Fixing mechanism for mask plate detection and equipment for mask plate detection

Abstract

The utility model relates to a fixing mechanism for mask plate detection and equipment for mask plate detection, and belongs to the technical field of mask plate detection. On the basis of the annular bottom plate, the first right-angle abutting end and the second right-angle abutting end are arranged at the two opposite corners respectively and matched with the fixed adsorption part and the movable adsorption part to limit the two opposite corners of the mask plate, and therefore complete limiting and fixing of the mask plate are achieved; the hollow part for mounting the backlight source is reserved, so that illumination of the backlight source cannot be shielded, and the placement position of the backlight source cannot be interfered; furthermore, a plurality of pressing pieces are arranged to reinforce the fixation of the mask plate, so that the mask plate is stable and reliable, and the space is saved; in addition, a leveling mechanism can be additionally arranged for leveling, so that the flat placement of the mask plate is further ensured.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of fixed mechanism for mask plate detection and equipment for mask plate detection, belong to mask plate detection technical field. BACKGROUND

[0002] Mask plate is mainly used in photolithography process, especially in the process of semiconductor manufacturing. Its main function is to form a specific pattern on the substrate by selectively shielding light. Due to the particularity of the mask plate (glass material, light transmission and no reflection), the material transmits light in the presence of only bright field light source, and most of the light cannot be reflected to the detector, so high-precision detection of the mask plate cannot be completed. Therefore, the current general method is to combine bright field light source with backlight source to achieve high-precision detection.

[0003] However, the premise of using backlight source is that there should be no obstruction below the mask plate, otherwise the backlight source cannot be placed and illuminated. However, the mask plate stage without obstruction at the bottom cannot realize the fixation of the mask plate only relying on the original adsorption device. Therefore, it is currently difficult to find a mask plate fixation and detection device that can meet the requirements of fixation and no obstruction at the bottom.

[0004] In the prior art, most of the fixation frames are shown in CN111996487A, which cannot adapt to fixation of mask plates of various sizes and cannot be reliably fixed. There are also multifunctional suction disc devices for mask plate detection with backlight disclosed in CN105739235A, which fix the mask plate on both sides by setting two movable suction disc bodies on the guide rail. However, since a large number of air suction holes need to be provided on both sides of the mask plate, this will cause the two sides of the mask plate to be shaded, thereby affecting the observation of the two sides. If the number of suction holes is reduced and only the middle of the two sides is supported, it is difficult to fix the mask plate. Even if inward force is provided to the two sides to clamp the mask plate, the mask plate may be broken due to its fragility.

[0005] Therefore, if there is an error in the size of the mask plate during the manufacturing process, two situations will occur when the mask plate is limited by the limiting hole and the limiting pin. One is that the mask plate is too large to be placed or too small to cover the air suction hole. The other is that internal stress is generated on the mask plate, damaging the mask plate. In summary, it is currently difficult to meet the technical requirements of mask plate fixation and unobstructed exposure. UTILITY MODEL CONTENT

[0006] To solve the above problems, in the first aspect, the utility model provides a kind of fixed mechanism for mask plate detection, including:

[0007] The bottom plate is a hollow annular plate in the middle;

[0008] Suction accessories are fixed on both sides of the bottom plate, and each of the two suction accessories has a first right-angled abutting end and a second right-angled abutting end arranged towards the center of the bottom plate, and the directions of the first right-angled abutting end and the second right-angled abutting end are opposite; the first right-angled abutting end and the second right-angled abutting end are provided with suction holes;

[0009] A pressing member is arranged on the first right-angled abutting end and / or the second right-angled abutting end.

[0010] Further, the pressing member includes a base arranged on the upper surface of the first right-angled abutting end or the second right-angled abutting end, a pushing rod inserted into the base, a pressing finger connected to the pushing rod, and a spring connected to the pressing finger and the base and sleeved on the surface of the pushing rod.

[0011] Further, the pressing finger is a wedge-shaped block and has a downwardly inclined cutting surface towards the base.

[0012] Further, the end of the cutting surface away from the base is flush with any right-angled side of the second right-angled abutting end or the first right-angled abutting end.

[0013] Further, the bottom plate is a rectangular annular plate, the bottom plate is provided with horizontal guide rails, the fixed suction accessory is arranged at a corner of the bottom plate, the guide rails are two and are arranged at two opposite corners on both sides of the fixed suction accessory, and the guide rails are arranged along the diagonal direction of the bottom plate.

[0014] Further, the suction accessory includes:

[0015] The fixed suction accessory is fixed on one side of the bottom plate, and the fixed suction accessory has a first right-angled abutting end arranged towards the center of the bottom plate.

[0016] The movable suction accessory is slidably connected to the guide rail, and the movable suction accessory has a second right-angled abutting end arranged towards the center of the bottom plate, and the directions of the first right-angled abutting end and the second right-angled abutting end are opposite.

[0017] The driving assembly is connected to the movable suction accessory, drives the movable suction accessory along the guide rail, and can make the first right-angled abutting end and the second right-angled abutting end abut two opposite corners of the mask plate at the same time to limit the position.

[0018] Further, the movable suction accessory includes a docking plate and two wing plates connected to both sides of the docking plate, the second right-angled abutting end is located on the side of the docking plate close to the fixed suction accessory, and the surface of the docking plate is provided with at least two pressing members.

[0019] Further, the bottom plate comprises a first corner provided with a fixed suction accessory, a second corner opposite to the first corner, the fixed suction accessory being in L-shaped structure and being installed on the straight edges of the bottom plate at the first corner and on both sides of the first corner, and two wing plates being parallel to the straight edges of the bottom plate on both sides of the second corner.

[0020] In a second aspect, the utility model provides a device for mask plate detection, including work table and gantry frame on work table, be provided with detection module on gantry frame, be provided with leveling mechanism with middle hollow on work table, the leveling mechanism bears mask plate detection fixed mechanism, back light source sets up in the hollow area of leveling mechanism middle part and the hollow area of mask plate detection fixed mechanism bottom plate.

[0021] Further, the leveling mechanism comprises a fixed frame and a leveling frame located above the fixed frame, the fixed frame and the leveling frame are both rectangular frame structures with consistent external dimensions and overlapping positions, and three voice coil motors are connected between the fixed frame and the leveling frame, with three edges of the fixed frame and the leveling frame coinciding.

[0022] The utility model has the advantages of:

[0023] The utility model discloses a bottom plate, a first right angle abutting end and a second right angle abutting end are arranged at opposite corners, and a fixed suction accessory and a movable suction accessory are arranged to limit the mask plate at two opposite corners, so that the mask plate is completely limited and fixed, and the utility model discloses a hollow part for installing a back light source, which does not block the illumination of the back light source and does not interfere with the placement position of the back light source. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a structure schematic view of the mask plate detection fixed mechanism in an embodiment of the utility model;

[0025] Figure 2 It is a structure schematic view of the mask plate detection fixed mechanism in an embodiment of the utility model;

[0026] Figure 3 It is a structure schematic view of the mask plate detection fixed mechanism in an embodiment of the utility model;

[0027] Figure 4 It is a structure schematic view of the mask plate detection fixed mechanism in an embodiment of the utility model;

[0028] In the figure: 1, mask plate detection fixed mechanism; 2, leveling mechanism; 3, backlight; 4, detection module; 5, workbench; 6, adsorption air hole; 1.1, bottom plate; 1.2, fixed suction accessory; 1.3, guide rail; 1.4, drive assembly; 1.5, drive connecting piece; 1.6, moving suction accessory; 1.7, lower pressing piece; 2.1, voice coil motor; 2.2, leveling frame; 2.3, fixed frame; 1.7.1, lower pressing finger; 1.7.2, push rod; 1.7.3, spring; 1.7.4, base. DETAILED DESCRIPTION

[0029] The technical solutions of the present application will be described clearly and completely below in conjunction with the drawings. Obviously, the described embodiments are only some of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0030] In the description of the present application, it should be pointed out that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as limiting the devices or elements indicated to have a particular orientation, to be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0031] In the description of the present application, it should be pointed out that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the communication between two elements inside. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0032] Example 1

[0033] As Figures 1-2 shown, the present application provides a kind of fixed mechanism for mask plate detection, comprising:

[0034] The bottom plate 1.1 is a hollow annular plate, which is provided with horizontal guide rails 1.3; the bottom plate 1.1 is a rectangular annular plate, the fixed suction accessory 1.2 is arranged at one corner of the bottom plate 1.1, and the guide rails 1.3 are arranged at two opposite corners on both sides of the fixed suction accessory 1.2, and the guide rails 1.3 are arranged along the diagonal direction of the bottom plate 1.1.

[0035] The suction accessory includes the fixed suction accessory 1.2 and the movable suction accessory 1.6.

[0036] The fixed suction accessory 1.2 is fixed to one side of the bottom plate 1.1, and the fixed suction accessory 1.2 has a first right-angled abutting end arranged towards the center of the bottom plate 1.1.

[0037] The movable suction accessory 1.6 is slidably connected to the guide rails 1.3, and the movable suction accessory 1.6 has a second right-angled abutting end arranged towards the center of the bottom plate 1.1, and the directions of the first right-angled abutting end and the second right-angled abutting end are opposite; the movable suction accessory 1.6 includes a butt plate and two wing plates connected to both sides of the butt plate, the second right-angled abutting end is located on one side of the butt plate close to the fixed suction accessory 1.2, and the surface of the butt plate is provided with at least two pressing members 1.7.

[0038] The driving assembly 1.4 is connected to the movable suction accessory 1.6 through a driving connecting piece 1.5, and the driving assembly can be a servo motor; the driving assembly 1.4 can drive the movable suction accessory 1.6 to move along the guide rails 1.3, so as to adapt to different sizes of mask plates and adapt to detection of different sizes of mask plates.

[0039] The pressing member 1.7 is arranged on the first right-angled abutting end and / or the second right-angled abutting end; the pressing member 1.7 includes a base 1.7.4 arranged on the upper surface of the first right-angled abutting end or the second right-angled abutting end, a pushing rod 1.7.2 inserted into the base 1.7.4, a pressing finger 1.7.1 connected to the pushing rod 1.7.2, and a spring 1.7.3 connected to the pressing finger 1.7.1 and the base 1.7.4 and sleeved on the surface of the pushing rod 1.7.2; the pressing finger 1.7.1 is a wedge-shaped block and has a downwardly inclined tangent surface towards the base 1.7.4, and an end of the tangent surface away from the base 1.7.4 is flush with any right angle side of the second right-angled abutting end; preferably, the two right angle sides of the first right-angled abutting end and the two right angle sides of the second right-angled abutting end are both provided with the pressing member 1.7, and a total of four pressing members 1.7 are arranged.

[0040] Both the first and second right-angle abutment ends are provided with adsorption pores 6. Driving the moving adsorption member 16 along the guide rail 13 allows the first and second right-angle abutment ends to simultaneously abut against the two opposite corners of the mask plate for positioning. At the same time, the mask plate is fixed through the adsorption pores. In addition, since the end of the cross-section of each pressing member 17 away from the base 174 is flush with any right-angle side of the second or first right-angle abutment end, the edge of the mask plate will synchronously press the pressing finger 17.1 outward. The pressing finger 17.1 always receives the downward thrust provided by the mask plate, so the edge of the mask plate can form a stable abutment with the pressing finger 17.1, further realizing the fixation of the mask plate.

[0041] Furthermore, the base plate 1.1 includes a first corner on which a fixed adsorption member 1.2 is installed, and a second corner relative to the first corner. The first corner and the second corner are opposite corners. The fixed adsorption member 1.2 has an L-shaped structure and is installed on the right-angled sides of the base plate on the first corner and both sides of the first corner. The two wing plates are parallel to the right-angled sides of the base plate on both sides of the second corner. With this arrangement, both the fixed adsorption member 1.2 and the movable adsorption member 1.6 are located on the periphery of the mask plate and will not obstruct the mask plate.

[0042] Example 2

[0043] like Figures 3-4 As shown, this utility model provides a device for mask plate inspection, including a workbench 5 and a gantry frame mounted on the workbench 5. The gantry frame is equipped with an inspection module 4. The workbench 5 is equipped with a leveling mechanism 2 with a central hollow section. The leveling mechanism 2 carries the mask plate inspection fixing mechanism 1 described in Embodiment 1. The backlight 3 is located in the hollow area in the center of the leveling mechanism 2 and the hollow area of ​​the base plate of the mask plate inspection fixing mechanism 1.

[0044] Furthermore, the leveling mechanism 2 includes a fixed frame 2.3 and a leveling frame 2.2 located above the fixed frame 2.3. Both the fixed frame 2.3 and the leveling frame 2.2 are rectangular frame structures with the same external dimensions and overlapping vertically. Three voice coil motors 2.1 are connected between the fixed frame 2.3 and the leveling frame 2.2. The three voice coil motors 2.1 are located on three of the overlapping sides of the fixed frame 2.3 and the leveling frame 2.2, respectively.

[0045] The following demonstrates the steps for placing and securing the photomask:

[0046] The driving assembly 1.4 is used to drive the mobile suction accessory 1.6 to displace to a target position (the target position of displacement can be calculated and set according to the size of the corresponding mask plate in advance), and then the mobile suction accessory 1.6 is finely adjusted to make the first right-angle abutting end and the second right-angle abutting end abut two opposite corners of the mask plate at the same time to limit, and the mask plate is vacuum-sucked through the suction holes 6, at the same time, the corresponding lower pressing fingers 1.7.1 abut the edges of the two opposite corners of the mask plate, so that the mask plate is further fixed.

[0047] Before each detection, the leveling action is performed first, and then the detection is performed, so as to improve the entire detection precision. The leveling steps are as follows:

[0048] The mask plate detection fixing mechanism 1 carrying the mask plate and the leveling mechanism 2 are moved to the lower side of the detection module 4 by using the workbench 5, the detection module 4 measures the focal planes of the four vertices of the mask plate under the microscopic objective lens in the camera imaging mode, and the relative height of the leveling frame 2.2 and the fixed frame 2.3 on each edge is adjusted by controlling the displacement of the three voice coil motors 2.1 according to the height difference of the focal planes of the four vertices. Specifically, after the height difference of the focal planes of the four vertices is detected, the height of three edges is adjusted by the three voice coil motors 2.1 until the height difference of the focal planes satisfies the condition, so that the leveling is realized.

[0049] Although the utility model has disclosed as above with preferred embodiments, it is not used to limit the utility model, anyone familiar with the technology can make various changes and modifications without departing from the spirit and scope of the utility model, therefore the protection scope of the utility model should be limited by the claims.

Claims

1. A fixing mechanism for mask plate detection, characterized in that, The utility model relates to a mask plate detection fixed mechanism, including: The bottom plate is the annular plate of middle hollow; Suction accessory, fixed in both sides of the bottom plate, two suction accessories have first right angle abutting end and second right angle abutting end respectively, the direction of first right angle abutting end and second right angle abutting end is opposite, and the suction hole is arranged in first right angle abutting end and second right angle abutting end; The lower pressing piece is arranged on the first right angle abutting end and / or second right angle abutting end.

2. The fixing mechanism for mask inspection according to claim 1, wherein The lower pressing piece includes the pedestal arranged on the upper surface of the first right angle abutting end or the second right angle abutting end, the push rod inserted into the pedestal, the lower pressing finger connected with the push rod, and the spring connected with the lower pressing finger and the pedestal and sleeved on the surface of the push rod.

3. The fixing mechanism for mask inspection according to claim 2, wherein The lower pressing finger is a wedge-shaped block and has a downwardly inclined tangent surface towards the pedestal.

4. The fixing mechanism for mask inspection according to claim 3, wherein The tangent surface away from the pedestal is flush with any right angle side of the second right angle abutting end or the first right angle abutting end.

5. The fixing mechanism for mask inspection according to claim 1, wherein The bottom plate is a rectangular annular plate, the bottom plate is provided with horizontal guide rails, the fixed suction accessory is arranged at a corner of the bottom plate, the guide rails are two and are arranged at two opposite corners on both sides of the fixed suction accessory, and the guide rails are arranged along the diagonal direction of the bottom plate.

6. The fixing mechanism for mask inspection according to claim 1, wherein The utility model relates to a mask plate detection fixed mechanism, including: The fixed suction accessory is fixed on one side of the bottom plate, and the fixed suction accessory has a first right angle abutting end arranged towards the center of the bottom plate; The movable suction accessory is slidably connected to the guide rail, and the movable suction accessory has a second right angle abutting end arranged towards the center of the bottom plate, and the directions of the first right angle abutting end and the second right angle abutting end are opposite; The driving assembly is connected to the movable suction accessory, drives the movable suction accessory along the guide rail, and can make the first right angle abutting end and the second right angle abutting end abut against two opposite corners of the mask plate at the same time to limit.

7. The fixing mechanism for mask inspection according to claim 6, wherein The movable suction accessory includes a docking plate and two wing plates connected to both sides of the docking plate, the second right angle abutting end is located on one side of the docking plate close to the fixed suction accessory, and at least two lower pressing pieces are arranged on the surface of the docking plate.

8. The fixing mechanism for mask inspection according to claim 7, wherein The bottom plate includes a first corner where the fixed suction accessory is installed, a second corner opposite to the first corner, the fixed suction accessory is in an L-shaped structure and is installed on the right angle side of the bottom plate at the first corner and on both sides of the first corner, and the two wing plates are parallel to the right angle side of the bottom plate on both sides of the second corner.

9. An apparatus for mask plate detection, comprising a worktable and a gantry erected on the worktable, a detection module is arranged on the gantry, characterized in that, The workbench is provided with a middle hollow leveling mechanism, the leveling mechanism carries the fixed mechanism for mask plate detection as claimed in any one of claims 1-8, and a backlight source is arranged in the hollow area of the middle part of the leveling mechanism and the hollow area of the bottom plate of the fixed mechanism for mask plate detection.

10. The apparatus for mask detection according to claim 9, wherein, The leveling mechanism includes a fixed frame and a leveling frame located above the fixed frame, the fixed frame and the leveling frame are both rectangular frame structures with consistent external dimensions and overlapping positions, three voice coil motors are connected between the fixed frame and the leveling frame, and the three voice coil motors are located at three edges of the fixed frame and the leveling frame that coincide.

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