Main furnace chamber of single crystal furnace and single crystal furnace provided with main furnace chamber

Abstract

The utility model provides a single crystal furnace main furnace chamber and a single crystal furnace provided with the main furnace chamber, the single crystal furnace main furnace chamber comprises a cylindrical furnace body, the cylindrical furnace body comprises an outer wall and an inner wall, a vacuum cavity is arranged between the outer wall and the inner wall, and a first thermal insulation layer is arranged in the vacuum cavity. The single crystal furnace has the beneficial effects that the vacuum cavity and the heat preservation layer are arranged, so that heat preservation and heat insulation of the main furnace chamber are realized, the heat preservation effect is ensured, the heat loss is reduced, the power consumption of the single crystal furnace is reduced, and the single crystal drawing quality can be improved.

Description

Technical Field

[0001] This utility model belongs to the field of single crystal furnace technology, and in particular relates to a main furnace chamber of a single crystal furnace and a single crystal furnace equipped with the main furnace chamber. Background Technology

[0002] A single crystal furnace mainly consists of an auxiliary furnace chamber, an isolation chamber, a furnace lid, and a main furnace chamber. The main furnace chamber houses the crucible, heaters, and other structures to achieve single crystal pulling. During the single crystal pulling process, the temperature inside the main furnace chamber needs to be kept stable and controllable at all times, reaching temperatures as high as thousands of degrees Celsius, placing high demands on the furnace body's heat resistance and insulation capabilities. In existing technologies, the main furnace chamber is designed with a hollow water-circulating structure, achieving insulation by circulating water through the cavity. However, this requires a large volume of circulating water, which continuously carries away heat from the furnace during circulation, increasing power consumption and resulting in poor insulation performance. Utility Model Content

[0003] To solve the above-mentioned technical problems, this utility model provides a main furnace chamber for a single crystal furnace and a single crystal furnace equipped with the main furnace chamber, which effectively solves the technical problems of large circulating water consumption in the main furnace chamber of the single crystal furnace, increased power consumption in the furnace and poor heat preservation effect, and overcomes the shortcomings of the prior art.

[0004] The technical solution adopted by this utility model is: a main furnace chamber of a single crystal furnace, including a cylindrical furnace body, the cylindrical furnace body including an outer wall and an inner wall, a vacuum cavity provided between the outer wall and the inner wall, and a first heat insulation layer provided in the vacuum cavity.

[0005] Optionally, the first insulation layer is disposed on the side of the outer wall and / or inner wall near the vacuum cavity.

[0006] Optionally, a second insulation layer is provided on the side of the first insulation layer on the inner wall away from the inner wall.

[0007] Optionally, at least one second insulation layer is provided, arranged sequentially from the inside out.

[0008] Optionally, a partition wall is provided between the outer wall and the inner wall, which divides the vacuum cavity into a first vacuum cavity and a second vacuum cavity. The first vacuum cavity is located near the outer wall, and the second vacuum cavity is located near the inner wall.

[0009] Optionally, a third insulation layer is provided on the side of the partition wall closest to the first vacuum chamber.

[0010] Optionally, the first insulation layer and the third insulation layer are configured as coating layers.

[0011] Optionally, the second insulation layer is configured as an adhesive layer.

[0012] Optionally, a vacuum line is provided on the outer wall, the vacuum line is connected to the vacuum chamber, a control valve is provided on the vacuum line, and a filter screen is provided on the control valve.

[0013] This utility model also provides a single crystal furnace, which is provided with a single crystal furnace main furnace chamber as described above.

[0014] The advantages and positive effects of this utility model are as follows: by adopting the above technical solution, by setting up a vacuum chamber and a heat insulation layer, the heat insulation of the main furnace chamber is achieved, the heat insulation effect is guaranteed, heat loss is reduced, the power consumption of the single crystal furnace is reduced, and the single crystal can be pulled normally. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the cylindrical furnace body structure of the main furnace chamber of a single crystal furnace according to an embodiment of this utility model.

[0016] Figure 2 This is a schematic diagram of the external connection of the main furnace chamber of a single crystal furnace according to an embodiment of this utility model.

[0017] In the picture:

[0018] 1. Cylindrical furnace body 2. Outer wall 3. Inner wall

[0019] 4. First insulation layer; 5. Second insulation layer; 6. Partition wall

[0020] 7. First vacuum chamber; 8. Second vacuum chamber; 9. Third insulation layer

[0021] 10. Vacuum piping; 11. Control valve; 12. Pressure gauge

[0022] 13. Millitonometer Detailed Implementation

[0023] This utility model provides a main furnace chamber for a single crystal furnace and a single crystal furnace equipped with the main furnace chamber. The embodiments of this utility model will be described below with reference to the accompanying drawings.

[0024] In the description of the embodiments of this utility model, it should be understood that the terms "top," "bottom," etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, it should be noted that unless otherwise expressly specified and limited, the terms "set" and "connected" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a direct connection or an indirect connection through an intermediate medium; it can refer to the internal communication of two elements. Those skilled in the art can understand the specific meaning of the above terms in this utility model through specific circumstances.

[0025] like Figure 1 As shown in the figure, an embodiment of this utility model discloses a main furnace chamber for a single crystal furnace, comprising a cylindrical furnace body 1. The cylindrical furnace body 1 includes an outer wall 2 and an inner wall 3, both of which are made of metal, preferably stainless steel. A vacuum chamber is provided between the outer wall 2 and the inner wall 3. By providing a vacuum chamber, heat transfer can be blocked, reducing heat loss. A first insulation layer 4 is provided inside the vacuum chamber. By providing the first insulation layer 4, the insulation effect of the main furnace chamber is further ensured, reducing heat loss.

[0026] Specifically, the first insulation layer 4 is disposed on the side of the outer wall 2 and / or the inner wall 3 closest to the vacuum cavity. The first insulation layer 4 may be disposed only on the outer wall 2, only on the inner wall 3, or on both the outer wall 2 and the inner wall 3. Preferably, the first insulation layer 4 is disposed only on the inner wall 3, which can save insulation material and maximize heat insulation at the location closest to the hot zone. At the same time, the isolation of the vacuum cavity allows the first insulation layer 4 to achieve the best insulation effect.

[0027] Preferably, a second insulation layer 5 is provided on the side of the first insulation layer 4 on the inner wall 3 away from the inner wall 3, and at least one second insulation layer 5 is provided, arranged sequentially from the inside to the outside. The insulation effect is further improved by providing the second insulation layer 5.

[0028] Preferably, at least one first insulation layer 4 and one second insulation layer 5 are provided, arranged sequentially from the inside out. There is no specific limitation on the number of the first insulation layer 4 and the second insulation layer 5; one layer or multiple layers may be provided.

[0029] Preferably, a partition wall 6 is provided between the outer wall 2 and the inner wall 3, dividing the vacuum chamber into a first vacuum chamber 7 and a second vacuum chamber 8. The first vacuum chamber 7 is located near the outer wall 2, and the second vacuum chamber 8 is located near the inner wall 3. The partition wall 6 is made of metal, preferably stainless steel. By providing multiple vacuum chambers, a better heat insulation effect can be achieved.

[0030] Preferably, a third insulation layer 9 is provided on the side of the partition wall 6 closest to the first vacuum chamber 7. In order to prevent some heat from being unblocked by the second vacuum chamber 8, the third insulation layer 9 is provided to insulate some of the heat passing through the second vacuum chamber 8, thereby further reducing heat loss.

[0031] Preferably, the first insulation layer 4 and the third insulation layer 9 are configured as coating layers. The first insulation layer 4 is coated on the inner wall 3 near the second vacuum chamber 8, and the third insulation layer 9 is coated on the partition wall 6 near the first vacuum chamber 7. The coating material needs to be heat-resistant and provide thermal insulation; the specific material is not limited. The coating layer uses a high-temperature resistant insulating coating.

[0032] Preferably, the second insulation layer 5 is an adhesive layer. The second insulation layer 5 is adhered to the first insulation layer 4. The adhesive layer is made of a material that is heat-resistant and can provide thermal insulation; the specific material is not limited. Preferably, the adhesive layer is made of a heat-resistant insulation felt.

[0033] Specifically, such as Figure 2 As shown, a vacuum line 10 is provided on the outer wall 2, which is connected to the vacuum chamber. To facilitate better vacuuming, two separate vacuum lines 10 are provided on the outer wall 2. One vacuum line 10 is connected to the first vacuum chamber 7, and the other vacuum line 10 is connected to the second vacuum chamber 8. Each vacuum line 10 is equipped with a control valve 11. To prevent blockage, a filter screen is fixed to the control valve 11, which is not shown in the figure.

[0034] Preferably, a pressure monitoring device is connected to the vacuum line 10 to monitor the vacuum level during the evacuation process. The pressure monitoring device includes a pressure gauge 12. Preferably, a millitometry gauge 13 can also be connected for more accurate monitoring of the vacuum level. The pressure gauge 12 and the control valve 11 are connected by a three-way connector, and a through hole is opened in the three-way connector body to connect the millitometry gauge 13 through a welded joint.

[0035] A single crystal furnace consists of a secondary furnace chamber, an isolation chamber, a furnace cover, and a main furnace chamber, wherein the cylindrical furnace body of the main furnace chamber is as described above.

[0036] Example: A main furnace chamber for a single crystal furnace includes a cylindrical furnace body 1, which includes an outer wall 2 and an inner wall 3. Both the outer wall 2 and the inner wall 3 are made of stainless steel, with the outer wall 2 having a thickness of 6 mm and the inner wall 3 having a thickness of 10 mm. A vacuum chamber is provided between the outer wall 2 and the inner wall 3. A first insulation layer 4, coated with an insulating paint, with a thickness of 8 mm, is provided on the side of the inner wall 3 closest to the vacuum chamber. A second insulation layer 5, consisting of two layers bonded together from the inside out, is provided on the side of the first insulation layer 4 furthest from the inner wall 3. The second insulation layer 5 is an insulating felt with a thickness of 10 mm. A partition wall 6 is provided between the outer wall 2 and the inner wall 3, dividing the vacuum chamber into a first vacuum chamber 7 and a second vacuum chamber 8. The first vacuum chamber 7 is located closer to the outer wall 2, and the second vacuum chamber 8 is located closer to the inner wall 3. The first vacuum chamber 7 has a thickness of 20 mm, and the second vacuum chamber 8 has a thickness of 6 mm. The partition wall 6 is made of stainless steel with a thickness of 4 mm. A third insulation layer 9, 3mm thick, is provided on the side of the partition wall 6 closest to the first vacuum chamber 7. This insulation layer is coated with insulating paint. Two separate vacuum lines 10 are provided on the outer wall 2; one connects to the first vacuum chamber 7, and the other connects to the second vacuum chamber 8. A tee is connected to each vacuum line 10, and a pressure gauge 12 and a control valve 11 are connected via a tee connector. A through-hole is formed in the tee connector body, through which a millitometry gauge 13 is connected via a welded joint. A filter screen is fixed to the control valve 11.

[0037] After the vacuum chamber of the main furnace is evacuated, during the no-fire stage, multiple test points are selected on the outer wall to monitor the temperature. The highest temperature on the outer wall of the main furnace is 38℃, which is less than the safe temperature of 60℃, meeting the usage requirements.

[0038] The water consumption of the single crystal furnace was monitored, and the water consumption of the conventional single crystal furnace was compared with that of the single crystal furnace in this embodiment. The water consumption of the single crystal furnace in this embodiment was significantly lower than that of the conventional single crystal furnace.

[0039] During the crystal growth process, the crystal growth rate and diameter are monitored. The crystal growth rate curves of a conventional single crystal furnace and the single crystal furnace of this embodiment are basically consistent. The crystal diameter curves of a conventional single crystal furnace and the single crystal furnace of this embodiment are also basically consistent. Therefore, it can be seen that the single crystal furnace using the main furnace chamber of this embodiment can meet the usage requirements.

[0040] The advantages and positive effects of this utility model are:

[0041] 1. By setting up a vacuum chamber and insulation layer, the main furnace chamber is insulated and heat-insulated, ensuring the insulation effect, reducing heat loss, reducing the power consumption of the single crystal furnace, and improving the quality of single crystal pulling.

[0042] 2. It reduces the amount of circulating water used in the single crystal furnace, saves water resources, and lowers production costs.

[0043] The embodiments of this utility model have been described in detail above, but the content described is only a preferred embodiment of this utility model and should not be considered as limiting the scope of implementation of this utility model. All equivalent changes and improvements made in accordance with the claims of this utility model should still fall within the patent coverage of this utility model.

Claims

1. A main furnace chamber for a single crystal furnace, comprising a cylindrical furnace body, characterized in that: The cylindrical furnace body includes an outer wall and an inner wall, and a vacuum cavity is provided between the outer wall and the inner wall. A first heat insulation layer is provided inside the vacuum cavity.

2. The main furnace chamber of a single crystal furnace according to claim 1, characterized in that: The first insulation layer is disposed on the side of the outer wall and / or inner wall near the vacuum cavity.

3. The main furnace chamber of a single crystal furnace according to claim 2, characterized in that: A second insulation layer is provided on the side of the first insulation layer located away from the inner wall.

4. The main furnace chamber of a single crystal furnace according to claim 3, characterized in that: The first insulation layer and the second insulation layer are each provided at least once, arranged sequentially from the inside to the outside.

5. The main furnace chamber of a single crystal furnace according to any one of claims 2-4, characterized in that: A partition wall is provided between the outer wall and the inner wall, which divides the vacuum cavity into a first vacuum cavity and a second vacuum cavity. The first vacuum cavity is located near the outer wall, and the second vacuum cavity is located near the inner wall.

6. The main furnace chamber of a single crystal furnace according to claim 5, characterized in that: The partition wall is provided with a third insulation layer on the side closest to the first vacuum chamber.

7. The main furnace chamber of a single crystal furnace according to claim 6, characterized in that: The first and third insulation layers are configured as coating layers.

8. The main furnace chamber of a single crystal furnace according to claim 3 or 4, characterized in that: The second insulation layer is configured as an adhesive layer.

9. The main furnace chamber of a single crystal furnace according to any one of claims 2-4 and 6-7, characterized in that: The outer wall is provided with a vacuum pumping pipeline, which is connected to the vacuum chamber. A control valve is provided on the vacuum pumping pipeline, and a filter screen is provided on the control valve.

10. A single crystal furnace, characterized in that: The single crystal furnace is provided with a main furnace chamber as described in any one of claims 1-9.

Images