment, based on embodiment 4, specifies the design of the throwing assembly 5 and the unloading assembly 6. The throwing assembly 5 includes a second frame 51 and a second belt 52, which is driven by a second drive component 53 to automatically throw out workpieces that have completed inspection but failed. The unloading assembly 6 includes a third frame 61 and a third belt 62, which is driven by a third drive component 63 to deliver workpieces that have passed inspection out of the inspection area. This design improves the automation level and work efficiency of the equipment.

[0052] Example 6

[0053] Reference Figure 7 Based on Embodiment 5, this embodiment further describes the detailed structure of the alignment and pickup component 7. The alignment and pickup component 7 includes a first mounting frame 71, on which a first X-axis slide rail 72 and a first X-axis slider 73 are mounted. Preferably, a magnetic ruler is provided on the first mounting frame 71 for precise control of the sliding of the first X-axis slider 73 on the first X-axis slide rail 72. A first receiving plate 74 is provided on the first X-axis slider 73, and a first Y-axis slide rail 75 and a first Y-axis slider 76 are further provided on the first receiving plate 74. The first Y-axis slider 76 can slide on the first Y-axis slide rail 75 by being pushed by the telescopic drive member 77. The first Y-axis slider 76 is also equipped with a first Z-axis drive member 78 and a first pneumatic pickup member 710. Driven by the first Z-axis drive member 78, the pickup and placement operations of the workpiece are realized. This multi-dimensional movement design makes the pickup and alignment process more flexible and precise.

[0054] Example 7

[0055] Reference Figure 8Based on Embodiment 6, this embodiment elaborates on the structure and working principle of the material handling and unloading assembly 8. The material handling and unloading assembly 8 includes a second X-axis slider 81 mounted on a first X-axis slide rail 72, and a second receiving plate 82 mounted on the second X-axis slider 81. A second Z-axis drive component 83 and a second pneumatic pickup component 85 are mounted on the second receiving plate 82. Driven by the second Z-axis drive component 83, the second pneumatic pickup component 85 can achieve precise handling and unloading of the workpiece. This design enables the equipment to automatically classify and process workpieces after inspection, improving overall work efficiency.

[0056] Example 8

[0057] Reference Figure 9 This embodiment, based on embodiment 7, specifically describes the design and function of the high-speed moving component 9. The high-speed moving component 9 includes a second mounting bracket 91, on which a second X-axis slide rail 92 and a second X-axis slider 81 are mounted. A 0.1nm resolution grating ruler, combined with a high-precision U-shaped coreless linear motor, drives the second X-axis slider 81 to slide on the second Z-axis slide rail. The second X-axis slider 81 is further provided with a third Z-axis drive component 94 and a third lifting component 95. The third Z-axis drive component 94 includes a Z-axis servo motor and a Z-axis high-precision grinding screw. The TDI line scan camera 10 is mounted on the third lifting component 95. Through the cooperation of the second X-axis slide rail 92 and the third Z-axis drive component 94, precise movement and focusing of the TDI line scan camera 10 can be achieved during the detection process. This design significantly improves the detection accuracy and flexibility of the equipment.

[0058] Specifically, the equipment automatically performs a calibration each time it is powered on to ensure all components are in the correct position. After running continuously for a period of time, the equipment automatically enters maintenance mode to inspect and adjust critical components, such as cleaning the lens and checking belt wear. If any problems are detected, the equipment will promptly issue an alarm and prompt the operator to handle the issue.

[0059] Example 10

[0060] Building upon Example 9, this example further enhances the intelligence and networking capabilities of the AOI inspection machine. We have equipped the equipment with advanced image processing and data analysis algorithms, enabling it to automatically identify and classify various defects and provide detailed inspection reports. Simultaneously, the equipment supports remote monitoring and control, allowing operators to view the equipment's operating status and inspection results anytime via mobile phone or computer, achieving remote management and debugging.

[0061] In addition, we have added cloud platform connectivity to the equipment, allowing all testing data to be automatically uploaded to the cloud platform for analysis and storage. Through in-depth mining and analysis of historical data, we can help companies promptly identify potential problems in the production process, propose improvement suggestions, and thereby further improve product quality and production efficiency.

[0062] The above-described embodiments are specific implementations of the present invention, but the present invention is not limited to these embodiments. Various modifications and variations made to the present invention without departing from its principles and spirit should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention is defined by the appended claims and their equivalent substitutions. Any person skilled in the art can modify or improve the above embodiments without departing from the design concept and principles of the present invention, and these modifications and improvements should also be considered within the scope of protection of the present invention.

Claims

1. An AOI inspection machine with a high-speed inspection mechanism, characterized in that, The system includes a cabinet (1), on which a loading assembly (2), a vision alignment assembly (3), a vacuum platform (4), a throwing assembly (5), and a unloading assembly (6) are sequentially arranged. The cabinet (1) is equipped with an alignment pickup assembly (7). Through the cooperation of the alignment pickup assembly (7) and the vision alignment assembly (3), the workpiece on the loading assembly (2) is transferred to the vacuum platform (4). The cabinet (1) is equipped with a conveying and unloading assembly (8). Through the conveying and unloading assembly (8), the workpiece on the vacuum platform (4) is transferred to the throwing assembly (5) or the unloading assembly (6). The cabinet (1) is equipped with a high-speed moving assembly (9). The high-speed moving assembly (9) is equipped with a TDI line array camera (10). The TDI line array camera (10) is equipped with a laser displacement sensor (11).

2. The AOI inspection machine with a high-speed detection mechanism according to claim 1, characterized in that, The feeding assembly (2) includes a first frame (21), on which a first belt (22) is provided. The first belt (22) is connected to a first driving member (23), and the first belt (22) is driven to move relative to the first frame (21) by the first driving member (23).

3. An AOI inspection machine with a high-speed detection mechanism according to claim 2, characterized in that, The first frame (21) is provided with a positioning stop (24).

4. An AOI inspection machine with a high-speed detection mechanism according to claim 1, characterized in that, The visual alignment component (3) includes a linear slide (31) mounted on the cabinet (1), and a visual alignment camera (32) is mounted on the linear slide (31). The height of the visual alignment camera (32) from the cabinet (1) is adjusted by the linear slide (31).

5. An AOI inspection machine with a high-speed detection mechanism according to claim 1, characterized in that, The vacuum platform (4) includes a mounting platform (41), an adjusting slide rail (42) on the mounting platform (41), an adjusting slider (43) on the adjusting slide rail (42), and the adjusting slider (43) can be driven by a linear motor to slide on the adjusting slide rail (42). The adjusting slider (43) is provided with a receiving platform (44) for receiving workpieces. The adjusting slider (43) is provided with a first mounting plate (45), a reading head (46) on the first mounting plate (45), a magnetic strip (47) on the mounting platform (41), and a second mounting plate (48) on the mounting platform (41), a vacuum gauge (49) on the second mounting plate (48).

6. An AOI inspection machine with a high-speed inspection mechanism according to claim 1, characterized in that, The material throwing assembly (5) includes a second frame (51), on which a second belt (52) is provided. The second belt (52) is connected to a second driving member (53), and the second belt (52) is driven to move relative to the second frame (51) by the second driving member (53).

7. An AOI inspection machine with a high-speed detection mechanism according to claim 1, characterized in that, The feeding assembly (6) includes a third frame (61), on which a third belt (62) is provided. The third belt (62) is connected to a third driving member (63), which drives the third belt (62) to move relative to the third frame (61).

8. An AOI inspection machine with a high-speed detection mechanism according to claim 1, characterized in that, The alignment pickup assembly (7) includes a first mounting bracket (71), on which a first X-axis slide rail (72) is provided, and on which a first X-axis slider (73) is provided. The first X-axis slide rail (72) is slidable on the first X-axis slide rail (72). The first X-axis slider (73) is provided with a first receiving plate (74), and on which a first Y-axis slide rail (75) is provided. The first Y-axis slide rail (75) is provided with a first Y-axis slider (76). 74) is provided with a telescopic drive (77), which pushes the first Y-axis slider (76) to slide on the first Y-axis slide rail (75); the first Y-axis slider (76) is provided with a first Z-axis drive (78), the first Z-axis drive (78) is provided with a first lifting member (79), the first lifting member (79) is provided with a first pneumatic pickup member (710), which is driven by the first Z-axis drive (78) to move closer to or further away from the feeding assembly (2).

9. An AOI inspection machine with a high-speed detection mechanism according to claim 8, characterized in that, The material handling and unloading assembly (8) includes a second X-axis slider (81) disposed on the first X-axis slide rail (72), a second receiving plate (82) disposed on the second X-axis slider (81), a second Z-axis drive (83) disposed on the second receiving plate (82), a second lifting member (84) disposed on the second Z-axis drive (83), and a second pneumatic pickup member (85) disposed on the second lifting member (84). The second pneumatic pickup member (85) is driven by the second Z-axis drive (83) to move toward or away from the unloading assembly (6).

10. An AOI inspection machine with a high-speed detection mechanism according to claim 1, characterized in that, The high-speed moving component (9) includes a second mounting bracket (91), a second X-axis slide rail (92) is provided on the second mounting bracket (91), a third X-axis slider (93) is provided on the second X-axis slide rail (92), a third Z-axis drive (94) is provided on the third X-axis slider (93), a third lifting component (95) is provided on the third Z-axis drive (94), and the TDI line array camera (10) is located on the third lifting component (95).