Silicon wafer grinding tool storage cabinet

Abstract

The utility model provides a silicon wafer grinding tool storage cabinet which is used for storing grinding tools and comprises a cabinet body, and a plurality of storage cavities used for storing the grinding tools are arranged in the cabinet body. A cabinet door is movably connected to an opening of the storage cavity; a partition bar is arranged in the storage cavity and connected with a push-pull plate through a damping sliding rail. And a suspension bracket for placing a grinding tool is detachably arranged on the push-pull plate. The grinding tool can be prevented from being polluted by external particulate matters, and the cleanliness of the grinding tool is ensured; a push-pull plate is arranged, so that a user can conveniently take and place; classified storage of grinding tools of different specifications is achieved, and confusion of users is avoided; meanwhile, collision and abrasion of the grinding tool are avoided, and the occupied space is reduced; the overall structure is simple, manufacturing is easy, and using is convenient.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the technical field of silicon wafer grinding processing, especially relates to a silicon wafer grinding tool storage cabinet. BACKGROUND

[0002] In order to make the surface of the silicon wafer formed after the multi-wire sawing smooth and flat, the silicon wafer needs to be ground by using a silicon wafer grinding device, wherein the wandering star wheel and the diamond wheel are essential auxiliary tools in the silicon wafer grinding process. Because the cleanliness of the wandering star wheel and the diamond wheel is very high, the wandering star wheel and the diamond wheel need to be replaced and cleaned frequently. The wandering star wheel and the diamond wheel after cleaning are often hung in a disorderly manner on a machine table, which is difficult to identify and distinguish, and is prone to cause confusion in use. In addition, the wandering star wheel and the diamond wheel exposed to the environment are difficult to avoid being contaminated by particulate impurities, which affects the grinding effect of the silicon wafer and even causes waste pieces. SUMMARY

[0003] To solve the above technical problems, the utility model provides a silicon wafer grinding tool storage cabinet, which can orderly and classifiedly store the grinding tools, ensure the cleanliness of the grinding tools, has a simple structure, occupies a small space, and is convenient to take and store.

[0004] The utility model adopts the technical scheme of a silicon wafer grinding tool storage cabinet, the storage cabinet comprises a cabinet body, a plurality of storage cavities for storing grinding tools are arranged in the cabinet body, a cabinet door is movably connected to the opening of the storage cavity, and the storage cavity is closed or opened by the cabinet door; a damping slide rail is arranged in the storage cavity, the damping slide rail is connected with a push-pull plate, so that the push-pull plate can slide out of the outside of the cabinet door; and a hanging rack for placing the grinding tools is detachably arranged on the push-pull plate.

[0005] Further, the cabinet body comprises two side plates, a plurality of vertical partition bars are arranged between the two side plates in parallel to separate the storage cavities; the partition bar is provided with at least two horizontal rods, and the damping slide rail is arranged on one side of the horizontal rod.

[0006] Further, the push-pull plate is provided with a cross hole, the hanging rack passes through the cross hole horizontally and can move on the push-pull plate along the cross hole to adapt to the space required by the grinding tools of different specifications.

[0007] Further, the hanging rack is provided with a threaded portion and a hanging portion, the threaded portion passes through the cross hole and is fixed to the cross hole by a fastener, and the hanging portion has a gap between the end away from the threaded portion and the adjacent partition bar.

[0008] Further, the suspension part is provided with a plurality of clamping grooves along the length direction, and the size of the clamping grooves is matched with the thickness of the grinding tool.

[0009] Further, the plurality of cross holes are arranged in a staggered manner.

[0010] Further, a plurality of horizontal layered plates are arranged between the two side plates, and a plurality of water dripping holes are arranged on the layered plates.

[0011] Further, the bottom of the cabinet body is provided with a water collecting cavity, and the water collecting cavity is communicated with a drainage pipeline.

[0012] Further, one side of the cabinet door is connected with the cabinet body through a flat hinge, and the other side is connected with the cabinet body through a pearl collision.

[0013] Further, the push-pull plate is provided with a handle at one end close to the cabinet door; and the cabinet door is made of transparent material.

[0014] The utility model has the advantages and positive effects that: the grinding tool is stored in a closed manner through the cabinet body, so that the grinding tool is prevented from being polluted by external particles, and the cleanliness of the grinding tool is ensured; the push-pull plate is arranged, so that the user can take and place the grinding tool conveniently; the grinding tool is hung on the hanging rack, so that the grinding tools of different specifications are stored in a classified manner, and the user is prevented from confusing the grinding tools; the grinding tools are arranged in a spaced manner along the thickness direction and do not contact each other, so that the grinding tools are prevented from being bumped and worn, and the occupied space is reduced; the overall structure is simple, easy to manufacture and convenient to use. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 is a structure schematic view of one specific embodiment of the utility model;

[0016] Figure 2 is an internal schematic view of a storage cabinet of one specific embodiment of the utility model;

[0017] Figure 3 is a structure schematic view of a partition of one specific embodiment of the utility model;

[0018] Figure 4 is a structure schematic view of a push-pull plate of one specific embodiment of the utility model;

[0019] Figure 5 is a structure schematic view of a hanging rack of one specific embodiment of the utility model.

[0020] In the drawing:

[0021] 1, cabinet body 11, top plate 12, side plate

[0022] 13, bottom plate 14, frame plate 15, storage cavity

[0023] 16, cabinet door 2, partition 3, damping slide rail

[0024] 4, push-pull plate 41, cross hole 42, handle

[0025] 5, layered plate 51, water droplet hole 6, hanging bracket

[0026] 61, threaded part 62, hanging part 63, clamping groove DETAILED DESCRIPTION

[0027] The embodiments of the utility model will be described below in combination with the drawings.

[0028] As Figure 1 shown, the utility model provides a silicon wafer grinding tool storage cabinet for storing grinding tools such as wandering star wheel and diamond wheel; the wandering star wheel and the diamond wheel are both auxiliary tools in the silicon wafer grinding process, and both can be placed in the storage cabinet proposed in the application, so as to be convenient for the user to take, not easy to be damaged by knocking, and not be polluted by the outside world.

[0029] As Figure 1 , Figure 2 shown, the storage cabinet comprises a cabinet body 1, a plurality of storage cavities 15 for storing grinding tools are arranged in the cabinet body 1; cabinet doors 16 are movably connected at the openings of the storage cavities 15, and are used for closing or opening the storage cavities 15; damping slide rails 3 are arranged in the storage cavities 15, and push-pull plates 4 are connected to the damping slide rails 3, so that the push-pull plates 4 can slide out of the cabinet doors 16; hanging brackets 6 for placing grinding tools are detachably arranged on the push-pull plates 4.

[0030] In the application, the grinding tools are hung and placed on the hanging brackets 6, and by pulling the push-pull plates 4, the hanging brackets 6 can be moved to the outside of the cabinet doors 16, so as to be convenient for the user to take the grinding tools on the hanging brackets 6 or to hang the grinding tools ready for cleaning on the hanging brackets 6; during storage, the cabinet doors 16 remain closed to prevent the grinding tools from being polluted by external particulate matter.

[0031] The cabinet body 1 comprises two side plates 12, a top plate 11, a back plate, a bottom plate 13 and a frame plate 14, the back plate is arranged in the vertical direction, the top plate 11 and the bottom plate 13 are arranged at the upper end and the lower end of the back plate in the horizontal direction respectively, the two side plates 12 are arranged at the left side and the right side of the top plate 11, the back plate and the bottom plate 13 respectively, and the frame plate 14 is arranged in parallel in front of the back plate and is connected with the two side plates 12, the top plate 11 and the bottom plate 13 respectively, so that the cabinet body 1 as a whole has a cuboid structure; wherein the frame plate 14 is provided with a plurality of openings as the openings of the storage cavities 15, and one cabinet door 16 is arranged at each opening, and each cabinet door 16 can be independently opened and closed.

[0032] Multiple vertical dividers 2 are arranged side-by-side between the two side panels 12 to separate the storage cavity 15; for example... Figure 3 As shown, the divider 2 has at least two horizontal bars, and the damping slide rail 3 is located on one side of the horizontal bars; specifically, the two ends of the divider 2 are respectively connected to the back plate and the frame plate 14, and are parallel to the side plate 12. There is a set distance between two adjacent dividers 2 to form the storage box, and this distance can meet the installation space requirements of the push-pull plate 4 and the hanging bracket 6; wherein the two dividers 2 closest to the two side plates 12 are respectively attached to the corresponding side plates 12; as Figure 3 As shown, the partition 2 consists of several horizontal and vertical bars, and is hollow in shape. The horizontal bars are arranged horizontally in a direction parallel to the side plate 12. At least two horizontal bars are provided with damping slide rails 3 on the same side, so that the two damping slide rails 3 are connected to the upper and lower ends of the push-pull plate 4, thereby enabling the push-pull plate 4 to slide stably. Preferably, each damping slide rail 3 is connected to the same side of the partition 2 on the same side of the storage cavity 15. That is, the push-pull plate 4 is set on the same side of the storage cavity 15. For example, the push-pull plate 4 is set on the left or right side of the storage cavity 15, so that there is enough space in the storage cavity 15 to install the hanging bracket 6.

[0033] Preferably, for ease of use, the sliding plate 4 is located on the same side where the cabinet door 16 and the frame plate 14 are connected; for example, when the cabinet door 16 is connected to the frame plate 14 on the left side of the storage cavity 15, the sliding plate 4 is located on the left side of the storage cavity 15 so that personnel can place the grinding tool on the hanging rack 6 from the right side after opening the cabinet door 16.

[0034] The aforementioned damping slide rail 3 includes a fixed rail, a sliding rail, and a damper. The fixed rail is fixedly mounted on a horizontal bar, and the sliding rail is mounted on the push-pull plate 4, which can drive the push-pull plate 4 to slide along the fixed rail. The damper can limit the relative sliding stroke of the fixed rail and the sliding rail, so that the push-pull plate 4 will not hit the cabinet 1 when it slides, and can slide more smoothly. The damping slide rail 3 is a commercially available product and can be selected and used as needed. Preferably, the width of the push-pull plate 4 is smaller than the corresponding width of the partition 2, which makes it easier to control the push-pull plate 4 to slide completely into the storage cavity 15 and will not obstruct the closing of the cabinet door 16.

[0035] The cabinet door 16 is hinged to the frame plate 14 of the cabinet body 1 via a hinge. Preferably, a handle is provided on the outside of the cabinet door 16 for easy opening and closing. The movable end of the cabinet door 16 is connected to the frame plate 14 via a ball-and-socket connection for easy opening and closing. A sealing structure is also provided between the cabinet door 16 and the frame plate 14 to keep the storage cavity 15 clean.

[0036] like Figure 4As shown, the push-pull plate 4 is provided with a cross hole 41, and the hanging rack 6 horizontally passes through the cross hole 41 and can move on the push-pull plate 4 along the cross hole 41 to adapt to the space required by the grinding tool of different specifications; the grinding tool in the application is provided with a through hole, so that the hanging rack 6 can pass through the through hole to hang the grinding tool on the hanging rack 6, and by providing the cross hole 41, the hanging rack 6 can move in four directions of up, down, left and right in the cross hole 41, so as to adjust the position of the hanging rack 6 according to the size of different grinding tools before use, realize the storage of grinding tools of different specifications, and avoid scratching caused by contact between the grinding tool and the cabinet body 1.

[0037] As shown in the figure, Figure 5 The hanging rack 6 is provided with a threaded part 61 and a hanging part 62, the threaded part 61 passes through the cross hole 41 and is fixed to the cross hole 41 by a fastener, and the hanging part 62 has a gap between the threaded part 61 and the adjacent partition 2.

[0038] Specifically, one end of the hanging rack 6 is provided with a threaded part 61, the fastener is threadedly connected with the threaded part 61, and the size of the threaded part 61 is adapted to the cross hole 41 and can pass through the cross hole 41; the other end of the hanging rack 6 is provided with a hanging part 62, and the shape of the hanging part 62 is larger than that of the cross hole 41; when the hanging rack 6 is installed, the threaded part 61 passes through the cross hole 41 and is fixed by the fastener, and the gap between the hanging part 62 and the adjacent partition 2 can facilitate the movement of the push-pull plate 4 and the personnel to put the grinding tool into and take it out from the end of the hanging part 62. At the same time, the position of the cross hole 41 corresponds to the hollow part of the partition 2, so that the hanging rack 6 passes through the cross hole 41 and installs the fastener.

[0039] The above-mentioned hanging part 62 is provided with a plurality of clamping grooves 63 along the length direction, and the size of the clamping groove 63 is adapted to the thickness of the grinding tool; the grinding tool in the application includes a star wheel and an emery wheel, both of which are circular structures with a certain thickness, and the clamping groove 63 is arranged to arrange the grinding tool along the thickness direction and hang on the hanging rack 6, which can greatly reduce the occupied space; each clamping groove 63 can accommodate a grinding tool of a certain specification, and there is enough space between adjacent clamping grooves 63, so that the adjacent grinding tools will not contact and scratch each other, which is convenient for personnel to take and place; at the same time, the grinding tools placed on the same hanging rack 6 are of the same specification, and personnel are not easy to confuse when taking and placing.

[0040] In a preferred embodiment, the push-pull plate 4 is provided with a plurality of cross holes 41, which are arranged staggeredly. The hanger 6 can be placed in different cross holes 41 according to the specifications of the grinding tool. When used, the user can identify the specifications of the grinding tool to be placed in the hanger 6 by observing the position of the hanger 6, or adjust the position of the hanger 6 to be used for suspending another grinding tool of different specifications, so as to meet the use requirements of different working conditions.

[0041] Further, the bottom of the cabinet 1 is provided with a water collecting cavity, which is communicated with a drainage pipeline. It can be understood that the water collecting cavity is arranged at the lower part of the storage cavity 15, which can be part of the bottom of the storage cavity 15, or a separate cavity communicated with the storage cavity 15. When the cleaned grinding tool is placed on the hanger 6, the liquid remaining on the grinding tool will drip into the water collecting cavity and be discharged into the drainage pipeline through the water collecting cavity, and then be discharged out of the cabinet 1. Preferably, different water collecting cavities are communicated with each other to facilitate the flow of liquid.

[0042] Further, a plurality of horizontal layering plates 5 are arranged side by side between the two side plates 12, and the layering plates 5 are provided with a plurality of water dripping holes 51. It can be understood that a plurality of storage cavities 15 are arranged above and below the layering plates 5. When the cleaned grinding tool is placed in the storage cavity 15 above the layering plate 5, the liquid remaining on the grinding tool can drip through the water dripping holes 51 on the layering plate 5 to the next layer, and then be discharged through the water collecting cavity arranged at the bottom of the cabinet 1.

[0043] In a preferred embodiment, the end of the push-pull plate 4 close to the cabinet door 16 is provided with a handle 42 to facilitate the user to push or pull the push-pull plate 4, so as to conveniently pull the push-pull plate 4 out of the cabinet 1 or push it into the cabinet 1, thereby achieving the taking and placing of the grinding tool. The cabinet door 16 is made of transparent material to facilitate the user to observe the condition of the grinding tool placed in each storage cavity 15 when used, or more conveniently identify the grinding tool to be used.

[0044] The technical solutions of the present application will be described in detail below through a specific embodiment.

[0045] Embodiment 1

[0046] As Figures 1-5As shown, a silicon wafer grinding tool storage cabinet for storing grinding tools such as star wheels and diamond wheels, the storage cabinet comprises a cabinet body 1, the cabinet body 1 is provided with a plurality of storage cavities 15 for storing grinding tools, in the embodiment, the cabinet body 1 is provided with two layers of storage cavities 15, each layer is provided with five storage cavities 15; the cabinet body 1 comprises two side plates 12, a top plate 11, a back plate, a bottom plate 13 and a frame plate 14, the storage cavities 15 are separated by a partition 2, the partition 2 is arranged on the left side of the storage cavity 15 along the direction parallel to the side plate 12, the two ends of the partition 2 are connected to the back plate and the frame plate 14 respectively; the two layers of storage cavities 15 are separated by a layering plate 5, the layering plate 5 is densely provided with water droplet holes 51; the lowermost storage cavity 15 is also provided with a layering plate 5 below, a water collecting cavity is formed between the layering plate 5 and the bottom plate 13, the water collecting cavity is connected to a drainage pipeline through a drainage port; the opening of the storage cavity 15 is movably connected with a cabinet door 16, the left side of the cabinet door 16 is connected to the frame plate 14 through a flat hinge, and the right side is connected to the frame plate 14 through a pearl collision; the partition 2 is provided with four horizontal rods, the right side of the two horizontal rods located in the middle is connected with a sliding plate 4 through a damping sliding rail 3, the sliding plate 4 is provided with three cross holes 41, one of which is located in the upper middle part of the sliding plate 4, and the other two are arranged below the cross hole 41 with a preset interval. The hanging bracket 6 comprises a threaded part 61 and a hanging part 62, the threaded part 61 is arranged in one of the cross holes 41 and fixed to the cross hole 41 through a fastener; the hanging part 62 of the hanging bracket 6 is provided with five clamping grooves 63, each clamping groove 63 can hang a grinding tool with a certain thickness; the same hanging bracket 6 can hang a group of five grinding tools with the same specification.

[0047] In the embodiment, the cabinet body 1 is made of 8mm thick white PVC plate, and the cabinet door 16 is made of 5mm thick transparent blue PVC plate, both of which have good cleanliness; the hanging bracket 6 is made of stainless steel rod wrapped with plastic material, which has good bearing capacity and is not easy to be damaged, deformed or cause abrasion of the grinding tool.

[0048] In the application, the grinding tools are stored in a closed manner by the cabinet body, which can prevent external particulate matter from contaminating the grinding tools and ensure the cleanliness of the grinding tools; the sliding plate is arranged to facilitate the user to take and place the grinding tools; the grinding tools are hung on the hanging bracket to realize the classified storage of grinding tools of different specifications and avoid confusion by the user; the grinding tools are arranged in the thickness direction with a certain interval and do not contact each other, which avoids the grinding tools from being knocked and abraded and reduces the occupied space; the overall structure is simple, easy to manufacture and convenient to use.

[0049] The embodiments of the present application are described in detail above, but the content is only the preferred embodiments of the present application, and cannot be considered to limit the scope of the present application. Any equivalent changes and improvements made within the scope of the present application should still belong to the patent coverage of the present application.

Claims

1. A silicon wafer polishing tool storage cabinet characterized by, The storage cabinet comprises a cabinet body, a plurality of storage cavities for storing grinding tools are arranged in the cabinet body, a cabinet door is movably connected to the opening of the storage cavity for closing or opening the storage cavity, a damping slide rail is arranged in the storage cavity, a push-pull plate is connected to the damping slide rail, the push-pull plate can slide out of the cabinet door, and a hanging rack for placing the grinding tool is detachably arranged on the push-pull plate.

2. The silicon wafer polishing tool storage cabinet of claim 1, wherein: The cabinet body comprises two side plates, a plurality of vertical partition bars are arranged between the two side plates in parallel to separate the storage cavities, and the partition bar is provided with at least two horizontal rods, and the damping slide rail is arranged on one side of the horizontal rod.

3. The silicon wafer polishing tool storage cabinet of claim 2, wherein: The push-pull plate is provided with a cross hole, the hanging rack passes through the cross hole horizontally and can move on the push-pull plate along the cross hole to adapt to the space required by the grinding tool of different specifications.

4. The silicon wafer polishing tool storage cabinet of claim 3, wherein: The hanging rack is provided with a threaded portion and a hanging portion, the threaded portion passes through the cross hole and is fixed to the cross hole by a fastener, and the hanging portion has a gap between the end away from the threaded portion and the adjacent partition bar.

5. The silicon wafer polishing tool storage cabinet of claim 4, wherein: A plurality of clamping grooves are arranged on the hanging portion in the length direction, and the size of the clamping groove is matched with the thickness of the grinding tool.

6. The silicon wafer polishing tool storage cabinet according to claim 4 or 5, characterized in that: A plurality of cross holes are arranged in a staggered manner.

7. The silicon wafer polishing tool storage cabinet of claims 1, 2, 4 or 5, wherein: A plurality of horizontal layered plates are arranged between the two side plates in parallel, and a plurality of water droplet holes are arranged on the layered plate.

8. The silicon wafer polishing tool storage cabinet of claim 7, wherein: The bottom of the cabinet body is provided with a water collecting cavity, and the water collecting cavity is communicated with a drainage pipeline.

9. The silicon wafer polishing tool storage cabinet of claim 7, wherein: One side of the cabinet door is connected to the cabinet body through a flat hinge, and the other side is connected to the cabinet body through a pearl collision.

10. The silicon wafer polishing tool storage cabinet according to claim 8 or 9, characterized in that: One end of the push-pull plate close to the cabinet door is provided with a handle. The cabinet door is made of transparent material.

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