MEMS galvanometer driver, vehicle-mounted laser radar and automobile

Abstract

The utility model belongs to the technical field of laser radars, and particularly relates to an MEMS galvanometer driver, a vehicle-mounted laser radar and an automobile, and the MEMS galvanometer driver comprises an FPGA circuit which is used for generating a control signal of an MEMS galvanometer; the DAC module is connected with the FPGA circuit through an SPI (Serial Peripheral Interface) bus interface and is used for converting the control signal into an analog signal; the low-pass filter is connected with the DAC module and is used for filtering interference signals in the analog signals; the high-voltage amplification module is connected with the low-pass filter and is used for amplifying the filtered analog signal into a high-voltage signal; the high-voltage power supply circuit is connected with the high-voltage amplification module and is used for supplying power to the high-voltage amplification module; wherein the FPGA circuit realizes different scanning modes and scanning ranges of the MEMS galvanometer by changing the waveform and the amplitude of the control signal, the scanning mode and the scanning range can be flexibly adjusted, and the efficiency and the precision of laser radar detection are improved.

Description

Technical Field

[0001] This utility model belongs to the field of lidar technology, specifically relating to a MEMS galvanometer driver, an automotive lidar, and a car. Background Technology

[0002] With the continuous development of autonomous driving technology, the requirements for MEMS galvanometer drivers in vehicle-mounted LiDAR are also constantly increasing, which has driven the continuous innovation and progress of related technologies. However, existing MEMS galvanometer drivers still have some limitations.

[0003] Most MEMS galvanometer drivers use a line-by-line scanning method with a fixed scanning angle. This fixed scanning mode has some problems in practical applications. For example, when the scanning distance is far, a large number of scanning points may fall outside the road area, or scan road signs or even higher positions, resulting in a sharp reduction in the number of effective scanning points. This further reduces the effective point cloud of the vehicle-mounted LiDAR, thus affecting its detection performance.

[0004] Therefore, there is an urgent need for a driver that can change the scanning mode and scanning angle of MEMS galvanometers according to different application scenarios. This driver should be able to flexibly adjust the scanning mode and range to adapt to the application requirements of different autonomous driving scenarios, thereby improving the efficiency and accuracy of radar detection. Utility Model Content

[0005] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide a MEMS galvanometer driver, an automotive lidar and a car, so as to flexibly adjust the scanning mode and range to adapt to different application requirements, thereby improving the efficiency and accuracy of lidar detection.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] The first aspect of this utility model provides a MEMS galvanometer driver, comprising:

[0008] FPGA circuitry is used to generate control signals for MEMS mirrors.

[0009] The DAC module is connected to the FPGA circuit via an SPI bus interface and is used to convert the control signals into analog signals.

[0010] A low-pass filter, connected to the DAC module, is used to filter out interference signals in the analog signal;

[0011] A high-voltage amplifier module, connected to the low-pass filter, is used to amplify the filtered analog signal into a high-voltage signal; and a high-voltage power supply circuit, connected to the high-voltage amplifier module, is used to supply power to the high-voltage amplifier module.

[0012] The FPGA circuit achieves different scanning modes and scanning ranges of the MEMS galvanometer by changing the waveform and amplitude of the control signal.

[0013] In one embodiment of this utility model, the MEMS galvanometer driver further includes an RC low-pass filter bank, which is connected to the high-voltage amplification module to reduce noise.

[0014] As one embodiment of this utility model, the high-voltage amplification module amplifies a 3.3V or 5V signal into a high-voltage signal of 180-200V.

[0015] In one embodiment of this utility model, the control signals generated by the FPGA circuit include X-axis drive control signals and Y-axis drive control signals.

[0016] In one embodiment of this utility model, the DAC module includes at least two output channels, which are used to output X-axis drive control signals and Y-axis drive control signals, respectively.

[0017] As one embodiment of this utility model, the FPGA circuit adjusts the scanning mode of the MEMS galvanometer in different application scenarios by changing the waveform and amplitude of the control signal; the different application scenarios include long-distance scanning and short-distance scanning.

[0018] As one embodiment of this utility model, the MEMS galvanometer driver further includes a control unit, which is used to send control commands to the FPGA circuit according to application requirements to change the waveform and amplitude of the control signal.

[0019] In one embodiment of this utility model, the control unit is also used to receive external environmental information and automatically adjust the scanning mode and scanning range of the MEMS galvanometer according to the external environmental information.

[0020] The second aspect of this utility model provides an on-board lidar, comprising: a MEMS mirror; and a MEMS mirror driver as provided in the first aspect, the MEMS mirror driver being used to drive the MEMS mirror.

[0021] The third aspect of this utility model provides an automobile, characterized in that it includes the MEMS galvanometer driver described in the first aspect or the lidar described in the second aspect.

[0022] This invention improves the efficiency and accuracy of radar detection by flexibly controlling the scanning mode and range of the MEMS galvanometer, thereby enhancing the overall performance of the radar system. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the principle of a MEMS galvanometer driver according to a specific embodiment of the present invention;

[0025] Figure 2 This is a schematic diagram of the structure of a MEMS galvanometer driver according to a specific embodiment of the present invention;

[0026] Explanation of reference numerals in the attached figures:

[0027] 1-FPGA circuit; 2-DAC module; 3-Low-pass filter; 4-High-voltage amplifier module; 5-RC low-pass filter bank; 6-High-voltage power supply circuit; 7-Control unit. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model. Furthermore, it should be understood that the specific embodiments described herein are only for illustration and explanation of the present utility model and are not intended to limit the present utility model.

[0029] It should be noted that the order of description of the following embodiments is not intended to limit the preferred order of the embodiments of this application. Furthermore, the descriptions of each embodiment in the following embodiments have their own emphasis; for parts not described in detail in a certain embodiment, please refer to the relevant descriptions in other embodiments.

[0030] Automotive LiDAR is widely used in autonomous driving and advanced driver assistance systems. It measures the distance and shape of the surrounding environment by emitting laser beams and receiving reflected signals, thereby generating high-precision three-dimensional point cloud data.

[0031] MEMS galvanometers and their drivers are core components of automotive LiDAR systems. In these systems, MEMS galvanometers play a crucial role. As microelectromechanical systems, they enable precise beam deflection at a minute scale. In automotive LiDAR, MEMS galvanometers are primarily used to control the scanning direction and range of the laser beam. By adjusting the vibration frequency and amplitude of the MEMS galvanometer, different scanning modes, such as linear scanning and helical scanning, can be achieved.

[0032] MEMS galvanometers are characterized by miniaturization, low power consumption, and high precision. Compared with traditional mechanical scanning systems, MEMS galvanometers can achieve faster scanning speeds and higher resolutions, enabling vehicle-mounted LiDAR to quickly and accurately capture changes in the surrounding environment and provide real-time and reliable data support for autonomous driving decisions.

[0033] MEMS galvanometer drivers can adjust the scanning range and density of the laser beam to adapt to different road environments and driving scenarios. For example, when driving on highways, the proportion of long-range scanning can be increased; while on urban roads, the scanning density of close-range and side views can be increased to better identify pedestrians and obstacles.

[0034] like Figure 1 and Figure 2 As shown, the first aspect of this utility model provides a MEMS galvanometer driver, which has the ability to control the scanning mode and scanning range through adjustable signals. It mainly includes key components such as FPGA circuit 1, DAC module 2, low-pass filter 3, high-voltage amplification module (or high-voltage amplification and filtering circuit) 4, RC low-pass filter bank 5, and high-voltage power supply circuit 6. These components work together to generate and process control signals.

[0035] FPGA circuit 1 is responsible for generating control signals for the MEMS galvanometer. When it is necessary to change the scanning mode, FPGA circuit 1 can change the waveform and amplitude of the control signal to realize different scanning methods and scanning ranges of the MEMS galvanometer.

[0036] DAC module 2 is connected to FPGA circuit 1 via SPI bus interface and is responsible for converting digital control signals into analog signals. This connection method can realize high-speed and efficient data transmission, thereby ensuring the real-time performance and accuracy of control signals.

[0037] DAC module 2 can be a multi-channel output device, which can simultaneously output multiple control signals to meet the control requirements for driving the X and Y axes.

[0038] Specifically, DAC module 2 includes at least two output channels, used to output X-axis drive control signals and Y-axis drive control signals respectively. This allows the MEMS mirror to scan simultaneously along the X and Y axes, achieving two-dimensional scanning. Furthermore, the multi-channel output design allows DAC module 2 to flexibly adjust the number and type of output signals according to application requirements, thus meeting different drive control needs.

[0039] Therefore, the multi-channel output design of DAC module 2 and its connection to the FPGA circuit 1 via the SPI bus enable the MEMS galvanometer driver to achieve flexible and efficient scanning control, thereby improving radar detection efficiency.

[0040] The high-voltage amplifier module 4 is connected to the low-pass filter 3 and is responsible for amplifying the filtered analog signal into a high-voltage signal.

[0041] The RC low-pass filter bank 5 is connected to the high-voltage amplifier module 4 to further reduce noise and improve signal stability.

[0042] The high-voltage power supply circuit 6 is connected to the high-voltage amplifier module 4 and is responsible for supplying power to the high-voltage amplifier module 4 to realize high-voltage signal output.

[0043] Here, through the coordinated operation of the aforementioned components, the MEMS galvanometer driver system can flexibly control the scanning mode and range according to application requirements, thereby improving radar detection efficiency.

[0044] In one embodiment of this invention, the FPGA circuit 1 can generate different control signals to meet the scanning requirements of the MEMS galvanometer in different application scenarios. For example, the FPGA circuit 1 can generate X-axis drive control signals and Y-axis drive control signals to realize the scanning control of the MEMS galvanometer on the X and Y axes.

[0045] In one embodiment of this utility model, the control signal generated by the FPGA circuit 1 can adjust the scanning mode and scanning range of the MEMS galvanometer by changing the waveform and amplitude.

[0046] In one embodiment of this invention, the DAC module 2 can be connected to the FPGA circuit 1 via an SPI bus interface to convert the digital control signals generated by the FPGA circuit 1 into analog signals. The DAC module 2 can be a multi-channel output device, such as two-channel or four-channel, to meet the drive control requirements of the X-axis and Y-axis. For example, the DAC module 2 can include at least two output channels, respectively used to output X-axis drive control signals and Y-axis drive control signals.

[0047] In one embodiment of this invention, a low-pass filter 3 can be connected to a DAC module 2 to filter out interference signals in the analog signal, helping to improve signal quality and stability. Correspondingly, the number of low-pass filters 3 is consistent with the number of channels in the DAC module 2, and the number of high-voltage amplifier modules 4 is consistent with the number of low-pass filters 3. The number of RC low-pass filter banks 5 and high-voltage power supply circuits 6 are also consistent with the number of high-voltage amplifier modules 4.

[0048] Specifically, during signal transmission, various factors may affect the signal and generate interference signals. These interference signals may adversely affect the signal quality and stability, thereby affecting the scanning effect of the MEMS galvanometer.

[0049] To address this problem, the low-pass filter 3 provided by this invention can effectively filter out interference signals in analog signals, thereby ensuring signal quality and stability.

[0050] For example, the low-pass filter 3 allows signals with frequencies below a set threshold to pass through, while blocking signals with frequencies above the set threshold from passing through, thereby filtering out interference signals.

[0051] This method enables the MEMS galvanometer driver to maintain good scanning performance under various environmental conditions, thereby improving radar detection efficiency.

[0052] In one embodiment of this invention, the high-voltage amplification module 4 can be connected to the low-pass filter 3 to amplify the filtered analog signal into a high-voltage signal. For example, the high-voltage amplification module 4 can amplify a 3.3V or 5V signal into a 180-200V high-voltage signal.

[0053] Specifically, the high-voltage amplifier module 4 can amplify a 3.3V or 5V signal into a 180-200V high-voltage signal, and the MEMS galvanometer driver can generate a high-voltage control signal, thereby realizing efficient driving of the MEMS galvanometer and improving radar detection efficiency.

[0054] This amplification process can be specifically achieved through the internal circuit design and component selection of the high-voltage amplification module 4. For example, the high-voltage amplification module 4 may include one or more amplifiers, which can be connected in series, parallel, or other ways to achieve the desired amplification factor. Furthermore, the high-voltage amplification module 4 may also include components for stabilizing the output signal, such as resistors, capacitors, and inductors. These components help reduce noise and fluctuations in the output signal, thereby improving signal stability and quality.

[0055] In one embodiment of this utility model, the RC low-pass filter bank 5 can be connected to the high-voltage amplifier module 4 to further reduce noise and improve signal stability and quality.

[0056] Specifically, noise may be generated during signal amplification, which can adversely affect signal quality and stability, thereby impacting the scanning performance of the MEMS galvanometer. To address this issue, the RC low-pass filter bank 5 provided in this invention can effectively reduce noise, thereby improving signal stability and quality.

[0057] Specifically, the RC low-pass filter bank 5 allows signals with frequencies below a set threshold to pass through, while blocking signals with frequencies above the set threshold from passing through, thereby reducing noise.

[0058] This method enables MEMS galvanometer drivers to maintain good scanning performance under various environmental conditions, thereby improving radar detection efficiency.

[0059] In one embodiment of this utility model, the high-voltage power supply circuit 6 can be connected to the high-voltage amplification module 4 to supply power to the high-voltage amplification module 4. For example, the input voltage of the high-voltage power supply circuit 6 can be +5V, and the output voltage can be 180~200V.

[0060] This power supply circuit design ensures that the high-voltage amplifier module 4 receives a stable power supply, thereby guaranteeing its normal operation.

[0061] For example, the high-voltage power supply circuit 6 may include one or more power modules, which can be connected in series, parallel, or other ways to achieve the required power supply voltage and current. The high-voltage power supply circuit 6 may also include components for stabilizing the output voltage, such as resistors, capacitors, and inductors. These components help reduce output voltage fluctuations, thereby improving power supply stability and quality, ensuring the normal operation of the MEMS galvanometer driver, and improving radar detection efficiency.

[0062] In one embodiment of this utility model, the FPGA circuit 1 adjusts the scanning mode of the MEMS galvanometer in different application scenarios by changing the waveform and amplitude of the control signal; the different application scenarios include long-distance scanning and short-distance scanning.

[0063] Specifically, FPGA circuit 1 can achieve different scanning modes and scanning ranges of the MEMS galvanometer by changing the waveform and amplitude of the control signal. For example, when long-range scanning is required, FPGA circuit 1 can generate a control signal with a larger amplitude and a slower frequency; while when short-range scanning is required, FPGA circuit 1 can generate a control signal with a smaller amplitude and a faster frequency. This flexible control method allows the MEMS galvanometer to adapt to different application scenarios, thereby improving radar detection efficiency.

[0064] In addition, FPGA circuit 1 can also generate X-axis drive control signals and Y-axis drive control signals. These two signals can control the scanning of the MEMS mirror on the X-axis and Y-axis, respectively. For example, when horizontal scanning is required, FPGA circuit 1 can generate an X-axis drive control signal; while when vertical scanning is required, FPGA circuit 1 can generate a Y-axis drive control signal.

[0065] This method enables two-dimensional scanning of MEMS galvanometers, thereby improving the scanning coverage and accuracy.

[0066] like Figure 2 As shown, in one embodiment of the present invention, the MEMS galvanometer driver further includes a control unit 7, which is at least used to send control commands to the FPGA circuit 1 according to application requirements to change the waveform and amplitude of the control signal.

[0067] Specifically, the control unit 7 can generate corresponding control commands according to the needs of the application scenario, and then send these control commands to the FPGA circuit 1 through a certain communication interface (e.g., serial interface, parallel interface, or wireless interface). After receiving the control commands, the FPGA circuit 1 can change the waveform and amplitude of the control signal according to these commands, thereby realizing different scanning modes and scanning ranges of the MEMS galvanometer.

[0068] For example, when the application requires long-distance scanning, the control unit 7 can generate corresponding control instructions to make the FPGA circuit 1 generate control signals with larger amplitude and slower frequency; while when the application requires short-distance scanning, the control unit 7 can generate corresponding control instructions to make the FPGA circuit 1 generate control signals with smaller amplitude and faster frequency.

[0069] This method allows the MEMS galvanometer driver to flexibly adjust the scanning mode and range according to application requirements, thereby improving radar detection efficiency.

[0070] Furthermore, the control unit 7 can also receive external environmental information and automatically adjust the scanning mode and scanning range of the MEMS galvanometer based on this information.

[0071] Specifically, the control unit 7 can receive external environmental information through a sensor (e.g., a distance sensor, a light sensor, or a temperature sensor), and then generate corresponding control commands based on this information. These commands are then sent to the FPGA circuit 1 via a communication interface. Upon receiving these commands, the FPGA circuit 1 can change the waveform and amplitude of the control signal according to these commands, thereby automatically adjusting the scanning mode and scanning range of the MEMS galvanometer.

[0072] For example, when the external environment information shows that the target object is far away, the control unit 7 can generate corresponding control commands to make the FPGA circuit 1 generate control signals with larger amplitude and slower frequency to achieve long-distance scanning; while when the external environment information shows that the target object is close, the control unit 7 can generate corresponding control commands to make the FPGA circuit 1 generate control signals with smaller amplitude and faster frequency to achieve short-distance scanning.

[0073] This method enables the MEMS galvanometer driver to automatically adjust the scanning mode and range based on external environmental information, thereby improving radar detection efficiency.

[0074] A second aspect of this invention provides an on-board lidar system, comprising: a MEMS mirror; and a MEMS mirror driver as described in any of the above embodiments, wherein the MEMS mirror driver is used to drive the MEMS mirror.

[0075] Specifically, MEMS galvanometer drivers can be used in radar detection, such as automotive lidar. Radar detection is a widely used technology that can be used to detect and track target objects. In radar detection, MEMS galvanometer drivers can change the direction of the radar laser beam by controlling the scanning method and range of the MEMS galvanometer. This flexible control method allows the radar to flexibly adjust the detection range and direction according to actual needs, thereby improving detection efficiency.

[0076] Therefore, by flexibly controlling the scanning mode and range of the MEMS galvanometer, the MEMS galvanometer driver can improve the efficiency and accuracy of radar detection, thereby improving the overall performance of the radar system.

[0077] The third aspect of this utility model provides an automobile, including the vehicle-mounted lidar or MEMS galvanometer driver described in the above embodiments.

[0078] The solution of this application has been described in detail above. Specific examples have been used to illustrate the principles and implementation methods of this application. The description of the above embodiments is only for the purpose of helping to understand the method and core ideas of this application. At the same time, for those skilled in the art, there will be changes in the specific implementation methods and application scope based on the ideas of this application. Therefore, the content of this specification should not be construed as a limitation of this application.

[0079] Throughout this specification, the terms "an embodiment," "embodiment," or "specific embodiment" refer to a particular feature, structure, or characteristic described in connection with an embodiment that is included in at least one embodiment of this application, but not necessarily in all embodiments. Therefore, the various representations of the phrases "in one embodiment," "in an embodiment," or "in a specific embodiment" in different places throughout this specification do not necessarily refer to the same embodiment. Furthermore, a particular feature, structure, or characteristic of any specific embodiment of this application may be combined with one or more other embodiments in any suitable manner. It should be understood that other variations and modifications of the embodiments described and illustrated herein may be based on the teachings herein and will be considered part of the spirit and scope of this application.

[0080] It should also be understood that one or more of the elements shown in the figures may be implemented in a more separate or more integrated manner, or may be removed because they are not operable in one embodiment of the invention, or may be provided because they may be useful for a particular application.

[0081] Furthermore, unless otherwise expressly stated, any arrows in the accompanying drawings should be considered illustrative only and not limiting. Additionally, unless otherwise stated, the term "or" as used herein is generally intended to mean "and / or". Where a term is anticipated to provide a separation or combination capability that is unclear, a combination of components or steps will also be considered as indicated.

Claims

1. A MEMS galvanometer driver, characterized in that, include: FPGA circuitry is used to generate control signals for MEMS mirrors. The DAC module is connected to the FPGA circuit via an SPI bus interface and is used to convert the control signals into analog signals. A low-pass filter, connected to the DAC module, is used to filter out interference signals in the analog signal; A high-voltage amplifier module, connected to the low-pass filter, is used to amplify the filtered analog signal into a high-voltage signal; as well as A high-voltage power supply circuit, connected to the high-voltage amplification module, is used to supply power to the high-voltage amplification module; The FPGA circuit achieves different scanning modes and scanning ranges of the MEMS galvanometer by changing the waveform and amplitude of the control signal.

2. The MEMS galvanometer driver according to claim 1, characterized in that, It also includes an RC low-pass filter bank, which is connected to the high-voltage amplifier module to reduce noise.

3. The MEMS galvanometer driver according to claim 1, characterized in that, The high-voltage amplification module amplifies the 3.3V or 5V signal into a high-voltage signal of 180~200V.

4. The MEMS galvanometer driver according to claim 1, characterized in that, The control signals generated by the FPGA circuit include X-axis drive control signals and Y-axis drive control signals.

5. The MEMS galvanometer driver according to claim 4, characterized in that, The DAC module includes at least two output channels, which are used to output X-axis drive control signals and Y-axis drive control signals, respectively.

6. The MEMS galvanometer driver according to claim 1, characterized in that, The FPGA circuit adjusts the scanning mode of the MEMS galvanometer in different application scenarios by changing the waveform and amplitude of the control signal; the different application scenarios include long-distance scanning and short-distance scanning.

7. The MEMS galvanometer driver according to claim 1, characterized in that, It also includes a control unit for sending control commands to the FPGA circuit according to application requirements to change the waveform and amplitude of the control signal.

8. The MEMS galvanometer driver according to claim 7, characterized in that, The control unit is also used to receive external environmental information and automatically adjust the scanning mode and scanning range of the MEMS galvanometer according to the external environmental information.

9. A vehicle-mounted lidar, characterized in that, include: MEMS galvanometer; And the MEMS mirror driver as described in any one of claims 1-8, wherein the MEMS mirror driver is used to drive the MEMS mirror.

10. A car, characterized in that, Includes the MEMS galvanometer driver as described in any one of claims 1-8 or the lidar as described in claim 9.

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