Multifunctional film mechanical property detection device

Abstract

The utility model relates to the technical field of optical measurement mechanics and material performance detection, in particular to a multifunctional film mechanical performance detection device which comprises a base, a controller is fixedly connected to the upper surface of the base, a lifting machine is fixedly connected to the upper surface of the base, and a clamping mechanism is arranged on the front surface of the lifting machine. The clamping mechanism comprises a first U-shaped block, a round hole is formed in the right surface of the first U-shaped block, a round block is slidably connected to the inner surface of the round hole, a first sliding groove is formed in the right surface of the round block, and a clamping block is slidably connected to the inner surface of the first sliding groove. Through the clamping block, the round block, the L-shaped rod and the fixing plate and the threaded rod arranged in the second U-shaped block, the thin film can be clamped, the front face of the thin film is aligned with the microscope body, the thin film can be subjected to TEM testing while tension detection is conducted on the thin film, the detection function of the detection device is increased, and the detection efficiency is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the field of light mechanics and material performance detection technology, concretely to a multi -functional film mechanics performance detection device. BACKGROUND

[0002] Thin film science and technology are the basis of microelectronics, information, sensor, optics, solar energy utilization and other technologies, and it has been widely penetrated into various fields of contemporary technology. In order to adapt to different industrial application requirements such as high strength, wear resistance, high temperature resistance and corrosion resistance, various surface treatment technologies such as surface plating are usually used to process the material surface, so that it is suitable for various complex working environments. Thin film technology is also the basis of microelectronic devices and microelectrooptical devices. Recently, thin film technology has promoted the rise and development of microelectromechanical systems (MEMS).

[0003] Through the search, the Chinese authorized publication number CN 206440547 U discloses a film tension detection device, which comprises a driving motor and a lead screw connected with the output end of the driving motor, the lead screw is provided with a guide rod on both sides, the lead screw is provided with a tensile test mechanism and a shearing mechanism, the tensile test mechanism comprises a movable pull plate sleeved on the middle part of the lead screw, the movable pull plate is fixed with a tension lead screw nut matched with the lead screw in the middle part, the movable pull plate is provided with a fixed pull plate fixed on the guide rod at the front end, the fixed pull plate is fixed with a tension sensor at the rear side, the fixed pull plate has a through hole for the lead screw to pass through in the middle part, the upper end of the movable pull plate and the fixed pull plate is provided with a pressing plate for clamping the film, the rear side of the fixed pull plate is provided with a shearing mechanism for detecting the film, the film tensioning and cutting two working procedures are realized by the lead screw nut mechanism, and the working efficiency is greatly improved, and the production cost is saved.

[0004] But because the function of most detection devices is single, when the film is detected, it needs to pass through multiple detection procedures, greatly increases the detection time, and at the same time in the detection room, different detection devices will occupy more use space, in view of this, we provide a multi -functional film mechanics performance detection device. Utility model content

[0005] The utility model aims at providing a multi -functional film mechanics performance detection device, the multi -functional film mechanics performance detection device solves the problem of single function of detection device, increases the detection time, and occupies more space.

[0006] In order to achieve the above object, the utility model provides the following technical scheme:

[0007] The utility model provides a kind of multifunctional film mechanics performance detection device, including base, the upper surface of the base is fixedly connected with controller, the upper surface of the base is fixedly connected with lift, the front surface of the lift is provided with clamping mechanism, the clamping mechanism includes U block one, the right surface of the U block one is opened with round hole, the inner surface of the round hole is slidably connected with round block, the right surface of the round block is opened with sliding slot one, the inner surface of the sliding slot one is slidably connected with clamping block, the left surface of the round block is fixedly connected with protruding block, and the protruding block is in contact with clamping block.

[0008] Preferably, the right surface of the round block is penetrated by a movable rod and slidably connected with the movable rod, one end of the movable rod is hinged with the support one, and the other end of the support one is hinged with the clamping block.

[0009] Preferably, the right surface of the round block is fixedly connected with an L-shaped rod, the upper surface of the base is fixedly connected with a U-shaped block two, the inner surface of the U-shaped block two is slidably connected with a fixed plate, the front surface of the fixed plate is rotatably connected with a threaded rod, the threaded rod penetrates the U-shaped block two and is threadedly connected with the U-shaped block two.

[0010] Preferably, the front surface of the U-shaped block one is provided with a detection mechanism, the detection mechanism includes a straight plate, the straight plate is fixedly connected with the front surface of the U-shaped block one, the upper surface of the straight plate is penetrated by a sliding rod and slidably connected with the sliding rod, and the lower surface of the sliding rod is fixedly connected with a microscope body.

[0011] Preferably, the upper surface of the straight plate is slidably connected with a movable block, one end of the movable block is hinged with the support two, and the other end of the support two is hinged with the sliding rod.

[0012] Preferably, the upper surface of the movable block is penetrated by a tapered rod and slidably connected with the tapered rod, the upper surface of the straight plate is linearly arrayed with a clamping hole, and the inner surface of the clamping hole is slidably connected with the tapered rod.

[0013] Preferably, the upper surface of the movable block is opened with a sliding slot two, the inner surface of the sliding slot two is slidably connected with an F-shaped limiting rod, and the F-shaped limiting rod is slidably connected with the tapered rod.

[0014] By the above technical scheme, the utility model provides a kind of multifunctional film mechanics performance detection device. At least have the following beneficial effects:

[0015] (1), the utility model discloses a clamping block, round block, L-shaped rod and the fixed plate and threaded rod in the U-shaped block two of being set, can be clamped to film, at the same time, the front surface of film is aligned with microscope body, is realized in the tension detection of film, can carry out TEM test to film, makes the detection function of detection device increase, makes detection efficiency improve.

[0016] (2), the utility model discloses the setting of straight board, support no. 2, movable block and conical rod can be moved on straight board through the control movable block, control the up-down movement of microscope body, realize that the alignment of thin film can be realized to the microscope body, guarantee the stability of TEM test. BRIEF DESCRIPTION OF DRAWINGS

[0017] The accompanying drawings, which are included to provide a further understanding of the present application and constitute a part of this application, illustrate embodiments of the present application and together with the description serve to explain the principles of the present application.

[0018] Figure 1 It is whole structure schematic diagram of the utility model;

[0019] Figure 2 It is whole structure schematic diagram of the utility model's clamping mechanism;

[0020] Figure 3 It is the U-shaped block one front view structure schematic diagram of the utility model;

[0021] Figure 4 It is the U-shaped block one rear view structure schematic diagram of the utility model.

[0022] In the drawing: 1, base;2, controller;3, elevator;4, clamping mechanism;41, U-shaped block one;42, round hole;43, round block;44, sliding slot one;45, clamping block;46, protruding block;47, movable rod;48, support one;49, L-shaped rod;410, U-shaped block two;411, fixed plate;412, threaded rod;5, detection mechanism;51, straight board;52, sliding rod;53, microscope body;54, movable block;55, support no. 2;56, conical rod;57, clamping hole;58, sliding slot two;59, F-shaped limiting rod. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0024] Embodiment one

[0025] Please refer to Figures 1-4The utility model provides a kind of multifunctional film mechanical property detection device, including base 1, the upper surface of base 1 is fixedly connected with controller 2, the upper surface of base 1 is fixedly connected with lift 3, lift 3 is connected with U block one 41, lift 3 can drive U block one 41 rise or descend, by this setting, tension test can be carried out to film, the front surface of lift 3 is provided with clamping mechanism 4, clamping mechanism 4 includes U block one 41, the right surface of U block one 41 is provided with round hole 42, the inner surface of round hole 42 is slidably connected with round block 43, the right surface of round block 43 is provided with sliding slot one 44, the inner surface of sliding slot one 44 is slidably connected with clamping block 45, the left surface of round block 43 is fixedly connected with lug 46, lug 46 is flush with clamping block 45 on the left surface of round block 43, while in sliding slot one 44, fixedly connected with limiting rod, limiting rod passes through clamping block 45, so that clamping block 45 can be stably slid in sliding slot one 44, spring is sleeved on limiting rod, by the elasticity of spring, clamping block 45 can be tightly attached to lug 46, lug 46 is contacted with clamping block 45, the right surface of round block 43 is penetrated with movable rod 47 and is slidably connected with movable rod 47, movable rod 47 is hinged with one end of support one 48, clamping block 45 is hinged with the other end of support one 48, the right surface of round block 43 is fixedly connected with L type rod 49, L type rod 49 is fixed with the two ends of spring with U block one 41 respectively, by the elastic force of spring, L type rod 49 pulls one corner of film, and clamping mechanism 4 is provided with two groups, by the mutual cooperation of two groups of L type rod 49 and round block 43, the two corners of upper end of film are pulled, ensure that film is more flat when detecting, the upper surface of base 1 is fixedly connected with U block two 410, the inner surface of U block two 410 is slidably connected with fixed plate 411, the front surface of fixed plate 411 is rotatably connected with threaded rod 412, threaded rod 412 penetrates U block two 410 and is threadedly connected with U block two 410, by the cooperation of threaded rod 412 and fixed plate 411, rotating threaded rod 412 can clamp the lower end of film entirely.

[0026] In the embodiment, by the cooperation of clamping block 45, round block 43, L type rod 49 and fixed plate 411 and threaded rod 412 arranged in U block two 410, film can be clamped, and the front surface of film is aligned with microscope body 53, so that TEM test can be carried out on film while tension test is carried out on film, so that the detection function of detection device is increased, and the detection efficiency is improved.

[0027] Embodiment two

[0028] Please refer to Figures 1-4On the basis of embodiment one, the utility model provides a technical scheme: preferably, the front surface of U block one 41 is provided with detection mechanism 5, detection mechanism 5 includes straight board 51, and straight board 51 is fixedly connected with the front surface of U block one 41, and the upper surface of straight board 51 is penetrated with slide rod 52 and is slidably connected with slide rod 52, and the lower surface of slide rod 52 is fixedly connected with microscope body 53, and the upper surface of straight board 51 is slidably connected with movable block 54, and movable block 54 is hinged with one end of support no.

[0029] In the embodiment, by the setting of the straight board 51, the support no. 55, the movable block 54 and the tapered rod 56, the movable block 54 can be controlled to move on the straight board 51, the up-and-down movement of the microscope body 53 is controlled, and the microscope body 53 can be aligned with the film, so that the stability of the TEM test is ensured.

[0030] The working principle is that when the film needs to be detected, the lower end of the film is placed in the U-shaped block two 410, then the threaded rod 412 is rotated clockwise, the fixed plate 411 is tightly attached to the U-shaped block two 410, the lower end of the film is fixed in the U-shaped block two 410, then the movable rod 47 is pushed, the clamping block 45 is driven away from the protrusion 46 through the support one 48, one corner of the film is placed between the clamping block 45 and the protrusion 46, and one corner of the film is clamped, through the same operation, the other corner of the film is clamped, then the controller 2 controls the elevator 3 to start, and the film is subjected to the tensile test, after the tensile test is completed, the controller 2 controls the elevator 3 to lift, so that the film remains flat, then the F-shaped limiting rod 59 is pulled out from the tapered rod 56, the movable block 54 is moved on the straight plate 51, the slide rod 52 is driven to move up and down through the support two 55, the microscope body 53 is aligned with the film, the tapered rod 56 is re-clamped into the clamping hole 57 through the spring, and the F-shaped limiting rod 59 limits the tapered rod 56 through the spring, so that the microscope body 53 is more stable when the film is subjected to the TEM detection, and the film can be taken out after the TEM detection and the tensile test.

[0031] It should be noted that the relational terms herein such as first and second and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any such actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0032] Although the embodiments of the present application have been shown and described, it should be understood by those skilled in the art that various changes, modifications, substitutions and variations can be made thereto without departing from the principles and spirit of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A multifunctional thin film mechanical property testing device, comprising a base (1), characterized in that: The upper surface of the base (1) is fixedly connected with a controller (2), the upper surface of the base (1) is fixedly connected with a lifting machine (3), the front surface of the lifting machine (3) is provided with a clamping mechanism (4), the clamping mechanism (4) comprises a U-shaped block one (41), the right surface of the U-shaped block one (41) is provided with a circular hole (42), the inner surface of the circular hole (42) is slidably connected with a circular block (43), the right surface of the circular block (43) is provided with a sliding groove one (44), the inner surface of the sliding groove one (44) is slidably connected with a clamping block (45), the left surface of the circular block (43) is fixedly connected with a protruding block (46), and the protruding block (46) is in contact with the clamping block (45).

2. The multifunctional thin film mechanical property detection device according to claim 1, characterized in that: The right surface of the circular block (43) penetrates through and is slidably connected with a movable rod (47), one end of a support one (48) is hinged to the movable rod (47), and the other end of the support one (48) is hinged to the clamping block (45).

3. The multifunctional thin film mechanical property detection device according to claim 2, characterized in that: The right surface of the circular block (43) is fixedly connected with an L-shaped rod (49), the upper surface of the base (1) is fixedly connected with a U-shaped block two (410), the inner surface of the U-shaped block two (410) is slidably connected with a fixed plate (411), the front surface of the fixed plate (411) is rotatably connected with a threaded rod (412), the threaded rod (412) penetrates through the U-shaped block two (410) and is threadedly connected with the U-shaped block two (410).

4. The multifunctional thin film mechanical property detection device according to claim 3, characterized in that: The front surface of the U-shaped block one (41) is provided with a detection mechanism (5), the detection mechanism (5) comprises a straight plate (51), the straight plate (51) is fixedly connected with the front surface of the U-shaped block one (41), the upper surface of the straight plate (51) penetrates through and is slidably connected with a sliding rod (52), and the lower surface of the sliding rod (52) is fixedly connected with a microscope body (53).

5. The multifunctional thin film mechanical property detection device according to claim 4, characterized in that: The upper surface of the straight plate (51) is slidably connected with a movable block (54), one end of a support two (55) is hinged to the movable block (54), and the other end of the support two (55) is hinged to the sliding rod (52).

6. The multifunctional thin film mechanical property detection device according to claim 5, characterized in that: The upper surface of the movable block (54) penetrates through and is slidably connected with a conical rod (56), the upper surface of the straight plate (51) is linearly arranged and provided with a clamping hole (57), and the inner surface of the clamping hole (57) is slidably connected with the conical rod (56).

7. The multifunctional thin film mechanical property detection device according to claim 6, characterized in that: The upper surface of the movable block (54) is provided with a sliding groove two (58), the inner surface of the sliding groove two (58) is slidably connected with an F-shaped limiting rod (59), and the F-shaped limiting rod (59) is slidably connected with the conical rod (56).

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