Diluent sampling and detecting equipment for semiconductor manufacturing

Abstract

The utility model discloses diluent sampling and detecting equipment for semiconductor manufacturing, and relates to the technical field of sampling and detecting equipment, the diluent sampling and detecting equipment for semiconductor manufacturing comprises a sampling tube, the main body of the sampling tube is of a bidirectional through structure at the upper side and the lower side; according to the utility model, through the arrangement of the rotating sleeve screwed on the outer side of the cap, after sampling is completed, the rotating sleeve can be rotated, so that the rotating sleeve can be screwed on the outer side of the cap, and a balloon with a hollow structure inside is fixedly connected to the top end surface of the sampling tube; according to the utility model, the screw sleeve is arranged on the outer side of the sampling tube, so that the screw sleeve is screwed on the outer side of the sampling tube along an external thread formed on the outer peripheral surface of the cap, and the screw sleeve is tightly connected with the cap; the sampling tube can be placed on a table top by adjusting the gasket sleeved on the outer side of the sampling tube and serving as a support, so that the sampling tube is prevented from rolling when being placed.

Description

TECHNICAL FIELD

[0001] The utility model relates to sampling detection equipment technical field, concretely to a kind of diluent sampling detection equipment of semiconductor manufacturing. BACKGROUND

[0002] Diluent, when raw materials are processed into powder, or to make it easy to spray the inert substance added to dilute. Such as: clay, kaolin, pottery clay, talcum powder, etc., the existing patent a diluent sampling device, patent publication number CN208505684U including outer tube, outer tube inside one side is provided with moving pipe, and moving pipe penetrates outer tube and extends to outer tube outside, piston is arranged in moving pipe, one end of piston is fixedly installed with push rod, and push rod penetrates moving pipe and extends to moving pipe outside, moving pipe away from the end of push rod is fixedly installed with moving block, and moving block is matched with the inner diameter of outer tube, the upper and lower ends of moving block are both provided with limiting slot, moving block is internally provided with through-hole, moving block away from the end of moving pipe is fixedly installed with inner tube, and inner tube penetrates outer tube and extends to outer tube outside, inner tube on the outside of outer tube is fixedly installed with liquid taking needle. The device overcomes some shortcomings of traditional sampler, for example, the length of the device itself cannot be adjusted, the needle tube after sampling is exposed to the outside world and other problems, greatly improves sampling efficiency.

[0003] For the related technology in the above, the inventor believes that the following defects exist: when using, although sampling can be carried out through needle, but when sampling, due to the lack of effective transfer sealing structure, the sample in the balloon inside is easy to seep out due to accidental touch of balloon part in transfer process after sampling of sampling device is completed, so we put forward a kind of diluent sampling detection equipment of semiconductor manufacturing to solve the above problems. UTILITY MODEL CONTENT

[0004] In view of the deficiencies of the prior art, the utility model provides a kind of diluent sampling detection equipment of semiconductor manufacturing, solve the problem that the sample in the balloon inside is easy to seep out due to lack of effective transfer sealing structure after sampling of sampling device is completed.

[0005] To achieve the above object, the utility model is realized by the following technical scheme:

[0006] A kind of diluent sampling detection equipment of semiconductor manufacturing, including sampling pipe, the main body of the sampling pipe is bidirectional through structure on the top and bottom sides, and the top end surface of sampling pipe is fixedly connected with the balloon of internal hollow structure, the balloon is flexible structure, the front end of sampling pipe is provided with through slot, the inside of the through slot is fixedly connected with observation window, the front end of observation window is fixedly connected with mark, the outside of sampling pipe is fixedly connected with gasket.

[0007] Preferably, the main body of the gasket is made of flexible rubber material, and the gasket is provided with two parts, which are arranged in a longitudinal array on the upper and lower sides of the outer peripheral surface of the sampling tube.

[0008] Preferably, the inner wall of the sampling tube is fixedly connected with a gasket, the main body of the gasket is an annular structure, the diameter of the gasket is smaller than that of the sampling tube, and the outer peripheral surface of the sampling tube is provided with external threads.

[0009] Preferably, the bottom end surface of the gasket is fixedly connected with a flow cone, the main body of the flow cone is a truncated cone structure with a wide top and a narrow bottom, and the upper and lower sides of the flow cone are through structures.

[0010] Preferably, the bottom end surface of the flow cone is fixedly connected with a spring member, and the bottom end surface of the spring member is fixedly connected with a cap.

[0011] Preferably, the outer peripheral surface of the cap is also provided with external threads, and the top end surface of the cap is fixedly connected with a flow guide cover.

[0012] Preferably, the top end surface of the flow guide cover is fixedly connected with a top ball for closing the bottom end opening of the flow cone, and the outer side of the cap is screwed with a rotating sleeve, and the outer peripheral surface of the rotating sleeve is annularly arranged with anti-slip grooves.

[0013] The utility model provides a kind of diluent sampling detection equipment of semiconductor manufacturing.Compared with prior art, it has the following beneficial effects:

[0014] The diluent sampling detection equipment of semiconductor manufacturing is provided with the rotating sleeve screwed on the outer side of the cap, so that after sampling is completed, the rotating sleeve is screwed on the outer side of the sampling tube along the external threads provided on the outer peripheral surface of the cap to tightly connect it with the cap, thereby preventing liquid leakage.

[0015] The diluent sampling detection equipment of semiconductor manufacturing is provided with the gasket sleeved on the outer peripheral surface of the sampling tube, so that when the sampling tube is placed horizontally, the gasket sleeved on the outer side of the sampling tube is adjusted and placed on the desktop as support, thereby preventing the sampling tube from rolling when placed. BRIEF DESCRIPTION OF DRAWINGS

[0016] Figure 1 It is the front side view structure schematic diagram of the sampling detection equipment of the utility model after being split;

[0017] Figure 2 It is the combination structure schematic diagram of the sampling detection equipment of the utility model;

[0018] Figure 3The utility model discloses a sampling detection equipment's sampling pipe and balloon combination structure schematic diagram;

[0019] Figure 4 The utility model discloses a sampling detection equipment's cap and flow guide cover combination structure schematic diagram;

[0020] Figure 5 The utility model discloses a sampling detection equipment's front view structure schematic diagram;

[0021] Figure 6 The utility model discloses a sampling detection equipment's left view structure schematic diagram.

[0022] In the drawing: 1, sampling pipe;101, balloon;102, observation window;103, mark;104, gasket;105, outer thread;2, gasket;201, poly flow cover;202, spring part;3, cap;301, flow guide cover;302, top ball;303, rotating sleeve;304, antiskid groove. DETAILED DESCRIPTION

[0023] The technical scheme in the embodiments of the utility model will be apparently and completely described below with the drawings in the embodiments of the utility model, and apparently, the described embodiments are only part of the embodiments of the utility model, not all the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by the ordinary skill in the art without making creative labor belong to the range of the utility model protection.

[0024] Please refer to Figures 1-6 The utility model provides a kind of technical scheme: a diluent sampling detection equipment for semiconductor manufacturing, including sampling pipe 1, the main body of sampling pipe 1 is two-way through structure in upper and lower sides, and the top end surface of sampling pipe 1 is fixedly connected with balloon 101 of internal hollow structure, balloon 101 is flexible structure, the front end of sampling pipe 1 is provided with through slot, the inside of this through slot is fixedly connected with observation window 102, the front end of observation window 102 is fixedly connected with mark 103, the outside of sampling pipe 1 is fixedly connected with gasket 104;

[0025] By being fixedly connected with balloon 101 on the top end surface of sampling pipe 1, when using, it can be sampled to sample by negative pressure generated by extruding balloon 101 to sample.

[0026] Please refer to Figure 3 、 Figure 5 The main body of gasket 104 is flexible rubber material, and gasket 104 is provided with two, and two gaskets 104 are vertically arranged on the upper and lower sides of the outer circumferential surface of sampling pipe 1;

[0027] The gasket 104 is sleeved outside the sampling pipe 1, so that the sampling pipe 1 can be assisted and supported during use.

[0028] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1. Figure 1 , Figure 6 The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0029] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0030] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1. Figure 2 , Figure 4 The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0031] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0032] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1. Figure 1 , Figure 5 The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0033] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0034] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1. Figure 3 , Figure 6 The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0035] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0036] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1. Figure 1 , Figure 3 The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0037] The gasket 2 is fixedly connected to the inner wall of the sampling pipe 1.

[0038] When the diluent in the semiconductor manufacturing process needs to be sampled for testing, the sampling tube 1 can be manually held, the rotating sleeve 303 is screwed onto the outer side of the cap 3 through the external threads 105 on the outer peripheral surface of the cap 3, and the sampling tube 1 and the cap 3 at the bottom end of the spring member 202 are inserted into the diluent to be sampled and placed. When sampling, the balloon 101 mounted on the top surface of the sampling tube 1 is manually squeezed, the cap 3 is pushed out to the outside by the gas, and the diluent is drawn through the opening at the bottom end of the flow cover 201.

[0039] When the sampling is completed, the cap 3 moves upward under the elastic reset action of the spring member 202, and the top ball 302 fixedly connected to the top end surface of the flow cover 301 is inserted into the opening at the bottom end of the flow cover 201 to automatically close. After the closing is completed, the rotating sleeve 303 is held and rotated to tightly connect and limit the cap 3 and the sampling tube 1, thereby preventing leakage.

[0040] In summary, the device can realize the closing of the bottom opening of the sampling tube 1 by setting the cap 3 fixedly connected to the bottom end surface of the spring member 202.

[0041] The contents not described in detail in the specification are all prior art known to those skilled in the art.

Claims

1. A diluent sampling detection apparatus for semiconductor manufacturing, comprising a sampling tube (1), characterized in that: The body of the sampling pipe (1) is a bidirectional through structure on the upper and lower sides, and the top end surface of the sampling pipe (1) is fixedly connected with a balloon (101) with an internal hollow structure, the balloon (101) is a flexible structure, the front end of the sampling pipe (1) is provided with a through slot, the inside of the through slot is fixedly connected with an observation window (102), the front end of the observation window (102) is fixedly connected with a mark (103), and the outer side of the sampling pipe (1) is fixedly connected with a gasket (104).

2. The dilutant sampling detection apparatus for semiconductor manufacturing according to claim 1, wherein: The body of the gasket (104) is made of flexible rubber material, and the gasket (104) is provided with two parts, and the two gaskets (104) are arranged in a longitudinal array on the upper and lower sides of the outer circumferential surface of the sampling pipe (1).

3. A dilutant sampling detection apparatus for semiconductor manufacturing according to claim 2, wherein: The inner wall of the sampling pipe (1) is fixedly connected with a gasket (2), the body of the gasket (2) is an annular structure, and the diameter of the gasket (2) is smaller than the diameter of the sampling pipe (1), and the outer circumferential surface of the sampling pipe (1) is provided with an external thread (105).

4. The dilutant sampling detection apparatus for semiconductor manufacturing according to claim 3, wherein: The bottom end surface of the gasket (2) is fixedly connected with a flow cone (201), the body of the flow cone (201) is a truncated cone structure with a thick upper part and a thin lower part, and the upper and lower sides of the flow cone (201) are through structures.

5. A dilutant sampling detection apparatus for semiconductor manufacturing according to claim 4, wherein: The bottom end surface of the flow cone (201) is fixedly connected with a spring member (202), and the bottom end surface of the spring member (202) is fixedly connected with a cap (3).

6. A dilutant sampling detection apparatus for semiconductor manufacturing according to claim 5, wherein: The outer circumferential surface of the cap (3) is also provided with an external thread (105), and the top end surface of the cap (3) is fixedly connected with a flow guide cover (301).

7. A dilutant sampling detection apparatus for semiconductor manufacturing according to claim 6, wherein: The top end surface of the flow guide cover (301) is fixedly connected with a top ball (302), the top ball (302) is used for closing the bottom end opening of the flow cone (201), and the outer side of the cap (3) is screwed with a rotating sleeve (303), and the outer circumferential surface of the rotating sleeve (303) is annularly arranged with anti-skid grooves (304).

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