Target back plate brazing tool for large-size sputtering target material
By designing a brazing fixture for the backplate of a large-size sputtering target and utilizing the screw adjustment mechanism of the outer and inner ring support seats, the problems of assembly clearance control and hole position leakage of the large-size target backplate were solved, and high-precision target backplate brazing was achieved.
Patent Information
- Application Number
- CN202423149687.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-20
- Publication Date
- 2025-11-14
- Estimated Expiration
- 2034-12-20
AI Technical Summary
In the existing technology, the target backplate for brazing oxygen-free copper and stainless steel is relatively small. For target backplates with a diameter of more than 24 inches, it is difficult to control the flatness accuracy of the large surface and the uniformity of the assembly gap, and there is also the problem of leakage at the hole position.
A brazing fixture for a target backplate for large-size sputtering targets was designed, including a main body, an outer ring support base, and an inner ring support base. Through the outer ring fastening adjustment mechanism and the inner ring fastening adjustment mechanism, the individual clamping of each area of the target backplate and the control of the assembly gap are achieved by the cooperation of the screw and the threaded hole.
This improved the consistency of assembly clearance and clamping effect in various areas of the target backplate, reduced the risk of leakage at hole locations, and increased the pass rate of brazing of large-size target backplates.
Smart Images
Figure CN223544301U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of brazing technology for large-size semiconductor target backplates, specifically a brazing fixture for large-size sputtering target backplates. Background Technology
[0002] In semiconductor manufacturing, a target backplate typically refers to the structure used to support the target material, which plays a crucial role in the deposition or etching process. Target backplates are usually made of conductive materials to ensure effective current conduction during deposition, while also possessing good mechanical strength and thermal conductivity to withstand the heat and stress generated during processing. Copper is an excellent conductor of electricity, effectively conducting current and ensuring uniform excitation of the target material during deposition. Its high thermal conductivity also facilitates rapid heat dissipation during deposition, preventing overheating of the target material and thus improving deposition quality and stability. Copper also offers excellent machinability, allowing for easy fabrication into the desired target backplate shape and size. However, using only copper for the target backplate would be relatively expensive. To control costs, oxygen-free copper is typically brazed with stainless steel.
[0003] Based on the above, the inventors have discovered the following problems: the target backplate for current oxygen-free copper and stainless steel brazing is relatively small. For target backplates with a diameter exceeding 24 inches, the first-pass yield is low due to factors such as the difficulty in controlling the flatness accuracy of the large surface machining and the difficulty in ensuring the uniformity of the assembly gap between parts. In particular, there is a mounting hole in the middle that needs to penetrate the double-layer plate, and the hole is very prone to leakage. Traditional tooling uses full-surface clamping, which cannot effectively solve the problem.
[0004] Therefore, in view of this, we have studied and improved the existing structure and its shortcomings, and provided a brazing fixture for the backplate of a large-size sputtering target, in order to achieve a more practical purpose. Utility Model Content
[0005] The purpose of this invention is to provide a brazing fixture for the backplate of a large-size sputtering target, so as to solve the problems mentioned in the background art.
[0006] In view of the above problems, the technical solution proposed by this utility model is as follows:
[0007] A brazing fixture for a large-size sputtering target backplate includes a main body, which comprises a base and a top cover. An outer ring support is mounted on the upper surface of the base, and several inner ring support seats are mounted on the top surface of the base. The top cover has an outer ring fastening and adjustment mechanism, which includes several first screws. Each of the first screws has an outer ring pressure block connected to its bottom end. Each of the outer ring pressure blocks has an outer ring pressure ring at its bottom end, located directly above the outer ring support seat. The top cover also has an inner ring fastening and adjustment mechanism, which includes several second screws. Each of the second screws has an inner ring pressure block connected to its bottom end, located directly above the inner ring support seats.
[0008] Furthermore, the top surface of the upper cover is provided with a plurality of first threaded holes, and the bottom ends of the plurality of first screws extend to the outside through the plurality of first threaded holes and are threadedly connected to the plurality of first threaded holes respectively.
[0009] The beneficial effect of adopting the above-mentioned further solution is that, through the cooperation of the first threaded hole and the first screw, when the first screw is rotated, the first screw will move vertically and linearly under the action of the meshing connection between the internal thread of the first threaded hole and the external thread of the first screw, thereby adjusting the downward pressure of the outer ring pressure block. When the outer ring pressure block moves downward, it can press on the outer ring pressure ring. By setting multiple first screws, the downward pressure of several outer ring pressure blocks can be adjusted individually, and the distribution number of the first screws can also be adjusted according to actual needs.
[0010] Furthermore, the top surface of the cover has a plurality of second threaded holes near the center, and the bottom ends of the plurality of second screws extend outward through the plurality of second threaded holes and are threadedly connected to the plurality of second threaded holes respectively.
[0011] The beneficial effect of adopting the above-mentioned further solution is that, through the cooperation of the second threaded hole and the second screw, when the second screw is rotated, the second screw will move vertically and linearly under the action of the meshing connection between the internal thread of the second threaded hole and the external thread of the second screw, thereby adjusting the downward pressure of the inner ring pressure block. When the inner ring pressure block moves downward, it can press on the inner ring position of the target back plate to be welded. By setting multiple second screws, the downward pressure of several inner ring pressure blocks can be adjusted individually, and the distribution number of the second screws can also be adjusted according to actual needs.
[0012] Furthermore, the upper end of the cover has four through holes near the first threaded hole, and the top surface of the base has four insertion holes. Each of the four insertion holes has an insertion rod inside. The upper end of the insertion rod is connected to a connecting rod. The outside of the connecting rod has several threads, and the external threads of the connecting rod are connected to a support member. The upper end of the connecting rod extends through the through hole to the outside and is threaded to a locking nut.
[0013] The beneficial effects of adopting the above-mentioned further solution are that, through the cooperation of the connecting rod and the support, since the connecting rod is provided with several screws on its outside, the position of the support on the connecting rod can be adjusted when the support is rotated. When the support moves up or down, the through hole is aligned with the connecting rod and inserted, so that the bottom end of the top cover fits with the top end of the support. Then, the connecting rod is assembled with the locking nut to limit the position of the top cover, so as to adjust the distance between the base and the top cover according to the thickness requirements of the product, thereby improving the compatibility of the tooling. At the same time, through the cooperation of the insertion rod and the insertion hole, the connecting rod and the base can be disassembled, so as to replace the connecting rod of different lengths.
[0014] Furthermore, the upper end of the support member is fitted with the bottom end of the cover, and the bottom end of the locking nut is fitted with the upper end of the cover.
[0015] The beneficial effect of adopting the above-mentioned further solution is that, through the cooperation of the support and the locking nut, the upper cover is limited between the support and the locking nut.
[0016] Furthermore, the insertion rod is clearance-fitted with the insertion hole, and the cross-section of the insertion rod is gear-shaped.
[0017] The beneficial effect of adopting the above-mentioned further solution is that, since the cross-section of the insertion rod is gear-shaped and the insertion rod is fitted with the insertion hole with a clearance, when the insertion rod is inserted into the insertion hole, the connecting rod is limited and fixed on the base, thereby preventing the connecting rod from being displaced during the rotation of the support.
[0018] Furthermore, the outer ring support is in the shape of a hollow ring, and the inner ring support is in the shape of a circular block.
[0019] The beneficial effect of adopting the above-mentioned further solution is that by setting the outer ring support base as a hollow ring and the inner ring support base as a circular block, it is convenient to support the outer ring and inner ring of the target backplate respectively.
[0020] Compared with the prior art, the beneficial effects of this utility model are as follows: This brazing fixture for the target backplate of a large-size sputtering target uses an outer ring support and an inner ring support to support the target backplate. By setting an outer ring fastening adjustment mechanism and an inner ring fastening adjustment mechanism, the torque values of several first screws and several second screws are controlled respectively to achieve consistency in the assembly gap of each area of the target backplate. When the first screw is rotated, the engagement between the inner thread of the first threaded hole and the outer thread of the first screw causes the first screw to move vertically in a straight line, thereby adjusting the downward pressure of the outer ring pressure block. When the outer ring pressure block moves downward, it can press against the outer ring pressure ring, thus pressing the outer ring area of the target backplate. When the second screw is rotated, the engagement between the inner thread of the second threaded hole and the outer thread of the second screw causes the second screw to move vertically in a straight line, thereby... This allows for adjustment of the downward pressure of the inner ring pressure block. When the inner ring pressure block moves downward, it can press against the inner ring position of the target back plate to be welded. Through the setting of multiple first screws and multiple second screws, the downward pressure of several outer ring pressure blocks and several inner ring pressure blocks can be adjusted individually. At the same time, the distribution of the first screws and second screws can be adjusted according to actual needs, thereby achieving single-point clamping and controlling the assembly gap of each area of the target back plate. Through the cooperation of the connecting rod and the support, since there are several screws on the outside of the connecting rod, when the support is rotated, the position of the support on the connecting rod can be adjusted. When the support moves up or down, the through hole is aligned with the connecting rod and inserted, so that the bottom end of the top cover fits with the top end of the support. Then, the connecting rod is assembled with the locking nut to limit the top cover, so as to adjust the distance between the base and the top cover according to the thickness requirements of the product. Attached Figure Description
[0021] Figure 1 A three-dimensional structural schematic diagram of a target backplate brazing fixture for a large-size sputtering target provided by this utility model;
[0022] Figure 2 An exploded three-dimensional structural diagram of the base of a target backplate brazing fixture for a large-size sputtering target provided by this utility model;
[0023] Figure 3 A three-dimensional structural schematic diagram of the top cover of a target backplate brazing fixture for a large-size sputtering target provided by this utility model;
[0024] Figure 4 A three-dimensional structural schematic diagram of the outer ring fastening and adjustment mechanism of a target backplate brazing fixture for a large-size sputtering target provided by this utility model;
[0025] Figure 5 A three-dimensional structural diagram of the inner ring fastening and adjustment mechanism of a target backplate brazing fixture for a large-size sputtering target provided by this utility model.
[0026] In the diagram: 100, main body; 1001, base; 1002, top cover; 1003, outer ring support; 1004, inner ring support; 1005, first threaded hole; 1006, second threaded hole; 1007, through hole; 1008, insertion hole; 1009, insertion rod; 1010, connecting rod; 1011, support component; 1012, locking nut; 200, outer ring fastening and adjustment mechanism; 2001, first screw; 2002, outer ring pressure block; 2003, outer ring pressure ring; 300, inner ring fastening and adjustment mechanism; 3001, second screw; 3002, inner ring pressure block. Detailed Implementation
[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0028] Please see Figures 1-5 This utility model provides a technical solution: a brazing fixture for a target backplate of a large-size sputtering target, comprising a main body 100, the main body 100 including a base 1001 and a top cover 1002, an outer ring support seat 1003 mounted on the upper end surface of the base 1001, and a plurality of inner ring support seats 1004 mounted on the top surface of the base 1001, the top cover 1002 being provided with an outer ring fastening and adjustment mechanism 200, the outer ring fastening and adjustment mechanism 200 including a plurality of first screws 2001, the bottom ends of the plurality of first screws 2001 being connected to an outer ring pressure block 2002, the bottom ends of the plurality of outer ring pressure blocks 2002 being provided with an outer ring pressure ring 2003, the outer ring pressure ring 2003 being located directly above the outer ring support seat 1003. The upper cover 1002 is provided with an inner ring fastening adjustment mechanism 300. The inner ring fastening adjustment mechanism 300 includes several second screws 3001. The bottom ends of several second screws 3001 are connected to several inner ring pressure blocks 3002. The several inner ring pressure blocks 3002 are located directly above several inner ring support seats 1004. Through the cooperation of the outer ring support seat 1003 and the inner ring support seat 1004, the target back plate is supported. By setting the outer ring fastening adjustment mechanism 200 and the inner ring fastening adjustment mechanism 300, the outer ring area and the inner ring area of the target back plate to be welded can be pressed respectively. At the same time, the outer ring or inner ring area of the target back plate can be pressed according to the actual welding needs.
[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0030] Please see Figures 1-5 This utility model provides a technical solution: A plurality of first threaded holes 1005 are provided on the top surface of the upper cover 1002. The bottom ends of a plurality of first screws 2001 extend outward through the plurality of first threaded holes 1005 and are threadedly connected to each of the first threaded holes 1005. A plurality of second threaded holes 1006 are provided near the center of the top surface of the upper cover 1002. The bottom ends of a plurality of second screws 3001 extend outward through the plurality of second threaded holes 1006 and are threadedly connected to each of the second threaded holes 1006. By controlling the torque values of the plurality of first screws 2001 and the plurality of second screws 3001 respectively, the consistency of the assembly gap in each area of the target backplate is achieved. When the first screw 2001 is rotated, under the action of the meshing connection between the internal thread of the first threaded hole 1005 and the external thread of the first screw 2001, the first screw 2001 moves vertically and linearly, thereby causing the outer ring pressure block 2... The downward pressure of the inner ring pressure block 3002 is adjusted. When the outer ring pressure block 2002 moves downward, it can press against the outer ring pressure ring 2003, thereby pressing the outer ring area of the target back plate. When the second screw 3001 is rotated, the second screw 3001 moves vertically and linearly under the action of the meshing connection between the internal thread of the second threaded hole 1006 and the external thread of the second screw 3001, thereby adjusting the downward pressure of the inner ring pressure block 3002. When the inner ring pressure block 3002 moves downward, it can press against the inner ring position of the target back plate to be welded. Through the setting of multiple first screws 2001 and multiple second screws 3001, the downward pressure of several outer ring pressure blocks 2002 and several inner ring pressure blocks 3002 can be adjusted individually. At the same time, the distribution of the first screws 2001 and the second screws 3001 can be adjusted according to actual needs, thereby achieving single-point pressing and controlling the assembly gap of each area of the target back plate.
[0031] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.
[0032] Please see Figures 1-5 This utility model provides a technical solution: Four through holes 1007 are provided at the upper end of the top cover 1002 near the first threaded hole 1005; four insertion holes 1008 are provided on the top surface of the base 1001; each of the four insertion holes 1008 has an insertion rod 1009 inside; a connecting rod 1010 is connected to the upper end of the insertion rod 1009; the connecting rod 1010 has several threads on its exterior, and a support member 1011 is connected to the external threads of the connecting rod 1010; the upper end of the connecting rod 1010 extends through the through holes 1007 to the outside. The upper end of the support member 1011 is fitted with the lower end of the upper cover 1002, and the lower end of the locking nut 1012 is fitted with the upper end of the upper cover 1002. The insertion rod 1009 is clearance-fitted with the insertion hole 1008, and the cross-section of the insertion rod 1009 is gear-shaped. The outer ring support 1003 is hollow ring-shaped, and the inner ring support 1004 is circular block-shaped. Through the cooperation of the connecting rod 1010 and the support member 1011, since the connecting rod 1010 has several screws on its outside, when it rotates... When the support member 1011 is moved, its position on the connecting rod 1010 is adjustable. After the support member 1011 moves up or down, the through hole 1007 is aligned and inserted with the connecting rod 1010, so that the bottom end of the upper cover 1002 fits against the upper end of the support member 1011. Then, the connecting rod 1010 is assembled with the locking nut 1012 to limit the upper cover 1002, so that the distance between the base 1001 and the upper cover 1002 can be adjusted according to the thickness requirements of the product, thereby improving the tooling. The compatibility is ensured, and the use of the insertion rod 1009 and the socket 1008 makes the connecting rod 1010 detachable from the base 1001, so as to replace the connecting rod 1010 of different lengths. Since the cross-section of the insertion rod 1009 is gear-shaped and the insertion rod 1009 and the socket 1008 are in clearance fit, when the insertion rod 1009 is inserted into the socket 1008, the connecting rod 1010 is limited and fixed on the base 1001, thereby preventing the connecting rod 1010 from being displaced during the rotation of the support 1011.
[0033] Specifically, the working principle of this large-size sputtering target backplate brazing fixture is as follows: First, the target backplate to be welded is placed on the outer ring support 1003 and the inner ring support 1004 to provide support. Then, the outer ring pressure ring 2003 is placed on the upper surface of the target backplate. Through the cooperation of the connecting rod 1010 and the support member 1011, and because the connecting rod 1010 has several screws on its exterior, rotating the support member 1011 adjusts its position on the connecting rod 1010. When the support member 1011 moves up or down, the through hole 1007 connects with the connecting rod 1011. The rod 1010 is aligned and inserted so that the bottom end of the upper cover 1002 fits against the upper end of the support 1011. Then, the connecting rod 1010 is assembled with the locking nut 1012 to limit the upper cover 1002, so that the distance between the base 1001 and the upper cover 1002 can be adjusted according to the thickness requirements of the product, improving the compatibility of the tooling. After inserting the insertion rod 1009 into the insertion hole 1008, the connecting rod 1010 is limited and fixed on the base 1001, thereby preventing the connecting rod 1010 from displacing during the rotation of the support 1011. This is achieved by controlling several first screws 2001 and several... The torque value of the second screw 3001 ensures consistency in the assembly clearance of various areas of the target backplate. When the first screw 2001 is rotated, the engagement between the internal thread of the first threaded hole 1005 and the external thread of the first screw 2001 causes the first screw 2001 to move vertically and linearly, thereby adjusting the downward pressure of the outer ring pressure block 2002. When the outer ring pressure block 2002 moves downward, it can press against the outer ring pressure ring 2003, thus pressing the outer ring area of the target backplate. When the second screw 3001 is rotated, the engagement between the internal thread of the second threaded hole 1006 and the external thread of the second screw 3001... Under the action of the interlocking connection, the second screw 3001 moves vertically in a straight line, thereby adjusting the downward pressure of the inner ring pressure block 3002. When the inner ring pressure block 3002 moves downward, it can press on the inner ring position of the target back plate to be welded. Through the setting of multiple first screws 2001 and multiple second screws 3001, the downward pressure of several outer ring pressure blocks 2002 and several inner ring pressure blocks 3002 can be adjusted individually. At the same time, the distribution number of first screws 2001 and second screws 3001 can be adjusted according to actual needs, thereby achieving single-point pressing and controlling the assembly gap of each area of the target back plate.
Claims
1. A brazing fixture for a target backplate of a large-size sputtering target, characterized in that, The system includes a main body (100), which includes a base (1001) and a top cover (1002). An outer ring support seat (1003) is installed on the upper surface of the base (1001), and a plurality of inner ring support seats (1004) are installed on the top surface of the base (1001). An outer ring fastening adjustment mechanism (200) is provided on the top cover (1002). The outer ring fastening adjustment mechanism (200) includes a plurality of first screws (2001), and an outer ring pressure block (2002) is connected to the bottom end of each of the plurality of first screws (2001). The bottom end of several outer ring pressure blocks (2002) is provided with an outer ring pressure ring (2003), the outer ring pressure ring (2003) is located directly above the outer ring support seat (1003), and the upper cover (1002) is provided with an inner ring fastening adjustment mechanism (300), the inner ring fastening adjustment mechanism (300) includes several second screws (3001), the bottom end of several second screws (3001) is connected to several inner ring pressure blocks (3002), and the several inner ring pressure blocks (3002) are respectively located directly above several inner ring support seats (1004).
2. The brazing fixture for a large-size sputtering target backplate according to claim 1, characterized in that, The top surface of the cover (1002) is provided with a plurality of first threaded holes (1005), and the bottom ends of a plurality of first screws (2001) extend to the outside through the plurality of first threaded holes (1005) respectively, and are threadedly connected to the plurality of first threaded holes (1005) respectively.
3. The brazing fixture for a large-size sputtering target backplate according to claim 2, characterized in that, The top surface of the cover (1002) is provided with a plurality of second threaded holes (1006) near the center. The bottom ends of a plurality of second screws (3001) extend to the outside through the plurality of second threaded holes (1006) respectively, and are threadedly connected to the plurality of second threaded holes (1006) respectively.
4. The brazing fixture for a large-size sputtering target backplate according to claim 3, characterized in that, The upper end of the cover (1002) is provided with four through holes (1007) near the first threaded hole (1005). The top surface of the base (1001) is provided with four insertion holes (1008). Each of the four insertion holes (1008) is provided with an insertion rod (1009). The upper end of the insertion rod (1009) is connected to a connecting rod (1010). The connecting rod (1010) is provided with several threads on the outside. The connecting rod (1010) is connected to a support member (1011) by the external threads. The upper end of the connecting rod (1010) extends through the through hole (1007) to the outside and is connected to a locking nut (1012) by threads.
5. The brazing fixture for a large-size sputtering target backplate according to claim 4, characterized in that, The upper end of the support member (1011) is attached to the bottom end of the cover (1002), and the bottom end of the locking nut (1012) is attached to the upper end of the cover (1002).
6. The brazing fixture for a target backplate of a large-size sputtering target according to claim 4, characterized in that, The insertion rod (1009) is clearance-fitted with the insertion hole (1008), and the cross-section of the insertion rod (1009) is gear-shaped.
7. The brazing fixture for a target backplate of a large-size sputtering target according to claim 1, characterized in that, The outer ring support (1003) is in the shape of a hollow ring, and the inner ring support (1004) is in the shape of a circular block.