Heater and single crystal furnace
By designing a heater that increases the heating amount at the feeding position and reduces the heat at the non-feeding position in the single crystal furnace, the problem of temperature field asymmetry in the single crystal furnace was solved, thereby improving the crystal pulling success rate and crystal quality.
Patent Information
- Application Number
- CN202423273386.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-12-27
- Publication Date
- 2025-11-21
- Estimated Expiration
- 2034-12-27
AI Technical Summary
In a single crystal furnace, the temperature in the feeding area is too low, while the temperature further away from the feeding area is too high, resulting in an asymmetrical temperature field, which makes crystal pulling difficult and affects crystal quality.
Design a heater that increases heat generation by adding a second heating element at the feeding location and reduces heat generation at the non-feeding location, thereby optimizing the temperature field distribution.
It effectively reduces temperature difference, improves crystallization rate and yield, and improves the phenomenon of misalignment between temperature field and rotation axis. It is suitable for continuous Czochralski single crystal furnace.
Smart Images
Figure CN223576651U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to single crystal silicon technical field especially, relates to a kind of heater and single crystal furnace. BACKGROUND
[0002] At present, single crystal furnace draws single crystal silicon rod heat field is more symmetrical, but in continuous straight-pulling single crystal furnace, due to the problem of continuous feeding on one side of single crystal furnace, the structure of current single crystal furnace leads to the temperature field in single crystal heat field is not symmetrical, the temperature of feeding area is low, the temperature far from feeding area is high, the center of temperature field and the center of rotation axis do not coincide, so as to lead to crystal pulling difficulty, and crystal quality is also affected.
[0003] Therefore, it is necessary to improve the existing heater and single crystal furnace to solve the above problems. UTILITY MODEL CONTENT
[0004] The utility model aims at providing a kind of heater and single crystal furnace that can optimize temperature field, to improve the phenomenon that current temperature field and rotation axis do not coincide.
[0005] To realize the utility model purpose described above, the utility model provides a kind of heater, comprising:
[0006] First heating body, it has several first heating fins connected head to tail, the first heating fin is arranged along the circumferential direction of the heater, and each first heating fin is arranged along the axial direction of the heater;
[0007] Second heating body, it is arranged adjacent to the first heating body in the circumferential direction, and has several second heating fins connected head to tail, and the second heating fin is also arranged along the circumferential direction, and each second heating fin is arranged along the axial direction;
[0008] Wherein the second heating body is arranged closer to the feeding position of the heater than the first heating body, and the heat generated by the second heating body is greater than the heat generated by the first heating body.
[0009] As further improvement of the utility model, several first heating fins are arranged at the same height in the axial direction of the heater.
[0010] As further improvement of the utility model, in the axial direction, the top surface of the first heating fin is flush arranged, and the bottom surface is also flush arranged.
[0011] As further improvement of the utility model, the thickness of the first and second heating bodies in the radial direction of the heater is same, and the height of the second heating body in the axial direction is less than the height of the first heating body in the axial direction.
[0012] As a further improvement of the utility model, the first heating body and the second heating body are flush at one end in the axial direction and have a height difference at the other end in the axial direction.
[0013] As a further improvement of the utility model, the height of the second heating sheet gradually decreases in the axial direction in the circumferential direction of the heater.
[0014] As a further improvement of the utility model, the first heating body and the second heating body have the same height in the axial direction and different thicknesses in the radial direction of the heater, and the thickness of the second heating body in the radial direction is smaller than the thickness of the first heating body in the radial direction.
[0015] As a further improvement of the utility model, the first heating body and the second heating body are independently arranged and made of materials with different resistivities, and the resistivity of the first heating body is higher than that of the second heating body.
[0016] As a further improvement of the utility model, the first and second heating bodies splice to form at least a part of the heater, and the first and second heating bodies have the same height in the axial direction and the same thickness in the radial direction of the heater.
[0017] To achieve the above-mentioned utility model purposes, the utility model also provides a single crystal furnace which comprises the aforementioned heater.
[0018] The heater and the single crystal furnace have the following beneficial effects: the heater and the single crystal furnace increase the heat generation of the heater at the material charging and melting positions and reduce the heat generation of the heater at the non-melting area, so that the heat generation of the heater at the material charging and melting positions is large, the heat generation of the heater at the non-material charging position is small, the temperature difference of the molten silicon is reduced, the periodic temperature influence on the crystal growth area is reduced, the crystal growth rate and the yield of the material charging and crystal pulling are increased, and the temperature field is optimized, the phenomenon that the temperature field and the rotating shaft do not coincide is improved, so that the heater can be better applied to the continuous direct pulling type single crystal furnace. BRIEF DESCRIPTION OF DRAWINGS
[0019] Figure 1 is a perspective view of the first embodiment of the heater of the utility model.
[0020] Figures 2-3 is Figure 1 is a view of another perspective of the heater.
[0021] Figure 4 is a temperature distribution diagram of the inside of a crucible when a traditional heater is used.
[0022] Figure 5It is the temperature distribution diagram inside the crucible when the heater is used.
[0023] Figure 6 It is the three-dimensional schematic view of the second embodiment of the heater of the utility model.
[0024] Figure 7 It is Figure 6 It is the view of another perspective of the heater shown in the figure.
[0025] Figure 8 It is the three-dimensional schematic view of the third embodiment of the heater of the utility model.
[0026] Figure 9 It is Figure 8 It is the view of another perspective of the heater shown in the figure.
[0027] In the figure,
[0028] 100, heater;
[0029] 2, first heating body; 21, first heating sheet; 210, clamping gap; 212, connecting part;
[0030] 3, second heating body; 31, second heating sheet; 310, clamping gap; 312, connecting part;
[0031] 4, feeding pipe. DETAILED DESCRIPTION
[0032] The utility model will be described in detail below in combination with the embodiment shown in the drawings. But the embodiment does not limit the utility model, the conversion of structure, method or function made by the person skilled in the art according to the embodiment is included in the protection scope of the utility model.
[0033] The terms for indicating spatial relative position such as "up", "down", "left", "right", "front", "back" and the like used in this paper are for the purpose of facilitating the description to describe the relationship of one feature relative to another feature as shown in the drawings. It can be understood that according to the different product placement positions, the terms for indicating spatial relative position can be intended to include different positions except the positions shown in the drawings, and should not be understood as limiting the claims. In addition, the description word "horizontal" used in this paper is not completely equal to along the direction perpendicular to the gravity direction, and a certain angle of inclination is allowed.
[0034] Please refer to Figures 1-9 It is the schematic view of the heater 100 and the single crystal furnace of the utility model, wherein Figures 1-3 It is the schematic view of the first embodiment of the heater 100 of the utility model, Figure 4 It is the temperature distribution diagram inside the crucible when the traditional heater is used, Figure 5is a temperature distribution diagram inside a crucible when the heater 100 is used; Figures 6-7 is a schematic view of a second embodiment of the heater 100 of the utility model, Figures 8-9 is a schematic view of a third embodiment of the heater 100 of the utility model.
[0035] Please refer to Figures 1-3 and Figures 6-9 As shown in the figure, the heater 100 comprises:
[0036] A first heating body 2 has a plurality of first heating pieces 21 connected head to tail, the first heating pieces 21 are arranged along a circumferential direction of the heater 100, and each first heating piece 21 is arranged along an axial direction of the heater 100;
[0037] A second heating body 3 is arranged adjacent to the first heating body 2 along the circumferential direction and has a plurality of second heating pieces 31 connected head to tail, the second heating pieces 31 are also arranged along the circumferential direction, and each second heating piece 31 is arranged along the axial direction;
[0038] The second heating body 3 is arranged closer to a feeding position P of the heater 100 than the first heating body 2, and the second heating body 3 generates more heat than the first heating body 2.
[0039] In the utility model, the plurality of first heating pieces 21 in the first heating body 2 are of an integral structure, the plurality of second heating pieces 31 in the second heating body 3 are also of an integral structure, the first and second heating pieces 21, 31 are arranged with equal width along the circumferential direction, and the feeding position P is a position where a feeding pipe 4 of the single crystal furnace is arranged.
[0040] In an embodiment of the utility model, along the height direction (i.e. the axial direction of the heater 100), the inner diameter and the outer diameter of each first heating piece 21 in the radial direction of the heater 100 are always the same, and the inner diameter and the outer diameter of each second heating piece 31 in the radial direction are always the same.
[0041] Therefore, in the utility model, through setting the second heating body 3 closer to the charging position P of the heater 100 than the first heating body 2, and setting the heat generated by the second heating body 3 greater than the heat generated by the first heating body 2, the heat generation of the heater 100 is increased at the charging and melting positions, and the heat generation of the heater 100 is reduced at the non-melting area, so that the heat generation of the heater 100 of the utility model is large at the charging and melting positions, and the heat generation is small at the non-charging position, thereby reducing the temperature difference of the molten silicon, reducing the temperature periodic influence on the crystal growth area, increasing the crystal growth rate and yield of the charging and crystal pulling, and further optimizing the temperature field, improving the phenomenon that the current temperature field and the rotating shaft do not coincide, so that the heater 100 of the utility model can be better applied to the continuous Czochralski single crystal furnace.
[0042] Figure 4 and Figure 5 The temperature distribution comparison chart of the inside of the crucible when using the traditional heater and the heater 100 of the utility model is shown, wherein Figure 4 is the temperature distribution chart of the inside of the crucible when using the traditional heater, Figure 5 is the temperature distribution chart of the inside of the crucible when using the heater 100 of the utility model, and it can be seen that the temperature difference when using the traditional heater is 7.47K, and the temperature difference when using the heater 100 of the utility model is 2.53K, which is only 33.87% of the traditional temperature difference, and is reduced by 66%, so that the heater 100 of the utility model can effectively reduce the temperature difference of the molten silicon, thereby reducing the temperature periodic influence on the crystal growth area, increasing the crystal growth rate and yield of the charging and crystal pulling, and being better applied to the continuous Czochralski single crystal furnace.
[0043] The heater 100 is a cylindrical structure arranged around the crucible (not shown) in the thermal field of the single crystal furnace, and the first heating body 2 and the second heating body 3 at least surround a part of the cylindrical structure, and the gaps 210 between the two adjacent first heating fins 21 are arranged equidistantly in the direction from top to bottom until the arc-shaped connecting parts of the two; the gaps 310 between the two adjacent second heating fins 31 are also arranged equidistantly in the direction from top to bottom until the arc-shaped connecting parts of the two, so as to have better heating effect, reduce the processing cost of the heater 100, and effectively ensure the temperature of the respective corresponding areas of the first and second heating bodies 2 and 3, which is beneficial to improve the growth quality of the single crystal silicon rod.
[0044] The first heating fins 21 are arranged equidistantly in the axial direction of the heater 100. Further, in some embodiments of the utility model, in the axial direction, the top surface of the first heating fin 21 is arranged flush, and the bottom surface is also arranged flush, so as to simplify the structure of the first heating body 2 and reduce the manufacturing cost.
[0045] The first and second heating bodies 2, 3 have the same thickness in the radial direction of the heater 100, and the height of the second heating body 3 in the axial direction is less than the height of the first heating body 2 in the axial direction, so that the heat generation of the second heating body 3 is increased in the case of the same thickness.
[0046] As shown in the first embodiment of the utility model, the first heating body 2 and the second heating body 3 are flush at one end in the axial direction and have a height difference at the other end in the axial direction. Two first heating pieces 21 are provided with a connecting part 212 connected with an electrode foot plate (not shown), and the two first heating pieces 21 are arranged adjacent to the second heating body 3. Figures 1-3
[0047] In some embodiments of the utility model, preferably, the height of the first heating body 2 in the axial direction is set to 280 mm, and the height of the second heating body 3 in the axial direction is set to 200 mm, so that the resistance ratio of the first heating body 2 and the second heating body 3 is 1.4:1, and at this time, the heat generation ratio of the first heating body 2 and the second heating body 3 is 1:1.4, so that the heat generated by the second heating body 3 is greater than the heat generated by the first heating body 2, avoiding that the temperature at the charging position is too low and reducing the temperature difference of the molten silicon.
[0048] As shown in the first embodiment of the utility model, the first heating body 2 and the second heating body 3 are flush at one end in the axial direction and have a height difference at the other end in the axial direction. Two first heating pieces 21 are provided with a connecting part 212 connected with an electrode foot plate (not shown), and the two first heating pieces 21 are arranged adjacent to the second heating body 3. Figure 6 and Figure 7 As shown in the second embodiment of the utility model, the first and second heating bodies 2, 3 have the same thickness in the radial direction of the heater 100, and the height of the second heating body 3 in the axial direction is less than the height of the first heating body 2 in the axial direction. Different from the first embodiment, the height of each second heating piece 31 in the second heating body 3 in the axial direction is always equal, while in the second embodiment, in the circumferential direction of the heater 100, the height of the second heating pieces 31 in the axial direction gradually decreases, so that the height of the second heating piece 31 is reduced in a slow changing manner, and the heat generation is increased.
[0049] For example, the height of the first heating piece 21 in the axial direction is set to 280 mm, and the height of the second heating piece 31 in the axial direction gradually transitions to 200 mm at the charging position, and specifically, in some embodiments of the utility model, as shown in Figure 7 As shown, the center lines of the first heating sheet 21 and the second heating sheet 31 in the axial direction are arranged at the same height, the height of the top surface of the second heating sheet 31 gradually decreases, and the height of the bottom surface gradually increases; in other embodiments, the top surface of the second heating sheet 31 can be arranged to be flush, and the bottom surface can be arranged to be gradually changed in the height direction; of course, the bottom surface of the second heating sheet 31 can be arranged to be flush, and the top surface can be arranged to be gradually changed in the height direction.
[0050] Please refer to Figures 8-9 As shown, in the third embodiment of the heater of the utility model, the first heating body 2 and the second heating body 3 are independently arranged and made of materials with different resistivities, and the resistivity of the first heating body 2 is higher than that of the second heating body 3, so that the heat generation of the second heating body 3 is increased by reducing the resistivity.
[0051] Further, in this embodiment, the first and second heating bodies 2 and 3 splice to form at least part of the heater 100, and the heights of the first and second heating bodies 2 and 3 in the axial direction are the same, and the thicknesses of the first and second heating bodies 2 and 3 in the radial direction of the heater 100 are also the same. A pair of the first heating sheets 21 is provided with a pair of connecting portions 212, a pair of the second heating sheets 31 is provided with another pair of connecting portions 312, and the pair of connecting portions 212 are arranged adjacent to the corresponding pair of connecting portions 312, so as to be connected to the same electrode foot plate through the connecting portions 212 and 312. In this way, the arrangement mode of the first and second heating bodies 2 and 3 can reduce the processing difficulty, is low in cost, and can greatly improve the product qualification rate.
[0052] In addition, in the fourth embodiment of the heater 100 of the utility model, the heights of the first and second heating bodies 2 and 3 in the axial direction are the same, and the thicknesses of the first and second heating bodies 2 and 3 in the radial direction of the heater 100 are different, and the thickness of the second heating body 3 in the radial direction is smaller than that of the first heating body 2 in the radial direction, so that the heat generation of the second heating body 3 is increased by reducing the thickness.
[0053] Of course, in other embodiments of the utility model, the height of the second heating body 3 in the axial direction can be reduced while reducing the thickness of the second heating body 3 in the radial direction; the resistivity of the second heating body 3 can be reduced while reducing the thickness of the second heating body 3 in the radial direction; the resistivity of the second heating body 3 can be reduced while reducing the height of the second heating body 3 in the axial direction; and the height of the second heating body in the axial direction and the resistivity of the second heating body can be reduced while reducing the thickness of the second heating body in the radial direction.
[0054] The utility model also provides a single crystal furnace, the single crystal furnace includes above-mentioned heater 100.
[0055] In the utility model, the heater 100 and the single crystal furnace are through setting the second heating body 3 closer to the charging position P of the heater 100 than the first heating body 2, and setting the heat generated by the second heating body 3 to be greater than the heat generated by the first heating body 2, so that the heat generation of the heater 100 is increased at the charging and melting material positions, and the heat generation of the heater is reduced in the non-melting material area, so that the heat generation of the heater 100 of the utility model is large at the charging position and the melting material position, and the heat generation is small at the non-charging position, thereby reducing the temperature difference of the fused silicon, reducing the temperature periodic influence on the crystal growth area, increasing the crystal growth rate and yield of the charging crystal pulling, and further optimizing the heating device of the temperature field, improving the current temperature field and the non-coincidence phenomenon of the rotating shaft, so that the heater 100 of the utility model can be better applied to the continuous pulling type single crystal furnace.
[0056] It should be understood that although the present specification is described in terms of embodiments, not every embodiment contains only one independent technical solution, and the description of the specification is only for the sake of clarity, and those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be combined appropriately to form other embodiments that those skilled in the art can understand.
[0057] The series of detailed descriptions listed above are only specific descriptions of the feasible embodiments of the utility model, and they are not used to limit the protection scope of the utility model, and equivalent embodiments or changes made without departing from the spirit of the utility model art should be included in the protection scope of the utility model.
Claims
1. A heater characterized by, The application relates to a heater comprising: a first heating body having a plurality of first heating pieces connected end to end, the first heating pieces being arranged along a circumferential direction of the heater, each of the first heating pieces being arranged along an axial direction of the heater; a second heating body arranged adjacent to the first heating body along the circumferential direction, the second heating body also having a plurality of second heating pieces connected end to end, the second heating pieces being arranged along the circumferential direction, each of the second heating pieces being arranged along the axial direction of the heater; wherein the second heating body is arranged closer to a material feeding position of the heater than the first heating body, and the second heating body generates more heat than the first heating body.
2. The heater of claim 1, wherein: The first heating pieces are arranged at the same height along the axial direction of the heater.
3. The heater of claim 2, wherein: The top surfaces of the first heating pieces are arranged at the same height along the axial direction, and the bottom surfaces are also arranged at the same height along the axial direction.
4. The heater of claim 3, wherein: The first and second heating bodies have the same thickness along a radial direction of the heater, and the second heating body has a smaller height along the axial direction than the first heating body.
5. The heater of claim 4, wherein: The first and second heating bodies have the same height at one end along the axial direction and have a height difference at the other end along the axial direction.
6. The heater of claim 4, wherein: Along the circumferential direction of the heater, the heights of the second heating pieces along the axial direction gradually decrease.
7. The heater of claim 3, wherein: The first and second heating bodies have the same height along the axial direction and different thicknesses along the radial direction of the heater, and the second heating body has a smaller thickness along the radial direction than the first heating body.
8. The heater of claim 3, wherein: The first and second heating bodies are independently arranged and made of materials with different resistivities, and the first heating body has a higher resistivity than the second heating body.
9. The heater of claim 8, wherein: The first and second heating bodies are arranged to form at least a part of the heater, and the first and second heating bodies have the same height along the axial direction and the same thickness along the radial direction of the heater.
10. A single crystal furnace characterized by: The application further relates to a heater comprising any one of the heaters according to claims 1 to 9.