Automatic filling device for high-purity gas

Abstract

The utility model relates to the technical field of gas filling, in particular to an automatic high-purity gas filling device which comprises a base, a filling rack is welded to the top of the base, a gas filling head is arranged on the top of the filling rack in a penetrating mode, a pressure gauge is arranged on the surface of the gas filling head, and a filling sensing platform is fixedly arranged on the top of the base. And a tank body is placed at the top of the filling induction platform, the top of the tank body communicates with an air inlet pipe, and an adjusting mechanism is arranged on the surface of the filling rack. The inflation head, the air inlet pipe, the hydraulic rod, the movable plate, the supporting rod, the guide rod, the clamping clamping plate, the butt joint pipe and the electric telescopic rod are matched, the butt joint pipe is arranged between the air conveying pipeline and the air inlet pipeline, therefore, leakage cannot occur in the air conveying process of the air conveying pipeline, the safety of an operator is improved, displacement is prevented through the clamping clamping plate, and the safety of the operator is improved. And the connection port can be kept in a stable working state.

Description

TECHNICAL FIELD

[0001] The utility model relates to gas filling technical field, concretely to a kind of high-purity gas automatic filling device. BACKGROUND

[0002] At present, the production of bottled high-purity gas adopts the process of first pressurizing and then purifying gas, and the purified gas is directly filled into gas cylinders, which can reduce the pollution of equipment and pipelines to the gas. With the rapid development of integrated circuits and other industries, the requirements for the purity of the gas used in the process of manufacturing integrated circuits and semiconductor products are becoming higher and higher.

[0003] After searching, the patent number CN217208914U, named as a gas filling device with high efficiency, includes a filling rack, a filling steel cylinder rack, a filling workbench, a steel cylinder supporting unit and a filling unit. Through research and analysis, it is found that although the gas filling device has the advantages of high automation degree and high work efficiency, it still has the following disadvantages to some extent.

[0004] For example, the gas filling device can only be docked, cannot be quickly and stably installed, has poor sealing during the filling process, is prone to leakage of the gas pipeline during gas transmission, and cannot use an intelligent control system to automatically adjust the filling process based on preset parameters and conditions, which reduces the consistency and stability of the product, affects the product quality. In order to solve the above technical problems, it is necessary to design a high-purity gas automatic filling device to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims at providing a high-purity gas automatic filling device, which has good sealing during the filling process and can be automatically filled to improve safety and efficiency, solving the problems of easy leakage of the gas pipeline during gas transmission and inability to automatically adjust the filling process based on preset parameters and conditions.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a high-purity gas automatic filling device, including base, the top of base is welded with filling rack, the top of filling rack is penetrated and is provided with filling head, the surface of filling head is provided with pressure gauge, the top of base is fixedly provided with filling induction platform, the top of filling induction platform is placed with jar body, the top of jar body is communicated with air inlet pipe, the surface of filling rack is provided with adjusting mechanism, the adjusting mechanism includes hydraulic rod, one end of hydraulic rod penetrates filling rack and is fixedly connected with movable plate, the surface of movable plate is welded with supporting rod and guide rod respectively, one end of supporting rod is welded with clamping plate, the surface of filling head is fixedly provided with butt joint pipe, the inner wall of filling rack is fixedly connected with electric telescopic rod, and the electric telescopic rod is fixedly connected with butt joint pipe.

[0007] Preferably, the active sleeve of the butt joint pipe is arranged on the surface of the air inlet pipe, and the inflation head is inserted into the inner cavity of the air inlet pipe.

[0008] Preferably, the opposite side of the clamping card plate is in active contact with the surface of the butt joint pipe, and the supporting rod and the guide rod are respectively penetrated through the filling frame and are in active connection with the inner wall of the filling frame.

[0009] Preferably, the surface of the tank body is communicated with a back pressure valve, and the bottom of the filling induction platform is provided with a weight display.

[0010] Preferably, the surface of the guide rod is actively sleeved with a limiting plate, the surface of the limiting plate is welded with a support column, the surface of the support column is fixedly connected with a clamping seat, and the surface of the support column is actively sleeved with a compression spring.

[0011] Preferably, the two ends of the compression spring are respectively fixedly connected with the clamping seat and the limiting plate, and one end of the guide rod is welded with a stop plate.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] 1. The utility model discloses a cooperation of the inflation head, the air inlet pipe, the hydraulic rod, the movable plate, the supporting rod, the guide rod, the clamping card plate, the butt joint pipe and the electric telescopic rod, and a butt joint pipe is arranged between the gas conveying pipeline and the air inlet pipeline, so that the gas conveying pipeline does not leak during gas conveying, the safety of the operator is improved, the clamping card plate is used for preventing displacement, and the connecting port can keep a stable working state.

[0014] 2. The utility model discloses a cooperation of the pressure gauge, the filling induction platform, the back pressure valve and the weight display, and the functions of automatic filling, automatic weighing, automatic stopping and automatic pressure control can be realized, the method of automatic pressure control is used to replace the method of manual pressure control, the purification device can work under stable pressure, better purification effect is obtained, and the pressure of the tank body gas can be kept constant. ACCURACY OF DRAWINGS

[0015] Figure 1 It is a three-dimensional schematic view of the utility model;

[0016] Figure 2 It is a three-dimensional schematic view of the utility model from the bottom;

[0017] Figure 3 It is a three-dimensional schematic view of the utility model from the bottom;

[0018] Figure 4 It is a three-dimensional schematic view of the utility model from the bottom;

[0019] In the figure: 1, base; 2, filling frame; 3, inflation head; 4, pressure gauge; 5, filling induction platform; 6, tank body; 7, air inlet pipe; 8, adjusting mechanism; 9, hydraulic rod; 10, movable plate; 11, supporting rod; 12, guide rod; 13, clamping card plate; 14, butt joint pipe; 15, electric telescopic rod; 16, back pressure valve; 17, weight display; 18, limiting plate; 19, support column; 20, clamping seat; 21, compression spring. DETAILED DESCRIPTION

[0020] Please refer to Figures 1-4 , an automatic high-purity gas filling device, comprising a base 1, a filling frame 2 is welded on the top of the base 1, an inflation head 3 is provided through the top of the filling frame 2, a pressure gauge 4 is provided on the surface of the inflation head 3, a filling induction platform 5 is fixedly provided on the top of the base 1, a tank body 6 is placed on the top of the filling induction platform 5, an air inlet pipe 7 is communicated with the top of the tank body 6, an adjusting mechanism 8 is provided on the surface of the filling frame 2, the adjusting mechanism 8 comprises a hydraulic rod 9, one end of the hydraulic rod 9 penetrates through the filling frame 2 and is fixedly connected with a movable plate 10, the surface of the movable plate 10 is respectively welded with a supporting rod 11 and a guide rod 12, one end of the supporting rod 11 is welded with a clamping card plate 13, a butt joint pipe 14 is fixedly provided on the surface of the inflation head 3, an electric telescopic rod 15 is fixedly connected with the inner wall of the filling frame 2, and the electric telescopic rod 15 is fixedly connected with the butt joint pipe 14.

[0021] Please refer to Figure 3 and Figure 4 , the butt joint pipe 14 is movably provided on the surface of the air inlet pipe 7, the butt joint pipe 14 is provided to shield and protect the surfaces of the air inlet pipe 7 and the inflation head 3, which facilitates the operation of the inflation head 3, and the inflation head 3 is inserted into the inner cavity of the air inlet pipe 7.

[0022] Please refer to Figure 1 and Figure 3 , the opposite side of the clamping card plate 13 is movably in contact with the surface of the butt joint pipe 14, the clamping card plate 13 is provided to stably support the supported object, which can improve the overall structural completion quality of the butt joint pipe 14, and the supporting rod 11 and the guide rod 12 penetrate through the filling frame 2 and are movably connected with the inner wall of the filling frame 2.

[0023] Please refer to Figure 1 , the surface of the tank body 6 is communicated with a back pressure valve 16, and the bottom of the filling induction platform 5 is provided with a weight display 17, the weight display 17 is provided to sense the weight change in the filling process, thereby improving the usability.

[0024] Please refer to Figure 2 and Figure 3The surface of the guide rod 12 movably sheaths the limiting plate 18, the limiting plate 18 provides a support point for the support column 19, and the support column 19 can bear lateral pressure, the surface of the limiting plate 18 is welded with the support column 19, the surface of the support column 19 is fixedly connected with the clamping seat 20, and the surface of the support column 19 movably sheaths the compression spring 21.

[0025] Please refer to Figure 3 The two ends of the compression spring 21 are fixedly connected with the clamping seat 20 and the limiting plate 18 respectively, the compression spring 21 can effectively absorb and disperse energy, and reduce the maintenance cost and use cost in the later period, and one end of the guide rod 12 is welded with the stop plate.

[0026] In use, first, the sensing values of the filling sensing platform 5 are returned to zero, then the gas storage tank body 6 is placed on the filling sensing platform 5, the gas inlet pipe 7 is aligned with the inflation head 3, the inflation head 3 is pushed to vertically slide in the process of starting the vertical extension and retraction of the electric telescopic rod 15, so that the inflation head 3 extends to the inside of the gas inlet pipe 7, the butt joint pipe 14 is sleeved on the outer surface of the gas inlet pipe 7 to wrap the same, the support rod 11 and the guide rod 12 are synchronously pushed to slide horizontally along the inner wall of the filling rack 2 in the process of starting the horizontal extension and retraction of the hydraulic rod 9, the support rod 11 adjusts the support points of the clamping clamping plate 13 on the extension surface, drives the clamping clamping plate 13 to slide horizontally, and is moved to a certain position according to the installation requirement to be attached to the butt joint pipe 14, the butt joint pipe 14 ensures that the connection port does not leak during gas transmission, the clamping clamping plate 13 keeps the stable working state, the limiting plate 18, the support column 19, the clamping seat 20 and the compression spring 21 on the extension surface of the guide rod 12 adjust the support points, drive the clamping seat 20 to be close to each other, and the tank body 6 can be simply installed, the limiting plate 18 is close to each other to extrude the support column 19, the compression spring 21 receives pressure to buffer and support the clamping seat 20, so that the tank body 6 is elastically limited, and the tank body 6 is prevented from toppling, the gas pressurizing system is connected with the inflation head 3, then the total control switch on the external control cabinet is turned on, the filling pressure value and the filling quality value are set, the gas is conveyed along the pressure gauge 4, the pressure gauge 4 is used for displaying the pressure change in the filling process, the quality and the pressure during the filling process are displayed, when the filling quality pressure reaches the preset value, the filling is automatically ended, the clamping clamping plate 13 and the clamping seat 20 are away from the tank body 6, the weight display 17 is used for setting the filling weight, and the weight change in the filling process is displayed in real time and fed back to the main control system, when the purified gas exceeds the constant pressure, the back pressure valve 16 is opened, the opening and closing of the back pressure valve 16 makes the tank body 6 gas filling system always maintain a constant pressure.

[0027] Summarized above: this high-purity gas automatic filling device, through the base 1, filling rack 2, inflation head 3, pressure gauge 4, filling induction platform 5, tank 6, air inlet pipe 7 and adjustment mechanism 8 cooperation, solved the easy to cause the gas pipeline in gas transmission will appear leakage, can't preset parameters and conditions automatic adjustment filling process problem.

Claims

1. An automated high-purity gas filling device, comprising a base (1), characterized in that: A filling frame (2) is welded to the top of the base (1). An inflation head (3) is provided through the top of the filling frame (2). A pressure gauge (4) is provided on the surface of the inflation head (3). A filling sensing platform (5) is fixedly provided on the top of the base (1). A tank (6) is placed on the top of the filling sensing platform (5). An air inlet pipe (7) is connected to the top of the tank (6). An adjustment mechanism (8) is provided on the surface of the filling frame (2). The adjustment mechanism (8) includes a hydraulic system. The hydraulic rod (9) has one end that passes through the filling machine frame (2) and is fixedly connected to a movable plate (10). The surface of the movable plate (10) is welded with a support rod (11) and a guide rod (12). One end of the support rod (11) is welded with a clamping plate (13). The surface of the inflation head (3) is fixedly provided with a connecting pipe (14). The inner wall of the filling machine frame (2) is fixedly connected with an electric telescopic rod (15). The electric telescopic rod (15) is fixedly connected to the connecting pipe (14).

2. The high-purity gas automated filling device according to claim 1, characterized in that: The connecting pipe (14) is movably sleeved on the surface of the air inlet pipe (7), and the inflation head (3) is inserted into the inner cavity of the air inlet pipe (7).

3. The high-purity gas automated filling device according to claim 1, characterized in that: The clamping plate (13) is in active contact with the surface of the connecting pipe (14) on the opposite side. The support rod (11) and the guide rod (12) pass through the filling frame (2) and are movably connected to the inner wall of the filling frame (2).

4. The automated high-purity gas filling device according to claim 1, characterized in that: The surface of the tank (6) is connected to a back pressure valve (16), and a weight display (17) is provided at the bottom of the filling induction platform (5).

5. The automated high-purity gas filling device according to claim 1, characterized in that: The guide rod (12) is movably fitted with a limiting plate (18), the limiting plate (18) is welded with a support column (19), the support column (19) is fixedly connected with a card seat (20), and the support column (19) is movably fitted with a compression spring (21).

6. The high-purity gas automated filling device according to claim 5, characterized in that: The two ends of the compression spring (21) are fixedly connected to the card seat (20) and the limiting plate (18) respectively, and a stop plate is welded to one end of the guide rod (12).

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