Static electricity removing structure of electronic-grade isopropanol delivery pipeline

Abstract

The static electricity removing structure comprises an inner pipe and an outer pipe which are coaxially arranged, a linear heat source channel is arranged between the inner pipe and the outer pipe, a spiral pipe is arranged on the outer wall of the inner pipe, and a spiral heat source channel is arranged between the spiral pipe and the inner pipe. A water inlet pipe and a water outlet pipe are arranged at the two ends of the spiral pipe respectively, and a plurality of supporting blocks are arranged on the two sides of the spiral pipe between the inner pipe and the outer pipe. By arranging the linear heat source channel and the spiral heat source channel, electronic-grade isopropanol flowing through the inner tube can be effectively heated, so that the resistivity of the electronic-grade isopropanol is reduced, and the generation of static electricity is reduced. Meanwhile, due to the design of the spiral pipe, heating is more uniform, and the static electricity removal effect is further improved. By effectively removing static electricity, the adsorption and loss of the electronic-grade isopropanol in the conveying process can be reduced, and the purity and yield of the product are improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to a kind of static removal structures of electronic grade isopropanol delivery pipeline. BACKGROUND

[0002] With the rapid development of microelectronics industry, the demand for high-purity chemical reagents is increasing, among which electronic grade isopropanol as a key semiconductor manufacturing material, its quality directly affects the performance and reliability of chip. However, in the production, storage and transportation process of electronic grade isopropanol, the generation and accumulation of static electricity is a problem that cannot be ignored. Especially in winter, due to the decrease of outdoor temperature, the viscosity of electronic grade isopropanol will increase, which further aggravates the generation and accumulation of static electricity, posing a serious threat to product quality and safety. SUMMARY

[0003] The main purpose of the utility model is to provide a kind of static removal structures of electronic grade isopropanol delivery pipeline, to solve the problems raised in the above background technology.

[0004] The purpose of the utility model can be achieved by adopting the following technical scheme:

[0005] A kind of static removal structure of electronic grade isopropanol delivery pipeline, including coaxially arranged inner tube and outer tube, linear heat source channel is arranged between the inner tube and outer tube, spiral pipe is arranged on the outer wall of the inner tube, spiral heat source channel is arranged between the spiral pipe and inner tube, water inlet pipe and water outlet pipe are arranged at both ends of the spiral pipe respectively, a plurality of support blocks are arranged on both sides of the spiral pipe between the inner tube and outer tube.

[0006] Preferably, the cross section of the spiral pipe is semicircular.

[0007] Preferably, the water inlet pipe and the water outlet pipe extend out of the outer tube, and the outer tube is provided with through holes for the water inlet pipe and the water outlet pipe to extend out.

[0008] Preferably, the support block is provided with six, and the six support blocks are evenly distributed between the inner tube and the outer tube and along the circumference of the inner tube.

[0009] Preferably, the support block is divided into fixed pipe and movable pipe, the top end of the movable pipe is closed, and the inside of the fixed pipe and the movable pipe is communicated.

[0010] Preferably, a spring is arranged inside the fixed pipe and the movable pipe, and the two ends of the spring are connected to the outer wall of the inner tube and the inner top surface of the movable pipe respectively.

[0011] Preferably, flanges are arranged at both ends of the outer tube.

[0012] Preferably, communication pipes are arranged at both ends of the outer tube.

[0013] The beneficial technical effects of this utility model are as follows:

[0014] This invention effectively heats electronic-grade isopropanol flowing through the inner tube by setting up a linear heat source channel and a spiral heat source channel, thereby reducing its resistivity and decreasing static electricity generation. Simultaneously, the spiral tube design ensures more uniform heating, further improving the static electricity removal effect. Effective static electricity removal reduces the adsorption and loss of electronic-grade isopropanol during transport, improving product purity and yield. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the electrostatic removal structure according to an embodiment of the present invention;

[0016] Figure 2 This is a cross-sectional view of the electrostatic removal structure according to an embodiment of the present invention;

[0017] Figure 3 This is a schematic diagram of the outer tube structure of an embodiment of the present invention;

[0018] Figure 4 This is a schematic diagram of the inner tube structure of an embodiment of the present invention;

[0019] Figure 5 This is a schematic diagram of the spiral tube structure according to an embodiment of the present invention;

[0020] Figure 6 This is a schematic diagram of the support block structure of an embodiment of the present invention.

[0021] In the diagram: 1. Inner pipe; 2. Outer pipe; 3. Straight heat source channel; 4. Spiral pipe; 5. Spiral heat source channel; 6. Inlet pipe; 7. Outlet pipe; 8. Support block; 801. Fixed pipe; 802. Movable pipe; 9. Through hole; 10. Spring; 11. Flange; 12. Connecting pipe. Detailed Implementation

[0022] To enable those skilled in the art to understand the technical solution of this utility model more clearly, the present utility model will be further described in detail below with reference to the embodiments and accompanying drawings, but the implementation of this utility model is not limited thereto.

[0023] like Figures 1-6 As shown, the electrostatic removal structure of an electronic-grade isopropanol delivery pipeline provided in this embodiment includes an inner tube 1 and an outer tube 2 arranged coaxially. A linear heat source channel 3 is provided between the inner tube 1 and the outer tube 2. A spiral tube 4 is provided on the outer wall of the inner tube 1. A spiral heat source channel 5 is provided between the spiral tube 4 and the inner tube 1. A water inlet pipe 6 and a water outlet pipe 7 are respectively provided at both ends of the spiral tube 4. Multiple support blocks 8 are provided on both sides of the spiral tube 4 between the inner tube 1 and the outer tube 2.

[0024] The heat source is introduced into the straight heat source channel 3 and the spiral heat source channel 5 respectively, the heat source in the straight heat source channel 3 can quickly contact the inner tube 1 at each position, and the spiral heat source channel 5 can increase the time for the heat source inside to stay outside the inner tube 1, ensure the heat exchange effect, increase the temperature of the electronic-grade isopropyl alcohol, and prevent static electricity from being generated.

[0025] In the embodiment, as shown in the figure, Figure 2 The cross section of the spiral pipe 4 is semicircular, so that the heat source in the spiral heat source channel 5 can directly contact the outer wall of the inner tube 1, the heat exchange efficiency is high, and the static electricity removal effect is good.

[0026] In the embodiment, as shown in the figure, Figure 1 The water inlet pipe 6 and the water outlet pipe 7 extend out of the outer tube 2, the outer tube 2 is provided with a through hole 9 for the water inlet pipe 6 and the water outlet pipe 7 to extend out, the heat source is introduced into the spiral heat source channel 5 through the water inlet pipe 6, and after heat exchange, the heat source flows out from the water outlet pipe 7, so that the heat exchange effect is good.

[0027] In the embodiment, as shown in the figure, Figure 4 The six support blocks 8 are uniformly distributed between the inner tube 1 and the outer tube 2 and along the circumference of the inner tube 1, so as to ensure the structural stability.

[0028] In the embodiment, as shown in the figure, Figure 6 The support block 8 is divided into a fixed pipe 801 and a movable pipe 802, the top end of the movable pipe 802 is closed, the inside of the fixed pipe 801 and the movable pipe 802 is communicated, springs 10 are arranged in the inside of the fixed pipe 801 and the movable pipe 802, and the two ends of the spring 10 are connected to the outer wall of the inner tube 1 and the inner top surface of the movable pipe 802 respectively, so as to provide elastic buffering and further improve the structural stability.

[0029] In the embodiment, as shown in the figure, Figure 1 The flanges 11 are arranged at both ends of the outer tube 2, so as to facilitate connection with other outer tubes 2 or devices.

[0030] In the embodiment, as shown in the figure, Figure 1 The communication pipes 12 are arranged at both ends of the outer tube 2, so as to facilitate heat source transmission in different straight heat source channels 3.

[0031] In summary, in the embodiment, the straight heat source channel 3 and the spiral heat source channel 5 are arranged, so that the electronic-grade isopropyl alcohol flowing through the inner tube 1 can be effectively heated, thereby reducing the resistivity and reducing the generation of static electricity. Meanwhile, the design of the spiral pipe 4 makes the heating more uniform, further improving the static electricity removal effect. By effectively removing static electricity, the adsorption and loss of the electronic-grade isopropyl alcohol during transportation can be reduced, and the purity and yield of the product can be improved. Meanwhile, reducing static electricity interference can also reduce the failure rate of production equipment and improve production efficiency.

[0032] The above merely illustrates the further embodiments of the present application, but the protection scope of the present application is not limited thereto, any skilled person in the art can make equivalent replacement or change according to the technical scheme and concept of the present application within the disclosed scope, which all falls into the protection scope of the present application.

Claims

1. An electrostatic removal structure for an electronic grade isopropanol delivery line, characterized by: The utility model provides a heat pipe, including coaxial inner tube (1) and outer tube (2), be provided with linear heat source channel (3) between inner tube (1) and outer tube (2), be provided with spiral pipe (4) on the outer wall of inner tube (1), be provided with spiral heat source channel (5) between spiral pipe (4) and inner tube (1), the both ends of spiral pipe (4) are provided with water inlet pipe (6) and water outlet pipe (7) respectively, be provided with a plurality of support block (8) between inner tube (1) and outer tube (2) in the both sides of spiral pipe (4).

2. The electrostatic removal structure of an electronic grade isopropanol delivery line according to claim 1, wherein: The cross section of the spiral pipe (4) is semicircular.

3. The static electricity removal structure of an electronic grade isopropyl alcohol delivery line according to claim 1, wherein: The water inlet pipe (6) and the water outlet pipe (7) extend out of the outer tube (2), and the outer tube (2) is provided with through holes (9) for the water inlet pipe (6) and the water outlet pipe (7) to extend out.

4. The static electricity removal structure of an electronic grade isopropyl alcohol delivery line according to claim 1, wherein: The support block (8) is provided with six, and the six support blocks (8) are evenly distributed between the inner tube (1) and the outer tube (2) and along the circumference of the inner tube (1).

5. The static electricity removal structure for an electronic grade isopropanol delivery line of claim 1, wherein: The support block (8) is divided into a fixed tube (801) and a movable tube (802), the top end of the movable tube (802) is closed, and the inside of the fixed tube (801) and the movable tube (802) is communicated.

6. The static electricity removal structure of an electronic grade isopropanol delivery line according to claim 5, wherein: The inside of the fixed tube (801) and the movable tube (802) is provided with a spring (10), and the both ends of the spring (10) are connected to the outer wall of the inner tube (1) and the inner top surface of the movable tube (802) respectively.

7. The static electricity removal structure of an electronic grade isopropyl alcohol delivery line according to claim 1, wherein: The outer tube (2) is provided with flanges (11) at both ends.

8. The static electricity removal structure of an electronic grade isopropyl alcohol delivery line according to claim 1, wherein: The outer tube (2) is provided with communication pipes (12) at both ends.

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