Multi-dimensional sample stage for scanning electron microscope

Abstract

The utility model discloses a multidimensional sample stage for a scanning electron microscope, which comprises a sample stage and a fixing device, a motor is arranged on the fixing device, an output shaft of the motor is fixedly connected to a central shaft of the sample stage, and the motor is used for driving the sample stage to rotate around the central shaft of the sample stage. The sample table is of a polyhedral structure, and a plurality of samples are respectively fixed on a plurality of surfaces of the sample table. The function of detecting a plurality of samples through one-time sample injection can be realized, so that the problem of low detection efficiency in the prior art is solved.

Description

Technical Field

[0001] This utility model relates to the field of electron microscope sample stage technology, and more specifically to a multidimensional sample stage for scanning electron microscopes. Background Technology

[0002] A scanning electron microscope (SEM) is a high-resolution microscope that uses a focused electron beam to scan the surface of a sample and obtains information about the surface morphology and composition of the sample through the signal generated by the interaction between the sample and the electron beam.

[0003] Scanning electron microscopes (SEMs) have wide applications in materials science, physics, chemistry, biology and many other fields. They can provide high-resolution images of sample surfaces, with resolutions reaching the nanometer level. SEMs can observe both conductive and non-conductive samples and have relatively low requirements for sample preparation.

[0004] SEM uses thermionic emission or field emission techniques to generate an electron beam. Through an electromagnetic lens system, the electron beam is focused into a very fine probe, which scans the sample surface using a raster, typically line by line. The electron beam interacts with the sample, generating secondary electrons, backscattered electrons, X-rays, and other signals. These signals are detected by corresponding detectors and converted into electrical signals. After amplification and processing, these electrical signals form an image of the sample surface.

[0005] In scanning electron microscopy (SEM) examinations, samples are typically fixed in position on the stage using conductive adhesive before being loaded into the detection chamber for observation. Currently, commonly used SEM stages are generally circular or square flat plates, capable of holding multiple samples or supporting multiple sub-stages of different shapes. During examination, the detector is moved to detect samples at different positions. Since SEMs require a vacuum environment, and flat plate stages can only hold a limited number of samples at a time, samples must be reattached and the vacuum re-evacuated after each examination. The time required to reach a vacuum varies from 2 to 20 minutes depending on the microscope model. This frequent sample change and vacuuming significantly reduces the efficiency of SEM examinations. Utility Model Content

[0006] In view of this, the present invention provides a scanning electron microscope sample stage with multiple sample bearing surfaces, which can realize the function of detecting multiple samples at one time, so as to solve the problem of low detection efficiency in the prior art.

[0007] To achieve the above objectives, the present invention provides a multidimensional sample stage for a scanning electron microscope, comprising a sample stage and a fixing device. The fixing device is equipped with a motor, the output shaft of which is fixedly connected to the central axis of the sample stage. The motor is used to drive the sample stage to rotate around its own central axis. The sample stage has a polyhedral structure, and several samples are fixed on multiple surfaces of the sample stage.

[0008] Preferably, the motor is electrically connected to the processor via a transmission line, and the processor is used to transmit signals and receive and issue action commands.

[0009] Preferably, the processor is connected to the signal transmitting device via a wired or wireless means.

[0010] Preferably, the sample stage has a cube, cuboid, or polygonal prism structure.

[0011] As can be seen from the above technical solution, compared with the prior art, the multidimensional sample stage for scanning electron microscopes disclosed in this utility model has the following beneficial effects:

[0012] Because the sample stage adopts a polyhedral structure, such as a cube, cuboid, or polygonal prism, and multiple surfaces can each hold several samples, it allows for sequential scanning electron microscopy observation of multiple different samples without frequent disassembly and reassembly after a single placement operation. For example, in a batch of material comparison analysis experiments, material samples with different compositions or processes can be fixed on different surfaces of the sample stage. By rotating the sample stage, the observation object can be quickly switched, greatly improving observation efficiency and saving time spent on repeated sample loading and unloading. Moreover, it ensures that different samples are compared under the same microscope environment settings, making the comparison results more accurate and scientific.

[0013] The motor on the mounting device has its output shaft fixedly connected to the central axis of the sample stage, driving the sample stage to rotate around its own central axis. During scanning electron microscopy observation, for samples with complex microstructures or those requiring observation of their surface features from different angles, the motor-driven rotation function allows for flexible adjustment of the sample angle. For example, when observing the crystal growth of crystalline materials, rotating the sample stage via the motor allows for the acquisition of microscopic morphology images of the crystal faces from multiple angles. This facilitates a more comprehensive and in-depth analysis of crystal growth characteristics, defect distribution, and other factors, avoiding the positional deviations and operational inconveniences that can occur with manual sample angle adjustments. This provides convenient conditions for precise and detailed microstructure research.

[0014] The motor is electrically connected to the processor via a transmission line. The processor is responsible for transmitting signals and receiving and issuing action commands. This connection method makes the control of the sample stage's rotation highly precise. Operators can send specific commands to the processor according to the observation needs under the microscope, such as setting parameters like rotation angle and speed. The processor then accurately transmits these commands to the motor, causing the sample stage to rotate as required. For example, when taking multi-angle photographs of biological cell samples, the processor can precisely control the sample stage to rotate by a fixed small angle each time, thereby achieving omnidirectional, equidistant image acquisition. This provides a complete and standardized data foundation for subsequent cell morphology analysis and intercellular interaction studies.

[0015] The processor communicates with the signal transmitting device via wired or wireless means, expanding the application scenarios and operational flexibility of the sample stage. Wired connections ensure stable signal transmission, making them suitable for fixed-location experimental environments with extremely high requirements for data transmission accuracy. For example, in high-precision material microstructure research laboratories, a stable wired connection guarantees the accurate transmission of every control command, ensuring precise execution of the sample stage's rotation. Wireless communication connections facilitate remote control of the sample stage in special experimental scenarios. For instance, in environments requiring radiation isolation or to avoid human interference, operators can remotely send commands to the processor from a safe area via the signal transmitting device to control the sample stage's rotation and other related operations, ensuring operator safety and the smooth progress of the experiment. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0017] Figure 1 This is a front view of the multidimensional sample stage for scanning electron microscope according to the present invention.

[0018] Figure 2 This is a schematic diagram of the sample stage of this utility model.

[0019] Explanation of reference numerals in the attached drawings: 1-Sample stage; 2-Motor; 3-Fixing device; 4-Transmission line; 5-Processor. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see the appendix Figure 1-2 This invention discloses a multidimensional sample stage for scanning electron microscopes.

[0022] like Figure 1 As shown, the multidimensional sample stage for scanning electron microscopes provided by this utility model includes a sample stage 1, a motor 2, and a fixing device 3, wherein, as... Figure 2 As shown, the sample stage 1 is a polyhedron that can fix different samples on different surfaces. The motor 2 is used to drive the sample stage 1 to rotate so that different samples can be tested one by one.

[0023] Specifically, the motor 2 is fixedly installed on the fixing device 3, and the central axis of the sample stage 1 is fixedly connected to the output shaft of the motor 2. When the motor 2 is working, it can drive the sample stage 1 to rotate around its own central axis so that different surfaces are placed in the test area, and then the sample on the surface is tested.

[0024] It should be noted that, in order to improve the stability of the sample stage 1, while the central shaft of the sample stage 1 is connected to the output shaft of the motor 2, the other end of the central shaft of the sample stage 1 is rotatably connected to the fixing device 3. Thus, the output shaft of the motor 2 and the fixing device 3 simultaneously support both ends of the central shaft of the sample stage 1, preventing the sample stage 1 from tilting or being damaged due to uneven force on both ends, thereby affecting the effect and accuracy of sample detection. The motor 2 is electrically connected to an external control device, such as a computer or PLC, through wires. The motor 2 can be a stepper motor, thereby enabling more precise rotation control.

[0025] To further optimize the above technical solution, the multidimensional sample stage also includes a transmission line 4 and a processor 5. The transmission line 4 is used for signal transmission between the processor 5 and the motor 2, and the processor 5 is used for transmitting signals, receiving and issuing action commands.

[0026] Specifically, motor 2 is electrically connected to processor 5 via transmission line 4. Processor 5 can be installed on fixed device 3 or placed on a stable working surface, as long as the connection between processor 5 and the electrical box of motor 2 is maintained. The location of processor 5 is not specifically limited here. Processor 5 can be a PLC or a control board. Processor 5 is equipped with a signal receiving module, such as a wireless communication module or Bluetooth module, etc., to receive external command signals.

[0027] It should be noted that the processor 5 communicates with the signal transmitting device via wired or wireless means, such as WiFi, hotspot, or Bluetooth. The signal transmitting device can be a computer, mobile device, etc.

[0028] The method of using the multidimensional sample stage for scanning electron microscope of this utility model is as follows:

[0029] The samples are pasted on different surfaces of the sample stage 1. After the sample stage 1 is loaded onto the output shaft of the motor 2, the vacuum pump is started to draw a vacuum and the detection begins. After the samples on one surface of the sample stage 1 are detected, a signal is sent to the processor 5 through an external signal transmitting device to rotate the sample stage 1 to another surface and continue the detection until the samples on all surfaces of the sample stage 1 are detected.

[0030] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A multidimensional sample stage for a scanning electron microscope, characterized in that, It includes a sample stage (1) and a fixing device (3). The fixing device (3) is equipped with a motor (2). The output shaft of the motor (2) is fixedly connected to the central axis of the sample stage (1). The motor (2) is used to drive the sample stage (1) to rotate around its own central axis. The sample stage (1) has a polyhedral structure, and several samples are fixed on multiple surfaces of the sample stage (1).

2. The multidimensional sample stage for scanning electron microscopy according to claim 1, characterized in that, The motor (2) is electrically connected to the processor (5) via a transmission line (4). The processor (5) is used to transmit signals and receive and issue action commands.

3. The multidimensional sample stage for scanning electron microscopy according to claim 2, characterized in that, The processor (5) is connected to the signal transmitting device via wired or wireless means.

4. The multidimensional sample stage for scanning electron microscopy according to claim 1, characterized in that, The sample stage (1) has a cube, cuboid or polygonal prism structure.

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