Condensation module convenient for water-gas separation and tail gas treatment equipment

Abstract

The utility model provides a condensation module convenient for water-gas separation and tail gas treatment equipment. The condensation module comprises a first condensation cavity, a second condensation cavity and a third condensation cavity which are sequentially connected from bottom to top, the inner diameter of the first condensation cavity is gradually reduced from bottom to top; the inner diameter of the third condensation cavity is gradually increased from bottom to top; a cooling water pipe and condensation blades are arranged in the second condensation cavity, and the multiple sets of condensation blades are obliquely arranged on the circumferential face of the cooling water pipe around the axis perpendicular to the cooling water pipe. Cold water circulates in the cooling water pipe, so that the temperature in the pipe section can be effectively reduced, and moisture in tail gas is promoted to be condensed; the condensation blades are obliquely arranged around the axis perpendicular to the cooling water pipe, so that the contact area between tail gas and the condensation blades is increased, and the condensation effect is improved; meanwhile, the inclined design of the condensing blades is beneficial to guiding the tail gas to form vortex in the second pipe section, the retention time of the tail gas in the second pipe section is prolonged, the condensing effect is further improved, and moisture in the tail gas is reduced.

Description

Technical Field

[0001] This application relates to the field of semiconductor exhaust gas treatment equipment technology, and in particular to a condensation module and exhaust gas treatment equipment that facilitates water-gas separation. Background Technology

[0002] In semiconductor manufacturing, a large amount of exhaust gas is typically generated, and some processes produce exhaust gas containing significant amounts of flammable gases. A common method for treating flammable gases is combustion, converting them into harmless substances. However, the exhaust gas after combustion is extremely hot, necessitating cooling. A common method is water washing, where the evaporation of water removes a large amount of heat, thus achieving cooling. However, water washing significantly increases the moisture content of the exhaust gas. Directly discharging this water-laden exhaust gas into downstream processes can easily lead to equipment corrosion and shorten equipment lifespan. Therefore, it is necessary to dry the washed exhaust gas to reduce its moisture content. Utility Model Content

[0003] To address the aforementioned technical problems, this application provides a condensation module and exhaust gas treatment device that facilitates water-gas separation.

[0004] In a first aspect, this application provides a condensation module that facilitates water-vapor separation. The condensation module includes a first condensation chamber, a second condensation chamber, and a third condensation chamber connected sequentially from bottom to top. The inner diameter of the first condensation chamber gradually decreases from bottom to top, and the inner diameter of the third condensation chamber gradually increases from bottom to top. The second condensation chamber is provided with a cooling water pipe and condensation blades. The condensation blades are in multiple sets, and the multiple sets of condensation blades are obliquely arranged on the circumferential surface of the cooling water pipe around an axis perpendicular to the cooling water pipe.

[0005] In some embodiments of this application, a first condensate return channel is provided on the inner wall of the second condensation chamber. The first condensate return channel is in multiple sets, and the multiple sets of the first condensate return channels are arranged at intervals along the inner wall of the second condensation chamber.

[0006] In some embodiments of this application, a second condensate return groove extending along the inclined direction of the condensate blade is provided on the upper and lower surfaces of the condensate blade.

[0007] In some embodiments of this application, a cooling pipe section is sleeved outside the second condensing chamber, and a cooling space is formed between the cooling pipe section and the second condensing chamber, in which cooling water flows.

[0008] In some embodiments of this application, multiple sets of the condenser blades are spirally arranged with the cooling water pipe as the axis of rotation.

[0009] In some embodiments of this application, a porous filter plate is provided between the second condensing chamber and the third condensing chamber, and the porous filter plate is provided with packing material.

[0010] In some embodiments of this application, an ultrasonic generator is further provided outside the third condensation chamber.

[0011] In some embodiments of this application, the bottom surface of the condenser blade is provided with spaced protrusions.

[0012] A second aspect of this application provides an exhaust gas treatment device, including the aforementioned condensation module that facilitates water-gas separation.

[0013] Compared with the prior art, this utility model has the following advantages and beneficial effects: The condensation module of this application includes a first condensation chamber, a second condensation chamber, and a third condensation chamber connected sequentially from bottom to top; the inner diameter of the first condensation chamber gradually decreases from bottom to top; the inner diameter of the third condensation chamber gradually increases from bottom to top. The first, second, and third condensation chambers form a Venturi structure, which can accelerate the flow velocity of the exhaust gas in the condensation chamber; the second condensation chamber is equipped with a cooling water pipe and condensing blades, and multiple sets of condensing blades are inclined around an axis perpendicular to the cooling water pipe on the circumferential surface of the cooling water pipe. The cooling water pipe, through circulating cold water, can effectively reduce the temperature in the pipe section and promote the condensation of moisture in the exhaust gas; the condensing blades are inclined around an axis perpendicular to the cooling water pipe, increasing the contact area between the exhaust gas and the condensing blades and improving the condensation effect; at the same time, the inclined design of the condensing blades helps to guide the exhaust gas to form a vortex in the second pipe section, increasing the residence time of the exhaust gas in the second pipe section, further improving the condensation effect and reducing the moisture in the exhaust gas.

[0014] It should be understood that the above general description and the following detailed description are merely exemplary and explanatory, and do not limit this document. Attached Figure Description

[0015] The accompanying drawings, which form part of this document, are used to provide a further understanding of the document. The illustrative embodiments and descriptions herein are used to explain the document and do not constitute an undue limitation thereof. In the drawings:

[0016] Figure 1 This is a schematic diagram of the structure of a condensation module that facilitates water vapor separation, provided in an exemplary embodiment of this application;

[0017] Figure 2 This is a front sectional view of a condensation module that facilitates water vapor separation, provided in an exemplary embodiment of this application;

[0018] Figure 3 This is a top cross-sectional view of a condensation module that facilitates water vapor separation, provided in an exemplary embodiment of this application.

[0019] Figure 4 This is a schematic diagram of the structure of multiple sets of condenser blades provided in an exemplary embodiment of this application.

[0020] In the picture:

[0021] 101. First condensing chamber; 102. Second condensing chamber; 103. Third condensing chamber; 104. Cooling pipe section; 105. Cooling water pipe; 106. Condensing blades; 107. Porous filter plate; 108. Second condensate return tank. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. It should be noted that, unless otherwise specified, the embodiments and features in the embodiments of this application can be arbitrarily combined with each other.

[0023] In semiconductor manufacturing, a large amount of exhaust gas is typically generated, and some processes produce exhaust gas containing significant amounts of flammable gases. A common method for treating flammable gases is combustion, converting them into harmless substances. However, the exhaust gas after combustion is extremely hot, necessitating cooling. A common method is water washing, where the evaporation of water removes a large amount of heat, thus achieving cooling. However, water washing significantly increases the moisture content of the exhaust gas. Directly discharging this water-laden exhaust gas into downstream processes can easily lead to equipment corrosion and shorten equipment lifespan. Therefore, it is necessary to dry the washed exhaust gas to reduce its moisture content.

[0024] Based on this, an exemplary embodiment of this application provides a condensation module that facilitates water-gas separation. The condensation module includes a first condensation chamber, a second condensation chamber, and a third condensation chamber connected sequentially from bottom to top. The inner diameter of the first condensation chamber gradually decreases from bottom to top; the inner diameter of the third condensation chamber gradually increases from bottom to top. The first, second, and third condensation chambers form a Venturi structure, which can accelerate the flow velocity of the exhaust gas within the condensation chambers. The second condensation chamber is equipped with a cooling water pipe and condensing blades. Multiple sets of condensing blades are inclined around an axis perpendicular to the cooling water pipe on its circumferential surface. The cooling water pipe, through circulating cold water, can effectively reduce the temperature within the pipe section, promoting the condensation of moisture in the exhaust gas. The inclined arrangement of the condensing blades around an axis perpendicular to the cooling water pipe increases the contact area between the exhaust gas and the condensing blades, improving the condensation effect. Simultaneously, the inclined design of the condensing blades helps guide the exhaust gas to form a vortex within the second pipe section, increasing the residence time of the exhaust gas within the second pipe section, further improving the condensation effect and reducing the moisture in the exhaust gas.

[0025] An exemplary embodiment of this application provides a condensation module that facilitates water vapor separation, such as... Figure 1 and 2 As shown, the condensation module includes a first condensation chamber 101, a second condensation chamber 102, and a third condensation chamber 103 connected sequentially from bottom to top. Exhaust gas passes through these chambers sequentially from the bottom to condense water vapor, reducing the water vapor content and drying the exhaust gas. The inner diameter of the first condensation chamber 101 gradually increases from bottom to top; the inner diameter of the third condensation chamber 103 gradually decreases from bottom to top; and the inner diameter of the second condensation chamber 102 remains constant. The first, second, and third condensation chambers 101, 102, and 103 form a Venturi structure, which accelerates the flow velocity of the exhaust gas within the condensation chambers. The second condensation chamber 102 is equipped with a cooling water pipe 105 and condensing blades 106. The cooling water pipe 105 is externally connected to a valve and a cooling water circulation system to circulate the cooling water. The cooling water circulation system may include refrigeration components to cool the water in the circulation system. The built-in cooling water pipe 105 can effectively reduce the temperature within the pipe section and promote the condensation of moisture in the exhaust gas. For example... Figure 3 As shown, there are multiple sets of condensing blades 106. These multiple sets of condensing blades 106 are inclinedly arranged on the circumferential surface of the cooling water pipe 105 around an axis perpendicular to the cooling water pipe 105. The multiple sets of condensing blades 106 can partially overlap, so that a slit is formed between two adjacent condensing blades 106 to allow the exhaust gas to pass through. The slit is inclined, thus increasing the contact area between the exhaust gas and the condensing blades 106 and improving the condensation effect. At the same time, the inclined design of the condensing blades 106 helps to guide the exhaust gas to form a vortex in the second condensing chamber 102, increasing the residence time of the exhaust gas in the second condensing chamber 102, further improving the condensation effect and reducing the moisture in the exhaust gas.

[0026] To facilitate the downward flow of condensed water droplets, such as Figure 3 As shown, second condensate return channels 108 extending along the inclined direction of the condensate blade 106 are provided on the upper and lower surfaces of the condenser blade 106; multiple sets of first condensate return channels are provided at the positions where the inner wall of the second condensation chamber 102 contacts the condenser blade 106, and the first condensate return channels are arranged at intervals along the inner wall of the second condensation chamber 102. In this way, water droplets condensed on the upper and lower surfaces of the condenser blade 106 can fall downwards into the second water washing module through the second condensate return channels 108, or flow into the first condensate return channels and then flow into the second water washing module, accelerating the discharge of condensate.

[0027] In an exemplary embodiment, the bottom surface of the condenser blade 106 is provided with spaced protrusions. The protrusions can increase the surface area of ​​the condenser blade 106 to increase the contact area with the exhaust gas. At the same time, the design of the protrusions can increase the probability of water vapor in the exhaust gas colliding with the protrusions, thereby effectively improving the condensation effect.

[0028] In one embodiment, such as Figure 4 As shown, multiple sets of condensing blades 106 are spirally arranged around the cooling water pipe 105 as the rotation axis. The multiple sets of condensing blades 106 form a multi-layer condensing blade group. Each layer is provided with multiple condensing blades 106, which makes the exhaust gas spiral upward and form a swirling flow in the second condensing chamber 102, increasing the contact surface between the exhaust gas and the condensing blades 106, and further improving the condensation effect.

[0029] In one embodiment, such as Figure 2 As shown, in order to improve the condensation effect, a cooling pipe section 104 is sleeved on the outside of the second condensation chamber 102, and a cooling space is formed between the cooling pipe section 104 and the second condensation chamber 102. The cooling pipe section 104 is connected to a circulation system, and cooling water flows in the cooling space. In this way, the second condensation chamber 102 can be cooled down, further improving the condensation effect of moisture in the exhaust gas and reducing the moisture content in the exhaust gas.

[0030] In one embodiment, reference continues to be made to Figure 2 To improve the dryness of the exhaust gas, a porous filter plate 107 is installed between the second condensing chamber 102 and the third condensing chamber 103. The porous filter plate 107 is filled with packing material to further enhance the condensation effect. To prevent impurities in the exhaust gas from clogging the porous filter plate 107, an ultrasonic generator is also installed outside the third condensing chamber 103. The ultrasonic generator can periodically or when the equipment is not in operation vibrate the third condensing chamber 103 to remove impurities from the porous filter plate.

[0031] An exemplary embodiment of this application provides an exhaust gas treatment device, which includes a condensation module that facilitates water vapor separation as described in any of the above embodiments. Thus, the condensation module can fully remove water vapor from the exhaust gas treated by the exhaust gas treatment device, thereby achieving water vapor separation and drying the exhaust gas.

[0032] In this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that an article or device that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or device. Without further limitation, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the article or device that includes said element.

[0033] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0034] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if these modifications and variations fall within the scope of the claims of this application and their equivalents, the intent of this application also includes these modifications and variations.

Claims

1. A condensation module for easy water-vapor separation, characterized in that, The condensation module includes a first condensation chamber, a second condensation chamber, and a third condensation chamber connected sequentially from bottom to top; the inner diameter of the first condensation chamber gradually decreases from bottom to top; the inner diameter of the third condensation chamber gradually increases from bottom to top; the second condensation chamber is provided with a cooling water pipe and condensation blades, and there are multiple sets of condensation blades, which are inclinedly arranged on the circumferential surface of the cooling water pipe around an axis perpendicular to the cooling water pipe.

2. The condensation module for easy water-vapor separation according to claim 1, characterized in that, The inner wall of the second condensing chamber is provided with a first condensate return channel. There are multiple sets of the first condensate return channels, which are arranged at intervals along the inner wall of the second condensing chamber.

3. The condensation module for easy water-vapor separation according to claim 2, characterized in that, The upper and lower surfaces of the condensing blade are provided with a second condensate return groove extending along the tilting direction of the condensing blade.

4. The condensation module for easy water-vapor separation according to claim 1, characterized in that, A cooling pipe section is sleeved on the outside of the second condensation chamber, and a cooling space is formed between the cooling pipe section and the second condensation chamber, in which cooling water flows.

5. The condensation module for easy water-vapor separation according to claim 1, characterized in that, The multiple sets of condenser blades are spirally arranged with the cooling water pipe as the axis of rotation.

6. The condensation module for easy water-vapor separation according to claim 1, characterized in that, A porous filter plate is provided between the second condensation chamber and the third condensation chamber, and the porous filter plate is provided with packing material.

7. The condensation module for easy water-vapor separation according to claim 1, characterized in that, An ultrasonic generator is also installed outside the third condensation chamber.

8. The condensation module for easy water-vapor separation according to claim 1, characterized in that, The bottom surface of the condenser blade is provided with spaced protrusions.

9. A tail gas treatment device, characterized in that, Includes a condensation module that facilitates water-vapor separation as described in any one of claims 1 to 8.

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