Testing device for magnetic suspension molecular pump

Abstract

The utility model relates to the technical field of molecular pumps, and discloses a testing device for a magnetic suspension molecular pump, which comprises a frame and a first bracket, the frame comprises a first main body and a second main body, the first main body is arranged at the top of the second main body and extends upwards, and the second main body is suitable for mounting a testing mechanism; the first support is suitable for mounting the magnetic suspension molecular pump, the first support and the first main body are oppositely arranged in the first direction, the first support is rotatably arranged on the first main body, and the first direction is perpendicular to the vertical direction; wherein the first support is provided with a plurality of first positioning parts, the first positioning parts are arranged around the rotating axis of the first support at intervals, the first main body is provided with a second positioning part, and the second positioning part can be selectively matched with parts of the plurality of first positioning parts to adjust the inclination angle of the first support. According to the testing device, the testing efficiency is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of molecular pumps, and particularly relates to a testing device for a magnetic suspension molecular pump. BACKGROUND

[0002] As an ultra-high vacuum acquisition device, a molecular pump is widely applied in the chip field, medical biology and vacuum coating industries. In combination with different use occasions, the gas inlet of the molecular pump needs to be connected at different positions, and the central axis of the gas inlet and the vertical line can form various angles. The gravity point of the rotor assembly of the magnetic suspension molecular pump at different angles will change, which will affect the output of the magnetic bearing and the control system.

[0003] In the related art, the molecular pump is usually fixed to a side plate at a certain angle for testing. When the angle needs to be changed, the molecular pump fixing bolts are disassembled, rotated to the specified angle, and then re-fixed and tested. This method is time-consuming and laborious, and has low efficiency. CONTENT OF THE UTILITY MODEL

[0004] The present application provides a testing device for a magnetic suspension molecular pump, which improves the testing efficiency.

[0005] In order to achieve the above purpose, the main technical scheme adopted by the present application comprises:

[0006] In a first aspect, the present application provides a testing device for a magnetic suspension molecular pump, comprising a frame and a first support. The frame comprises a first main body and a second main body, the first main body is arranged on the top of the second main body and extends upward, and the second main body is adapted to install a testing mechanism. The first support is adapted to install the magnetic suspension molecular pump, and is arranged opposite to the first main body along a first direction. The first support is rotatably arranged on the first main body, and the first direction is perpendicular to the vertical direction. A first positioning part is arranged on the first support, and a plurality of first positioning parts are arranged at intervals around the rotation axis of the first support. A second positioning part is arranged on the first main body, and the second positioning part selectively cooperates with part of the plurality of first positioning parts to adjust the inclination angle of the first support.

[0007] The testing device for a magnetic suspension molecular pump provided by the present application can more flexibly adjust the inclination angle of the magnetic suspension molecular pump by arranging the first support to be rotatable, thereby improving the convenience of adjusting the angle and improving the testing efficiency. The inclination angle of the first support can be conveniently adjusted through the cooperation of the first positioning part and the second positioning part, and the plurality of cooperation points of the first positioning part and the second positioning part improve the efficiency of adjusting the angle during testing, thereby helping to improve the testing efficiency. At the same time, it is ensured that the stable running state can be maintained in the inclined state, and the vibration or instability phenomenon caused by the change of the angle is avoided.

[0008] Optionally, the first support comprises a first plate portion and a second plate portion, the first plate portion and the second plate portion are perpendicular to each other, the first plate portion is rotatably arranged on the first main body, and a plurality of first positioning portions are arranged on the first plate portion; the second plate portion is suitable for mounting the magnetic suspension molecular pump.

[0009] In the above scheme, when the first plate portion rotates relative to the first main body, the center axis of the gas inlet of the magnetic suspension molecular pump and the vertical line can have the same rotation angle as the first plate portion due to the perpendicularity of the first plate portion and the second plate portion, thereby facilitating the determination of an accurate test angle.

[0010] Optionally, the first plate portion is provided with a first rotating shaft, the first main body is provided with a mounting hole matched with the first rotating shaft, and the mounting hole penetrates the first main body in the first direction.

[0011] The first main body is further provided with a first bearing, the outer ring of the first bearing is fixed to the first main body, and the inner ring of the first bearing is fixed to the first rotating shaft.

[0012] In the above scheme, the first bearing can help rotation, the outer ring of the first bearing is fixed to the first main body, and the inner ring of the first bearing is fixed to the first rotating shaft, thereby improving the friction between the first main body and the first rotating shaft, and improving the load capacity of the first rotating shaft, which helps to ensure the stability of the overall structure during the test process.

[0013] Optionally, the first bearing is two, and the two first bearings are arranged on both sides of the first main body in the first direction.

[0014] In the above scheme, by installing bearings at two positions, the load borne by the first rotating shaft can be more effectively dispersed, thereby improving the reliability of the connection between the first rotating shaft and the first main body, improving the stability of the connection between the first rotating shaft and the first main body, reducing the vibration or shaking that may be caused during the test process, and thereby improving the accuracy of the test process.

[0015] Optionally, the first positioning portion is configured as a first positioning hole, and the first positioning hole penetrates the first plate portion in the first direction.

[0016] The first main body is provided with a second positioning hole, the second positioning hole penetrates the first main body in the first direction, the second positioning portion is configured as a positioning pin, and the positioning pin passes through the second positioning hole to be inserted and matched with the corresponding first positioning hole.

[0017] In the above scheme, through the insertion and fixation of the positioning pin with the first positioning hole and the second positioning hole, on the one hand, the first plate part and the first main body can form a stable connection, ensuring the stability of the overall structure and the accuracy of the test process, on the other hand, the positioning pin passes through the second positioning hole and is inserted and matched with the first positioning hole, this connection method is simple and reliable, easy to realize, so that the first plate part and the first main body can easily realize positioning at different angles, facilitating the replacement of the test angle, thereby helping to improve the test efficiency.

[0018] Optionally, the second positioning hole is two, along the second direction, the two second positioning holes are arranged on both sides of the mounting hole, and the first direction, the second direction and the vertical direction are perpendicular to each other.

[0019] In the above scheme, the two second positioning holes can have an additional supporting effect in the second direction, which helps to enhance the stability of the overall structure and reduce the probability of deformation or displacement caused by vibration or external force.

[0020] Optionally, the second plate part is provided with a detection hole, and the detection hole penetrates the second plate part along the thickness direction of the second plate part.

[0021] In the above scheme, the detection hole penetrating the second plate part can allow the device to be tested to penetrate from one side of the second plate part to the other side, facilitating the arrangement of pipelines required in the detection process, and at the same time can enhance the structural strength of the plate part. When the plate part is subjected to external pressure or impact, the through hole can play a role in dispersing stress, thereby improving the stability of the overall structure during the test process.

[0022] Optionally, the frame further comprises a first side baffle and a second side baffle, which are oppositely arranged along the second direction, and are detachably arranged at both ends of the first main body, and the first direction, the second direction and the vertical direction are perpendicular to each other.

[0023] In the above scheme, the detachable first side baffle and the second side baffle can be easily removed or replaced from the frame, thereby facilitating the replacement of the device to be tested or the test mechanism in the test device, thereby helping to improve the test efficiency.

[0024] Optionally, the frame further comprises a third baffle, which is oppositely arranged with the first main body along the first direction, and the first side baffle is detachably arranged at one end of the third baffle along the second direction, and the second side baffle is detachably arranged at the other end of the third baffle.

[0025] In the above scheme, the first side baffle and the second side baffle are respectively detachably arranged at both ends of the third baffle, and they together with the third baffle form a closed or semi-closed space, which helps to protect the equipment inside the structure.

[0026] Optionally, the third baffle is rotatably arranged on the second body.

[0027] In the above scheme, the rotatable third baffle can conveniently adjust its position according to the need, further improving the convenience of disassembling and assembling the frame, thereby helping to improve the test efficiency. BRIEF DESCRIPTION OF DRAWINGS

[0028] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the drawings needed to be used in the description of the specific embodiments or the prior art will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative labor.

[0029] Figure 1 The overall structure schematic diagram of the test device in some embodiments of the present application;

[0030] Figure 2 The structure schematic diagram of the first support in some other embodiments of the present application;

[0031] Figure 3 The cross-sectional structure schematic diagram of the test device in some other embodiments of the present application;

[0032] Figure 4 The structure schematic diagram of the second positioning part in some other embodiments of the present application;

[0033] Figure 5 The structure schematic diagram of the first support in some other embodiments of the present application;

[0034] Figure 6 The structure schematic diagram of the frame in some other embodiments of the present application;

[0035] Figure 7 The overall structure schematic diagram in some other embodiments of the present application;

[0036] Figure 8 The structure schematic diagram of the positioning pin in some other embodiments of the present application.

[0037]

Explanation of reference signs

[0038] 100: frame; 110: first body; 111: second positioning part; 111a: positioning pin; 111b: threaded surface; 111c: optical axis; 112: mounting hole; 113: first bearing; 114: second positioning hole;

[0039] 120: second body;

[0040] 130: first side baffle; 140: second side baffle; 150: third baffle;

[0041] 200: first support; 201: first positioning part; 201a: first positioning hole;

[0042] 210: first plate part; 211: first rotation shaft; 210a: second reinforcing rib;

[0043] 220: second plate part; 221: detection hole; 220a: first reinforcing rib;

[0044] X: first direction; Y: second direction;

[0045] 300: positioning pin fixing block;

[0046] 400: clamp;

[0047] 500: bearing support block;

[0048] 600: bearing cover plate;

[0049] 700: bearing retainer. DETAILED DESCRIPTION

[0050] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only some of the embodiments of the present application, but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0051] Unless otherwise defined, all technical and scientific terms used in the present application have the same meaning as commonly understood by one of ordinary skill in the art to which the present application belongs; the terms used in the specification of the present application are only for the purpose of describing specific embodiments and are not intended to limit the present application; the terms "include" and "have" and any variations thereof in the specification and claims of the present application and the above description of drawings are intended to cover non-exclusive inclusion. The terms "first", "second" and the like in the specification and claims of the present application and the above description of drawings are used to distinguish different objects, but not to describe a particular order or primary and secondary relationship.

[0052] In the present application, the phrase "embodiment" means that the specific features, structures or characteristics described in conjunction with the embodiment can be included in at least one embodiment of the present application. The phrase appears at various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment to other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in the present application can be combined with other embodiments.

[0053] In the description of the present application, it should be noted that unless specifically defined and limited, the terms "mounting", "connecting", "connecting", "attaching" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or integrally connected; it can be directly connected, or indirectly connected through an intermediate medium, or it can be connected inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0054] The term "and / or" in the present application is only to describe the association relationship of the associated objects, which means that there can be three relationships, for example, A and / or B can mean that A exists alone, A and B exist together, and B exists alone. In addition, the character " / " in the present application generally represents that the front and rear associated objects have an "or" relationship.

[0055] "Multiple" appearing in the present application means two or more (including two), and similarly, "multiple groups" means two or more groups (including two groups), and "multiple pieces" means two or more pieces (including two pieces).

[0056] As an ultra-high vacuum acquisition device, the molecular pump is widely used in the chip field, medical biology, vacuum coating and other industries. Combined with different use occasions, the gas inlet of the molecular pump needs to be connected at different positions, and the center axis of the gas inlet and the vertical line can form various angles. The gravity point of the rotor assembly of the magnetic suspension molecular pump at different angles will also change, which will affect the output and control system of the magnetic bearing. Therefore, after the molecular pump is assembled, it needs to be tested at multiple angles to verify the operation reliability and stability.

[0057] In the related art, the molecular pump is usually fixed to the side plate at a certain angle for testing. When the angle needs to be changed, the molecular pump fixing bolt is disassembled, rotated to the specified angle, and then re-fixed and tested. This testing is time-consuming and laborious, and the efficiency is low.

[0058] In view of this, the embodiment of the present application provides a testing device for a magnetic suspension molecular pump, please refer to Figure 1 , comprising a frame 100 and a first support 200.

[0059] The frame 100 comprises a first body 110 and a second body 120, the first body 110 is arranged on the top of the second body 120 and extends upward, and the second body 120 is suitable for installing a testing mechanism. It can be understood that the first body 110 located on the top of the second body 120 and extending upward makes full use of the vertical space, reduces the occupation of the space on the side of the second body 120, and provides more operation space for installing the testing mechanism on the second body 120, thereby facilitating to improve the installation efficiency, and further helping to improve the testing efficiency.

[0060] The first support 200 is suitable for mounting a magnetic suspension molecular pump, that is, the magnetic suspension molecular pump and the test mechanism can be arranged in a vertical direction, which not only facilitates the inclined arrangement of the magnetic suspension molecular pump, but also reduces the probability of interference between the magnetic suspension molecular pump and the test mechanism during rotation, thereby facilitating multi-angle testing.

[0061] As an example, the magnetic suspension molecular pump refers to a molecular pump that uses magnetic suspension technology to support and drive rotating components (usually impellers) within the pump. It creates a high vacuum environment through momentum transfer between a high-speed rotating rotor and gas molecules.

[0062] In the magnetic suspension molecular pump, magnetic suspension technology is applied to support and drive rotating components within the pump. Through the action of a magnetic field, the impeller can rotate without actual physical contact, thereby reducing friction and wear. At the same time, the core components of the molecular pump are rotating blades and fixed blades. The rotating blades rotate at high speed (with a rotational speed of up to 1800-90000 revolutions per minute), and through the high-speed movement (up to several hundred meters per second) of the blade end, momentum transfer with gas molecules is achieved to realize the pumping of gas or liquid.

[0063] The basic structure of the magnetic suspension molecular pump is composed of several components such as permanent magnets, magnetic bearings, rotors, stators, and molecular flow channels.

[0064] In the first direction X, the first support 200 is arranged opposite to the first main body 110, and the first support 200 is rotatably arranged on the first main body 110. It can be understood that the first support 200 can drive the magnetic suspension molecular pump to rotate, thereby flexibly adjusting the inclination angle of the magnetic suspension molecular pump. By arranging the first support 200 to be rotatable, the inclination angle of the magnetic suspension molecular pump can be more flexibly adjusted, thereby improving the testing efficiency.

[0065] The first support 200 is provided with a first positioning part 201, and the first positioning part 201 is multiple and arranged at intervals around the rotation axis of the first support 200. It can be understood that the multiple first positioning parts 201 arranged at intervals can provide more positioning points for the first support 200, and different first positioning parts 201 at different inclination angles can be used for fixation, which helps to improve the stability of the first support 200 at different inclination angles.

[0066] In addition, the multiple first positioning parts 201 arranged at intervals can also ensure that the molecular pump maintains a stable operating state in the inclined state, reducing the occurrence of vibration or instability caused by changes in angle.

[0067] The first body 110 is provided with a second positioning part 111, which is selectively matched with part of the plurality of first positioning parts 201 to adjust the inclination angle of the first support 200. It can be understood that the inclination angle of the first support 200 can be conveniently adjusted through the cooperation of the first positioning part 201 and the second positioning part 111, and the plurality of cooperation points of the first positioning part 201 and the second positioning part 111 improve the efficiency of adjusting the angle during the test, thereby helping to improve the test efficiency.

[0068] In other embodiments, please refer to Figure 2 and Figure 3 The first support 200 includes a first plate part 210 and a second plate part 220, and the first plate part 210 and the second plate part 220 are perpendicular to each other. It can be understood that the first plate part 210 and the second plate part 220 perpendicular to each other make the space utilization more efficient, and the limited installation space can be fully utilized to avoid interference with other equipment or structures.

[0069] The first plate part 210 is rotatably arranged on the first body 110. It can be understood that the first plate part 210 is rotatably arranged on the first body 110, so that the entire first support 200 can be flexibly adjusted in angle around the rotation axis, thereby allowing the magnetic levitation molecular pump to operate at different working angles to adapt to different working environments and test requirements.

[0070] A plurality of first positioning parts 201 are arranged on the first plate part 210, and the second plate part 220 is adapted to install the magnetic levitation molecular pump. It can be understood that the plurality of first positioning parts 201 arranged on the first plate part 210 can be matched with the second positioning part 111 on the first body 110, thereby ensuring the accurate positioning of the first support 200 after adjusting the angle.

[0071] In the above scheme, when the first plate part 210 rotates relative to the first body 110, due to the perpendicularity of the first plate part 210 and the second plate part 220, the center axis of the gas inlet of the magnetic levitation molecular pump and the vertical line can have the same rotation angle as the first plate part 210, thereby facilitating the determination of the accurate test angle.

[0072] In other embodiments, please refer to Figure 3 The first plate part 210 is provided with a first rotation shaft 211. It can be understood that the first rotation shaft 211 can drive the first plate part 210 to rotate.

[0073] The first body 110 is provided with a mounting hole 112 matched with the first rotation shaft 211, and the mounting hole 112 penetrates the first body 110 along the first direction X. It can be understood that the first rotation shaft 211 can rotate in the mounting hole 112, thereby driving the first plate part 210 to rotate relative to the first body 110.

[0074] In addition, the cooperation of the first rotating shaft 211 and the mounting hole 112 enables the first plate part 210 and the first main body 110 to be stably connected, which helps to enhance the stability of the structure and ensure that the device or machine does not shake or loosen during operation.

[0075] The first main body 110 is provided with a first bearing 113. It can be understood that the first bearing 113 can help rotation. The outer ring of the first bearing 113 is fixed to the first main body 110, and the inner ring of the first bearing 113 is fixed to the first rotating shaft 211, thereby improving the friction between the first main body 110 and the first rotating shaft 211, and improving the load capacity of the first rotating shaft 211, which helps to ensure the stability of the overall structure during testing.

[0076] As an example, a bearing refers to a part used to support the rotating body of a machine, and its main function is to reduce the friction coefficient during movement and ensure the rotation accuracy. The bearing reduces the friction and wear between mechanical parts through the rolling friction of the rolling body between the inner and outer rings, thereby reducing energy loss.

[0077] The bearing includes a rolling bearing, which is a precision mechanical element that changes the sliding friction between the rotating shaft and the shaft seat into rolling friction, thereby reducing friction loss. The rolling bearing is generally composed of four parts: an inner ring, an outer ring, a rolling body, and a retainer. The inner ring is matched with the shaft and rotates with the shaft; the outer ring is matched with the bearing seat and serves as a support; the rolling body is uniformly distributed between the inner and outer rings by the retainer, and its shape, size, and number directly affect the service performance and life of the rolling bearing; the retainer uniformly distributes the rolling body and guides the rotation of the rolling body to play a lubricating role.

[0078] The bearing includes but is not limited to a deep groove ball bearing, a needle bearing, an angular contact bearing, a self-aligning ball bearing, a self-aligning roller bearing, a thrust ball bearing, a thrust self-aligning roller bearing, a cylindrical roller bearing, a tapered roller bearing, a bearing with a seat and an outer spherical ball, etc. The present application does not limit this.

[0079] In other embodiments, please refer to Figure 3 The first bearing 113 is two, which can be understood as two first bearings 113 that can more evenly support the first rotating shaft 211, thereby enhancing the stability of the overall structure and helping to reduce shaking caused by vibration or external force, and improving the stability of the overall structure during testing.

[0080] In the first direction X, two first bearings 113 are arranged on both sides of the first body 110. By installing bearings at two positions, the load borne by the first rotating shaft 211 can be more effectively dispersed, thereby improving the reliability of the connection between the first rotating shaft 211 and the first body 110, helping to improve the stability of the connection between the first rotating shaft 211 and the first body 110, reducing vibrations or shaking that can occur during testing, and thereby helping to improve the accuracy of the testing process.

[0081] Optionally, the first bearing can be an angular contact ball bearing, which is arranged face-to-face or back-to-back and can bear axial forces in different directions. The first bearing can also be configured as other bearings capable of bearing loads in two directions, which are not limited in the present application.

[0082] In other embodiments, please refer to Figure 4 The first positioning part 201 is configured as a first positioning hole 201a, which penetrates the first plate part 210 in the first direction X. It can be understood that the first plate part 210 can be fixed through the first positioning hole 201a, and the fixing effect is further improved because the first positioning hole 201a penetrates the first plate part 210.

[0083] The first body 110 is provided with a second positioning hole 114, which penetrates the first body 110 in the first direction X. It can be understood that the first body 110 can be fixed through the second positioning hole 114, and the fixing effect of the first body 110 is further improved because the second positioning hole 114 penetrates the first body 110.

[0084] The second positioning part 111 is configured as a positioning pin 111a, which penetrates the second positioning hole 114 to be inserted and matched with the corresponding first positioning hole 201a. It can be understood that the insertion and matching of the first positioning hole 201a, the second positioning hole 114 and the positioning pin 111a can achieve accurate positioning, which can ensure the relative position between the first plate part 210 and the first body 110 is accurate, thereby helping to improve the accuracy of the test.

[0085] Through the insertion and fixing of the positioning pin 111a with the first positioning hole 201a and the second positioning hole 114, on the one hand, the first plate part 210 and the first body 110 can form a stable connection, ensuring the stability of the overall structure and the accuracy of the testing process. On the other hand, the positioning pin 111a penetrates the second positioning hole 114 and is inserted and matched with the first positioning hole 201a. This connection method is simple and reliable, easy to implement, so that the first plate part 210 and the first body 110 can easily realize positioning at different angles, facilitate the replacement of test angles, and thereby help to improve the test efficiency.

[0086] In some other embodiments, referring to Figure 4 , the second positioning hole 114 is two, and the two second positioning holes 114 are arranged on both sides of the mounting hole 112 along the second direction Y, and the first direction X, the second direction Y and the vertical direction are perpendicular to each other.

[0087] It can be understood that the two second positioning holes 114 can play an additional supporting effect in the second direction Y, which helps to enhance the stability of the overall structure and reduce the probability of deformation or displacement caused by vibration or external force.

[0088] In some other embodiments, referring to Figure 5 , the second plate portion 220 is provided with a detection hole 221, and the detection hole 221 penetrates the second plate portion 220 along the thickness direction of the second plate portion 220.

[0089] It can be understood that the detection hole 221 penetrating the second plate portion 220 can allow the device to be tested to penetrate from one side to the other side of the second plate portion 220, which is convenient for arranging the pipeline required by the detection process, and at the same time can enhance the structural strength of the plate portion. When the plate portion is subjected to external pressure or impact, the through hole can play a role in dispersing stress, thereby improving the stability of the overall structure in the test process.

[0090] In some other embodiments, referring to Figure 6 , the frame 100 further comprises a first side baffle 130 and a second side baffle 140, and it can be understood that the first side baffle 130 and the second side baffle 140 can play a role in protecting the internal structure or device of the test device.

[0091] The first side baffle 130 and the second side baffle 140 are oppositely arranged along the second direction Y, and it can be understood that the first side baffle 130 and the second side baffle 140 are oppositely arranged along the second direction Y, which provides additional support and stability for the frame 100, which helps to improve the stability of the overall structure, thereby helping to improve the test accuracy.

[0092] The first side baffle 130 and the second side baffle 140 are detachably arranged at both ends of the first main body 110, and the first direction X, the second direction Y and the vertical direction are perpendicular to each other.

[0093] It can be understood that the detachable first side baffle 130 and the second side baffle 140 can be easily removed or replaced from the frame 100, thereby facilitating the replacement of the device to be tested or the test mechanism in the test device, thereby helping to improve the test efficiency.

[0094] In some other embodiments, referring to Figure 6 , the frame 100 further comprises a third baffle 150, and it can be understood that the third baffle 150 can also play a role in protecting the internal structure or device of the test device.

[0095] In the first direction X, the third baffle plate 150 is arranged opposite to the first body 110. It can be understood that the third baffle plate 150 is arranged opposite to the first body 110 in the first direction X, which provides an additional support surface for the frame 100, helps to enhance the overall structural integrity of the frame 100, and improves its stability when bearing external loads.

[0096] In the second direction Y, the first side baffle plate is detachably arranged at one end of the third baffle plate 150, and the second side baffle plate is detachably arranged at the other end of the third baffle plate 150. It can be understood that the first side baffle plate and the second side baffle plate are respectively detachably arranged at the two ends of the third baffle plate 150, and they together with the third baffle plate 150 form a closed or semi-closed space, which helps to protect the equipment inside the structure.

[0097] In addition, the detachable connection of the third baffle plate 150 with the first side baffle plate and the second side baffle plate increases the flexibility of the frame 100, which helps to improve the efficiency of replacing the internal equipment, thereby improving the test efficiency.

[0098] In other embodiments, the third baffle plate 150 is rotatably arranged on the second body 120. It can be understood that the rotatable third baffle plate 150 can conveniently adjust its position as needed, further improving the convenience of assembling and disassembling the frame 100, thereby helping to improve the test efficiency.

[0099] At the same time, the third baffle plate 150 arranged in rotation can make more full use of space, improving the overall space utilization efficiency, thereby helping to arrange the test device.

[0100] In another specific embodiment, please refer to Figure 7 and Figure 8 The frame 100 is constructed as a metal frame composed of square tubes, and the frame 100 is provided with positioning pin fixing blocks 300, two positioning pin fixing blocks 300 are arranged on the two sides of the first body 110 in the first direction X, and cooperate with the positioning pins 111a.

[0101] The first plate part 210 is provided with a clamp 400, which is arranged opposite to the second plate part 220 in the vertical direction, for fixing the magnetic levitation molecular pump from the second direction Y and the vertical direction at the same time. The clamp 400 is bolted with the first plate part 210, and the bolt fastening part is provided as a waist-shaped hole, which is convenient for adjusting the distance to tighten the molecular pump.

[0102] The second plate part 220 is provided with a first reinforcing rib 220a around the detection hole 221 away from one side of the magnetic levitation molecular pump in the vertical direction, and the first plate part 210 is provided with a second reinforcing rib 210a around the first rotating shaft 211 away from one side of the magnetic levitation molecular pump in the first direction X, and the first reinforcing rib 220a and the second reinforcing rib 210a can reduce deformation.

[0103] The first body 110 is provided with two bearing support blocks 500, which are sleeved outside the corresponding first bearings 113, fixedly arranged on both sides of the first body 110 along the first direction X, and correspond to the second positioning part 111. Thus, the axial displacement of the first rotating shaft 211 is limited, so that the first rotating shaft 211 can only rotate.

[0104] The bearing support block is provided with a bearing cover plate 600 and a bearing retainer ring 700, which are adapted to cooperate with the first bearing 113 to protect the first bearing 113.

[0105] The positioning pin 111a has a threaded surface 111b at one end along the length direction and a light axis 111c at the other end; the threaded part cooperates with the threaded hole of the positioning pin fixing block 300, and when the positioning pin 111a needs to be inserted or withdrawn from the first positioning hole 201a, only the corresponding clockwise or counterclockwise rotation of the internal hexagonal hole on the positioning pin can be realized.

[0106] At least one of the first side baffle and the second side baffle has an open waist hole at one end along the length direction and a round hole at the other end along the length direction, and when the molecular pump is assembled or disassembled, at least one of the first side baffle and the second side baffle can be rotated by 90°, so that it is placed down, leaving space for operation.

[0107] The following is a brief description of a molecular pump test procedure using the test device.

[0108] First, place the first support 200 horizontally, insert the positioning pin 111a, and at this time, do not install the first side baffle 130 and the second side baffle 140 to the frame 100, and rotate the third baffle 150 to the side away from the first support 200, then fix the molecular pump to the first support 200, fix the clamp, the first side baffle 130 and the second side baffle 140.

[0109] Then, disassemble the positioning pin 111a, and rotate the first support 200 so that the magnetic levitation molecular pump reaches the specified test angle.

[0110] Insert the positioning pin 111a into the second positioning hole 111 and the corresponding first positioning hole 201a at this time, so that the first support 200 and the frame 100 are fixed, and the test of the magnetic levitation molecular pump is carried out.

[0111] After the test is completed, the positioning pin 111a is disassembled, so that the first support 200 and the frame 100 can be rotated relative to each other, and the first support 200 is rotated until another specified angle.

[0112] The positioning pin 111a is inserted into the second positioning hole 111 and the corresponding first positioning hole 201a at this time, so that the first support 200 and the frame 100 are fixed, and the test of the magnetic levitation molecular pump is performed again.

[0113] After the test is completed, the positioning pin 111a is disassembled, the molecular pump inlet is vertically upward, the positioning pin 111a is positioned, and the third baffle 150, the first side baffle 130, the second side baffle 140, the clamp, and the molecular pump are sequentially disassembled, and the test is completed.

[0114] It should also be noted that the terms "comprising", "including", or any other variant thereof are intended to cover non-exclusive inclusions, such that processes, methods, articles, or devices that comprise a list of elements do not include only those elements, but also other elements not expressly listed, or other elements inherent to such processes, methods, articles, or devices. Without more limitations, the element defined by the phrase "comprising a" does not exclude the presence of additional identical elements in the process, method, article, or device that includes the element.

[0115] Each of the embodiments in the specification is described in a progressive manner, and the same or similar parts between the embodiments can be referred to each other, and each embodiment mainly explains the difference from other embodiments. In particular, for the system embodiment, since it is basically similar to the method embodiment, the description is relatively simple, and the relevant parts can be referred to the part of the method embodiment.

[0116] The above only describes the embodiments of the present application and does not limit the present application. Those skilled in the art can make various changes and modifications to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principles of the present application shall be included in the scope of the claims of the present application.

[0117] Although the embodiments of the present application are described in conjunction with the drawings, those skilled in the art can make various modifications and changes without departing from the spirit and scope of the present application, and such modifications and changes fall within the scope defined by the appended claims.

Claims

1. A testing device for a magnetically levitated molecular pump, characterized in that, include: The frame includes a first body and a second body, the first body being disposed on top of the second body and extending upward, and the second body being adapted to mount a test mechanism; A first support is adapted to mount the magnetically levitated molecular pump. Along a first direction, the first support is disposed opposite to the first body. The first support is rotatably disposed on the first body. The first direction is perpendicular to the vertical direction. The first bracket is provided with a first positioning part, and there are multiple first positioning parts that are spaced apart around the rotation axis of the first bracket. The first main body is provided with a second positioning part, which can selectively cooperate with a portion of the multiple first positioning parts to adjust the tilt angle of the first bracket.

2. The testing apparatus according to claim 1, characterized in that, The first support includes a first plate portion and a second plate portion, which are perpendicular to each other. The first plate portion is rotatably disposed on the first body, and a plurality of first positioning portions are disposed on the first plate portion. The second plate portion is adapted to mount the magnetic levitation molecular pump.

3. The testing apparatus according to claim 2, characterized in that, The first plate is provided with a first rotating shaft, and the first body is provided with a mounting hole that mates with the first rotating shaft. Along the first direction, the mounting hole passes through the first body. The first body is also provided with a first bearing, the outer ring of the first bearing is fixed to the first body, and the inner ring of the first bearing is fixed to the first rotating shaft.

4. The testing apparatus according to claim 3, characterized in that, There are two first bearings, which are respectively disposed on both sides of the first body along the first direction.

5. The testing apparatus according to claim 3, characterized in that, The first positioning part is constructed as a first positioning hole, which penetrates the first plate part along the first direction; The first body is provided with a second positioning hole. Along the first direction, the second positioning hole passes through the first body. The second positioning part is constructed as a positioning pin. The positioning pin passes through the second positioning hole to be inserted and engaged with the corresponding first positioning hole.

6. The testing apparatus according to claim 5, characterized in that, There are two second positioning holes, which are located on both sides of the mounting hole along the second direction. The first direction, the second direction, and the vertical direction are perpendicular to each other.

7. The testing apparatus according to claim 2, characterized in that, The second plate portion is provided with a detection hole, which penetrates the second plate portion along its thickness direction.

8. The testing apparatus according to claim 1, characterized in that, The frame also includes a first side baffle and a second side baffle. Along the second direction, the first side baffle and the second side baffle are arranged opposite to each other. The first side baffle and the second side baffle are detachably disposed at both ends of the first main body. The first direction, the second direction and the vertical direction are perpendicular to each other.

9. The testing apparatus according to claim 8, characterized in that, The frame further includes a third baffle. Along the first direction, the third baffle is disposed opposite to the first main body. Along the second direction, the first side baffle is detachably disposed at one end of the third baffle, and the second side baffle is detachably disposed at the other end of the third baffle.

10. The testing apparatus according to claim 9, characterized in that, The third baffle is rotatably disposed on the second body.

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