Quartz boat cleaning device

Abstract

The utility model discloses a quartz boat cleaning device in the technical field of quartz boat application, which comprises a support frame, a roller conveyor belt mounted on the support frame, a cleaning mechanism arranged in the middle of the roller conveyor belt, a blanking mechanism arranged on the right side of the roller conveyor belt, and a bearing frame arranged on the right side of the roller conveyor belt. According to the quartz boat cleaning device, the discharging mechanism and the cleaning mechanism are additionally arranged, the discharging mechanism improves the efficiency and safety of the quartz boat treatment process, a plurality of quartz boats can be temporarily stored through the combination of six sets of mounting rods, connecting discs and storage rubber mats, and the quartz boat cleaning device is simple in structure, convenient to use and high in practicability. Sufficient time is provided for workers to pick and place the quartz boat, so that the shutdown time of a production line is reduced; according to the cleaning mechanism, efficient cleaning and rapid drying of the quartz boat are achieved, the cleanliness and production efficiency of the quartz boat are guaranteed, the multiple sets of flushing structures can clean the quartz boat from different angles, and it is guaranteed that pollutants on the surface of the quartz boat are thoroughly removed.

Description

TECHNICAL FIELD

[0001] The utility model relates to quartz boat application technical field, specifically a quartz boat cleaning device. BACKGROUND

[0002] Quartz boat, also known as quartz glass, is a material with high-purity silicon dioxide as the main component, usually derived from natural crystal or artificial silica, quartz glass has a series of unique physical and chemical properties, such as excellent high-temperature resistance, corrosion resistance, good light transmission and low thermal expansion coefficient, etc. The preparation process of quartz boat is special, which is made by high-temperature melting and rapid cooling, which can maintain its high purity and uniformity. Quartz boat is widely used in semiconductor, chemical, optical, electronic, scientific research and other industries. In the semiconductor industry, quartz boat is used to make silicon wafer carrier, which is an indispensable material in the process of manufacturing chips. In the optical field, it can be used as the base material of high-precision optical elements such as optical windows and lenses.

[0003] In the production and manufacturing process of quartz boat, due to dust in the environment and impurities generated in the processing process, a certain amount of pollutants will inevitably accumulate on the surface of quartz boat. If these pollutants are not effectively removed, they will affect the physical properties and optical properties of quartz boat, and thus affect its performance in subsequent applications. To solve this problem, current cleaning operations usually require workers to manually participate. They take down quartz boats one by one on the conveyor belt for cleaning. This process not only has low efficiency and prolongs the production cycle, but also has certain safety risks in manual operation. In order to reduce this risk and ensure the safety of workers' operation, more cautious handling methods must be adopted. In addition, if the quartz boats are directly conveyed to the storage box through the conveyor belt after cleaning, they may be damaged due to mutual collision during movement. This not only increases production cost, but also may cause production delay, which has a negative impact on the efficiency and economic benefits of the entire production process.

[0004] Therefore, the utility model designs a quartz boat cleaning device to solve the above problems. UTILITY MODEL CONTENTS

[0005] The utility model aims to provide a quartz boat cleaning device to solve the problems raised in the background art.

[0006] In order to achieve the above object, the utility model provides the following technical scheme: A quartz boat cleaning device, including support frame, the support frame is installed with gyro wheel conveying belt, the middle part of gyro wheel conveying belt is provided with cleaning mechanism, the right side of gyro wheel conveying belt is provided with discharging mechanism, the discharging mechanism includes bearing frame, rotating rod, transmission wheel body, transmission belt, drive wheel body, drive motor, installation rod, connecting disc and object rubber pad, the right side of gyro wheel conveying belt is provided with bearing frame, two bearing frames are installed with rotating rod between, the rear end of rotating rod is fixedly installed with transmission wheel body, the outside of transmission wheel body is surrounded with transmission belt, the below of transmission belt is provided with drive wheel body, the rear end of drive wheel body is installed with drive motor, and the drive end of drive motor is connected with drive wheel body, the outer wall of rotating rod is fixedly installed with installation rod, one end of installation rod away from rotating rod is fixedly installed with connecting disc, and the lower end of connecting disc is installed with object rubber pad, the cleaning mechanism includes infusion pipeline, liquid injection pipe head, first infusion pipe, second infusion pipe, first liquid injection head, third infusion pipe, second liquid injection head, water removal bin, heating bin, heating electric wire, electric control box, air blower, air inlet pipeline, air outlet pipeline, connecting seat and air jet nozzle, the front end of support frame is fixedly installed with infusion pipeline, the upper end of infusion pipeline is fixedly connected with first infusion pipe, the upper end of first infusion pipe is fixedly connected with second infusion pipe, the lower end of second infusion pipe is fixedly installed with first liquid injection head, the lower end of infusion pipeline is fixedly connected with third infusion pipe, the middle part of third infusion pipe is fixedly installed with second liquid injection head, the middle part of support frame is fixedly installed with water removal bin, the upper end of water removal bin is fixedly installed with heating bin, the inside of heating bin is installed with heating electric wire, the rear end of heating bin is fixedly installed with electric control box, the front of heating bin is provided with air blower, the air inlet pipeline is arranged between air blower and heating bin, the left end of air blower is fixedly connected with air outlet pipeline, and the air outlet pipeline is downwardly inserted into the inside of water removal bin, the lower end of air outlet pipeline is fixedly connected with connecting seat, and the lower end of connecting seat is fixedly installed with air jet nozzle.

[0007] Optionally, a plurality of groups of the installation rod, the connecting disc and the object rubber pad are rotatably installed on the outer wall of the rotating rod with the midpoint of the rotating rod as the axis.

[0008] Optionally, the front end of the infusion pipeline is fixedly connected with the liquid injection pipe head, four groups of the first infusion pipe, the second infusion pipe and the first liquid injection head are distributed above the gyro wheel conveying belt from left to right, and four groups of the third infusion pipe and the second liquid injection head are distributed below the gyro wheel conveying belt from left to right.

[0009] Optionally, the heating electric wire and the air blower are electrically connected with the electric control box, the air inlet pipeline is fixedly installed on the air blower and rearwardly extends and is inserted into the notch of the outer wall of the heating bin, and a plurality of groups of the air jet nozzle are distributed at the lower end of the connecting seat.

[0010] Optionally, the two groups of air blower, air inlet pipeline, air outlet pipeline, connecting seat and air jet nozzle are distributed on the water sump from left to right.

[0011] Compared with the prior art, the utility model has the advantages of:

[0012] 1、The utility model discloses a feeding mechanism, and the feeding mechanism improves the efficiency and safety of the quartz boat processing process;The introduction of the driving motor makes the placing and transferring process of the quartz boat fast and accurate, and the combination of the six groups of mounting rods, connecting discs and object placing rubber pads can temporarily store multiple quartz boats, providing sufficient time for workers to take and place the quartz boats, thereby reducing the downtime of the production line and improving the overall production rhythm.

[0013] 2、The utility model discloses a cleaning mechanism, which realizes efficient cleaning and rapid drying of the quartz boat, ensures the cleanliness and production efficiency of the quartz boat, and multiple washing structures can clean the quartz boat from different angles to ensure that the pollutants on the surface of the quartz boat are completely removed, which is crucial for maintaining the optical properties and physical properties of the quartz boat. BRIEF DESCRIPTION OF DRAWINGS

[0014] Figure 1 It is a structure schematic diagram of the utility model three -dimensional front view;

[0015] Figure 2 It is a structure schematic diagram of the utility model plane front view;

[0016] Figure 3 It is a structure schematic diagram of the utility model three -dimensional rear view;

[0017] Figure 4 It is a structure schematic diagram of the utility model three -dimensional top view;

[0018] Figure 5 It is a structure schematic diagram of the utility model plane top view;

[0019] Figure 6The utility model discloses a three-dimensional right view structure schematic diagram.

[0020] Figure 7 The utility model discloses a three-dimensional sectional structure schematic diagram Figure 1 ;

[0021] Figure 8 The utility model discloses a three-dimensional sectional structure schematic diagram Figure 2 ;

[0022] Figure 9 The utility model discloses a three-dimensional sectional structure schematic diagram Figure 3 .

[0023] In the figure: 1, support frame, 2, gyro wheel conveying belt, 3, blanking mechanism, 301, bearing frame, 302, rotary rod, 303, transmission wheel body, 304, transmission belt, 305, drive wheel body, 306, drive motor, 307, mounting rod, 308, connecting disc, 309, put rubber pad, 4, clean mechanism, 401, infusion pipeline, 402, liquid injection pipe head, 403, first infusion pipe, 404, second infusion pipe, 405, first liquid injection head, 406, third infusion pipe, 407, second liquid injection head, 408, water removal warehouse, 409, heating warehouse, 410, heating electric wire, 411, electric control box, 412, air blower, 413, air inlet pipeline, 414, air outlet pipeline, 415, connecting seat, 416, air jet nozzle. DETAILED DESCRIPTION

[0024] In the description of the utility model, need understanding, the orientation or positional relation that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer" indicate is based on the orientation or positional relation shown in the drawing, only for the convenience of describing the utility model and simplifying the description, and not indicate or imply the device or element that is indicated must have the specific orientation, with specific orientation structure and operation, therefore can not be understood as the limitation of the utility model. In addition, the terms "first", "second" and the like are only for the purpose of description, and can not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the feature with "first", "second" and the like can be explicitly or implicitly include one or more features. In the description of the utility model, unless otherwise specified, the meaning of "multiple" is two or more.

[0025] In the description of the utility model, it is necessary to explain that, unless there is definite stipulation and limitation, the term "installation", "connection", "connect" should be broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can be indirectly connected through intermediate medium, can be the communication inside two elements.For ordinary skilled person in the art, the specific meaning of the above-mentioned terms in the utility model can be understood through specific circumstances.

[0026] The technical scheme in the embodiments of the utility model will be described clearly and completely in the description of the drawings in the embodiments of the utility model, obviously, the described embodiments are only a part of the embodiments of the utility model, not all the embodiments.Based on the embodiments in the utility model, all other embodiments obtained by ordinary skilled person in the art without making creative labor belong to the scope of protection of the utility model.

[0027] Please refer to Figures 1 to 9 , in the embodiments of the utility model, a quartz boat cleaning device, including support frame 1, support frame 1 is installed with gyro wheel conveying belt 2, the middle part of gyro wheel conveying belt 2 is provided with cleaning mechanism 4, the right side of gyro wheel conveying belt 2 is provided with discharging mechanism 3, and the discharging mechanism 3 includes bearing frame 301, rotating rod 302, transmission wheel body 303, transmission belt 304, driving wheel body 305, driving motor 306, mounting rod 307, connecting disc 308 and storage rubber pad 309, the right side of gyro wheel conveying belt 2 is provided with bearing frame 301, two bearing frames 301 are installed with rotating rod 302, the rear end of rotating rod 302 is fixedly installed with transmission wheel body 303, the outer side of transmission wheel body 303 is sleeved with transmission belt 304, the lower portion of transmission belt 304 is provided with driving wheel body 305, the rear end of driving wheel body 305 is provided with driving motor 306, the transmission end of driving motor 306 is connected with driving wheel body 305, the outer wall of rotating rod 302 is fixedly installed with mounting rod 307, one end of mounting rod 307 away from rotating rod 302 is fixedly installed with connecting disc 308, the lower end of connecting disc 308 is installed with storage rubber pad 309, and a plurality of mounting rods 307, connecting discs 308 and storage rubber pads 309 are installed on the outer wall of rotating rod 302 with the midpoint of rotating rod 302 as the shaft;

[0028] See Figure 2 , Figure 3 , Figure 6 and Figure 7At the beginning, the blanking mechanism 3 is enabled, the driving motor 306 needs to be pre-connected to the power and connected to the control terminal, the driving motor 306 is started to drive the driving wheel body 305 and the transmission belt 304 to rotate, and then the transmission wheel body 303 and the rotating rod 302 are rotated to drive the six groups of installation rods 307, the connecting disc 308 and the storage rubber pad 309 to rotate at a uniform speed; according to the rotation frequency of the six groups of installation rods 307, the connecting disc 308 and the storage rubber pad 309, the quartz boat is placed on the roller conveyor 2 in sections, so as to ensure that the storage rubber pad 309 moves to the right side of the roller conveyor 2 each time, and the quartz boat just falls on the storage rubber pad 309, thereby realizing the effect that the storage rubber pad 309 supports the quartz boat. At this time, the supported quartz boat will continue to displace in the blanking mechanism 3 under the action of the rotation of the transmission wheel body 303 and the rotating rod 302, the blanking mechanism 3 has six groups of installation rods 307, connecting discs 308 and storage rubber pads 309, and can temporarily store six groups of quartz boats, which provides sufficient time for workers to take and stack the quartz boats. The workers take the quartz boat on the storage rubber pad 309 and stack it in the designated storage box;

[0029] Among them, the blanking mechanism 3 adopts the structure of supporting the quartz boat, six groups of supporting structures are compared on one side of the roller conveyor 2 to install the storage box, and the quartz boat falls freely into the storage box. The blanking mechanism 3 cooperates with manual operation, which can temporarily place the quartz boat after cleaning operation, provides more time for workers to take the quartz boat, and to a certain extent, improves the efficiency of the roller conveyor 2 conveying the quartz boat;

[0030] The clean mechanism 4 comprises a liquid conveying pipe 401, a liquid injection pipe head 402, a first liquid conveying pipe 403, a second liquid conveying pipe 404, a first liquid spraying head 405, a third liquid conveying pipe 406, a second liquid spraying head 407, a water removal bin 408, a heating bin 409, a heating electric wire 410, an electric control box 411, an air blower 412, an air inlet pipe 413, an air outlet pipe 414, a connecting seat 415 and an air jet spraying head 416, the front end of the support frame 1 is fixedly installed with the liquid conveying pipe 401, the upper end of the liquid conveying pipe 401 is fixedly connected with the first liquid conveying pipe 403, the upper end of the first liquid conveying pipe 403 is fixedly connected with the second liquid conveying pipe 404, the lower end of the second liquid conveying pipe 404 is fixedly installed with the first liquid spraying head 405, the lower end of the liquid conveying pipe 401 is fixedly connected with the third liquid conveying pipe 406, the middle part of the third liquid conveying pipe 406 is fixedly installed with the second liquid spraying head 407, the middle part of the support frame 1 is fixedly installed with the water removal bin 408, the upper end of the water removal bin 408 is fixedly installed with the heating bin 409, the inside of the heating bin 409 is installed with the heating electric wire 410, the rear end of the heating bin 409 is fixedly installed with the electric control box 411, the front of the heating bin 409 is provided with the air blower 412, the air inlet pipe 413 is arranged between the air blower 412 and the heating bin 409, the left end of the air blower 412 is fixedly connected with the air outlet pipe 414, the air outlet pipe 414 is downwardly inserted into the inside of the water removal bin 408, the lower end of the air outlet pipe 414 is fixedly connected with the connecting seat 415, the lower end of the connecting seat 415 is fixedly installed with the air jet spraying head 416, the front end of the liquid conveying pipe 401 is fixedly connected with the liquid injection pipe head 402, four groups of the first liquid conveying pipe 403, the second liquid conveying pipe 404 and the first liquid spraying head 405 are distributed above the roller conveying belt 2 from left to right, four groups of the third liquid conveying pipe 406 and the second liquid spraying head 407 are distributed below the roller conveying belt 2 from left to right, the heating electric wire 410 and the air blower 412 are electrically connected with the electric control box 411, the air inlet pipe 413 is fixedly installed on the air blower 412 and is backwardly extended and inserted into the notch of the outer wall of the heating bin 409, a plurality of groups of the air jet spraying head 416 are distributed at the lower end of the connecting seat 415, two groups of the air blower 412, the air inlet pipe 413, the air outlet pipe 414, the connecting seat 415 and the air jet spraying head 416 are distributed on the water removal bin 408 from left to right;

[0031] Referring to Figure 7 , Figure 8 and Figure 9, the cleaning mechanism 4 adopts multiple sets of flushing structure and two sets of drying structure, the flushing structure is infusion pipeline 401, liquid injection pipe head 402, first infusion pipe 403, second infusion pipe 404, first liquid injection head 405, third infusion pipe 406 and second liquid injection head 407, before use, liquid injection pipe head 402 needs to be connected with workshop water injection system in advance, when the quartz boat passes through the cleaning mechanism 4, the first infusion pipe 403, the second infusion pipe 404 and the third infusion pipe 406 in the four sets of flushing structure are all dredged, and the water flow is sprayed to the surface of the quartz boat through multiple first liquid injection heads 405 and second liquid injection heads 407, the second liquid injection head 407 is arranged below the quartz boat, and the first liquid injection head 405 is arranged above the quartz boat, which can realize the effect of cleaning the quartz boat from multiple directions; the drying structure is water removal bin 408, heating bin 409, heating wire 410, electric control box 411, air blower 412, air inlet pipeline 413, air outlet pipeline 414, connecting seat 415 and air injection head 416, the electric control box 411 needs to be connected with electricity in advance, wherein the connecting part of the heating bin 409 and the air inlet pipeline 413 is provided with a notch, the air inlet pipeline 413 is directly connected to the notch of the heating bin 409, when working, the heating wire 410 in the heating bin 409 works, so that the heating bin 409 is at high temperature, at this time, the air blower 412 starts and uses the air inlet pipeline 413 to extract high-temperature gas from the heating bin 409, and then sprays downward through the air outlet pipeline 414, the connecting seat 415 and the air injection head 416, so that the water outside the quartz boat can be quickly removed, and the drying effect is realized;

[0032] Wherein, the cleaning mechanism 4 adopts multiple sets of flushing structure and two sets of drying structure, the flushing structure is matched with the roller conveyor 2, unlike the traditional conveying belt, there are gaps between the rollers in the roller conveyor 2, so that part of the flushing structure can be installed below the roller conveyor 2, thereby expanding the flushing range and flushing area of the flushing structure, avoiding the situation that the side of the quartz boat in contact with the conveying belt cannot be effectively cleaned, the flushing structure covers the upper and lower sides of the quartz boat, which can realize the effect of cleaning the quartz boat from multiple directions; and the drying structure adopts the air blowing mode of the air blower 412, which can quickly blow away the water droplets on the surface of the quartz boat and cooperate with the heating effect of the heating bin 409 and the heating wire 410, the introduced airflow is hot airflow, which can realize the effect of efficient drying.

[0033] The working principle of the utility model is: in the clean mechanism 4, the quartz boat first passes through the flushing structure, the liquid injection pipe head 402 is connected with the workshop water injection system, the water flow is guided to pass through the first liquid delivery pipe 403, the second liquid delivery pipe 404 and the third liquid delivery pipe 406 and the first liquid injection head 405 and the second liquid injection head 407, and the quartz boat is cleaned in all directions, the quartz boat after flushing then enters the drying area, at this time, the heating electric wire 410 inside the heating bin 409 starts to work, the heating bin 409 generates high-temperature gas, the air blower 412 starts, the hot gas in the heating bin 409 is extracted through the air inlet pipeline 413, and the hot gas is sprayed to the surface of the quartz boat through the air outlet pipeline 414, the connecting seat 415 and the air injection nozzle 416, so that the moisture is quickly removed; then the discharging mechanism 3 is responsible for receiving and placing the quartz boat, after the driving motor 306 starts, the rotating rod 302 is rotated through the transmission mechanism, so that the mounting rod 307, the connecting disc 308 and the storage rubber pad 309 can periodically receive the quartz boat moved from the roller conveyor 2, sufficient time is provided for the worker to take and place the quartz boat, so that the downtime of the production line is reduced, and finally the worker safely stacks the quartz boat in the specified storage position; the whole cleaning and drying process is automatically completed in the moving process of the roller conveyor 2, the quartz boat is taken off from the conveying belt by the discharging mechanism 3 after being washed and dried, and can be immediately processed or stored next, the whole process is efficient, safe and high in automation degree.

[0034] Although the embodiments of the utility model have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A quartz boat cleaning device, comprising a support frame (1), wherein a roller conveyor belt (2) is mounted on the support frame (1), characterized in that: A cleaning mechanism (4) is provided in the middle of the roller conveyor belt (2), and a feeding mechanism (3) is provided on the right side of the roller conveyor belt (2). The feeding mechanism (3) includes a bearing frame (301), a rotating rod (302), a transmission wheel (303), a transmission belt (304), a drive wheel (305), a drive motor (306), a mounting rod (307), a connecting plate (308), and a placement pad (309). A bearing frame (301) is provided on the right side of the roller conveyor belt (2), and a rotating rod (302) is installed between the two bearing frames (301). A transmission wheel (303) is fixedly installed at the rear end of the rotating rod (302), and a transmission belt (309) is looped around the outer side of the transmission wheel (303). 4) A drive wheel (305) is provided below the transmission belt (304). A drive motor (306) is installed at the rear end of the drive wheel (305). The transmission end of the drive motor (306) is connected to the drive wheel (305). An installation rod (307) is fixedly installed on the outer wall of the rotating rod (302). A connecting plate (308) is fixedly installed at the end of the installation rod (307) away from the rotating rod (302). A storage pad (309) is installed at the lower end of the connecting plate (308). The cleanroom mechanism (4) includes an infusion pipe (401), an injection head (402), a first infusion pipe (403), a second infusion pipe (404), a first spray head (405), and a third infusion pipe (406). 6) Second spray head (407), dewatering chamber (408), heating chamber (409), heating wire (410), electrical control box (411), blower (412), air inlet pipe (413), air outlet pipe (414), connecting seat (415) and jet nozzle (416). The front end of the support frame (1) is fixedly installed with a liquid delivery pipe (401). The upper end of the liquid delivery pipe (401) is fixedly connected with a first liquid delivery pipe (403). The upper end of the first liquid delivery pipe (403) is fixedly connected with a second liquid delivery pipe (404). The lower end of the second liquid delivery pipe (404) is fixedly installed with a first spray head (405). The lower end of the liquid delivery pipe (401) is fixedly connected with a third liquid delivery pipe (406). A second spray head (407) is fixedly installed in the middle of the third infusion tube (406). A dewatering chamber (408) is fixedly installed in the middle of the support frame (1). A heating chamber (409) is fixedly installed at the upper end of the dewatering chamber (408). A heating wire (410) is installed inside the heating chamber (409). An electrical control box (411) is fixedly installed at the rear end of the heating chamber (409). A blower (412) is provided in front of the heating chamber (409). An air inlet pipe (413) is provided between the blower (412) and the heating chamber (409). An air outlet pipe (414) is fixedly connected to the left end of the blower (412). The air outlet pipe (414) is inserted downward into the interior of the dewatering chamber (408).A connecting seat (415) is fixedly connected to the lower end of the air outlet pipe (414), and an air jet nozzle (416) is fixedly installed at the lower end of the connecting seat (415).

2. The quartz boat cleaning device according to claim 1, characterized in that: Multiple sets of mounting rods (307), connecting discs (308) and storage pads (309) are mounted around the outer wall of the rotating rod (302) with the midpoint of the rotating rod (302) as the axis.

3. The quartz boat cleaning device according to claim 1, characterized in that: The infusion pipe (401) is fixedly connected to an injection tube head (402) at its front end. Four sets of the first infusion pipe (403), the second infusion pipe (404) and the first spray head (405) are distributed from left to right above the roller conveyor belt (2). Four sets of the third infusion pipe (406) and the second spray head (407) are distributed from left to right below the roller conveyor belt (2).

4. The quartz boat cleaning device according to claim 1, characterized in that: The heating wire (410) and the blower (412) are both electrically connected to the electrical control box (411). The air intake pipe (413) is fixedly installed on the blower (412) and extends backward to the slot on the outer wall of the heating chamber (409). Multiple sets of the jet nozzles (416) are distributed at the lower end of the connecting seat (415).

5. The quartz boat cleaning device according to claim 1, characterized in that: The two sets of blowers (412), air inlet pipes (413), air outlet pipes (414), connecting seats (415) and jet nozzles (416) are distributed from left to right on the dewatering chamber (408).

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