Valve box capable of being independently installed and used for supplying special gas to thin film deposition equipment

Abstract

The utility model relates to the technical field of semiconductors, and discloses an independently installed valve box for supplying special gas to thin film deposition equipment, which comprises a metal plate cabinet body, a main gas source pipeline, a compressed gas valve terminal accessory, a vaporizer and a flow meter, a chemical pipeline is installed inside the metal plate cabinet body, a pipeline back plate is installed on the inner rear wall of the metal plate cabinet body, and the main gas source pipeline is installed on the pipeline back plate. A supporting frame is installed at the bottom of the metal plate cabinet body, a threading pipe hole is formed in the inner rear wall of the metal plate cabinet body, a valve terminal assembly is installed on the right inner wall of the metal plate cabinet body, a valve terminal baffle is installed on the right side wall of the metal plate cabinet body, and a liquid receiving groove is formed in the inner bottom wall of the metal plate cabinet body. On the basis of not changing an original gas valve box, the valve box capable of being independently installed for supplying the special gas to the thin film deposition equipment is independently installed outside, can be independently controlled through pipelines, electrical temperature control and the like, can be in butt joint with the original gas valve box, is convenient to install and simple to install, and can quickly and effectively increase required liquid source process gas.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, specifically to a valve box that can be independently installed to supply special gases to thin film deposition equipment. Background Technology

[0002] In semiconductor manufacturing, gases are typically used to process wafers. The gas supply system mainly utilizes valve boxes to ensure the normal supply of gases. Specifically, the gas supply system usually includes a valve box system. Some specialized valve box systems also have gas safety devices, interlocks to prevent erroneous operations, alarm functions, explosion-proof functions, higher-level sensing, communication support, and the ability to produce and supply continuous mixed gases.

[0003] Semiconductor thin film deposition processes require the continuous flow of a large amount of specialty gas, with different gases and flow rates used for different processes. The mixing of different gas sources can significantly impact the process. Therefore, when using a liquid source, the structure of a standard gas valve box is insufficient. Adding a valve box would require major modifications to the original gas box structure and piping, making operation inconvenient and structurally incompatible. Furthermore, the liquid source piping requires heating and insulation. Current technologies cannot effectively add or modify the valve box, nor can they provide an efficient process source for liquid-to-gas mixing. Therefore, there is an urgent need for a valve box that can be independently installed to supply specialty gases to thin film deposition equipment. Utility Model Content

[0004] The purpose of this invention is to provide a valve box that can be independently installed to supply special gases to thin film deposition equipment, so as to solve the problems mentioned in the background art.

[0005] To solve the above-mentioned technical problems, this utility model provides the following technical solution: a valve box for supplying special gases to thin film deposition equipment that can be independently installed, including a sheet metal cabinet, a main gas source pipeline, compressed gas valve island accessories, a vaporizer and a flow meter. The sheet metal cabinet has a chemical pipeline installed inside, a pipeline back plate installed on the inner rear wall of the sheet metal cabinet, a support frame installed at the bottom of the sheet metal cabinet, a conduit hole opened on the inner rear wall of the sheet metal cabinet, a valve island assembly installed on the right inner wall of the sheet metal cabinet, a valve island baffle installed on the right side wall of the sheet metal cabinet, a liquid receiving groove provided on the inner bottom wall of the sheet metal cabinet, and a grounding bolt installed on the inner bottom wall of the sheet metal cabinet. The valve island assembly consists of a mounting rail, a valve plate and a control module. The overall air supply pipeline of the valve island assembly is equipped with a conversion joint and a manual valve.

[0006] Preferably, the valve island assembly is installed inside the valve island baffle, and the front of the sheet metal cabinet is equipped with a switch door, which has explosion-proof and safety features.

[0007] The sheet metal cabinet serves as the main frame of the entire valve box. The main gas source pipeline is used to connect to the external gas source. The main gas source is controlled by the compressed gas valve island. The air inlet is connected to a filter and a flow meter. The liquid source is converted by a liquid flow meter and a vaporizer equipped with helium as the carrier gas. All branches related to the liquid source are heated and insulated under nitrogen purging conditions. The chemical pipeline is installed inside the sheet metal cabinet for transporting special gases. The pipeline back plate is installed on the inner rear wall of the sheet metal cabinet for fixing and supporting the chemical pipeline.

[0008] Preferably, a positioning sheet metal component is installed on the inner rear wall of the sheet metal cabinet.

[0009] Preferably, a gap is left between the chemical pipeline and the valve island baffle, a heating temperature control device is installed on the chemical pipeline, and an external heat insulation device is installed on the outside of the chemical pipeline.

[0010] The chemical pipeline is used to transport special gases. The support frame is installed at the bottom of the sheet metal cabinet and is made of spliced ​​profiles to provide support. The conduit hole is opened on the inner rear wall of the sheet metal cabinet for wiring. A plastic baffle is installed in the hole to prevent foreign objects from entering. The valve island assembly is installed inside the valve island baffle and consists of mounting rails, valve plates and control modules. The overall venting pipeline is equipped with conversion joints and manual valves for convenient gas control and regulation. The liquid receiving tank is set on the inner bottom wall of the sheet metal cabinet to collect leaked liquids and prevent pollution and safety hazards.

[0011] Preferably, the chemical pipeline is equipped with flow control and chemical filter components, and the chemical pipeline is equipped with a pneumatic control valve.

[0012] Preferably, the pipeline back plate is provided with mounting holes that are compatible with the sheet metal cabinet, and the mounting holes are used to assemble chemical pipelines.

[0013] Grounding bolts are installed on the inner bottom wall of the sheet metal cabinet for grounding to ensure electrical safety. The front of the sheet metal cabinet has a switch door with explosion-proof and safety structures to ensure the safety of operators. Positioning sheet metal components are installed on the inner rear wall of the sheet metal cabinet for fixing and positioning internal components.

[0014] Preferably, the support frame is assembled from profiles, and a plastic baffle is installed inside the conduit hole.

[0015] Compared with the prior art, the beneficial effects achieved by this utility model are:

[0016] First, this utility model uses a sheet metal cabinet as the main frame of the entire valve box. The main gas source pipeline is used to connect to an external gas source. The main gas source is controlled by a compressed gas valve island. The air inlet is connected to a filter and a flow meter. The liquid source is converted by a liquid flow meter and a vaporizer equipped with helium as a carrier gas. All branches related to the liquid source are heated and insulated under nitrogen purging conditions. The chemical pipeline is installed inside the sheet metal cabinet for transporting special gases. The pipeline back plate is installed on the inner rear wall of the sheet metal cabinet for fixing and supporting the chemical pipeline. The chemical pipeline is used to transport special gases. The support frame is installed at the bottom of the sheet metal cabinet and is made of spliced ​​profiles to provide support. The conduit hole is opened on the inner rear wall of the sheet metal cabinet for wiring. A plastic baffle is installed in the hole to prevent foreign objects from entering. The valve island assembly is installed inside the valve island baffle and consists of mounting rails, valve plates, and a control module. The overall ventilation pipeline is equipped with a conversion joint and a manual valve for convenient gas control and adjustment. The liquid receiving tank is located inside the sheet metal cabinet. The bottom wall is used to collect leaked liquids, preventing pollution and safety hazards. Grounding bolts are installed on the inner bottom wall of the sheet metal cabinet for grounding, ensuring electrical safety. The front of the sheet metal cabinet has a switch door with explosion-proof and safety structures to ensure operator safety. Positioning sheet metal components are installed on the inner rear wall of the sheet metal cabinet for fixing and positioning internal components. A gap is left between the chemical pipeline and the valve island baffle to facilitate the assembly layout of signal lines and gas lines of electrical components in the chemical pipeline. Heating and temperature control devices and external heat insulation devices are installed on the pipeline to ensure stable gas temperature during transmission. Flow control and chemical filter components are installed on the chemical pipeline for precise control of gas flow and filtration of impurity particles. Pneumatic valves are used to control the on / off of gas. This valve box can be independently added externally without changing the original gas valve box. It can be independently controlled through pipelines and electrical temperature control, and can be connected to the original gas valve box. It is convenient to add and simple to install, and can quickly and effectively increase the required liquid source process gas. Attached Figure Description

[0017] Figure 1 This is a front view structural diagram of the present invention;

[0018] Figure 2 This is a side view of the three-dimensional structure of the present invention.

[0019] The components include: 1. Sheet metal cabinet; 2. Chemical pipelines; 3. Pipeline back panel; 4. Support frame; 5. Conduit hole; 6. Valve island assembly; 7. Valve island baffle; 8. Liquid receiving tank; 9. Grounding bolt. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] This utility model provides the following technical solution:

[0022] Example 1

[0023] Please see Figure 1 and Figure 2 A valve box for supplying special gases to thin film deposition equipment, which can be independently installed, includes a sheet metal cabinet 1, a main gas source pipeline, compressed gas valve island accessories, a vaporizer and a flow meter. A chemical pipeline 2 is installed inside the sheet metal cabinet 1. A pipeline back plate 3 is installed on the inner rear wall of the sheet metal cabinet 1. A support frame 4 is installed at the bottom of the sheet metal cabinet 1. A conduit hole 5 is opened on the inner rear wall of the sheet metal cabinet 1. A valve island assembly 6 is installed on the right inner wall of the sheet metal cabinet 1. A valve island baffle 7 is installed on the right side wall of the sheet metal cabinet 1. A liquid receiving groove 8 is provided on the inner bottom wall of the sheet metal cabinet 1. A grounding bolt 9 is installed on the inner bottom wall of the sheet metal cabinet 1. The valve island assembly 6 consists of a mounting rail, a valve plate and a control module. The overall air supply pipeline of the valve island assembly 6 is equipped with a conversion joint and a manual valve.

[0024] Valve island assembly 6 is installed inside valve island baffle 7. A switch door is installed on the front of sheet metal cabinet 1. The switch door is equipped with explosion-proof and safety structures.

[0025] Positioning sheet metal components are installed on the inner rear wall of sheet metal cabinet 1.

[0026] A gap is left between the chemical pipeline 2 and the valve island baffle 7. A heating temperature control device is installed on the chemical pipeline 2, and an external heat insulation device is installed on the outside of the chemical pipeline 2.

[0027] The chemical pipeline 2 is equipped with flow control and chemical filter components, and a pneumatic valve.

[0028] The pipeline back plate 3 is provided with mounting holes that are compatible with the sheet metal cabinet 1. The mounting holes are used to assemble the chemical pipeline 2.

[0029] The support frame 4 is made of spliced ​​profiles, and a plastic baffle is installed inside the conduit hole 5.

[0030] Through the above technical solution, the sheet metal cabinet 1 serves as the main frame of the entire valve box. The main gas source pipeline is used to connect to an external gas source. The main gas source is controlled by a compressed gas valve island. The air inlet is connected to a filter and a flow meter. The liquid source is converted through a liquid flow meter and a vaporizer equipped with helium as a carrier gas. All branches related to the liquid source are heated and insulated under nitrogen purging conditions. The chemical pipeline 2 is installed inside the sheet metal cabinet 1 for transporting special gases. The pipeline backplate 3 is installed inside the sheet metal cabinet 1. The rear wall is used to fix and support the chemical pipeline 2, which is used to transport special gases. The support frame 4 is installed at the bottom of the sheet metal cabinet 1 and is made of spliced ​​profiles to provide support. The conduit hole 5 is opened in the inner rear wall of the sheet metal cabinet 1 for wiring. A plastic baffle is installed in the hole to prevent foreign objects from entering. The valve island assembly 6 is installed inside the valve island baffle 7 and consists of mounting rails, valve plates and control modules. The overall ventilation pipeline is equipped with conversion joints and manual valves for convenient gas control and regulation. The liquid receiving tank 8 is set in the sheet metal cabinet. The inner bottom wall of body 1 is used to collect leaked liquids to prevent pollution and safety hazards. Grounding bolt 9 is installed on the inner bottom wall of sheet metal cabinet 1 for grounding to ensure electrical safety. The front of sheet metal cabinet 1 is equipped with a switch door and has explosion-proof and safety structures to ensure the safety of operators. Positioning sheet metal components are installed on the inner rear wall of sheet metal cabinet 1 for fixing and positioning internal components. A gap is left between chemical pipeline 2 and valve island baffle 7 to facilitate the assembly layout of signal lines and gas circuits of electrical components in chemical pipeline 2. Heating and temperature control devices and external heat insulation devices are installed on the pipeline to ensure stable gas temperature during transmission. Flow control and chemical filter components are installed on chemical pipeline 2 for precise control of gas flow and filtration of impurity particles. Pneumatic valves are used to control the on / off of gas. This valve box can be independently added externally without changing the original gas valve box. It can be independently controlled through pipelines and electrical temperature control, and can be connected to the original gas valve box. It is convenient to add and simple to install, and can quickly and effectively increase the required liquid source process gas.

[0031] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations may be made to these embodiments without departing from the principles and spirit, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A valve box for supplying special gas to a thin film deposition equipment, which can be installed independently, includes a sheet metal cabinet (1), a main gas source pipeline, compressed gas valve island accessories, a vaporizer and a flow meter, characterized in that: The sheet metal cabinet (1) is equipped with chemical pipelines (2) inside. The inner rear wall of the sheet metal cabinet (1) is equipped with a pipeline back plate (3). The bottom of the sheet metal cabinet (1) is equipped with a support frame (4). The inner rear wall of the sheet metal cabinet (1) is provided with a conduit hole (5). The right inner wall of the sheet metal cabinet (1) is equipped with a valve island assembly (6). The right side wall of the sheet metal cabinet (1) is equipped with a valve island baffle (7). The inner bottom wall of the sheet metal cabinet (1) is provided with a liquid receiving groove (8). The inner bottom wall of the sheet metal cabinet (1) is equipped with a grounding bolt (9). The valve island assembly (6) is composed of mounting rails, valve plates and control modules. The overall ventilation pipeline of the valve island assembly (6) is equipped with a conversion joint and a manual valve.

2. The valve box for supplying special gas to a thin film deposition equipment, which can be independently installed according to claim 1, is characterized in that: The valve island assembly (6) is installed inside the valve island baffle (7), and the front of the sheet metal cabinet (1) is equipped with a switch door, which is equipped with an explosion-proof and safety structure.

3. The valve box for supplying special gas to a thin film deposition equipment, which can be independently installed according to claim 1, is characterized in that: The inner rear wall of the sheet metal cabinet (1) is equipped with a positioning sheet metal component.

4. A valve box for supplying special gas to a thin film deposition equipment that can be independently installed according to claim 1, characterized in that: There is a gap between the chemical pipeline (2) and the valve island baffle (7). A heating temperature control device is installed on the chemical pipeline (2). An external heat insulation device is installed on the outside of the chemical pipeline (2).

5. A valve box for supplying special gas to a thin film deposition equipment that can be independently installed according to claim 1, characterized in that: The chemical pipeline (2) is equipped with flow control and chemical filter components, and the chemical pipeline (2) is also equipped with a pneumatic valve.

6. A valve box for supplying special gas to a thin film deposition equipment that can be independently installed according to claim 1, characterized in that: The pipeline back plate (3) is provided with mounting holes that are compatible with the sheet metal cabinet (1), and the mounting holes are used to assemble chemical pipelines (2).

7. A valve box for supplying special gas to a thin film deposition equipment that can be independently installed according to claim 1, characterized in that: The support frame (4) is made of spliced ​​profiles, and a plastic baffle is installed inside the conduit hole (5).

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